WO2009095170A3 - Electromagnetic membrane-microactuator - Google Patents

Electromagnetic membrane-microactuator Download PDF

Info

Publication number
WO2009095170A3
WO2009095170A3 PCT/EP2009/000330 EP2009000330W WO2009095170A3 WO 2009095170 A3 WO2009095170 A3 WO 2009095170A3 EP 2009000330 W EP2009000330 W EP 2009000330W WO 2009095170 A3 WO2009095170 A3 WO 2009095170A3
Authority
WO
WIPO (PCT)
Prior art keywords
microactuator
membrane
electromagnetic membrane
coil
supplied
Prior art date
Application number
PCT/EP2009/000330
Other languages
German (de)
French (fr)
Other versions
WO2009095170A2 (en
Inventor
Karin Bauer
Christian Bolzmacher
Josef Schalk
Original Assignee
Eads Deutschland Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eads Deutschland Gmbh filed Critical Eads Deutschland Gmbh
Publication of WO2009095170A2 publication Critical patent/WO2009095170A2/en
Publication of WO2009095170A3 publication Critical patent/WO2009095170A3/en

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64C—AEROPLANES; HELICOPTERS
    • B64C23/00—Influencing air flow over aircraft surfaces, not otherwise provided for
    • B64C23/005—Influencing air flow over aircraft surfaces, not otherwise provided for by other means not covered by groups B64C23/02 - B64C23/08, e.g. by electric charges, magnetic panels, piezoelectric elements, static charges or ultrasounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64C—AEROPLANES; HELICOPTERS
    • B64C3/00—Wings
    • B64C3/38—Adjustment of complete wings or parts thereof
    • B64C3/44—Varying camber
    • B64C3/48—Varying camber by relatively-movable parts of wing structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/16—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

The invention relates to an electromagnetic microactuator (1) that is incorporated onto a bearing body (2) and comprises at least coil (3) and one membrane (4) that, when said coil (3) is supplied with a current, can be deflected. Said membrane (4) consists of a dielectric elastomer actuator that can be supplied with current and comprises an elastomer film (5) having a electrode coating (6, 7) on both sides.
PCT/EP2009/000330 2008-01-30 2009-01-21 Electromagnetic membrane-microactuator WO2009095170A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008006832A DE102008006832A1 (en) 2008-01-30 2008-01-30 Electromagnetic membrane microactuator
DE102008006832.2 2008-01-30

Publications (2)

Publication Number Publication Date
WO2009095170A2 WO2009095170A2 (en) 2009-08-06
WO2009095170A3 true WO2009095170A3 (en) 2009-11-12

Family

ID=40806664

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2009/000330 WO2009095170A2 (en) 2008-01-30 2009-01-21 Electromagnetic membrane-microactuator

Country Status (2)

