WO2009070262A1 - Method of and apparatus for detecting change in shape of a moving substrate - Google Patents
Method of and apparatus for detecting change in shape of a moving substrate Download PDFInfo
- Publication number
- WO2009070262A1 WO2009070262A1 PCT/US2008/013060 US2008013060W WO2009070262A1 WO 2009070262 A1 WO2009070262 A1 WO 2009070262A1 US 2008013060 W US2008013060 W US 2008013060W WO 2009070262 A1 WO2009070262 A1 WO 2009070262A1
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- WO
- WIPO (PCT)
- Prior art keywords
- position sensor
- continuous substrate
- optical position
- distance
- glass
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
- C03B17/064—Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
Definitions
- the present invention relates to a measuring device, and more particularly, to an apparatus and method for measuring changes in shape of a planar material.
- the fusion process is one of the basic techniques used to produce sheet glass and can produce sheet glass having surfaces with superior flatness and smoothness relative to sheet glass produced by alternative processes, such as for example, the float and slot drawn processes.
- the fusion process has found advantageous use in the production of glass substrates used in, for example, the manufacture of light emitting displays, such as liquid crystal displays (LCDs).
- LCDs liquid crystal displays
- the fusion process specifically, the overflow downdraw fusion process, includes a supply pipe which provides molten glass to a collection trough formed in a refractory body known as an isopipe.
- molten glass passes from the supply pipe to the trough and then overflows the top of the trough on both sides, thus forming two sheets of glass that flow downward and then inward along the outer surfaces of the isopipe.
- the two sheets meet at the bottom or root of the isopipe, where they fuse together into a single ribbon of glass.
- the single ribbon is then fed to drawing equipment that controls the thickness of the sheet by the rate at which the sheet is drawn away from the root.
- the drawing equipment is located well downstream of the root so that the single ribbon has cooled and become rigid before coming into contact with the equipment.
- the outer surfaces of the final glass ribbon do not contact any part of the outside surface of the isopipe during any part of the process. In this way, the superior properties of the outer surfaces of the final sheet are achieved.
- thermocouples To detect changes in shape of the glass ribbon, conventional glass manufacturing systems utilize either intermittent off-line destructive product quality checks to detect out of plain sheet distortions, and/or temperature sensors, such as thermocouples, positioned close to the glass ribbon.
- the off-line shape measurement device is destructive therefore making 100% sampling ineffective.
- a shape change resulting in a distortion such as a bow
- the response of the thermocouples is slower than the optical sheet position sensors therefore changes in shape that occur rapidly and subsequently reverse are not identifiable with the air temperature readings.
- the thermocouples can also produce false positives.
- the temperature alarm limits may be activated by short term air flow or glass flow changes when there was no change in glass position.
- the present invention relates to a measuring device, and more particularly, to an apparatus and method for measuring changes in shape of a planar material.
- the present invention addresses at least a portion of the problems described above through the use of a position sensor used, for example, to detect the position of one or more portions of a glass ribbon, and thus, detect a change in shape.
- the present invention provides a method for detecting a change in shape of a continuous substrate, the method comprising irradiating with laser radiation at least a portion of a continuous substrate within at least a portion of a measurement zone, detecting on an optical position sensor at least a portion of a reflection of the laser radiation, and then determining a distance between the irradiated portion of the continuous substrate and the optical position sensor, and then comparing the distance to a predetermined value, a difference in which indicates a change in shape of the continuous substrate.
- FIG. 1 is a schematic diagram illustrating a representative construction for an isopipe for use in an overflow downdraw fusion process for making sheet glass, in accordance with one aspect of the present invention.
- FIG. 2 is an exemplary schematic of an optical position sensor and a substrate, in accordance with various aspects of the present invention.
- FIG. 3 is a schematic diagram illustrating a position sensor configured so as to direct laser radiation (dashed line) in a direction normal to the surface of a glass ribbon having a bow, in accordance with various aspects of the present invention.
- the arrow indicates the direction of glass travel during the forming process.
- FIG. 4 is a schematic diagram illustrating a position sensor configured so as to direct laser radiation (dashed line) in a direction normal to the surface of a glass ribbon, in accordance with various aspects of the present invention.
- the arrow indicates the direction of glass travel during the forming process.
- FIG. 5 is a graph illustrating the stress profile of the top edge of consecutive samples of a continuous glass substrate collected during a shape change using an optical position sensor, in accordance with various aspects of the present invention.
