WO2009110666A1 - An optic module for observing multi- wavelength light using micro-mirror - Google Patents
An optic module for observing multi- wavelength light using micro-mirror Download PDFInfo
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- WO2009110666A1 WO2009110666A1 PCT/KR2008/004234 KR2008004234W WO2009110666A1 WO 2009110666 A1 WO2009110666 A1 WO 2009110666A1 KR 2008004234 W KR2008004234 W KR 2008004234W WO 2009110666 A1 WO2009110666 A1 WO 2009110666A1
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- Prior art keywords
- mirror
- optical
- optical signal
- range
- wavelength
- Prior art date
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- 230000003287 optical effect Effects 0.000 claims abstract description 117
- 230000008859 change Effects 0.000 claims description 5
- 230000003595 spectral effect Effects 0.000 abstract description 4
- JJWKPURADFRFRB-UHFFFAOYSA-N carbonyl sulfide Chemical compound O=C=S JJWKPURADFRFRB-UHFFFAOYSA-N 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 238000013500 data storage Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
- G01J3/32—Investigating bands of a spectrum in sequence by a single detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
- G01J3/36—Investigating two or more bands of a spectrum by separate detectors
Definitions
- the present invention relates to an optical instrument. More particularly, this invention relates to an optical module that can effectively and rapidly measure a spectral characteristic of an object to be observed, where the optical module is configured to include: a micro-mirror for changing the reflection angle and accordingly the optical path at a high speed; and a plurality of optical signal detectors, adjacently deployed at different positions, for detecting light in a different range of wavelengths.
- a micro-mirror for changing the reflection angle and accordingly the optical path at a high speed
- a plurality of optical signal detectors adjacently deployed at different positions, for detecting light in a different range of wavelengths.
- An optical module for measuring multi- wavelength light is a type of spectrometer that separates light of different wavelength from an optical signal.
- An optical signal may include light in a variety of wavelengths. For example, cosmic rays from outer space may emit light in a variety of wavelengths.
- Cosmic rays may include optical signals in an infrared light range, a ultraviolet light range, and a visible light range. Cosmic rays may also include an optical signal whose wavelength is longer than infrared rays and an optical signal whose wavelength is shorter than ultraviolet rays.
- MEMS micro-electro-mechanical system
- small mechanical devices such as a sensor valve, gear, mirror, and semiconductor chip manipulator, etc.
- MEMS is also called 'smart matter.
- MEMS is an apparatus comprised of a silicon chip with a micro circuit. The MEMS is inserted into a mechanical apparatus, such as a mirror or sensor, when the mechanical apparatus is manufactured.
- the MEMS is employed in various systems, such as: an apparatus for inflating a vehicle's air bag to match with a user's weight and with the speed detected by the air bag sensor; a global position system (GPS) sensor that can indicate a continuous track of freight transportation and handling freight processes; a sensor that detects air flow change according to air resistance on the surface of airplane wings and performs interaction; an optical switching apparatus that outputs optical signals at 20 m/ns, a cooling/heating apparatus for operating a sensor; and a sensor installed in a building, for changing the flexibility of matter that reacts to atmospheric pressure.
- GPS global position system
- the present invention has been made in view of the above problems, and provides an optical module that can effectively and rapidly measure a spectral characteristic of an object to be observed, where the optical module is configured to include: a mirror for changing the reflection angle at a high speed; and a plurality of optical signal detectors, adjacently deployed at different positions, for detecting light in a different range of wavelengths.
- the present invention provides an optical module for observing light of multi- wavelengths including: (1) a mirror for changing a reflection angle; (2) a first detector for detecting an optical signal corresponding to a first range of wavelength, from light transmitted from the mirror; (3) at least one or more second detectors for detecting optical signals, whose range of wavelengths are different from the first range of wavelength, from light transmitted from the mirror; (4) a controller for controlling the mirror so that the first optical signal detector or at least one or more second optical signal detectors can detect the optical signals according to the range of wavelengths; and (5) a body for providing optical paths from the mirror to the first optical signal detector or at least one or more second optical signals detectors, wherein the body places the mirror, the first optical signal detector, the at least one or more second optical signal detectors, and the controller therein, and also forms an aperture for the mirror therethrough.
- the range of wavelength, different from the first range of wavelength includes an infrared range of wavelength, a ultra-violet range of wavelength, and a visible range or wavelength.
- the at least one or more second optical signal detectors are deployed adjacent to the first optical signal detector.