Country Link
DE (1) DE102008006832A1 (en)
WO (1) WO2009095170A2 (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2872297C (en) 2006-09-28 2016-10-11 Smith & Nephew, Inc. Portable wound therapy system
CN101868203B (en) 2007-11-21 2014-10-22 史密夫及内修公开有限公司 Wound dressing
EP2320488A1 (en) * 2009-11-07 2011-05-11 Bayer MaterialScience AG Electromechanical converter with dielectric elastomer
IT1401746B1 (en) * 2010-07-30 2013-08-02 St Microelectronics Srl INTEGRATED ELECTROMAGNETIC ACTUATOR, IN PARTICULARLY ELECTROMAGNETIC MICRO-PUMP FOR A MICROFLUIDIC DEVICE BASED ON MEMS TECHNOLOGY, AND ITS MANUFACTURING PROCEDURE
GB201015656D0 (en) 2010-09-20 2010-10-27 Smith & Nephew Pressure control apparatus
KR102003829B1 (en) * 2011-10-17 2019-07-25 더 기타머 컴파니 Vibration transducer and actuator
US9084845B2 (en) 2011-11-02 2015-07-21 Smith & Nephew Plc Reduced pressure therapy apparatuses and methods of using same
JP6276251B2 (en) 2012-03-20 2018-02-07 スミス アンド ネフュー ピーエルシーＳｍｉｔｈ ＆ Ｎｅｐｈｅｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ Operation control of decompression therapy system based on dynamic determination of duty cycle threshold
US9427505B2 (en) 2012-05-15 2016-08-30 Smith & Nephew Plc Negative pressure wound therapy apparatus
US10364143B2 (en) 2014-12-18 2019-07-30 Stmicroelectronics S.R.L. Integrated micro-electromechanical device of semiconductor material having a diaphragm, such as a pressure sensor and an actuator
WO2016103032A1 (en) 2014-12-22 2016-06-30 Smith & Nephew Plc Negative pressure wound therapy apparatus and methods
DE102015107626B4 (en) 2015-05-15 2019-11-07 Airbus Defence and Space GmbH Flow control device, fluid dynamic profile body and flow control method with sound wave generation
CN105299000B (en) * 2015-11-10 2018-05-29 中国科学院合肥物质科学研究院 A kind of unidirectional drive microfluid pipe
DE102017203598A1 (en) * 2017-03-06 2018-09-06 nui lab GmbH Electromagnetic actuator
WO2018170383A1 (en) * 2017-03-17 2018-09-20 Cu Aerospace, Llc Cyclotronic plasma actuator with arc-magnet for active flow control
DE102017216399A1 (en) * 2017-09-15 2019-03-21 Airbus Operations Gmbh Control surface for an aircraft and aircraft with a flexible control surface
DE102017223882B4 (en) * 2017-12-29 2020-07-16 Airbus Defence and Space GmbH Flow actuator module and flow body system
CN110641677A (en) * 2019-09-30 2020-01-03 安徽建筑大学 Airship
US11643190B2 (en) 2020-01-30 2023-05-09 Airbus Operations Gmbh Vortex generator apparatus for an aircraft

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2841943A1 (en) * 2002-07-04 2004-01-09 Bosch Gmbh Robert PUMPING DEVICE, MEMBRANE WITH SUCH DEVICES AND PNEUMATIC SERVOMOTOR WITH SUCH A MEMBRANE
US20040189106A1 (en) * 2003-03-14 2004-09-30 Shih-Chia Chang Microactuator having a ferromagnetic substrate
US20070200467A1 (en) * 1999-07-20 2007-08-30 Sri International Compliant electroactive polymer transducers for sonic applications
WO2008011466A1 (en) * 2006-07-19 2008-01-24 University Of Florida Research Foundation, Inc. Method and apparatus for electromagnetic actuation

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE552836C (en) * 1930-06-28 1932-06-18 Reinhard Wussow Electromagnetically operated pump
FR2454000A1 (en) * 1979-04-10 1980-11-07 Bourgeois Jean Marie Liquid or gas membrane operated pump - has two magnet carrying membranes driven by electromagnet
DE19849700C2 (en) * 1998-10-28 2001-06-28 Festo Ag & Co Micro valve arrangement
JP3832338B2 (en) * 2001-12-25 2006-10-11 松下電工株式会社 Electrostrictive polymer actuator
FR2862629B1 (en) * 2003-11-25 2006-02-17 St Microelectronics Sa COOLING DEVICE OF AN INTEGRATED CIRCUIT

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070200467A1 (en) * 1999-07-20 2007-08-30 Sri International Compliant electroactive polymer transducers for sonic applications
FR2841943A1 (en) * 2002-07-04 2004-01-09 Bosch Gmbh Robert PUMPING DEVICE, MEMBRANE WITH SUCH DEVICES AND PNEUMATIC SERVOMOTOR WITH SUCH A MEMBRANE
US20040189106A1 (en) * 2003-03-14 2004-09-30 Shih-Chia Chang Microactuator having a ferromagnetic substrate
WO2008011466A1 (en) * 2006-07-19 2008-01-24 University Of Florida Research Foundation, Inc. Method and apparatus for electromagnetic actuation

Also Published As

Publication number Publication date
WO2009095170A2 (en) 2009-08-06
DE102008006832A1 (en) 2009-08-13

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