WO2009069845A1 - Bio-sensor having sensing unit made from nano-sized resist-derived carbon - Google Patents

Bio-sensor having sensing unit made from nano-sized resist-derived carbon Download PDF

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Publication number
WO2009069845A1
WO2009069845A1 PCT/KR2007/006801 KR2007006801W WO2009069845A1 WO 2009069845 A1 WO2009069845 A1 WO 2009069845A1 KR 2007006801 W KR2007006801 W KR 2007006801W WO 2009069845 A1 WO2009069845 A1 WO 2009069845A1
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WO
WIPO (PCT)
Prior art keywords
sensor portion
biosensor
insulation layer
sensor
biomolecules
Prior art date
Application number
PCT/KR2007/006801
Other languages
French (fr)
Inventor
Seung Seob Lee
Jung A Lee
Kwang Cheol Lee
Se Il Park
Original Assignee
Korea Research Institute Of Standards And Science
Korea Advanced Institute Of Science And Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Research Institute Of Standards And Science, Korea Advanced Institute Of Science And Technology filed Critical Korea Research Institute Of Standards And Science
Publication of WO2009069845A1 publication Critical patent/WO2009069845A1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28—Electrolytic cell components
    • G01N27/30—Electrodes, e.g. test electrodes; Half-cells
    • G01N27/327—Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
    • G01N27/3275—Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction
    • G01N27/3278—Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction involving nanosized elements, e.g. nanogaps or nanoparticles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures

Definitions

  • the present invention relates to a biosensor for detecting biomolecules and, more particularly, to a biosensor having a nano-size sensor portion composed of pyrolyzed carbon.
  • MEMS micromachining-based semiconductor processing technology
  • the MEMS Micro-Electro-Mechanical System
  • the MEMS refers to a technology with which a sensor, an actuator and an electro-mechanical device each having an extremely small size in the order of microns are manufactured through a micromachining process derived from a semiconductor manufacturing process, particularly an integrated circuit technology.
  • the micro mechanical device manufactured by the micromachining process has a size and precision degree of several microns or less. Advantages of the micromachining process reside in that it can realize miniaturization, high performance, versatility and integration of a device through an extremely precise micromachining work while enhancing the stability and reliability of the device.
  • the micromachining technology can realize a unitary integrated system, thereby eliminating the need to perform an additional fabricating operation. This makes it possible to cost- effectively mass-produce micro structures through a series of process steps.
  • Bio-MEMS A MEMS used in the field of bio-engineering is referred to as Bio-MEMS.
  • the Bio-MEMS The Bio-MEMS
  • MEMS is a combination term of biotechnology and MEMS and means a micro device capable of analyzing biomolecules in vivo or in vitro.
  • One representative product using the Bio-MEMS is a biosensor.
  • the biosensor refers to an ultra-small sensor which includes a sensor portion for detecting biomolecules and a signal generating portion for generating an electrical or chemical signal corresponding to the biomolecules detected.
  • the biosensor is divided into a mechanical biosensor and an electrical biosensor.
  • the mechanical biosensor determines the kind and amount of biomolecules by measuring the resonant frequency or displacement of a cantilever having a pressure resistor, a piezoelectric material or a field-effect transistor formed thereon.
  • the resonant frequency or displacement of the cantilever varies when the pressure resistor, the piezoelectric material or the field-effect transistor reacts with biomolecules.
  • the electrical biosensor determines the kind and amount of biomolecules by measuring the change in electric resistance of a sensor portion made of a semiconductor nano wire, a carbon nano tube or a conductive polymer. The change in electric resistance occurs when the sensor portion makes a binding reaction with biomolecules.
  • the electrical biosensor has an advantage in that it can accurately determine the biomolecules using a nano-size sensor portion such as a carbon nano tube or a semiconductor nano wire.
  • a nano-size sensor portion such as a carbon nano tube or a semiconductor nano wire.
  • it is difficult to manufacture a sensor portion of arbitrary shape in a nano size.
  • additional process steps such as etching, deposition or the like, which makes it costly to produce the sensor portion in a nano size.
