WO2009143203A2 - Adjustable interferometer for laser ultrasonic measurement - Google Patents

Adjustable interferometer for laser ultrasonic measurement Download PDF

Info

Publication number
WO2009143203A2
WO2009143203A2 PCT/US2009/044600 US2009044600W WO2009143203A2 WO 2009143203 A2 WO2009143203 A2 WO 2009143203A2 US 2009044600 W US2009044600 W US 2009044600W WO 2009143203 A2 WO2009143203 A2 WO 2009143203A2
Authority
WO
WIPO (PCT)
Prior art keywords
interferometer
output
responsive
cavity
input
Prior art date
Application number
PCT/US2009/044600
Other languages
French (fr)
Other versions
WO2009143203A3 (en
Inventor
Thomas E. Drake
Marc Dubois
Original Assignee
Iphoton Solutions Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iphoton Solutions Llc filed Critical Iphoton Solutions Llc
Publication of WO2009143203A2 publication Critical patent/WO2009143203A2/en
Publication of WO2009143203A3 publication Critical patent/WO2009143203A3/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • G01N29/2418Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B17/00Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/023Solids
    • G01N2291/0231Composite or layered materials

Definitions

  • the invention generally relates to laser ultrasonic measurement, and more particularly to an adjustable interferometer for laser ultrasonic measurement.
  • Laser ultrasonic measurement systems are frequently used for testing of various components and complex structures. These systems offer advantages over non-laser type systems (e.g., pizoelectric transducer-based systems).
  • Laser ultrasonic systems are typically non-contact systems that test a structure by measuring ultrasonic waves induced in a structure. Typically, a short laser pulse is directed to a structure causing thermal expansion of the structure, which generates ultrasonic waves.
  • Laser ultrasonic systems are well suited for many industrial applications such as measurement of steel at high temperature, measurement of paint thickness, and non-destructive testing of complex composite structures.
  • CFP confocal Fabry-Perot
  • an interferometer includes a cavity including a pair of mirrors defining a cavity length.
  • a first beam splitter directs an input beam into the cavity through a first phase shift element.
  • a second beam splitter directs a reference beam into the cavity through a second phase shift element.
  • a first optical detector receives a first and a second output beam from the first beam splitter.
  • the first and the second output beams are generated responsive to the respective input beam and the reference beam.
  • the first optical detector generates a first signal responsive to the first output beam and to the second output beam.
  • a second optical detector receives a third and a fourth output beam from the second beam splitter.
  • the third and the fourth output beams are generated responsive to the respective input beam and the reference beam.
  • the second optical detector generates a second signal responsive to the third output beam and to the fourth output beam.
  • a feedback control system receives the first and second signals and in response to at least one of the first and second signals generates a feedback control signal for adjusting the cavity length.
  • the first and second signals are used for ultrasonic measurement of a target.
  • FIG. 1 illustrates a laser ultrasonic measurement system in accordance with an embodiment
  • FIG. 2 is a flow diagram of the method steps for adjusting the cavity length of an interferometer.
  • FIG. 3 illustrates an interferometer in accordance with one embodiment. DETAILED DESCRIPTION OF THE INVENTION
  • FIG. 1 illustrates a laser ultrasonic measurement system 100 in accordance with an embodiment.
  • the system 100 includes a laser source 104 which generates a source beam 108.
  • a beam splitter 112 splits the source beam 108 into two components: a primary beam 116 and a primary reference beam 120.
  • the primary beam 116 is amplified by an optical amplifier 124, and the amplified beam 128 is directed to a target 132.
  • Scattered beam 136 from the target 132 is accumulated by optical element 140 and directed by a fiber optic cable 148 as an input beam 152 to an interferometer 156.
  • the primary reference beam 120 is directed by fiber optic cable 160 as reference beam 162 to the interferometer 156.
  • the reference beam 162 counter-propagates within the interferometer 156 with respect to the input beam 152.
  • An optical switch 118 may be used to inhibit the reference beam 162 while the input beam 152 is being fed into the interferometer 156 in order to prevent degradation of the signal to noise ratio (SNR) due to simultaneous input of two beams. If, however, the scattered beam 136 is sufficiently large, the optical switch 118 may not be necessary.
  • SNR signal to noise ratio
  • the interferometer 156 generates a first output beam 168 and a second output beam 164 responsive to the input beam 152. Interferometer 156 also generates a first output beam 170 and a second output beam 166 responsive to the reference beam 162.
  • a first optical detector 176 receives the first output beam 168 from input beam 152 and the second output beam 166 from the reference beam 162 and generates a first signal 184, which is used for control of the interferometer 156 or ultrasonic measurement of the target 132.
  • a second optical detector 172 receives the second output beam 164 from the input beam 152 and the first output beam 170 from the reference beam 162 and in response generates a second signal 180.
  • a feedback control circuit 188 receives the first signal 184, and in response generates a feedback control signal 192, which is used to adjust a cavity length of the interferometer for optimal signal to noise ratio (SNR) performance.
  • the interferometer 156 includes movable mirrors (not shown in FIG. 1) that define its cavity length. The position of the mirrors is adjusted to vary the cavity length responsive to the feedback control signal 192. It should also be appreciated that a similar feedback control signal could be generated from the second detector signal 180 or a combination of signals 184 and 180. Alternatively, feedback control signal 192 could be used to adjust the frequency of source laser 104 for optimal signal to noise ratio (SNR) performance.
  • the target is subjected to a short pulse laser beam which generates ultrasound waves in the target 132.
  • a short pulse laser beam which generates ultrasound waves in the target 132.
  • thermal expansion in the target 132 generates ultrasound waves causing a phase shift in the scattered beams 136.
  • the phase shift is transferred to the input beam 152 which is subsequently fed into the interferometer 156.
  • the interferometer 156 demodulates the input beam 152 and generates the output beams 168 and 164 with amplitude modulations representative of the phase shift (i.e., ultrasound waves).
  • the signal 184 and the feedback control signal 192 are generated responsive to the characteristic of the source laser 104. It will therefore be appreciated that the reference beam 162 is utilized to adjust the interferometer 156 for optimum SNR performance while the input beam 152 is utilized for the ultrasonic measurement of the target.
  • FIG. 2 is a flow diagram of the method steps for adjusting the cavity length of an interferometer in accordance with one embodiment.
  • a primary beam and a reference beam are generated in accordance with the foregoing description.
  • the primary beam is amplified and directed to a target.
  • the target produces scattered beams which are accumulated to generate an input beam in step 212.
  • step 216 the input beam and the reference beam are directed into the interferometer in a counter-propagating manner.
  • step 220 output beams are generated responsive to the input beam and the reference beam.
  • step 224 a control signal is generated responsive to the reference beam.
  • step 228, the cavity length of the interferometer is adjusted responsive to the control signal.