- FIG. 6 is a graph illustrating the stress profile of the top edge of consecutive samples of a continuous glass substrate collected using conventional thermocouple alarms.
- any subset or combination of these is also specifically contemplated and disclosed.
- the sub-group of A-E, B-F, and C-E are specifically contemplated and should be considered disclosed from disclosure of A, B, and C; D, E, and F; and the example combination A-D.
- This concept applies to all aspects of this disclosure including, but not limited to any components of the compositions and steps in methods of making and using the disclosed compositions.
- additional steps that can be performed it is understood that each of these additional steps can be performed with any specific embodiment or combination of embodiments of the disclosed methods, and that each such combination is specifically contemplated and should be considered disclosed.
- Ranges can be expressed herein as from “about” one particular value, and/or to
- the present invention provides for a method for detecting a change in shape of, for example, a glass ribbon.
- the present invention also provides a system for detecting a change in shape of a glass ribbon during, for example, the glass manufacturing process, through the use of an optical position sensor.
- a conventional isopipe and sheet glass manufacturing system comprises a supply pipe 9 that provides molten glass to a collection trough 11 formed in a refractory body 13 known as an isopipe.
- molten glass can flow from the supply pipe to the trough where it can overflow the top of the trough of both sides, forming two sheets of glass that flow downward and then inward along the outer surfaces of the isopipe.
- the two sheets meet at the bottom or root 15 of the isopipe where they can fuse together into a single ribbon.
- the single ribbon is then fed to drawing equipment (represented by arrows 17), which controls the rate at which the ribbon is drawn away from the root, and thus, the thickness of the sheet.
- the drawing equipment is typically positioned downstream of the root such that the formed sheet glass has sufficiently cooled and become rigid before contacting the equipment. It should be noted that the methods and systems of the present invention can be used with any manufacturing process wherein a continuous ribbon of a planar material is formed, and the present invention is not intended to be limited to an overflow downdraw fusion process for manufacturing sheet glass.
- the glass forming process can be tailored to produce glass having a variety of shapes and magnitudes.
- a glass forming process can produce sheet glass that is planar.
- a glass forming process can produce sheet glass having a specific feature, such as a bow or curve.
- Changes in the shape of a glass ribbon such as, for example, when the glass passes through a setting zone located between the isopipe and the drawing equipment, can result in stress and glass breakage.
- Shape changes can vary in type and magnitude.
- a shape change represents the formation of a bow from a planar substrate.
- a shape change represents a flattening or further bowing of a bow.
- a shape change represents a distortion, such as a twist or flex, in a glass ribbon.
- the magnitude of a shape change, and the significance and/or stress resulting therefrom can vary.
- a shape change can represent a change in, for example, a distance from the optical position sensor to the substrate of from about 10 ⁇ m to about 50,000 ⁇ m or more, for example, about 10, 20, 40, 80, 100, 200, 400, 600, 1,000, 2,500, 3,500, 5,000, 7,500, 9,000, 10,000 , 20,000, 30,000, 40,000, 50,000 ⁇ m or more.
- a shape change can represent a deviation from a predetermined value of the distance between the optical position sensor and the substrate.
- a shape change can be less than about 10 ⁇ m or greater than about 50,000 ⁇ m.
- Off-line product quality checks can provide information to quantify the quality of one or more portions of glass when the glass ribbon is stable.
- Stable as used herein, is intended to refer to glass that continuously maintains the same position and shape throughout the setting zone of a glass forming process. When the ribbon shape changes while traveling through the setting zone, those shape changes can be formed into the glass sheet, resulting in stress. In a downstream process, differences in glass shape from one piece to another can cause product quality problems.
- thermocouples To detect changes in shape of the glass ribbon, conventional glass manufacturing systems utilize either intermittent off-line destructive product quality checks to detect out of plain sheet distortions, and/or temperature sensors, such as thermocouples, positioned close to the glass ribbon. Off-line shape measurement techniques are destructive and thus, unable to effectively sample substantial portions of produced sheet glass. In a thermocouple system, a shape change resulting in a distortion such as a bow, in the glass ribbon can cause the position of the hot glass ribbon to change with respect the temperature sensor. While thermocouple systems can detect changes in glass position and hence, changes in the shape of a glass ribbon, thermocouple systems suffer from limited sensitivity, environmental errors, and slow response times.
- thermocouple systems can produce false positive results with changes in glass flow, airflow, or environmental conditions adjacent to the glass ribbon and/or the thermocouple, hi addition, the slow response time typical for thermocouple systems will not detect changes in shape that occur rapidly and subsequently reverse.
