WO2009151745A3 - Shear sensors and uses thereof - Google Patents

Shear sensors and uses thereof Download PDF

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Publication number
WO2009151745A3
WO2009151745A3 PCT/US2009/039415 US2009039415W WO2009151745A3 WO 2009151745 A3 WO2009151745 A3 WO 2009151745A3 US 2009039415 W US2009039415 W US 2009039415W WO 2009151745 A3 WO2009151745 A3 WO 2009151745A3
Authority
WO
WIPO (PCT)
Prior art keywords
sensors
shear sensors
shear
relates
present
Prior art date
Application number
PCT/US2009/039415
Other languages
French (fr)
Other versions
WO2009151745A2 (en
Inventor
Robert D. White
Andrew Mueller
Christopher Rogers
Vincent Manno
Howard Stone
Douglas A. Gauthier
Original Assignee
Tufts University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tufts University filed Critical Tufts University
Priority to US12/935,726 priority Critical patent/US20110132871A1/en
Publication of WO2009151745A2 publication Critical patent/WO2009151745A2/en
Publication of WO2009151745A3 publication Critical patent/WO2009151745A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0061—Force sensors associated with industrial machines or actuators
    • G01L5/0076—Force sensors associated with manufacturing machines
    • G01L5/008—Force sensors integrated in an article or a dummy workpiece
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Abstract

The present invention relates to shear sensors. In particular, the present invention relates to deformable sensors for measurement of shear forces during chemical mechanical polishing.
PCT/US2009/039415 2008-04-03 2009-04-03 Shear sensors and uses thereof WO2009151745A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/935,726 US20110132871A1 (en) 2008-04-03 2009-04-03 Shear sensors and uses thereof

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US4213208P 2008-04-03 2008-04-03
US61/042,132 2008-04-03

Publications (2)

Publication Number Publication Date
WO2009151745A2 WO2009151745A2 (en) 2009-12-17
WO2009151745A3 true WO2009151745A3 (en) 2010-02-25

Family

ID=41417321

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2009/039415 WO2009151745A2 (en) 2008-04-03 2009-04-03 Shear sensors and uses thereof

Country Status (2)

Country Link
US (1) US20110132871A1 (en)
WO (1) WO2009151745A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9228822B2 (en) 2011-01-24 2016-01-05 President And Fellows Of Harvard College Non-differential elastomer curvature sensor
EP2758760B1 (en) 2011-09-24 2021-02-17 President and Fellows of Harvard College Elastic strain sensor
US9797791B2 (en) 2012-10-27 2017-10-24 President And Fellows Of Harvard College Multi-axis force sensing soft artificial skin
US10748797B2 (en) 2017-01-18 2020-08-18 Applied Materials, Inc. Plasma parameters and skew characterization by high speed imaging
US11478185B2 (en) 2019-02-12 2022-10-25 Hill-Rom Services, Inc. Skin dressing having sensor for pressure ulcer prevention
CN113340507B (en) * 2021-04-15 2023-05-23 安徽大学 Full-flexible three-dimensional force flexible touch sensor based on hourglass-shaped structure
CN113532370B (en) * 2021-06-11 2023-03-31 中国建筑第八工程局有限公司 Deformation measuring method for bidirectional sheared concrete member

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6877385B2 (en) * 2000-11-16 2005-04-12 National Science Council Contact type micro piezoresistive shear-stress sensor
US6915701B1 (en) * 2003-07-18 2005-07-12 Cleveland Medical Devices Inc. Composite material for a sensor for measuring shear forces
KR20070051497A (en) * 2005-11-15 2007-05-18 한국타이어 주식회사 Shear strain measurement apparatus of tire
US20080022778A1 (en) * 2003-06-06 2008-01-31 Chang Liu Microfabricated pressure and shear stress sensors

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5888120A (en) * 1997-09-29 1999-03-30 Lsi Logic Corporation Method and apparatus for chemical mechanical polishing
US6286226B1 (en) * 1999-09-24 2001-09-11 Agere Systems Guardian Corp. Tactile sensor comprising nanowires and method for making the same
US6520834B1 (en) * 2000-08-09 2003-02-18 Micron Technology, Inc. Methods and apparatuses for analyzing and controlling performance parameters in mechanical and chemical-mechanical planarization of microelectronic substrates
US6652366B2 (en) * 2001-05-16 2003-11-25 Speedfam-Ipec Corporation Dynamic slurry distribution control for CMP
US6692680B2 (en) * 2001-10-03 2004-02-17 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College Reproduction of micromold inserts
US7460224B2 (en) * 2005-12-19 2008-12-02 Opto Trace Technologies, Inc. Arrays of nano structures for surface-enhanced Raman scattering
US7497134B2 (en) * 2006-10-03 2009-03-03 Kla-Tencor Corporation Process condition measuring device and method for measuring shear force on a surface of a substrate that undergoes a polishing or planarization process
US9068952B2 (en) * 2009-09-02 2015-06-30 Kla-Tencor Corporation Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6877385B2 (en) * 2000-11-16 2005-04-12 National Science Council Contact type micro piezoresistive shear-stress sensor
US20080022778A1 (en) * 2003-06-06 2008-01-31 Chang Liu Microfabricated pressure and shear stress sensors
US6915701B1 (en) * 2003-07-18 2005-07-12 Cleveland Medical Devices Inc. Composite material for a sensor for measuring shear forces
KR20070051497A (en) * 2005-11-15 2007-05-18 한국타이어 주식회사 Shear strain measurement apparatus of tire

Also Published As

Publication number Publication date
US20110132871A1 (en) 2011-06-09
WO2009151745A2 (en) 2009-12-17

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