  • a biosensor for detecting biomolecules including: a sensor portion for making contact with biomolecules to be detected; an electrode for supplying an electric current to the sensor portion; and a connector portion for electrically interconnecting the sensor portion and the electrode, wherein the sensor portion is made from a pyrolyzed photo-sensitive sensor portion precursor obtained through a lithography process.
  • the present invention it is possible to easily manufacture a micro biosensor by forming a sensor portion precursor with a high molecular polymer through a photolithography process and then pyrolyzing the sensor portion precursor to form a sensor portion composed of conductive carbon.
  • the present biosensor is capable of accurately detecting biomolecules adhering to the sensor portion. This is because the biosensor is provided with an exposure window for allowing the biomolecules to make contact with the sensor portion with ease and because a vacant space is formed between the sensor portion and a substrate.
  • Fig. 1 shows a substrate and an underlying insulation layer with electrodes.
  • Fig. 2 illustrates a process for forming a sensor portion precursor in accordance with one embodiment of the present invention.
  • FIG. 3 illustrates a process for forming a sensor portion in accordance with one embodiment of the present invention.
  • FIG. 4 shows a substrate provided with a connector portion in accordance with one embodiment of the present invention.
  • FIG. 5 shows a biosensor provided with an exposure window in accordance with one embodiment of the present invention.
  • FIG. 6 is a section view of a biosensor in accordance with another embodiment of the present invention, specifically illustrating a sensor portion and its vicinity. Best Mode for Carrying out the Invention
  • Fig. 1 shows a substrate and an underlying insulation layer with electrodes.
  • an underlying insulation layer 2 is formed on the upper surface of a substrate 1.
  • a silicon, quartz or ceramic substrate may be used as the substrate 1.
  • a silicon oxide or silicon nitride film may be used as the underlying insulation layer 2.
  • the electrodes 3 and the alignment marks 4 provided on the upper surface of the underlying insulation layer 2 are produced by a photolithography process. More specifically, a polymer mask having patterns of the electrodes 3 and the alignment marks 4 pierced therethrough is attached to the upper surface of the underlying insulation layer 2. A metallic material is then applied onto the polymer mask thus attached. Thereafter, the polymer mask is separated from the underlying insulation layer 2 to thereby form the electrodes 3 and the alignment marks 4 on the underlying insulation layer 2.
  • FIG. 2 illustrates a process for forming a sensor portion precursor in accordance with one embodiment of the present invention.
  • a photo-sensitive layer 5 composed of a polymer is applied on the upper surface of the underlying insulation layer 2 on which the electrodes 3 and the alignment marks 4 have been formed.
  • a polymer mask 6 having a sensor portion pattern pierced therethrough is attached to the upper surface of the photo-sensitive layer 5.
  • the alignment marks 4 are used in aligning the sensor portion pattern of the polymer mask 6 at a specified position on the underlying insulation layer 2.
  • the photo-sensitive layer 5 is lithographed using the polymer mask 6 having the sensor portion pattern pierced therethrough.
  • electron beams B are irradiated on the photo-sensitive layer 5 from above the polymer mask 6, at which time only the electron beams passed through the sensor portion pattern reach the photo-sensitive layer 5.
  • the photo-sensitive layer 5 is preferably made of a high molecular polymer. After the electron beams B are irradiated on the photo-sensitive layer 5 through the sensor portion pattern, the polymer mask 6 is separated from the photo-sensitive layer 5 and is then developed with a developer solution.
  • the portion of the photo-sensitive layer 5 irradiated with the electron beams is left intact, but the portion of the photo-sensitive layer 5 not irradiated with the electron beams is completely dissolved away in the developer solution.
  • a portion of the photo-sensitive layer 5 corresponding to the sensor portion pattern of the polymer mask 6, i.e., a sensor portion precursor is left on the upper surface of the underlying insulation layer 2.
  • Fig. 3 illustrates a process for forming a sensor portion by pyrolyzing the sensor portion precursor.
  • a sensor portion precursor 7 composed of a high molecular polymer is formed on the underlying insulation layer 2 after the photosensitive layer 5 is developed. Heat H is applied on the sensor portion precursor 7 to pyrolyze the same. The sensor portion precursor 7 thus pyrolyzed is converted to a sensor portion composed of conductive carbon.