  • step 232 ultrasonic signals are generated responsive to the input beam.
  • step 236, the ultrasonic signal is used for ultrasonic measurement of the target.
  • FIG. 3 illustrates an interferometer 300 in accordance with one embodiment.
  • the interferometer 300 is a confocal Fabry-Perot (CFP) interferometer.
  • the interferometer 300 includes a first and a second cavity 304 and 308, respectively.
  • the interferometer 300 has two cavities, 304 and 308, it will be understood by those skilled in the art that the interferometer 300 may be implemented with a single cavity.
  • the first cavity 304 includes a pair of mirrors 312 and 316 defining a first cavity length Ll with at least one movable mirror.
  • the second cavity 308 includes a pair of mirrors 320 and 324 defining a second cavity length L2 with at least one movable mirror.
  • the first and second cavity lengths, Ll and L2 are varied by moving the respective mirrors.
  • a first fiber optic cable 328 directs an input beam 330 to a first beam splitter 332.
  • An optic 334 may be interposed in the path of the input beam 330 to relay the input beam from the first fiber optic cable 328 through the first cavity 304 and the second cavity 308.
  • the first beam splitter 332 may be a polarizing beam splitter (PBS), which splits the input beam 330 into a first polarized input beam 338 (e.g., p-state plane) and a second polarized beam 336 (e.g., s-state plane).
  • PBS polarizing beam splitter
  • the first polarized input beam 338 is directed to a second beam splitter 342, which directs the first polarized input beam 338 into the first cavity 304 through a first phase-shift element 344.
  • the first phase-shift element is a quarter wave plate which applies a quarter-wave phase shift to the first polarized input beam 338 prior to entering the first cavity 304.
  • Mirrors 346 and 348 may be utilized as necessary to direct the first polarized input beam 338 to the second beam splitter 342.
  • a second fiber optic cable 350 directs a reference beam 354 to a third beam splitter 358.
  • An optic 362 may be interposed in the path of the reference beam 354 to relay the reference beam from the second fiber optic cable 350 through the first cavity 304 and the second cavity 308.
  • the third beam splitter 358 may be a polarizing beam splitter (PBS), which splits the reference beam 354 into a first polarized reference beam 364 (e.g., p-state plane) and a second polarized reference beam 366 (e.g., s-state plane).
  • PBS polarizing beam splitter
  • the first polarized reference beam 364 is directed to a fourth beam splitter 370, which directs the first polarized reference beam 364 into the first cavity 304 through a second phase- shift element 372.
  • the second phase-shift element 372 is a quarter wave plate which applies a quarter-wave phase shift to the first polarized reference beam 364 prior to entering the first cavity 304.
  • Mirrors 374 and 376 may be utilized as necessary to direct the first polarized reference beam 364 to the fourth beam splitter 370.
  • An optical switch 378 may be used, if necessary, to inhibit the reference beam 354 while the first input beam 330 is being fed into the first cavity 304 and the second cavity 308 in order to prevent degradation of the signal to noise ratio (SNR) due to simultaneous input of two beams.
  • the first polarized input beam 338 and the first polarized reference beam 364 are each subjected to interference.
  • the second beam splitter 342 directs to a first optical detector circuit 384 a first output beam 380 responsive to the interference of the first polarized input beam 338 and directs a second output beam 382 to the first optical detector circuit 384 responsive to the interference of the first polarized reference beam 364.
  • the fourth beam splitter 370 directs to a second optical detector circuit 386 a third output beam 388 responsive to the interference of the first polarized input beam 338 and directs a fourth output beam 390 responsive to the interference of the first polarized reference beam 364.
  • the first optical detector circuit 384 generates a first reference signal 392 responsive to the second output beam 382, and the second optical detector circuit 386 generates a second reference signal 394 responsive to the fourth output beam 390.
  • first and second reference signals 392 and 394 are generated responsive to the interference of the first polarized reference beam 364. Accordingly, the first and second reference signals 392 and 394 are representative of the characteristic of the reference beam 354, which is derived from a laser source.
  • a first feedback control circuit 396 receives the first and second reference signals 392 and 394, respectively, and generates a first feedback control signal 398 based on reference signal 392 or reference signal 394, which is used to translate mirror 312 by adjuster 314 to control the first cavity length Ll for optimum SNR performance.
  • first feedback control signal 398 based on reference signal 392 or reference signal 394, which is used to translate mirror 312 by adjuster 314 to control the first cavity length Ll for optimum SNR performance.
  • the first optical detector circuit 384 also generates a first ultrasound signal 3010 responsive to the first polarized input beam 338, and the second optical detector circuit 386 generates a second ultrasound signal 3014 responsive to the first polarized input beam 338.
  • the first and second ultrasound signals 3010 and 3014 are used for ultrasonic measurement of a target (not shown in FIG. 3).
  • the second polarized input beam 336 (e.g. s-state) is directed through a third phase-shift element 318 to produce a second polarized input beam 356 (e.g. p-state) and enters the second cavity 308.
  • the second polarized reference beam 366 (e.g. s-state) is directed through a fourth phase-shift element 322 to produce a second polarized reference beam 368 (e.g. p-state) and enters the second cavity 308.
  • the third and fourth phase-shift elements 318 and 322 are half wave plates which apply a half-wave phase shift to their respective input and reference beams prior to entering the second cavity 308.
  • the second fiber optic cable 350 can be rotated to substantially equalize the intensity of the first polarized reference beam 364 and the second polarized reference beam 368.
  • a third optical detector circuit 3018 Responsive to the interference of the second polarized reference beam 368 in the second cavity 308, a third optical detector circuit 3018 generates a third reference signal 3022 and a fourth optical detector circuit 3024 generates a fourth reference signal 3028.
  • the third and fourth reference signals 3022 and 3028 are representative of the characteristic of the reference beam 354 derived from the laser source (not shown in FG. 3).
  • a second feedback control circuit 3032 receives the third and fourth reference signals 3022 and 3028 and in response generates a second feedback control signal 3036 based on reference signal 3022 or 3028, which is used to translate mirror 320 by adjuster 326 in order to control the second cavity length L2.
  • the third optical detector circuit 3018 also generates a third ultrasound signal 3040 responsive to the second polarized input beam 356, and the fourth optical detector circuit 3024 generates a fourth ultrasound signal 3044 responsive to the second polarized input beam 368.
  • the third and fourth ultrasound signals 3040 and 3044 are used for ultrasonic measurement of the target (not shown in FIG. 3).
  • the interferometer 300 can be modified to operate with a single cavity (e.g., cavity 304), instead of two cavities.
  • a single cavity version the input beam 330 and the reference beam 354 will be directed into the cavity 304 without first passing through beam splitters 332 and 358, respectively.
  • only two optical detector circuits e.g., 384 and 386) and one feedback control circuit (e.g., 396) are necessary.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