- the present invention provides a method of detecting changes in shape of a continuously moving planar substrate, such as a glass ribbon, through the use of an optical position sensor, hi one aspect, the optical position sensor of the present system can be used to identify isolated changes in the shape of a substrate that are not detectable by conventional shape identification tools, such as a thermocouple system or intermittent off-line destructive product quality checks. In another aspect, the optical position sensor of the present invention can be used to detect transient changes in shape that occur rapidly during, for example, the glass manufacturing process.
- the optical position sensor of the present invention can direct laser radiation onto a portion of a continuously moving substrate, such as a glass ribbon formed in the overflow downdraw fusion process, and detect onto, for example, a photodiode detector, a reflected portion of the laser radiation, hi one aspect, the laser radiation directed onto the substrate does not track the movement of the substrate.
- the portion of a continuously moving substrate onto which laser radiation is directed changes at about the same rate which the substrate is moving relative to the optical position sensor, hi one aspect, the laser radiation is directed on at least a portion of the substrate positioned within a measurement zone, hi a glass forming process, the measurement zone can, in various aspects, comprise the area from the root of an isopipe to the drawing equipment in which the glass ribbon travels.
- laser radiation can be directed onto a portion of the continuous substrate that is within or downstream of a setting zone of, for example, a glass manufacturing process.
- the optical position sensor can then determine the distance between the irradiated portion of the continuously moving substrate and the optical position sensor, and thus, determine the relative position of at least the irradiated portion of the substrate.
- the optical position sensor can detect at least a portion of a reflection of the laser radiation incident upon the substrate, determine a distance between the irradiated portion of the substrate and the optical position sensor, and then compare the distance to a predetermined value, a difference in which can indicate a change in the shape of at least a portion of the substrate.
- the optical position sensor can determine the relative position of the irradiated portion of a glass sheet onto which the laser radiation is directed. In another aspect, the optical position sensor can determine the relative position of a glass sheet or a portion thereof at a specific location in the glass forming process. [0033] The optical position sensor of the present invention can also provide a signal to indicate that a given portion of glass will have a different shape relative to other portions of the glass ribbon. In one aspect, the optical position sensor can be used to trigger an alarm to identify one or more portions of glass that, once cut from the ribbon, can be removed for further testing, discarded, or recycled.
- the optical position sensor can provide a signal to a control system that can automatically cut and remove a portion of glass from, for example, a glass ribbon, hi yet another aspect, the optical position sensor has a response time sufficient to allow detection and identification of a single piece of glass that is subsequently cut from a continuous glass ribbon.
- the optical position sensor can provide, during a glass forming process, a continuous stream of data regarding the position of a glass ribbon to an optional control system.
- the control system if utilized, identify a shape change and indicate that one or more individual glass sheets should be removed or subjected to further testing.
- the optical position sensor of the present invention can provide a cost effective method to quickly and accurately measure the distortion of one or more locations on a substrate, such as, for example, a planar glass ribbon.
- the position sensor system can be stable and robust.
- the optical position sensor is not subject to errors, such as false positive readings, from changes in glass flow, airflow, and/or environmental conditions adjacent to the glass ribbon and/or the position sensor.
- the optical position sensor of the present invention can comprise any suitable optical equipment capable of determining the position and/or a change in position of an object in optical communication therewith.
- the optical position sensor is a distance sensor, a displacement sensor, a position sensor, or a combination thereof.
- the optical position sensor is a laser rangefinder, such as, for example, an Acuity AccuRange 4000 laser rangefinder, available from Schmitt Measurement Systems, Inc., Portland, Oregon, USA.
- the optical position sensor can be configured to emit radiation in any suitable form that can be detected and detect, for example, a position change, in accordance with the various aspects of the present invention.
- the optical position sensor emits laser radiation.
- the optical position sensor emits laser radiation having a wavelength of about 780 nm.
- the specific wavelength and/or intensity of radiation emitted by an optical position sensor can vary, and the present invention is not intended to be limited to any particular wavelength and/or intensity of radiation.
- a laser position sensor can utilize a time of flight method, wherein the amount of time a beam of light takes to travel to and from a target, such as, for example, a substrate, is determined.
- a radiation source 22 such as, for example, a laser diode
- a portion of the light reflected from the substrate 10 can be collected using a lens 26, which can focus the collected laser radiation reflected from the substrate onto a detector 28, such as a photodiode detector.