- the mirror is a mirror to which a micro-electro mechanical system is applied and that can change its tilting angle at a high speed.
- the optical module according to the present invention can effectively and rapidly measure a spectral characteristic of an object to be observed, where the optical module is configured to include: a micro-mirror for changing the reflection angle and accordingly the optical path at a high speed; and a plurality of optical signal detectors, adjacently deployed at different positions, for detecting light in a different range of wavelengths.
- Figure 1 is a view illustrating an optical module for observing multi- wavelength light according to an embodiment of the present invention.
- [14] 100 optical module for observing multi- wavelength light (according to en embodiment of the present invention)
- [17] 120 first optical signal detector for detecting a particular wavelength light
- [18] 125 optical signal incident to a first optical signal detector through a micro-mirror
- [19] 130, 140 at least one or more second optical signal detectors for detecting light of different wavelengths
- Figure 1 is a view illustrating an optical module for observing multi-wavelength light according to an embodiment of the present invention.
- the optical module 100 is configured to include: a mirror 110 for changing a reflection angle at a relatively high speed; a first detector 120 for detecting an optical signal 125 corresponding to a first range of wavelength, from light transmitted from the mirror 110; at least one or more second detectors 130 and 140 for detecting optical signals 135 and 145, whose range of wavelengths are different from the first range of wavelength, from light transmitted from the mirror 110; and a body 150 for providing optical paths from the mirror 110 to the first optical signal detector 120 or at least one or more second optical signals detectors 130 and 140.
- the body 150 places the mirror 110, the first optical signal detector 120, and the at least one or more second optical signal detectors 130 and 140.
- the body 150 also forms an aperture 115 for the mirror 110 therethrough.
- the optical module 100 further includes a controller that controls the mirror 110 so that the first optical signal detector 120 or at least one or more second optical signal detectors 130 and 140 can detect the optical signals according to the range of wavelengths.
- the mirror 110 serves to transmit a signal of an object to be observed to the first optical signal detector 120 or at least one or more second optical signal detectors 130 and 140, at a reflection angle controlled by the controller.
- the mirror 110 can change its optical path for the object to be observed toward the first optical signal detector 120 or at least one or more second optical signal detectors 130 and 140, as the reflection angle is changed rapidly. It is preferable that the mirror 110 is implemented with an MEMS micro-mirror array to allow for changing its reflection angle at a relatively high speed.
- the first optical signal detector 120 detects an optical signal 125 of a first range of wavelength from light reflected from the mirror 110.
- the at least one or more second optical signal detectors 130 and 140 detect optical signals 135 and 145, whose range of wavelengths are different from the first range of wavelength, from light reflected from the mirror 110. It should be understood that it is not necessary to restrict the range of wavelengths of the optical signals that can be detected by the first optical signals detector 120 and the at least one or more second optical signal detectors 130 and 140. That is, the optical signals corresponding to a first range of wavelength and corresponding to a range of wavelength different from the first range of wavelength may include infrared rays, ultra-violet rays, and visible rays.
- the optical signals can also include an optical signal whose wavelength is longer than that of infrared rays or shorter than that of ultra-violet rays.
- the body 150 places the mirror 110, the first optical signal detector 120, and the at least one or more second optical signal detectors 130 and 140.
- the body 150 provides optical paths from the mirror 110 to the first optical signal detector 120 or at least one or more second optical signals detectors 130 and 140.
- the body 150 also forms an aperture 115 at its lower side, where the aperture 115 may be formed with an aperture adjustment (not shown).
- the controller controls the mirror 110 so that the first optical signal detector 120 or at least one or more second optical signal detectors 130 and 140 can detect the optical signals according to the range of wavelengths. It should be understood that the controller controls the whole operation of the system. According to an embodiment of the present invention, it can be implemented in such a way that respective individual controllers can control the entire system and the optical module.
- the optical module 100 is operated in connection with a data storage unit, an interface unit, a power supply, etc.
- the data storage unit stores detected optical signals and may be implemented with a hard disc, etc.
- the interface unit connects the elements and may be implemented with a bus interface, etc.
- the power supply supplies power to the elements in the system.