An interferometer includes a cavity including a pair of mirrors defining a cavity length. An input beam and a counter-propagating reference beam are directed into the cavity. The interferometer generates a feedback control signal and an ultrasound signal for optimal performance and measurement of a target, respectively.

Description

ADJUSTABLE INTERFEROMETER FOR LASER ULTRASONIC MEASUREMENT
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] Pursuant to 35 U.S. C. § 119 (e), this application claims priority from, and hereby incorporates by reference for all purposes, United States Provisional Patent Application Serial No. 61/054803, entitled INTERFEROMETER FOR THE OPTICAL DETECTION OF ULTRASOUND, filed May 20, 2008, and United States Patent Application Serial No. 12/468,165, entitled ADJUSTABLE INTERFEROMETER FOR LASER ULTRASONIC MEASUREMENT, filed May 19, 2009.
FIELD OF THE INVENTION
[0002] The invention generally relates to laser ultrasonic measurement, and more particularly to an adjustable interferometer for laser ultrasonic measurement.
BACKGROUND OF THE INVENTION
[0003] Laser ultrasonic measurement systems are frequently used for testing of various components and complex structures. These systems offer advantages over non-laser type systems (e.g., pizoelectric transducer-based systems). Laser ultrasonic systems are typically non-contact systems that test a structure by measuring ultrasonic waves induced in a structure. Typically, a short laser pulse is directed to a structure causing thermal expansion of the structure, which generates ultrasonic waves. Laser ultrasonic systems are well suited for many industrial applications such as measurement of steel at high temperature, measurement of paint thickness, and non-destructive testing of complex composite structures.
[0004] One drawback of existing confocal Fabry-Perot (CFP) interferometers for laser ultrasonic measurement systems is the difficulty of controlling the interferometer for optimal performance. In general, for optimal performance, the CFP cavity length must be continuously adjusted to compensate for drift in the laser frequency and changes in the length due to thermal expansion. In some configurations it is also possible to adjust the laser frequency to match a fixed-length cavity to compensate for cavity length changes and laser frequency drift. SUMMARY OF THE DISCLOSURE
[0005] In one embodiment, an interferometer includes a cavity including a pair of mirrors defining a cavity length. A first beam splitter directs an input beam into the cavity through a first phase shift element. A second beam splitter directs a reference beam into the cavity through a second phase shift element.
[0006] A first optical detector receives a first and a second output beam from the first beam splitter. The first and the second output beams are generated responsive to the respective input beam and the reference beam. The first optical detector generates a first signal responsive to the first output beam and to the second output beam.
[0007] A second optical detector receives a third and a fourth output beam from the second beam splitter. The third and the fourth output beams are generated responsive to the respective input beam and the reference beam. The second optical detector generates a second signal responsive to the third output beam and to the fourth output beam.
[0008] A feedback control system receives the first and second signals and in response to at least one of the first and second signals generates a feedback control signal for adjusting the cavity length. The first and second signals are used for ultrasonic measurement of a target.
BRIEF DESCRIPTION OF THE DRAWINGS
[0009] For a more complete understanding of the features, example embodiments and possible advantages of the present invention, reference is now made to the detailed description of the invention along with the accompanying figures and in which:
[0010] FIG. 1 illustrates a laser ultrasonic measurement system in accordance with an embodiment;
[0011] FIG. 2 is a flow diagram of the method steps for adjusting the cavity length of an interferometer; and
[0012] FIG. 3 illustrates an interferometer in accordance with one embodiment. DETAILED DESCRIPTION OF THE INVENTION
[0013] FIG. 1 illustrates a laser ultrasonic measurement system 100 in accordance with an embodiment. The system 100 includes a laser source 104 which generates a source beam 108. A beam splitter 112 splits the source beam 108 into two components: a primary beam 116 and a primary reference beam 120. The primary beam 116 is amplified by an optical amplifier 124, and the amplified beam 128 is directed to a target 132. Scattered beam 136 from the target 132 is accumulated by optical element 140 and directed by a fiber optic cable 148 as an input beam 152 to an interferometer 156.
[0014] The primary reference beam 120 is directed by fiber optic cable 160 as reference beam 162 to the interferometer 156. The reference beam 162 counter-propagates within the interferometer 156 with respect to the input beam 152. An optical switch 118 may be used to inhibit the reference beam 162 while the input beam 152 is being fed into the interferometer 156 in order to prevent degradation of the signal to noise ratio (SNR) due to simultaneous input of two beams. If, however, the scattered beam 136 is sufficiently large, the optical switch 118 may not be necessary.
[0015] The interferometer 156 generates a first output beam 168 and a second output beam 164 responsive to the input beam 152. Interferometer 156 also generates a first output beam 170 and a second output beam 166 responsive to the reference beam 162. A first optical detector 176 receives the first output beam 168 from input beam 152 and the second output beam 166 from the reference beam 162 and generates a first signal 184, which is used for control of the interferometer 156 or ultrasonic measurement of the target 132.
[0016] A second optical detector 172 receives the second output beam 164 from the input beam 152 and the first output beam 170 from the reference beam 162 and in response generates a second signal 180. A feedback control circuit 188 receives the first signal 184, and in response generates a feedback control signal 192, which is used to adjust a cavity length of the interferometer for optimal signal to noise ratio (SNR) performance. In one implementation, the interferometer 156 includes movable mirrors (not shown in FIG. 1) that define its cavity length. The position of the mirrors is adjusted to vary the cavity length responsive to the feedback control signal 192. It should also be appreciated that a similar feedback control signal could be generated from the second detector signal 180 or a combination of signals 184 and 180. Alternatively, feedback control signal 192 could be used to adjust the frequency of source laser 104 for optimal signal to noise ratio (SNR) performance.