- an optical position sensor can comprise other optical and/or electronic components, such as, for example, band pass filters, that can improve the accuracy of measurements.
- the environment in which an optical position sensor is placed and operated can be controlled so as to limit ambient light that could interfere with and/or limit detection and/or accuracy of the optical position sensor.
- the optical position sensor can, in various aspects, detect position changes of about 100 ⁇ m or greater, for example, about 100, 200, 250, 300, 500, 800, 1,000, 3,000, 5,000, 8,000, 10,000, 15,000, 20,000, 25,000, 30,000, 35,000, 40,000, 45,000, 50,000 ⁇ m, or more.
- the detection range of a particular optical position sensor can vary and can be less than or greater than the expected and/or typical change in shape of a substrate in a given manufacturing process. In another aspect, the detection range of an optical position sensor is greater than the expected range of movement of a substrate.
- the optical position sensor of the present invention can be positioned in any location or configuration suitable for use in detecting a distortion or change in the shape of at least a portion of a substrate such as, for example, a glass ribbon. In one aspect, the optical position sensor is positioned so as to direct laser radiation in a direction substantially normal to the surface of a glass ribbon.
- FIG. 3 illustrates an exemplary schematic wherein an optical position sensor 20 is positioned to direct laser radiation towards a bowed glass ribbon 10 in a direction normal to the surface of the glass ribbon.
- FIG. 4 illustrates an exemplary schematic wherein an optical position sensor 20 is positioned to direct laser radiation towards a planar glass ribbon 10 in a direction normal to the surface of the glass ribbon.
- the optical position sensor is positioned so as to direct laser radiation at an angle, for example, from about 15° to about 165° relative to the plane of the substrate.
- the optical position sensor is positioned so as to direct laser radiation at an angle, for example, from about 75° to about 105° relative to the plane of the substrate.
- an optical position sensor is configured and/or positioned so as to direct laser radiation towards a substrate at an angle
- the laser can, in various aspects, be separated from the detector, so as to detect a specular reflection or a substantial portion thereof of the laser radiation reflected from the substrate.
- the laser and detector of the optical position sensor can be positioned in various arrangements, such as, for example, adjacent to each other or concentrically positioned as illustrated in FIG. 2.
- the laser and detector are positioned are concentrically positioned at an angle of about 90° ⁇ 1.5° relative to the plane of the substrate.
- the optical position sensor of the present invention can be positioned at any distance from the substrate suitable for the optical position measuring technique.
- the optical position sensor is positioned from about 6 inches to about 600 inches (50 feet) or more, for example, about 6, 6.5, 7, 7.5, 8, 8.5, 9, 9.5, 10, 10.5, 11, 12, 15, 20, 30, 40, 50, 75, 80, 100, 120, 140, 160, 180, 200, 225, 250, 275, 300, 325, 350, 375, 400, 450, 500, 550, or 600 inches or more from the substrate; preferably from about 6 to about 36 inches, for example, about 6, 6.5, 7, 7.5, 8, 8.5, 9, 9.5, 10, 10.5, 11, 12, 15, 20, 30, 34, or 36 inches from the substrate; or more preferably from about 8.5 to about 9.5 inches, for example, about 8.5, 8.75, 9, 9.25, or 9.5 inches from the substrate.
- thermal controls and/or insulation can be provided to maintain a suitable operating environment for the optical position sensor.
- an optical position sensor positioned in a glass manufacturing process can be cooled via air and/or water so as to maintain the operating environment of the sensor in accordance with the design specifications and tolerances for the equipment.
- the thermal controls and methods can also vary depending upon the specific equipment used and the intended application and environmental conditions thereof, hi one aspect, the optical position sensor is positioned so as to maximize accuracy and limit interference from, for example thermal noise.
- the optical position sensor of the present invention can comprise one or multiple individual position sensors, hi one aspect, the optical position sensor comprises a single position sensor configured to detect a position and/or shape change at a single location on a glass ribbon, hi another aspect, the optical position sensor comprises two position sensors configured so as to detect position and/or shape changes at separate discrete locations on a glass ribbon, hi other aspect, the optical position sensor can comprise 3, 4, 5, or more individual position sensors configured to detect position and/or shape changes at multiple individual locations on a glass ribbon. If multiple position sensors are utilized, each of the multiple position sensors can be positioned on either the same side or an opposing side of, for example, a glass ribbon. In one aspect, two optical position sensors are employed and are positioned at separate locations on the same side of a glass ribbon, hi another aspect, two optical position sensors are employed and are positioned at separate location on opposing sides of a glass ribbon.