  • the sensor portion precursor 7 is heated to an elevated temperature, nitrogen, oxygen and the like constituting the sensor portion precursor 7 are removed and only a carbon component is left as it is.
  • the carbon component has an amorphous structure.
  • the electric conductivity and residual stress of the pyrolyzed sensor portion precursor 7 varies depending on the heating temperature and time of the sensor portion precursor 7, the chemical components of the polymer constituting the sensor portion precursor 7 and the kind of additives added to the sensor portion precursor 7.
  • the sensor portion precursor 7 is pyrolyzed by heating the same to a temperature of from 500 0 C to 700 0 C for 0.5 to 2 hours in an oven. This produces a sensor portion 8 made from a pyrolyzed photo-sensitive sensor portion precursor.
  • FIG. 4 illustrates the substrate provided with connector portions in accordance with one preferred embodiment of the present invention.
  • connector portions 9 for electrically interconnecting the sensor portion 8 and the electrodes 3 are formed through a photolithography process. More specifically, a polymer mask having patterns of the connector portions 9 pierced therethrough is attached to the underlying insulation layer 2 in alignment with the alignment marks 4 so that the connector portions 9 can be formed between the sensor portion 8 and the electrodes 3. A metallic material is applied on the polymer mask, at which time the metallic material is filled in the patterns of the connector portions 9. If the polymer mask is removed, the connector portions 9 for electrically interconnecting the sensor portion 8 and the electrodes 3 are formed on the underlying insulation layer 2.
  • Fig. 5 illustrates a biosensor having an exposure window in accordance with one embodiment of the present invention.
  • a covering insulation layer 10 is formed to the upper surface of the underlying insulation layer 2 on which the connector portions 9 are formed.
  • the task of forming the covering insulation layer 10 on the underlying insulation layer 2 is performed by applying PMMA (polymethyl methacrylate), SOG (spin-on-glass), polyimide or the like on the upper surface of the underlying insulation layer 2 in a liquid or gas phase.
  • PMMA polymethyl methacrylate
  • SOG spin-on-glass
  • polyimide polyimide
  • An exposure window 11 through which to expose the sensor portion 8 to biomolecules is formed in the covering insulation layer 10 to lie just above the sensor portion 8. If a test solution is allowed to flow over the covering insulation layer 10 of the biosensor, a part of the test solution enters the exposure window 11 and makes contact with the sensor portion 8. Thus the biomolecules contained in the test solution adhere to the sensor portion 8.
  • the electric resistance of the sensor portion 8 varies with the kind and amount of the biomolecules adhering to the sensor portion 8.
  • the electric resistance of the sensor portion 8 can be measured by supplying an electric current to the sensor portion 8 through the electrodes 3 and the connector portions 9. Based on the electric resistance thus measured, it is possible to detect the kind and amount of the biomolecules adhering to the sensor portion 8.
  • FIG. 6 is a section view of a biosensor in accordance with another embodiment of the present invention, specifically illustrating a sensor portion and its vicinity.
  • a portion of the underlying insulation layer 2 positioned below the sensor portion 8 is etched away to form a vacant space 12 between the sensor portion 8 and the substrate 1. Formation of the vacant space 12 makes it possible to reduce the electric resistance attributable to the contact between the underlying insulation layer 2 and the sensor portion 8. Accordingly, it is possible to accurately measure the change in electric resistance of the sensor portion 8 caused by the biomolecules adhering thereto.
  • the present biosensor is capable of accurately detecting biomolecules adhering to the sensor portion. This is because the biosensor is provided with an exposure window for allowing the biomolecules to make contact with the sensor portion with ease and because a vacant space is formed between the sensor portion and the substrate.

Abstract

Provided is a biosensor for detecting biomolecules. The biosensor includes a sensor portion for making contact with biomolecules to be detected, an electrode for supplying an electric current to the sensor portion and a connector portion for electrically interconnecting the sensor portion and the electrode. The sensor portion is made from a pyrolyzed photo-sensitive sensor portion precursor obtained through a lithography process.