[0017] In one implementation, the target is subjected to a short pulse laser beam which generates ultrasound waves in the target 132. It will be appreciated that when the target 132 is subjected to a short pulse laser beam, thermal expansion in the target 132 generates ultrasound waves causing a phase shift in the scattered beams 136. The phase shift is transferred to the input beam 152 which is subsequently fed into the interferometer 156. The interferometer 156 demodulates the input beam 152 and generates the output beams 168 and 164 with amplitude modulations representative of the phase shift (i.e., ultrasound waves). Independent of the presence of input beam 152, the signal 184 and the feedback control signal 192 are generated responsive to the characteristic of the source laser 104. It will therefore be appreciated that the reference beam 162 is utilized to adjust the interferometer 156 for optimum SNR performance while the input beam 152 is utilized for the ultrasonic measurement of the target.
[0018] FIG. 2 is a flow diagram of the method steps for adjusting the cavity length of an interferometer in accordance with one embodiment. In step 204, a primary beam and a reference beam are generated in accordance with the foregoing description. In step 208, the primary beam is amplified and directed to a target. In response, the target produces scattered beams which are accumulated to generate an input beam in step 212.
[0019] In step 216, the input beam and the reference beam are directed into the interferometer in a counter-propagating manner. In step 220, output beams are generated responsive to the input beam and the reference beam. In step 224, a control signal is generated responsive to the reference beam. In step 228, the cavity length of the interferometer is adjusted responsive to the control signal. In step 232, ultrasonic signals are generated responsive to the input beam. In step 236, the ultrasonic signal is used for ultrasonic measurement of the target.
[0020] FIG. 3 illustrates an interferometer 300 in accordance with one embodiment. In one implementation, the interferometer 300 is a confocal Fabry-Perot (CFP) interferometer. The interferometer 300 includes a first and a second cavity 304 and 308, respectively. Although the interferometer 300 has two cavities, 304 and 308, it will be understood by those skilled in the art that the interferometer 300 may be implemented with a single cavity. The first cavity 304 includes a pair of mirrors 312 and 316 defining a first cavity length Ll with at least one movable mirror. Likewise, the second cavity 308 includes a pair of mirrors 320 and 324 defining a second cavity length L2 with at least one movable mirror. The first and second cavity lengths, Ll and L2, are varied by moving the respective mirrors.
[0021] A first fiber optic cable 328 directs an input beam 330 to a first beam splitter 332. An optic 334 may be interposed in the path of the input beam 330 to relay the input beam from the first fiber optic cable 328 through the first cavity 304 and the second cavity 308. In one implementation, the first beam splitter 332 may be a polarizing beam splitter (PBS), which splits the input beam 330 into a first polarized input beam 338 (e.g., p-state plane) and a second polarized beam 336 (e.g., s-state plane). The first polarized input beam 338 is directed to a second beam splitter 342, which directs the first polarized input beam 338 into the first cavity 304 through a first phase-shift element 344. In one implementation, the first phase-shift element is a quarter wave plate which applies a quarter-wave phase shift to the first polarized input beam 338 prior to entering the first cavity 304. Mirrors 346 and 348 may be utilized as necessary to direct the first polarized input beam 338 to the second beam splitter 342.
[0022] A second fiber optic cable 350 directs a reference beam 354 to a third beam splitter 358. An optic 362 may be interposed in the path of the reference beam 354 to relay the reference beam from the second fiber optic cable 350 through the first cavity 304 and the second cavity 308. In one implementation, the third beam splitter 358 may be a polarizing beam splitter (PBS), which splits the reference beam 354 into a first polarized reference beam 364 (e.g., p-state plane) and a second polarized reference beam 366 (e.g., s-state plane).
[0023] The first polarized reference beam 364 is directed to a fourth beam splitter 370, which directs the first polarized reference beam 364 into the first cavity 304 through a second phase- shift element 372. In one implementation, the second phase-shift element 372 is a quarter wave plate which applies a quarter-wave phase shift to the first polarized reference beam 364 prior to entering the first cavity 304. Mirrors 374 and 376 may be utilized as necessary to direct the first polarized reference beam 364 to the fourth beam splitter 370.
[0024] An optical switch 378 may be used, if necessary, to inhibit the reference beam 354 while the first input beam 330 is being fed into the first cavity 304 and the second cavity 308 in order to prevent degradation of the signal to noise ratio (SNR) due to simultaneous input of two beams. Depending on the length Ll of the first cavity 304, the first polarized input beam 338 and the first polarized reference beam 364 are each subjected to interference. As a consequence, the second beam splitter 342 directs to a first optical detector circuit 384 a first output beam 380 responsive to the interference of the first polarized input beam 338 and directs a second output beam 382 to the first optical detector circuit 384 responsive to the interference of the first polarized reference beam 364. Likewise, the fourth beam splitter 370 directs to a second optical detector circuit 386 a third output beam 388 responsive to the interference of the first polarized input beam 338 and directs a fourth output beam 390 responsive to the interference of the first polarized reference beam 364. The first optical detector circuit 384 generates a first reference signal 392 responsive to the second output beam 382, and the second optical detector circuit 386 generates a second reference signal 394 responsive to the fourth output beam 390.