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
An optical module for observing the light of multi-wavelengths is disclosed. The optical module is configured as follows. A mirror changes a reflection angle. A first detector detects an optical signal corresponding to a first range of wavelength, from light transmitted from the mirror. At least one or more second detectors detect optical signals, whose range of wavelengths differs from the first range of wavelength, from light transmitted from the mirror. A controller controls the mirror so that the first optical signal detector or at least one or more second optical signal detectors can detect the optical signals according to the range of wavelengths. A body provides optical paths from the mirror to the first optical signal detector or at least one or more second optical signals detectors. The body places the mirror, the first optical signal detector, the at least one or more second optical signal detectors, and the controller therein. The body also forms an aperture for the mirror therethrough. This optical module can effectively and rapidly measure a spectral characteristic of an object to be observed. In particular, the optical module includes: a micro-mirror for changing the reflection angle and accordingly the optical path at a high speed; and a plurality of optical signal detectors, adjacently deployed at different positions, for detecting light in a different range of wavelengths.
Description
Description
AN OPTIC MODULE FOR OBSERVING MULTI- WAVELENGTH LIGHT USING MICRO-MIRROR
Technical Field
[1] The present invention relates to an optical instrument. More particularly, this invention relates to an optical module that can effectively and rapidly measure a spectral characteristic of an object to be observed, where the optical module is configured to include: a micro-mirror for changing the reflection angle and accordingly the optical path at a high speed; and a plurality of optical signal detectors, adjacently deployed at different positions, for detecting light in a different range of wavelengths. Background Art
[2] An optical module for measuring multi- wavelength light is a type of spectrometer that separates light of different wavelength from an optical signal. An optical signal may include light in a variety of wavelengths. For example, cosmic rays from outer space may emit light in a variety of wavelengths. Cosmic rays may include optical signals in an infrared light range, a ultraviolet light range, and a visible light range. Cosmic rays may also include an optical signal whose wavelength is longer than infrared rays and an optical signal whose wavelength is shorter than ultraviolet rays.
[3] Through the observation of radio frequencies that a detector detected on the ground or from the space and the development of their images, methods are being studied to observe space from the vicinity of the earth's polar orbit. These methods have advantages in that they can provide detailed information about the atmosphere's electrical activities covering all geographical areas of the earth during the all operation time of a satellite. However, if these methods separate and analyze respective optical signals according to the wavelength for cosmic rays using different detectors, they can perform more effective observation. Since cosmic rays move at a relatively high speed and their duration is relatively very short, in order to effectively track and separate cosmic rays, in real time, an optical module for measuring multi-wavelength light is required that uses a mirror that can change its tilting angle at a high speed. It does not need to restrict the use of the optical module to the measurement of cosmic rays.
[4] Recently, a micro-electro-mechanical system (MEMS) has come under the spotlight, where small mechanical devices, such as a sensor valve, gear, mirror, and semiconductor chip manipulator, etc., are combined with a computer. MEMS is also called 'smart matter.' MEMS is an apparatus comprised of a silicon chip with a micro circuit. The MEMS is inserted into a mechanical apparatus, such as a mirror or sensor, when the mechanical apparatus is manufactured. The MEMS is employed in various
systems, such as: an apparatus for inflating a vehicle's air bag to match with a user's weight and with the speed detected by the air bag sensor; a global position system (GPS) sensor that can indicate a continuous track of freight transportation and handling freight processes; a sensor that detects air flow change according to air resistance on the surface of airplane wings and performs interaction; an optical switching apparatus that outputs optical signals at 20 m/ns, a cooling/heating apparatus for operating a sensor; and a sensor installed in a building, for changing the flexibility of matter that reacts to atmospheric pressure. Considering the features and advantages of MEMS technology, it is necessary that the technology be applied to an optical module for observing multi- wavelengths. Disclosure of Invention Technical Problem
[5] Therefore, the present invention has been made in view of the above problems, and provides an optical module that can effectively and rapidly measure a spectral characteristic of an object to be observed, where the optical module is configured to include: a mirror for changing the reflection angle at a high speed; and a plurality of optical signal detectors, adjacently deployed at different positions, for detecting light in a different range of wavelengths. Technical Solution
[6] In accordance with an exemplary embodiment of the present invention, the present invention provides an optical module for observing light of multi- wavelengths including: (1) a mirror for changing a reflection angle; (2) a first detector for detecting an optical signal corresponding to a first range of wavelength, from light transmitted from the mirror; (3) at least one or more second detectors for detecting optical signals, whose range of wavelengths are different from the first range of wavelength, from light transmitted from the mirror; (4) a controller for controlling the mirror so that the first optical signal detector or at least one or more second optical signal detectors can detect the optical signals according to the range of wavelengths; and (5) a body for providing optical paths from the mirror to the first optical signal detector or at least one or more second optical signals detectors, wherein the body places the mirror, the first optical signal detector, the at least one or more second optical signal detectors, and the controller therein, and also forms an aperture for the mirror therethrough.