Description

Description
BIO-SENSOR HAVING SENSING UNIT MADE FROM NANO- SIZED RESIST-DERIVED CARBON
Technical Field
[1] The present invention relates to a biosensor for detecting biomolecules and, more particularly, to a biosensor having a nano-size sensor portion composed of pyrolyzed carbon. Background Art
[2] As a method for integrating a micro mechanical device, there is known a semiconductor processing technology using micromachining. The micromachining-based semiconductor processing technology, which is often referred to as "MEMS," has contributed to the development of a two-dimensional silicon processing technology represented by the conventional planar technology to a three-dimensional structure processing technology.
[3] The MEMS (Micro-Electro-Mechanical System) refers to a technology with which a sensor, an actuator and an electro-mechanical device each having an extremely small size in the order of microns are manufactured through a micromachining process derived from a semiconductor manufacturing process, particularly an integrated circuit technology. The micro mechanical device manufactured by the micromachining process has a size and precision degree of several microns or less. Advantages of the micromachining process reside in that it can realize miniaturization, high performance, versatility and integration of a device through an extremely precise micromachining work while enhancing the stability and reliability of the device. In addition, the micromachining technology can realize a unitary integrated system, thereby eliminating the need to perform an additional fabricating operation. This makes it possible to cost- effectively mass-produce micro structures through a series of process steps.
[4] A MEMS used in the field of bio-engineering is referred to as Bio-MEMS. The Bio-
MEMS is a combination term of biotechnology and MEMS and means a micro device capable of analyzing biomolecules in vivo or in vitro. One representative product using the Bio-MEMS is a biosensor. The biosensor refers to an ultra-small sensor which includes a sensor portion for detecting biomolecules and a signal generating portion for generating an electrical or chemical signal corresponding to the biomolecules detected.
[5] The biosensor is divided into a mechanical biosensor and an electrical biosensor. The mechanical biosensor determines the kind and amount of biomolecules by measuring the resonant frequency or displacement of a cantilever having a pressure resistor, a piezoelectric material or a field-effect transistor formed thereon. The resonant frequency or displacement of the cantilever varies when the pressure resistor, the piezoelectric material or the field-effect transistor reacts with biomolecules. In contrast, the electrical biosensor determines the kind and amount of biomolecules by measuring the change in electric resistance of a sensor portion made of a semiconductor nano wire, a carbon nano tube or a conductive polymer. The change in electric resistance occurs when the sensor portion makes a binding reaction with biomolecules.
Disclosure of Invention Technical Problem
[6] The electrical biosensor has an advantage in that it can accurately determine the biomolecules using a nano-size sensor portion such as a carbon nano tube or a semiconductor nano wire. However, it is difficult to manufacture a sensor portion of arbitrary shape in a nano size. In order to manufacture a nano-size sensor portion using a semiconductor manufacturing process, there is a need to perform additional process steps such as etching, deposition or the like, which makes it costly to produce the sensor portion in a nano size.
[7] Therefore, it is an object of the present invention to provide a novel biosensor having a nano-size sensor portion composed of pyrolyzed carbon, which can be cost-effectively manufactured through a simple process. Technical Solution
[8] In accordance with the present invention, there is provided a biosensor for detecting biomolecules, including: a sensor portion for making contact with biomolecules to be detected; an electrode for supplying an electric current to the sensor portion; and a connector portion for electrically interconnecting the sensor portion and the electrode, wherein the sensor portion is made from a pyrolyzed photo-sensitive sensor portion precursor obtained through a lithography process.
Advantageous Effects
[9] With the present invention, it is possible to easily manufacture a micro biosensor by forming a sensor portion precursor with a high molecular polymer through a photolithography process and then pyrolyzing the sensor portion precursor to form a sensor portion composed of conductive carbon. In addition, the present biosensor is capable of accurately detecting biomolecules adhering to the sensor portion. This is because the biosensor is provided with an exposure window for allowing the biomolecules to make contact with the sensor portion with ease and because a vacant space is formed between the sensor portion and a substrate. Brief Description of Drawings
[10] Fig. 1 shows a substrate and an underlying insulation layer with electrodes. [11] Fig. 2 illustrates a process for forming a sensor portion precursor in accordance with one embodiment of the present invention.
