WO2009124542A3 - Method and device for igniting an arc - Google Patents
Method and device for igniting an arc Download PDFInfo
- Publication number
- WO2009124542A3 WO2009124542A3 PCT/DE2009/000498 DE2009000498W WO2009124542A3 WO 2009124542 A3 WO2009124542 A3 WO 2009124542A3 DE 2009000498 W DE2009000498 W DE 2009000498W WO 2009124542 A3 WO2009124542 A3 WO 2009124542A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- anode
- cathode
- arc
- igniting
- ignition
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/3421—Transferred arc or pilot arc mode
Abstract
The invention relates to a method and a device for igniting an arc between an anode and a cathode of a plasma source at ambient atmosphere conditions, said cathode being arranged at a distance to the anode and the plasma source being suitable to produce a substrate surface modification. The aim of the invention is to reduce the effort required for igniting an arc and to make the ignition process safer. The invention is characterized in that a barrier discharge is ignited by means of a supplied gas by means of two electrodes that are arranged in parallel to the longitudinal axis between the anode and the cathode, the electrodes being connected to a high voltage generator and being supplied with high-frequency alternating current voltage during ignition. When a direct current voltage is applied to the anode and the cathode, the charge carriers present due to the barrier discharge between the anode and the cathode allow ignition of an arc.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/934,097 US20110108539A1 (en) | 2008-04-08 | 2009-04-07 | Method and Device for Igniting an Arc |
CN2009801121250A CN101983542A (en) | 2008-04-08 | 2009-04-07 | Method and device for igniting an arc |
EP09731134A EP2263428A2 (en) | 2008-04-08 | 2009-04-07 | Method and device for igniting an arc |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008018589.2 | 2008-04-08 | ||
DE102008018589A DE102008018589A1 (en) | 2008-04-08 | 2008-04-08 | Method and device for igniting an arc |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2009124542A2 WO2009124542A2 (en) | 2009-10-15 |
WO2009124542A3 true WO2009124542A3 (en) | 2009-12-03 |
Family
ID=41070141
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2009/000498 WO2009124542A2 (en) | 2008-04-08 | 2009-04-07 | Method and device for igniting an arc |
Country Status (5)
Country | Link |
---|---|
US (1) | US20110108539A1 (en) |
EP (1) | EP2263428A2 (en) |
CN (1) | CN101983542A (en) |
DE (1) | DE102008018589A1 (en) |
WO (1) | WO2009124542A2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2994046A1 (en) * | 2013-02-15 | 2016-03-16 | Stichting VU-VUmc | Respiration monitoring system and method, mask, breathing circuit and breathing circuit filter for use in such system and method, and computer program |
WO2016053936A2 (en) | 2014-09-29 | 2016-04-07 | The University Of Florida Research Foundation, Inc. | Electro-fluid transducers |
JP7048720B2 (en) * | 2018-03-20 | 2022-04-05 | 株式会社Fuji | Plasma equipment |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0550047A2 (en) * | 1991-12-30 | 1993-07-07 | Mark D. Winsor | A planar fluorescent and electroluminescent lamp having one or more chambers |
US5965988A (en) * | 1995-05-12 | 1999-10-12 | Patent-Treuhand-Gesellschaft Fur Elektrische Gluehlampen Mbh | Discharge lamp with galvanic and dielectric electrodes and method |
JP2003173887A (en) * | 2001-12-06 | 2003-06-20 | Harison Toshiba Lighting Corp | Dielectric barrier discharge lamp lighting device and lighting method |
US6831421B1 (en) * | 2003-03-24 | 2004-12-14 | The United States Of America As Represented By The Secretary Of The Air Force | Shunt-induced high frequency excitation of dielectric barrier discharges |
WO2006133524A2 (en) * | 2005-06-14 | 2006-12-21 | Peter Doncheff Dineff | Method for plasma chemical surface modification |