[7] Preferably, the range of wavelength, different from the first range of wavelength, includes an infrared range of wavelength, a ultra-violet range of wavelength, and a visible range or wavelength.
[8] Preferably, the at least one or more second optical signal detectors are deployed adjacent to the first optical signal detector.
[9] Preferably, the mirror is a mirror to which a micro-electro mechanical system is applied and that can change its tilting angle at a high speed.
Advantageous Effects
[10] As described above, the optical module according to the present invention can effectively and rapidly measure a spectral characteristic of an object to be observed, where the optical module is configured to include: a micro-mirror for changing the reflection angle and accordingly the optical path at a high speed; and a plurality of optical signal detectors, adjacently deployed at different positions, for detecting light in a different range of wavelengths. Brief Description of Drawings
[11] The features and advantages of the present invention will be more apparent from the following detailed description in conjunction with the accompanying drawings, in which:
[12] Figure 1 is a view illustrating an optical module for observing multi- wavelength light according to an embodiment of the present invention.
[13] <Brief Description of Symbols in the Drawings>
[14] 100: optical module for observing multi- wavelength light (according to en embodiment of the present invention)
[15] 110: mirror (micro-mirror array)
[16] 115: aperture
[17] 120: first optical signal detector for detecting a particular wavelength light
[18] 125: optical signal incident to a first optical signal detector through a micro-mirror
[19] 130, 140: at least one or more second optical signal detectors for detecting light of different wavelengths
[20] 135, 145: optical signal incident to a second optical signal detector through a micro- mirror
[21] 150: body
Best Mode for Carrying out the Invention
[22] Preferred embodiments according to an optical module of the present invention will be described in detail with reference to the accompanying drawings.
[23] Figure 1 is a view illustrating an optical module for observing multi-wavelength light according to an embodiment of the present invention. As shown in Figure 1, the optical module 100 is configured to include: a mirror 110 for changing a reflection angle at a relatively high speed; a first detector 120 for detecting an optical signal 125 corresponding to a first range of wavelength, from light transmitted from the mirror 110; at least one or more second detectors 130 and 140 for detecting optical signals 135 and 145, whose range of wavelengths are different from the first range of wavelength, from
light transmitted from the mirror 110; and a body 150 for providing optical paths from the mirror 110 to the first optical signal detector 120 or at least one or more second optical signals detectors 130 and 140. The body 150 places the mirror 110, the first optical signal detector 120, and the at least one or more second optical signal detectors 130 and 140. The body 150 also forms an aperture 115 for the mirror 110 therethrough. In addition, although not shown in Figure 1, the optical module 100 further includes a controller that controls the mirror 110 so that the first optical signal detector 120 or at least one or more second optical signal detectors 130 and 140 can detect the optical signals according to the range of wavelengths.
[24] The mirror 110 serves to transmit a signal of an object to be observed to the first optical signal detector 120 or at least one or more second optical signal detectors 130 and 140, at a reflection angle controlled by the controller. The mirror 110 can change its optical path for the object to be observed toward the first optical signal detector 120 or at least one or more second optical signal detectors 130 and 140, as the reflection angle is changed rapidly. It is preferable that the mirror 110 is implemented with an MEMS micro-mirror array to allow for changing its reflection angle at a relatively high speed.
[25] The first optical signal detector 120 detects an optical signal 125 of a first range of wavelength from light reflected from the mirror 110. The at least one or more second optical signal detectors 130 and 140 detect optical signals 135 and 145, whose range of wavelengths are different from the first range of wavelength, from light reflected from the mirror 110. It should be understood that it is not necessary to restrict the range of wavelengths of the optical signals that can be detected by the first optical signals detector 120 and the at least one or more second optical signal detectors 130 and 140. That is, the optical signals corresponding to a first range of wavelength and corresponding to a range of wavelength different from the first range of wavelength may include infrared rays, ultra-violet rays, and visible rays. The optical signals can also include an optical signal whose wavelength is longer than that of infrared rays or shorter than that of ultra-violet rays.
