WO2009084852A3 - Method for fabricating micro-lens - Google Patents

Method for fabricating micro-lens Download PDF

Info

Publication number
WO2009084852A3
WO2009084852A3 PCT/KR2008/007638 KR2008007638W WO2009084852A3 WO 2009084852 A3 WO2009084852 A3 WO 2009084852A3 KR 2008007638 W KR2008007638 W KR 2008007638W WO 2009084852 A3 WO2009084852 A3 WO 2009084852A3
Authority
WO
WIPO (PCT)
Prior art keywords
lens
micro
substrate
top surface
fabricating micro
Prior art date
Application number
PCT/KR2008/007638
Other languages
French (fr)
Other versions
WO2009084852A2 (en
Inventor
Young Min Song
Ki Soo Chang
Bong Kyu Jeong
Yong Tak Lee
Original Assignee
Kwangju Inst Sci & Tech
Young Min Song
Ki Soo Chang
Bong Kyu Jeong
Yong Tak Lee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kwangju Inst Sci & Tech, Young Min Song, Ki Soo Chang, Bong Kyu Jeong, Yong Tak Lee filed Critical Kwangju Inst Sci & Tech
Publication of WO2009084852A2 publication Critical patent/WO2009084852A2/en
Publication of WO2009084852A3 publication Critical patent/WO2009084852A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00365—Production of microlenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)
  • Semiconductor Lasers (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Led Devices (AREA)
  • Light Receiving Elements (AREA)

Abstract

Provided is a method of fabricating a micro-lens, including preparing a substrate having a step on top, forming a protection layer on the entire top surface of the substrate having the step, etching the entire surface of the protection layer to form a micro-lens having a radius of curvature on a top surface of the step, and etching the entire surface of the substrate having the micro-lens for the top surface of the step to be formed in a lens shape. Thus, the micro-lens can be integrated with a photoelectronic device in a self-aligned structure, and an additional process for forming the micro-lens is not necessary, so that the photoelectronic device in which the micro-lens is integrated can be fabricated more economically.
PCT/KR2008/007638 2007-12-28 2008-12-24 Method for fabricating micro-lens WO2009084852A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020070140579A KR101338354B1 (en) 2007-12-28 2007-12-28 Method for fabricating micro-lens
KR10-2007-0140579 2007-12-28

Publications (2)

Publication Number Publication Date
WO2009084852A2 WO2009084852A2 (en) 2009-07-09
WO2009084852A3 true WO2009084852A3 (en) 2009-08-20

Family

ID=40824875

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2008/007638 WO2009084852A2 (en) 2007-12-28 2008-12-24 Method for fabricating micro-lens

Country Status (2)

Country Link
KR (1) KR101338354B1 (en)
WO (1) WO2009084852A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2636111B8 (en) 2010-11-03 2020-08-19 TRUMPF Photonic Components GmbH Optical element for vertical external-cavity surface-emitting laser
KR101235834B1 (en) * 2010-12-08 2013-02-21 한국기계연구원 Method of forming protruding patterns using a polymer layer as a etching protection layer

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10242444A (en) * 1997-02-25 1998-09-11 Sony Corp Amplification-type image pickup element and its manufacture
KR20050072350A (en) * 2004-01-06 2005-07-11 매그나칩 반도체 유한회사 Method for manufacturing inorganic microlens
KR20060006201A (en) * 2004-07-15 2006-01-19 동부아남반도체 주식회사 Cmos image sensor and method for fabricating the same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006261211A (en) 2005-03-15 2006-09-28 Fuji Photo Film Co Ltd Micro lens unit, solid-state imaging device, and its manufacturing method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10242444A (en) * 1997-02-25 1998-09-11 Sony Corp Amplification-type image pickup element and its manufacture
KR20050072350A (en) * 2004-01-06 2005-07-11 매그나칩 반도체 유한회사 Method for manufacturing inorganic microlens
KR20060006201A (en) * 2004-07-15 2006-01-19 동부아남반도체 주식회사 Cmos image sensor and method for fabricating the same

Also Published As

Publication number Publication date
KR20090072460A (en) 2009-07-02
KR101338354B1 (en) 2013-12-16
WO2009084852A2 (en) 2009-07-09

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