WO2009089946A3 - Micromechanical component and method for producing a micromechanical component - Google Patents

Micromechanical component and method for producing a micromechanical component Download PDF

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Publication number
WO2009089946A3
WO2009089946A3 PCT/EP2008/065572 EP2008065572W WO2009089946A3 WO 2009089946 A3 WO2009089946 A3 WO 2009089946A3 EP 2008065572 W EP2008065572 W EP 2008065572W WO 2009089946 A3 WO2009089946 A3 WO 2009089946A3
Authority
WO
WIPO (PCT)
Prior art keywords
micromechanical component
membrane
active element
producing
voltage
Prior art date
Application number
PCT/EP2008/065572
Other languages
German (de)
French (fr)
Other versions
WO2009089946A2 (en
Inventor
Hubert Benzel
Christoph Schelling
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2009089946A2 publication Critical patent/WO2009089946A2/en
Publication of WO2009089946A3 publication Critical patent/WO2009089946A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/032—Bimorph and unimorph actuators, e.g. piezo and thermo
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/038—Microengines and actuators not provided for in B81B2201/031 - B81B2201/037
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches

Abstract

The invention relates to a micromechanical component (10) comprising a support (12) having a recess (14) on a surface of the support (12); a membrane (16) which covers the recess (14) to at least some degree; at least one active element (24) with voltage connections arranged on the membrane (16); the active element (24) being designed to vary its spatial extension when a voltage is applied to the active element (24) and to deform the membrane (16); and a microelement (22), arranged on the membrane (16), which can be adjusted by way of a deformation of the membrane (16) due to the application of voltage to the active element (24). The invention further relates to a method for producing a micromechanical component (10) and to a method for operating a micromechanical component (10).
PCT/EP2008/065572 2008-01-16 2008-11-14 Micromechanical component and method for producing a micromechanical component WO2009089946A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200810004639 DE102008004639A1 (en) 2008-01-16 2008-01-16 Micromechanical component and production method for a micromechanical component
DE102008004639.6 2008-01-16

Publications (2)

Publication Number Publication Date
WO2009089946A2 WO2009089946A2 (en) 2009-07-23
WO2009089946A3 true WO2009089946A3 (en) 2010-01-21

Family

ID=40785784

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/065572 WO2009089946A2 (en) 2008-01-16 2008-11-14 Micromechanical component and method for producing a micromechanical component

Country Status (2)

Country Link
DE (1) DE102008004639A1 (en)
WO (1) WO2009089946A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013217111A1 (en) * 2013-08-28 2015-03-19 Robert Bosch Gmbh Micromechanical component and method for producing a micromechanical component
DE102016014001B4 (en) * 2016-11-23 2020-11-12 Blickfeld GmbH MEMS scan module for a light scanner with at least two support elements
DE102020208290A1 (en) 2020-07-02 2022-01-05 Robert Bosch Gesellschaft mit beschränkter Haftung Micromechanical device
FR3123341A1 (en) * 2021-05-31 2022-12-02 Commissariat A L'energie Atomique Et Aux Energies Alternatives Micro electromechanical system

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5170283A (en) * 1991-07-24 1992-12-08 Northrop Corporation Silicon spatial light modulator
US5867302A (en) * 1997-08-07 1999-02-02 Sandia Corporation Bistable microelectromechanical actuator
US6178033B1 (en) * 1999-03-28 2001-01-23 Lucent Technologies Micromechanical membrane tilt-mirror switch
US6384952B1 (en) * 1997-03-27 2002-05-07 Mems Optical Inc. Vertical comb drive actuated deformable mirror device and method
WO2006086029A2 (en) * 2004-11-19 2006-08-17 Trustees Of Boston University Mems based retroreflector
US20070002009A1 (en) * 2003-10-07 2007-01-04 Pasch Nicholas F Micro-electromechanical display backplane and improvements thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5272262A (en) 1989-06-21 1993-12-21 City Of Hope Method for the production of catalytic RNA in bacteria
US5083857A (en) 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
US6483962B1 (en) 2000-05-24 2002-11-19 Vlad J. Novotny Optical cross connect switching array system with optical feedback
US6522454B2 (en) 2000-09-29 2003-02-18 Texas Instruments Incorporated Hidden hinge digital micromirror device with improved manufacturing yield and improved contrast ratio
WO2003098918A1 (en) 2002-05-17 2003-11-27 Microvision, Inc. Apparatus and method for sweeping an image beam in one dimension and bidirectionally sweeping an image beam in a second dimension
US7203394B2 (en) 2003-07-15 2007-04-10 Rosemount Aerospace Inc. Micro mirror arrays and microstructures with solderable connection sites

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5170283A (en) * 1991-07-24 1992-12-08 Northrop Corporation Silicon spatial light modulator
US6384952B1 (en) * 1997-03-27 2002-05-07 Mems Optical Inc. Vertical comb drive actuated deformable mirror device and method
US5867302A (en) * 1997-08-07 1999-02-02 Sandia Corporation Bistable microelectromechanical actuator
US6178033B1 (en) * 1999-03-28 2001-01-23 Lucent Technologies Micromechanical membrane tilt-mirror switch
US20070002009A1 (en) * 2003-10-07 2007-01-04 Pasch Nicholas F Micro-electromechanical display backplane and improvements thereof
WO2006086029A2 (en) * 2004-11-19 2006-08-17 Trustees Of Boston University Mems based retroreflector

Also Published As

Publication number Publication date
DE102008004639A1 (en) 2009-07-23
WO2009089946A2 (en) 2009-07-23

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