[0025] Thus, it will be appreciated that the first and second reference signals 392 and 394 are generated responsive to the interference of the first polarized reference beam 364. Accordingly, the first and second reference signals 392 and 394 are representative of the characteristic of the reference beam 354, which is derived from a laser source. A first feedback control circuit 396 receives the first and second reference signals 392 and 394, respectively, and generates a first feedback control signal 398 based on reference signal 392 or reference signal 394, which is used to translate mirror 312 by adjuster 314 to control the first cavity length Ll for optimum SNR performance. Of particular note is the ability to continuously maintain optimum SNR performance exclusively from the reference beam 354 during periods when the input beam 330 is not available.
[0026] The first optical detector circuit 384 also generates a first ultrasound signal 3010 responsive to the first polarized input beam 338, and the second optical detector circuit 386 generates a second ultrasound signal 3014 responsive to the first polarized input beam 338. The first and second ultrasound signals 3010 and 3014 are used for ultrasonic measurement of a target (not shown in FIG. 3).
[0027] In a similar manner to the description of the operation of the first cavity 304, the second polarized input beam 336 (e.g. s-state) is directed through a third phase-shift element 318 to produce a second polarized input beam 356 (e.g. p-state) and enters the second cavity 308. In a counter direction, the second polarized reference beam 366 (e.g. s-state) is directed through a fourth phase-shift element 322 to produce a second polarized reference beam 368 (e.g. p-state) and enters the second cavity 308. In one implementation, the third and fourth phase-shift elements 318 and 322 are half wave plates which apply a half-wave phase shift to their respective input and reference beams prior to entering the second cavity 308. If the reference beam 354 is polarized, the second fiber optic cable 350 can be rotated to substantially equalize the intensity of the first polarized reference beam 364 and the second polarized reference beam 368. Responsive to the interference of the second polarized reference beam 368 in the second cavity 308, a third optical detector circuit 3018 generates a third reference signal 3022 and a fourth optical detector circuit 3024 generates a fourth reference signal 3028. It will be appreciated that the third and fourth reference signals 3022 and 3028 are representative of the characteristic of the reference beam 354 derived from the laser source (not shown in FG. 3).
[0028] A second feedback control circuit 3032 receives the third and fourth reference signals 3022 and 3028 and in response generates a second feedback control signal 3036 based on reference signal 3022 or 3028, which is used to translate mirror 320 by adjuster 326 in order to control the second cavity length L2.
[0029] The third optical detector circuit 3018 also generates a third ultrasound signal 3040 responsive to the second polarized input beam 356, and the fourth optical detector circuit 3024 generates a fourth ultrasound signal 3044 responsive to the second polarized input beam 368. The third and fourth ultrasound signals 3040 and 3044 are used for ultrasonic measurement of the target (not shown in FIG. 3).
[0030] It will be apparent to one of skilled in the art that the interferometer 300 can be modified to operate with a single cavity (e.g., cavity 304), instead of two cavities. In a single cavity version, the input beam 330 and the reference beam 354 will be directed into the cavity 304 without first passing through beam splitters 332 and 358, respectively. In a single cavity embodiment, only two optical detector circuits (e.g., 384 and 386) and one feedback control circuit (e.g., 396) are necessary.
[0031] It will also be appreciated that one or more of the elements depicted in the drawings/figures can also be implemented in a more separated or integrated manner, or even removed or rendered as inoperable in certain cases, as is useful in accordance with a particular application. [0032] As used in the description herein and throughout the claims that follow, "a," "an" and "the" include plural references unless the context clearly dictates otherwise. Also, as used in the description herein and throughout the claims that follow, the meaning of "in" includes "in" and "on" unless the context clearly dictates otherwise.
[0033] The foregoing description of illustrated embodiments of the present invention, including what is described in the Abstract, is not intended to be exhaustive or to limit the invention to the precise forms disclosed herein. While specific embodiments of, and examples for, the invention are described herein for illustrative purposes only, various equivalent modifications are possible within the spirit and scope of the present invention, as those skilled in the relevant art will recognize and appreciate. As indicated, these modifications may be made to the present invention in light of the foregoing description of illustrated embodiments of the present invention and are to be included within the spirit and scope of the present invention.
[0034] Thus, while the present invention has been described herein with reference to particular embodiments thereof, a latitude of modification, various changes and substitutions are intended in the foregoing disclosures, and it will be appreciated that in some instances some features of embodiments of the invention will be employed without a corresponding use of other features without departing from the scope and spirit of the invention as set forth. Therefore, many modifications may be made to adapt a particular situation or material to the essential scope and spirit of the present invention. It is intended that the invention not be limited to the particular terms used in the following claims and/or to the particular embodiment disclosed as the best mode contemplated for carrying out this invention, but that the invention will include any and all embodiments and equivalents falling within the scope of the appended claims. Thus, the scope of the invention is to be determined solely by the appended claims.

