WO2009130682A3 - Vertical deflecting tilting micro-mirror for a spatial light modulator ic and method to fabricate such a device - Google Patents

Vertical deflecting tilting micro-mirror for a spatial light modulator ic and method to fabricate such a device Download PDF

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Publication number
WO2009130682A3
WO2009130682A3 PCT/IB2009/051673 IB2009051673W WO2009130682A3 WO 2009130682 A3 WO2009130682 A3 WO 2009130682A3 IB 2009051673 W IB2009051673 W IB 2009051673W WO 2009130682 A3 WO2009130682 A3 WO 2009130682A3
Authority
WO
WIPO (PCT)
Prior art keywords
mirror
light modulator
fabricate
spatial light
slm
Prior art date
Application number
PCT/IB2009/051673
Other languages
French (fr)
Other versions
WO2009130682A2 (en
Inventor
Petrus Hubertus Cornelis Magnee
Erik Jan Lous
Original Assignee
Nxp B.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp B.V. filed Critical Nxp B.V.
Publication of WO2009130682A2 publication Critical patent/WO2009130682A2/en
Publication of WO2009130682A3 publication Critical patent/WO2009130682A3/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

The present invention relates to the replacement of optical masks by a spatial-light modulator (SLM) and a method for manufacturing said SLM. An SLM is a series or grid of mirrors on a substrate, such as silicon, used to reflect light in a predetermined manner. The present invention relates further to an integrated device comprising a grid of mirrors, each mirror comprising a substantially flat surface, and an electronic controlling unit, wherein each mirror comprises one or more flexible bridges, which one or more bridges are adjustable to compensate for height differences between mirrors, caused by the non-flatness of the substrate of the device.
PCT/IB2009/051673 2008-04-23 2009-04-23 Vertical deflecting tilting micro-mirror for a spatial light modulator ic and method to fabricate such a device WO2009130682A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP08103698 2008-04-23
EP08103698.0 2008-04-23

Publications (2)

Publication Number Publication Date
WO2009130682A2 WO2009130682A2 (en) 2009-10-29
WO2009130682A3 true WO2009130682A3 (en) 2009-12-17

Family

ID=40790868

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2009/051673 WO2009130682A2 (en) 2008-04-23 2009-04-23 Vertical deflecting tilting micro-mirror for a spatial light modulator ic and method to fabricate such a device

Country Status (1)

Country Link
WO (1) WO2009130682A2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050275928A1 (en) * 2004-05-28 2005-12-15 Angstrom Inc. Variable focal length lens comprising micromirrors with one degree of freedom translation

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050275928A1 (en) * 2004-05-28 2005-12-15 Angstrom Inc. Variable focal length lens comprising micromirrors with one degree of freedom translation

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SANDSTROM T ET AL: "OML: optical maskless lithography for economic design prototyping and small-volume production", PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, SPIE, PO BOX 10 BELLINGHAM WA 98227-0010 USA, vol. 5377, no. 1, 24 February 2004 (2004-02-24), pages 777 - 787, XP002354539, ISSN: 0277-786X *

Also Published As

Publication number Publication date
WO2009130682A2 (en) 2009-10-29

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