- an optical position sensor was compared to a conventional thermocouple system for detecting shape changes in a continuous glass substrate formed by an overflow downdraw fusion process.
- a series of consecutive measurement samples were acquired, each sample comprising multiple individual measurements across the surface of the glass.
- FIG. 5 illustrates the acquired data, each line representing a sample of multiple individual measurements at positions 1-23 along the x-axis.
- the y-axis represents the stress profile of the glass. All but one of the samples had comparable deviations and thus, comparable stress levels. The remaining sample exhibited a significant deviation and thus, a significant stress level.
- FIG. 6 illustrates the acquired data for similar samples of a glass substrate when a conventional thermocouple system was used. As in FIG. 5, each line represents a sample of multiple individual measurements at positions 1-23 along the x-axis. No significant deviations were detected when using the conventional thermocouple system.
- the optical position sensor of the present invention as used in FIG. 5 was readily able to detect a transient deviation occurring in the glass substrate. In contrast, the conventional thermocouple system was unable to detect such a deviation.
- the use of an optical position sensor to detect deviations in the position of a glass substrate, and thus, changes in shape can provide improved detection of defects, facilitating improved quality control.
- compositions, articles, devices, and methods described herein can be made to the compositions, articles, devices, and methods described herein.
- Other aspects of the compositions, articles, devices, and methods described herein will be apparent from consideration of the specification and practice of the compositions, articles, devices, and methods disclosed herein. It is intended that the specification and examples be considered as exemplary.
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Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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JP2010535983A JP5654354B2 (en) | 2007-11-30 | 2008-11-24 | Method and apparatus for detecting shape change of a moving substrate |
KR1020107014431A KR101529744B1 (en) | 2007-11-30 | 2008-11-24 | Method of and apparatus for detecting change in shape of a moving substrate |
CN200880124110.1A CN101910782B (en) | 2007-11-30 | 2008-11-24 | Method of and apparatus for detecting change in shape of a moving substrate |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US478207P | 2007-11-30 | 2007-11-30 | |
US61/004,782 | 2007-11-30 |
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WO2009070262A1 true WO2009070262A1 (en) | 2009-06-04 |
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PCT/US2008/013060 WO2009070262A1 (en) | 2007-11-30 | 2008-11-24 | Method of and apparatus for detecting change in shape of a moving substrate |
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JP (2) | JP5654354B2 (en) |
KR (1) | KR101529744B1 (en) |
CN (1) | CN101910782B (en) |
TW (1) | TWI385378B (en) |
WO (1) | WO2009070262A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015077113A1 (en) * | 2013-11-25 | 2015-05-28 | Corning Incorporated | Methods for determining a shape of a substantially cylindrical specular reflective surface |
US9227295B2 (en) | 2011-05-27 | 2016-01-05 | Corning Incorporated | Non-polished glass wafer, thinning system and method for using the non-polished glass wafer to thin a semiconductor wafer |
WO2016011094A1 (en) * | 2014-07-17 | 2016-01-21 | Corning Incorporated | Methods for producing a glass ribbon |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009070262A1 (en) * | 2007-11-30 | 2009-06-04 | Corning Incorporated | Method of and apparatus for detecting change in shape of a moving substrate |
US8441532B2 (en) * | 2009-02-24 | 2013-05-14 | Corning Incorporated | Shape measurement of specular reflective surface |
CN105189374A (en) * | 2012-11-29 | 2015-12-23 | 康宁股份有限公司 | A process and apparatus for working on a thin glass web material |
US9546943B1 (en) * | 2015-03-21 | 2017-01-17 | J.A. Woollam Co., Inc | System and method for investigating change in optical properties of a porous effective substrate surface as a function of a sequence of solvent partial pressures at atmospheric pressure |