Claims

WHAT IS CLAIMED IS:
1. An interferometer, comprising: a first cavity including a pair of mirrors, at least one of which being movable, defining a first cavity length; a second cavity including a pair of mirrors, at least one of which being movable, defining a second cavity length; a first beam splitter for directing a first polarized input beam into the first cavity through a first phase shift element; a second beam splitter for directing a first polarized reference beam into the first cavity through a second phase shift element; a third beam splitter for directing a second polarized input beam into the second cavity through a third phase shift element; a fourth beam splitter for directing a second polarized reference beam into the second cavity through a fourth phase shift element; a first optical detector for receiving from the first beam splitter a first and a second output beam, the first and second output beams being generated responsive to the respective first polarized input beam and the first polarized reference beam, the first optical detector generating a first signal responsive to the first output beam and to the second output beam; a second optical detector for receiving from the second beam splitter a third and a fourth output beam, the third and fourth output beams being generated responsive to the respective first polarized input beam and the first polarized reference beam, the second optical detector generating a second signal responsive to the third output beam and the fourth output beam; a third optical detector for receiving from the third beam splitter a fifth and a sixth output beam, the fifth and sixth output beams being generated responsive to the respective second polarized input beam and the second polarized reference beam, the third optical detector generating a third signal responsive to the fifth output beam and to the sixth output beam; a fourth optical detector for receiving from the fourth beam splitter a seventh and an eighth output beam, the seventh and eighth output beams being generated responsive to the respective second polarized input beam and the second polarized reference beam, the fourth optical detector generating a fourth signal responsive to the seventh output beam and to the eighth output beam; a first feedback control system for receiving the first and second signals and in response to at least one of the first and second signals generating a first feedback control signal for adjusting the first cavity length; and a second feedback control system for receiving the third and fourth signals and in response to at least one of the third and fourth signals generating a second feedback control signal for adjusting the second cavity length.
2. The interferometer of claim 1, wherein the first feedback control system generates the first feedback control signal responsive to the first and second signals.
3. The interferometer of claim 1, wherein the second feedback control system generates the second feedback control signal responsive to the third and fourth signals.
4. The interferometer of claim 1, wherein the first and second polarized input beams are generated from an input beam, and wherein the input beam is generated from scattered beams.
5. The interferometer of claim 1, wherein the first and second polarized reference beams are generated from a reference beam.
6. The interferometer of claim 4, wherein a laser source generates a source beam which is split into a reference beam and a primary beam, wherein the primary beam is applied to a target which generates the scattered beams.
7. The interferometer of claim 4, wherein a laser source generates a source beam which is split into a reference beam and a primary beam, wherein the primary beam is amplified and applied to a target which generates the scattered beams.
8. The interferometer of claim 1, wherein the beam splitter element is a polarizing beam splitter.
9. The interferometer of claim 1, wherein the phase-shift element is a quarter wave plate.
10. The interferometer of claim 1, wherein the first and the second cavity lengths are adjusted by moving the respective mirrors.
11. The interferometer of claim 1 , wherein the signals are generated responsive to ultrasound waes in the target.
12. The interferometer of claim 1, wherein the signals are representative of ultrasound waves in the target.
13. The interferometer of claim 1, wherein the signals are representative of the frequency of the reference beam.
14. The interferometer of claim 1, wherein the reference beam can be attenuated when the signals are representative of the input beam.
15. An interferometer, comprising : a cavity including a pair of mirrors defining a cavity length; a first beam splitter for directing an input beam into the cavity through a first phase shift element; a second beam splitter for directing a reference beam into the cavity through a second phase shift element; a first optical detector for receiving from the first beam splitter a first and a second output beam, the first and the second output beam being generated responsive to the respective input beam and the reference beam, the first optical detector generating a first signal responsive to the first output beam and to the second output beam; a second optical detector for receiving from the second beam splitter a third and a fourth output beam, the third and the fourth output beam being generated responsive to the respective input beam and the reference beam, the second optical detector generating a second signal responsive to the third output beam and to the fourth output beam; and a feedback control system for receiving the first and second signals and in response to at least one of the first and second signals generating a feedback control signal for adjusting the cavity length.
