WO2009075350A1 - Spherical elastic surface wave element - Google Patents

Spherical elastic surface wave element Download PDF

Info

Publication number
WO2009075350A1
WO2009075350A1 PCT/JP2008/072631 JP2008072631W WO2009075350A1 WO 2009075350 A1 WO2009075350 A1 WO 2009075350A1 JP 2008072631 W JP2008072631 W JP 2008072631W WO 2009075350 A1 WO2009075350 A1 WO 2009075350A1
Authority
WO
WIPO (PCT)
Prior art keywords
surface wave
elastic surface
electrode
wave element
base
Prior art date
Application number
PCT/JP2008/072631
Other languages
French (fr)
Japanese (ja)
Inventor
Ichitaro Satoh
Yusuke Ebi
Original Assignee
Yamatake Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamatake Corporation filed Critical Yamatake Corporation
Publication of WO2009075350A1 publication Critical patent/WO2009075350A1/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/022Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • G01N29/2462Probes with waveguides, e.g. SAW devices
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02614Treatment of substrates, e.g. curved, spherical, cylindrical substrates ensuring closed round-about circuits for the acoustical waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/04Wave modes and trajectories
    • G01N2291/042Wave modes
    • G01N2291/0423Surface waves, e.g. Rayleigh waves, Love waves

Abstract

A spherical elastic surface wave element (100) includes: a spherical base (111); a pair of comb-shaped electrodes (112) which excite an elastic surface wave going around the surface of the base (111) and receives the elastic surface wave which has gone around the surface; a first and a second I/O electrode (114) which are formed in the vicinity of the two pole points of the optical axis passing through the center of the base (111) and connected to the respective comb-shaped electrodes (112); an external terminal (115) formed on the first I/O electrode (114); and an external electrode (116) formed to oppose to the second I/O electrode (114) in a non-contact way.
PCT/JP2008/072631 2007-12-13 2008-12-12 Spherical elastic surface wave element WO2009075350A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-322427 2007-12-13
JP2007322427A JP5000473B2 (en) 2007-12-13 2007-12-13 Spherical surface acoustic wave device

Publications (1)

Publication Number Publication Date
WO2009075350A1 true WO2009075350A1 (en) 2009-06-18

Family

ID=40755586

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/072631 WO2009075350A1 (en) 2007-12-13 2008-12-12 Spherical elastic surface wave element

Country Status (2)

Country Link
JP (1) JP5000473B2 (en)
WO (1) WO2009075350A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001045255A1 (en) * 1999-12-17 2001-06-21 Toppan Printing Co., Ltd. Saw device
JP2003115744A (en) * 2001-10-09 2003-04-18 Toppan Printing Co Ltd Surface acoustic wave element and analyzing method using surface acoustic wave element
JP2007233816A (en) * 2006-03-02 2007-09-13 Toppan Printing Co Ltd Environment detection information collecting method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4399241B2 (en) * 2003-11-21 2010-01-13 凸版印刷株式会社 Driving method of spherical surface acoustic wave element and electromagnetic wave transmission / reception system
JP4561251B2 (en) * 2004-09-02 2010-10-13 凸版印刷株式会社 Method of analyzing propagation surface of multi-circular surface acoustic wave element and element
JP4572727B2 (en) * 2005-04-19 2010-11-04 凸版印刷株式会社 Method for fixing spherical surface acoustic wave element, method for manufacturing spherical surface acoustic wave element, and spherical surface acoustic wave element support

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001045255A1 (en) * 1999-12-17 2001-06-21 Toppan Printing Co., Ltd. Saw device
JP2003115744A (en) * 2001-10-09 2003-04-18 Toppan Printing Co Ltd Surface acoustic wave element and analyzing method using surface acoustic wave element
JP2007233816A (en) * 2006-03-02 2007-09-13 Toppan Printing Co Ltd Environment detection information collecting method

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
ICHITARO SATO: "Koatsu Suiso Ryuryo Choseiben Muke Kyujo SAW Suiso Sensor no Kaihatsu", AZBIL TECHNICAL REVIEW YAMATAKE GROUP GIJUTSU KENKYU HOKOKUSHO, 14 December 2007 (2007-12-14), pages 30 - 34 *
SATOSHI KAI ET AL.: "Ball SAW Soshi Kodoka no Tameno Denkyoku Sekkin Seigyo ni yoru SAW Keisoku", IEICE TECHNICAL REPORT, vol. 106, no. 250, 14 September 2006 (2006-09-14), pages 13 - 17 *

Also Published As

Publication number Publication date
JP5000473B2 (en) 2012-08-15
JP2009147645A (en) 2009-07-02

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