JP6706423B2 (en) * | 2016-12-26 | 2020-06-10 | 日本電気硝子株式会社 | Glass breakage detection method, sheet glass manufacturing method, and glass cutting device |
CN112592032A (en) * | 2020-12-16 | 2021-04-02 | 成都中光电科技有限公司 | Method and device for monitoring bow of glass substrate during liquid crystal glass forming |
JP2022144790A (en) * | 2021-03-19 | 2022-10-03 | 日本電気硝子株式会社 | Manufacturing method and manufacturing apparatus of glass plate |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007015772A2 (en) * | 2005-07-27 | 2007-02-08 | Corning Incorporated | Apparatus and method for measuring a glass sheet |
US20070140311A1 (en) * | 2005-12-20 | 2007-06-21 | House Keith L | Method and apparatus for characterizing a glass ribbon |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7014A (en) * | 1850-01-15 | Folding bedstead | ||
JPS54158261A (en) * | 1978-06-03 | 1979-12-13 | Kobe Steel Ltd | Device for measuring bend of bar |
JPH04143608A (en) * | 1990-10-05 | 1992-05-18 | Nkk Corp | Device for measuring flatness of steel plate |
JP2526457B2 (en) * | 1991-12-16 | 1996-08-21 | 日本鋼管株式会社 | Plate flatness meter |
JP3834425B2 (en) * | 1998-06-12 | 2006-10-18 | 株式会社ブリヂストン | Board inspection method |
JP3586142B2 (en) * | 1999-07-22 | 2004-11-10 | エヌエッチ・テクノグラス株式会社 | Glass plate manufacturing method, glass plate manufacturing apparatus, and liquid crystal device |
JP2006039725A (en) * | 2004-07-23 | 2006-02-09 | Asahi Glass Fine Techno Co Ltd | Plate-like body classification-and-management method |
US7516628B2 (en) * | 2005-01-11 | 2009-04-14 | Corning Incorporated | On-line thickness gauge and method for measuring the thickness of a moving glass substrate |
JP2007046946A (en) * | 2005-08-08 | 2007-02-22 | Toshiba Mach Co Ltd | Measuring system of double-sided profile of substrate, and measuring method for the double-sided profile of substrate |
JP4237805B2 (en) * | 2006-04-07 | 2009-03-11 | 西山ステンレスケミカル株式会社 | Post-processing device for thin glass substrate |
JP2008070324A (en) * | 2006-09-15 | 2008-03-27 | Asahi Glass Co Ltd | Warpage detector of plate-like body, and its method |
CN100427880C (en) * | 2006-10-16 | 2008-10-22 | 中国科学院上海光学精密机械研究所 | Real-time detection device and method for roughness of optical glass |
WO2009070262A1 (en) * | 2007-11-30 | 2009-06-04 | Corning Incorporated | Method of and apparatus for detecting change in shape of a moving substrate |
-
2008
- 2008-11-24 WO PCT/US2008/013060 patent/WO2009070262A1/en active Application Filing
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007015772A2 (en) * | 2005-07-27 | 2007-02-08 | Corning Incorporated | Apparatus and method for measuring a glass sheet |
US20070140311A1 (en) * | 2005-12-20 | 2007-06-21 | House Keith L | Method and apparatus for characterizing a glass ribbon |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9227295B2 (en) | 2011-05-27 | 2016-01-05 | Corning Incorporated | Non-polished glass wafer, thinning system and method for using the non-polished glass wafer to thin a semiconductor wafer |
US9573835B2 (en) | 2011-05-27 | 2017-02-21 | Corning Incorporated | Non-polished glass wafer, thinning system and method for using the non-polished glass wafer to thin a semiconductor wafer |
WO2015077113A1 (en) * | 2013-11-25 | 2015-05-28 | Corning Incorporated | Methods for determining a shape of a substantially cylindrical specular reflective surface |
US9835442B2 (en) | 2013-11-25 | 2017-12-05 | Corning Incorporated | Methods for determining a shape of a substantially cylindrical specular reflective surface |
TWI637144B (en) * | 2013-11-25 | 2018-10-01 | 康寧公司 | Methods for determining a shape of a substantially cylindrical specular reflective surface |
WO2016011094A1 (en) * | 2014-07-17 | 2016-01-21 | Corning Incorporated | Methods for producing a glass ribbon |
US9682882B2 (en) | 2014-07-17 | 2017-06-20 | Corning Incorporated | Methods for producing a glass ribbon |
Also Published As
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JP5906288B2 (en) | 2016-04-20 |
TW200938830A (en) | 2009-09-16 |
JP2015014608A (en) | 2015-01-22 |
KR20100116579A (en) | 2010-11-01 |
KR101529744B1 (en) | 2015-06-29 |
JP2011505559A (en) | 2011-02-24 |
JP5654354B2 (en) | 2015-01-14 |
CN101910782A (en) | 2010-12-08 |
TWI385378B (en) | 2013-02-11 |
CN101910782B (en) | 2013-03-20 |
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