16. The interferometer of claim 15, further comprising adjusting the frequency of a laser source in response to the feedback control signal.
17. The interferometer of claim 15, wherein the feedback control system generates the feedback control signal responsive to the first and second signals.
18. The interferometer of claim 15, wherein the first and second signals are used for ultrasonic measurement of a target.
19. The interferometer of claim 15, wherein the input beam is formed from scattered beams off a target.
20. The interferometer of claim 19, wherein a laser source generates a source beam which is split into the reference beam and a primary beam, wherein the primary beam is applied to a target which generates the scattered beams.
21. The interferometer of claim 19, wherein a laser source generates a source beam which is split into the reference beam and a primary beam, wherein the primary beam is amplified and applied to a target which generates the scattered beams.
22. The interferometer of claim 15, further comprising a first optic for directing the input beam to the first beam splitter and a second optic for directing the reference beam to the second beam splitter.
23. The interferometer of claim 15, wherein the first and second beam splitter elements are polarizing beam splitters.
24. The interferometer of claim 15, wherein the first and second phase-shift elements are quarter wave plates.
25. The interferometer of claim 15, wherein the cavity length is adjusted by moving the mirrors.
26. The interferometer of claim 15, wherein the input beam is phase shifted by an ultrasound wave generated in the target.
27. The interferometer of claim 15 wherein the ultrasound signal is representative of ultrasonic waves in the target.
28. A method for adjusting a cavity length of an interferometer having at least one movable mirror, comprising: generating a reference beam and a primary beam; directing the primary beam onto a target; accumulating scattered beam from the target and generating an input beam responsive to the scattered beam; directing the input beam and the reference beam into the interferometer through different beam splitters; generating a first output beam responsive to the input beam and a second output beam responsive to the reference beam; generating a control signal responsive to the second output beam and an ultrasound signal responsive to the first output beam; and adjusting the cavity length of the interferometer responsive to the control signal.
29. The method of claim 28, wherein the reference beam and the primary beam are generated from a source beam.
30. The method of claim 28, wherein the reference beam and the primary beam are generated from a source beam and the primary beam is amplified before directed onto a target.
31. The method of claim 28, wherein the input beam is accumulated and generated from the scattered beam by an optic.
32. The method of claim 28, further comprising adjusting the cavity length of the interferometer to optimize the signal to noise ratio (SNR) of the interferometer.
33. A method for adjusting the frequency of a source beam relative to an interferometer cavity, comprising: generating a reference beam and a primary beam derived from the source beam; directing the primary beam onto a target; accumulating scattered beam from the target and generating an input beam responsive to the scattered beam; directing the input beam and the reference beam into the interferometer cavity through different polarizing beam splitters; generating a first output beam responsive to the input beam and a second output beam responsive to the reference beam; generating a control signal responsive to the second output beam; and adjusting the frequency of the source beam responsive to the control signal.
34. The method of claim 33, wherein the reference beam and the primary beam are generated from a source beam.
35. The method of claim 33, wherein the reference beam and the primary beam are generated from a source beam and the primary beam is amplified before directed onto a target.
36. The method of claim 33, wherein the input beam is accumulated and generated from the scattered beam by an optic.
37. The method of claim 33, further comprising adjusting the laser frequency to optimize the signal to noise ratio (SNR) of the interferometer.
PCT/US2009/044600 2008-05-20 2009-05-20 Adjustable interferometer for laser ultrasonic measurement WO2009143203A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US5480308P 2008-05-20 2008-05-20
US61/054,803 2008-05-20
US12/468,165 US8134715B2 (en) 2008-05-20 2009-05-19 Adjustable interferometer for laser ultrasonic measurement
US12/468,165 2009-05-19

Publications (2)

Publication Number Publication Date
WO2009143203A2 true WO2009143203A2 (en) 2009-11-26
WO2009143203A3 WO2009143203A3 (en) 2010-03-11

Family

ID=41340836

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2009/044600 WO2009143203A2 (en) 2008-05-20 2009-05-20 Adjustable interferometer for laser ultrasonic measurement

Country Status (2)

Country Link
US (1) US8134715B2 (en)
WO (1) WO2009143203A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108254061A (en) * 2018-01-04 2018-07-06 长飞光纤光缆股份有限公司 A kind of interferometric optical fiber sensor and its sensor fibre