[26] The body 150 places the mirror 110, the first optical signal detector 120, and the at least one or more second optical signal detectors 130 and 140. The body 150 provides optical paths from the mirror 110 to the first optical signal detector 120 or at least one or more second optical signals detectors 130 and 140. The body 150 also forms an aperture 115 at its lower side, where the aperture 115 may be formed with an aperture adjustment (not shown).
[27] The controller controls the mirror 110 so that the first optical signal detector 120 or at least one or more second optical signal detectors 130 and 140 can detect the optical signals according to the range of wavelengths. It should be understood that the
controller controls the whole operation of the system. According to an embodiment of the present invention, it can be implemented in such a way that respective individual controllers can control the entire system and the optical module.
[28] Although not shown in Figure 1, the optical module 100 is operated in connection with a data storage unit, an interface unit, a power supply, etc. The data storage unit stores detected optical signals and may be implemented with a hard disc, etc. The interface unit connects the elements and may be implemented with a bus interface, etc. The power supply supplies power to the elements in the system.
[29] Although the preferred embodiments of the present invention have been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions, and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims.
Claims
Claims
[1] An optical module for observing the light of multi-wavelengths comprising: a mirror for changing a reflection angle; a first detector for detecting an optical signal corresponding to a first range of wavelength, from light transmitted from the mirror; at least one or more second detectors for detecting optical signals, whose range of wavelengths are different from the first range of wavelength, from light transmitted from the mirror; a controller for controlling the mirror so that the first optical signal detector or at least one or more second optical signal detectors can detect the optical signals according to the range of wavelengths; and a body for providing optical paths from the mirror to the first optical signal detector or at least one or more second optical signals detectors, wherein the body places the mirror, the first optical signal detector, the at least one or more second optical signal detectors, and the controller therein, and also forms an aperture for the mirror therethrough. [2] The optical module according to claim 1, wherein the range of wavelength, different from the first range of wavelength, includes an infrared range of wavelength, a ultra-violet range of wavelength, and a visible range of wavelength. [3] The optical module according to claim 1, wherein the at least one or more second optical signal detectors are deployed adjacent to the first optical signal detector. [4] The optical module according to any one of claims 1 to 3, wherein the mirror is a mirror to which a micro-electro mechanical system is applied and that can change its tilting angle at a high speed.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080019609A KR100904685B1 (en) | 2008-03-03 | 2008-03-03 | An optic module for observing multi-wavelength light using micro-mirror |
KR10-2008-0019609 | 2008-03-03 |
Publications (1)
Publication Number | Publication Date |
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WO2009110666A1 true WO2009110666A1 (en) | 2009-09-11 |
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ID=40983176
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/KR2008/004234 WO2009110666A1 (en) | 2008-03-03 | 2008-07-19 | An optic module for observing multi- wavelength light using micro-mirror |
Country Status (2)
Country | Link |
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KR (1) | KR100904685B1 (en) |
WO (1) | WO2009110666A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US9869585B2 (en) | 2012-07-06 | 2018-01-16 | Smiths Detection Inc. | Dual spectrometer |
KR20170002840A (en) | 2015-06-30 | 2017-01-09 | 전자부품연구원 | Photo detector for measuring a multi-wavelength |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5438415A (en) * | 1991-01-30 | 1995-08-01 | Nkk Corporation | Ellipsometer and method of controlling coating thickness therewith |
US20020149782A1 (en) * | 2001-03-02 | 2002-10-17 | Raymond Christopher J. | Line profile asymmetry measurment using scatterometry |
US20070103679A1 (en) * | 2005-11-07 | 2007-05-10 | Yoo Woo S | Spectroscopy system |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6753960B1 (en) | 2001-12-05 | 2004-06-22 | Capella Photonics, Inc. | Optical spectral power monitors employing frequency-division-multiplexing detection schemes |
-
2008
- 2008-03-03 KR KR1020080019609A patent/KR100904685B1/en not_active IP Right Cessation
- 2008-07-19 WO PCT/KR2008/004234 patent/WO2009110666A1/en active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5438415A (en) * | 1991-01-30 | 1995-08-01 | Nkk Corporation | Ellipsometer and method of controlling coating thickness therewith |
US20020149782A1 (en) * | 2001-03-02 | 2002-10-17 | Raymond Christopher J. | Line profile asymmetry measurment using scatterometry |
US20070103679A1 (en) * | 2005-11-07 | 2007-05-10 | Yoo Woo S | Spectroscopy system |
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KR100904685B1 (en) | 2009-06-24 |
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