US20080061689A1 (en) * | 2006-02-13 | 2008-03-13 | Matsushita Electric Industrial Co., Ltd. | Dielectric barrier discharge lamp device and backlight for liquid crystal display |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE806181A (en) * | 1973-10-17 | 1974-02-15 | Soudure Autogene Elect | PROCESS FOR PRIMING A COLUMN OF PLASMA INSIDE AN ENCLOSURE AND ROD-ELECTRODE FOR THE EXECUTION OF THE SAID PROCESS |
DD125890A1 (en) * | 1976-03-02 | 1977-06-01 | ||
DD299812A7 (en) * | 1989-03-27 | 1992-05-07 | Ilmenauer Glaswerke Gmbh,De | METHOD FOR THE LABEL STABILIZATION OF LIGHT BOLTS IN PLASMA SMALL ARRANGEMENTS |
DE3914923A1 (en) | 1989-05-06 | 1990-11-08 | Heraeus Holding | DISCHARGE DEVICE |
DE4117005C2 (en) * | 1990-06-11 | 2003-07-24 | Tokyo Electron Ltd | Method and arrangement for acting with a light beam in a discharge space |
DE4302465C1 (en) * | 1993-01-29 | 1994-03-10 | Fraunhofer Ges Forschung | Appts. for producing dielectrically-hindered discharge - comprises gas-filled discharge space between two ignition voltage-admitted electrodes |
DE4440130A1 (en) * | 1994-11-10 | 1996-05-15 | Blz Bayrisches Laserzentrum Ge | Gas-discharge ignition or extinguishing appts. esp for high-power gas lasers |
EP0851720B1 (en) | 1996-12-23 | 1999-10-06 | Sulzer Metco AG | Non-transferred arc plasmatron |
DE19705884A1 (en) * | 1997-02-15 | 1998-08-20 | Leybold Ag | Plasma ignition system |
DE19816377C2 (en) * | 1998-04-11 | 2001-03-08 | Fraunhofer Ges Forschung | Method for exciting discharges between at least two main electrodes and device for carrying out such a method |
DE10042629C2 (en) * | 2000-08-30 | 2003-08-28 | Angaris Gmbh | Ignition device for an arc evaporator |
DE10051508C2 (en) * | 2000-10-18 | 2003-08-07 | Fraunhofer Ges Forschung | Method and device for reducing the ignition voltage of power pulses of pulsed plasmas |
DE10140298B4 (en) * | 2001-08-16 | 2005-02-24 | Mtu Aero Engines Gmbh | Method for plasma welding |
DE10224991A1 (en) * | 2002-06-05 | 2004-01-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method and device for reducing the ignition voltage of plasmas |
DE102004010261A1 (en) * | 2004-03-03 | 2005-09-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Plasma generator for vacuum coating processes uses arc generation controlled by anode current measurement |
DE102004015217B4 (en) | 2004-03-23 | 2006-04-13 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method for forming thin layers of silicon nitride on substrate surfaces |
-
2008
- 2008-04-08 DE DE102008018589A patent/DE102008018589A1/en not_active Withdrawn
-
2009
- 2009-04-07 CN CN2009801121250A patent/CN101983542A/en active Pending
- 2009-04-07 EP EP09731134A patent/EP2263428A2/en not_active Withdrawn
- 2009-04-07 US US12/934,097 patent/US20110108539A1/en not_active Abandoned
- 2009-04-07 WO PCT/DE2009/000498 patent/WO2009124542A2/en active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0550047A2 (en) * | 1991-12-30 | 1993-07-07 | Mark D. Winsor | A planar fluorescent and electroluminescent lamp having one or more chambers |
US5965988A (en) * | 1995-05-12 | 1999-10-12 | Patent-Treuhand-Gesellschaft Fur Elektrische Gluehlampen Mbh | Discharge lamp with galvanic and dielectric electrodes and method |
JP2003173887A (en) * | 2001-12-06 | 2003-06-20 | Harison Toshiba Lighting Corp | Dielectric barrier discharge lamp lighting device and lighting method |
US6831421B1 (en) * | 2003-03-24 | 2004-12-14 | The United States Of America As Represented By The Secretary Of The Air Force | Shunt-induced high frequency excitation of dielectric barrier discharges |
WO2006133524A2 (en) * | 2005-06-14 | 2006-12-21 | Peter Doncheff Dineff | Method for plasma chemical surface modification |
US20080061689A1 (en) * | 2006-02-13 | 2008-03-13 | Matsushita Electric Industrial Co., Ltd. | Dielectric barrier discharge lamp device and backlight for liquid crystal display |
Also Published As
Publication number | Publication date |
---|---|
CN101983542A (en) | 2011-03-02 |
WO2009124542A2 (en) | 2009-10-15 |
DE102008018589A1 (en) | 2009-11-05 |
EP2263428A2 (en) | 2010-12-22 |
US20110108539A1 (en) | 2011-05-12 |
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