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8134715B2 (en) * 2008-05-20 2012-03-13 Iphoton Solutions, Llc Adjustable interferometer for laser ultrasonic measurement
CN113984894A (en) * 2021-10-21 2022-01-28 中国计量大学 Laser ultrasonic nondestructive testing device and method based on double wave mixing
CN114414073B (en) * 2022-03-15 2023-06-02 中国工程物理研究院激光聚变研究中心 Method for measuring spectrum phase in ultra-short pulse laser system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5585921A (en) * 1995-03-15 1996-12-17 Hughes Aircraft Company Laser-ultrasonic non-destructive, non-contacting inspection system
US20020186380A1 (en) * 1999-06-24 2002-12-12 Drake Thomas E. System and method for high-speed laser detection of ultrasound
US6633384B1 (en) * 1998-06-30 2003-10-14 Lockheed Martin Corporation Method and apparatus for ultrasonic laser testing

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2007190C (en) * 1990-01-04 1998-11-24 National Research Council Of Canada Laser optical ultrasound detection
ATE319980T1 (en) * 1997-12-19 2006-03-15 Bernard Siu METHOD AND DEVICE FOR EVALUATION OF THE INTEGRITY OF CONNECTIONS USING LASER-INDUCED ULTRASOUND
US6378387B1 (en) 2000-08-25 2002-04-30 Aerobotics, Inc. Non-destructive inspection, testing and evaluation system for intact aircraft and components and method therefore
US6819432B2 (en) * 2001-03-14 2004-11-16 Hrl Laboratories, Llc Coherent detecting receiver using a time delay interferometer and adaptive beam combiner
US7770454B2 (en) 2003-09-26 2010-08-10 Lsp Technologies, Inc. Laser system and method for non-destructive bond detection and evaluation
US7474411B2 (en) * 2003-11-07 2009-01-06 Lockheed Martin Corporation System and method to reduce laser noise for improved interferometric laser ultrasound detection
US20080007717A1 (en) * 2004-03-31 2008-01-10 Force Technology Noise Reduction Of Laser Ultrasound Detection System
WO2007148310A2 (en) * 2006-06-23 2007-12-27 Optopol Technology Spolka Akcyjna Apparatus for optical frequency domain tomography with adjusting system
WO2008135903A2 (en) * 2007-05-07 2008-11-13 Philips Intellectual Property & Standards Gmbh Laser sensor for self-mixing interferometry with increased detection range
US7864338B2 (en) * 2007-11-09 2011-01-04 Bossa Nova Technologies, Llc Interferometric method and apparatus for linear detection of motion from a surface
US8520709B2 (en) * 2008-04-11 2013-08-27 Google Inc. Method and apparatus for reducing the amplitude modulation of optical signals in external cavity lasers
US8134715B2 (en) * 2008-05-20 2012-03-13 Iphoton Solutions, Llc Adjustable interferometer for laser ultrasonic measurement

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5585921A (en) * 1995-03-15 1996-12-17 Hughes Aircraft Company Laser-ultrasonic non-destructive, non-contacting inspection system
US6633384B1 (en) * 1998-06-30 2003-10-14 Lockheed Martin Corporation Method and apparatus for ultrasonic laser testing
US20020186380A1 (en) * 1999-06-24 2002-12-12 Drake Thomas E. System and method for high-speed laser detection of ultrasound

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108254061A (en) * 2018-01-04 2018-07-06 长飞光纤光缆股份有限公司 A kind of interferometric optical fiber sensor and its sensor fibre

Also Published As

Publication number Publication date
US20090290166A1 (en) 2009-11-26
US8134715B2 (en) 2012-03-13
WO2009143203A3 (en) 2010-03-11

Similar Documents

Publication Publication Date Title
US5894531A (en) Method and apparatus for detection of ultrasound using a fiber-optic interferometer
US5680212A (en) Sensitive and fast response optical detection of transient motion from a scattering surface by two-wave mixing
US5080491A (en) Laser optical ultarasound detection using two interferometer systems
US6819432B2 (en) Coherent detecting receiver using a time delay interferometer and adaptive beam combiner
US20150247826A1 (en) Vibration detection apparatus and vibration detection method
US8675204B2 (en) Interferometric material sensing apparatus including adjustable reference arm and associated methods
US8134715B2 (en) Adjustable interferometer for laser ultrasonic measurement
CA2699017A1 (en) Optical fiber electric current measurement apparatus and electric current measurement method
KR20010104199A (en) Differential pulsed laser beam probing of integrated circuits
WO2003010518A3 (en) Opto-acoustic apparatus with optical heterodyning for measuring solid surfaces and thin films
US10533974B2 (en) Laser measuring device and laser ultrasonic device
JP2006350332A (en) Active control and detection of two beams of nearly orthogonal polarized light within fiber for heterodyne interference method
US6320651B1 (en) Method and apparatus for determining a velocity
US7126695B2 (en) Heterodyne frequency modulated signal demodulator and method of operating the same
KR101871213B1 (en) Atom interferometer gyroscope based on single raman laser beam
JPH06174844A (en) Laser distance measuring apparatus
WO2006018897A1 (en) Laser phase difference detector and laser phase controller
KR20180124489A (en) Apparatus for measuring optical interference
JP5088915B2 (en) Displacement measuring device
JP5847476B2 (en) Defect inspection equipment
JP2019105616A (en) Laser ultrasonic device
JP2003121423A (en) Laser ultrasonic inspection device and laser ultrasonic inspection method
JPH10170334A (en) Vibration measuring instrument
JP4266171B2 (en) Displacement detection device, microphone device, and displacement detection method
Scalise et al. Single-mode optical fiber interferometer for surface vibration measurement

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 09751431

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 09751431

Country of ref document: EP

Kind code of ref document: A2