[12] Fig. 3 illustrates a process for forming a sensor portion in accordance with one embodiment of the present invention.
[13] Fig. 4 shows a substrate provided with a connector portion in accordance with one embodiment of the present invention.
[14] Fig. 5 shows a biosensor provided with an exposure window in accordance with one embodiment of the present invention.
[15] Fig. 6 is a section view of a biosensor in accordance with another embodiment of the present invention, specifically illustrating a sensor portion and its vicinity. Best Mode for Carrying out the Invention
[16] Hereinafter, a biosensor in accordance with the present invention will be described in detail with reference to Figs. 1 through 6.
[17] Fig. 1 shows a substrate and an underlying insulation layer with electrodes. Referring to Fig. 1, an underlying insulation layer 2 is formed on the upper surface of a substrate 1. On the upper surface of the underlying insulation layer 2, there are formed electrodes 3 and alignment marks 4. A silicon, quartz or ceramic substrate may be used as the substrate 1. A silicon oxide or silicon nitride film may be used as the underlying insulation layer 2.
[18] The electrodes 3 and the alignment marks 4 provided on the upper surface of the underlying insulation layer 2 are produced by a photolithography process. More specifically, a polymer mask having patterns of the electrodes 3 and the alignment marks 4 pierced therethrough is attached to the upper surface of the underlying insulation layer 2. A metallic material is then applied onto the polymer mask thus attached. Thereafter, the polymer mask is separated from the underlying insulation layer 2 to thereby form the electrodes 3 and the alignment marks 4 on the underlying insulation layer 2.
[19] Fig. 2 illustrates a process for forming a sensor portion precursor in accordance with one embodiment of the present invention. Referring to Fig. 2, a photo- sensitive layer 5 composed of a polymer is applied on the upper surface of the underlying insulation layer 2 on which the electrodes 3 and the alignment marks 4 have been formed. A polymer mask 6 having a sensor portion pattern pierced therethrough is attached to the upper surface of the photo-sensitive layer 5. The alignment marks 4 are used in aligning the sensor portion pattern of the polymer mask 6 at a specified position on the underlying insulation layer 2.
[20] The photo-sensitive layer 5 is lithographed using the polymer mask 6 having the sensor portion pattern pierced therethrough. First, electron beams B are irradiated on the photo-sensitive layer 5 from above the polymer mask 6, at which time only the electron beams passed through the sensor portion pattern reach the photo-sensitive layer 5. The photo-sensitive layer 5 is preferably made of a high molecular polymer. After the electron beams B are irradiated on the photo-sensitive layer 5 through the sensor portion pattern, the polymer mask 6 is separated from the photo-sensitive layer 5 and is then developed with a developer solution. As the photo-sensitive layer 5 is developed with the developer solution, the portion of the photo-sensitive layer 5 irradiated with the electron beams is left intact, but the portion of the photo-sensitive layer 5 not irradiated with the electron beams is completely dissolved away in the developer solution. Thus only a portion of the photo- sensitive layer 5 corresponding to the sensor portion pattern of the polymer mask 6, i.e., a sensor portion precursor, is left on the upper surface of the underlying insulation layer 2.
[21] Fig. 3 illustrates a process for forming a sensor portion by pyrolyzing the sensor portion precursor. Referring to Fig. 3, a sensor portion precursor 7 composed of a high molecular polymer is formed on the underlying insulation layer 2 after the photosensitive layer 5 is developed. Heat H is applied on the sensor portion precursor 7 to pyrolyze the same. The sensor portion precursor 7 thus pyrolyzed is converted to a sensor portion composed of conductive carbon. In other words, if the sensor portion precursor 7 is heated to an elevated temperature, nitrogen, oxygen and the like constituting the sensor portion precursor 7 are removed and only a carbon component is left as it is. The carbon component has an amorphous structure. The electric conductivity and residual stress of the pyrolyzed sensor portion precursor 7 varies depending on the heating temperature and time of the sensor portion precursor 7, the chemical components of the polymer constituting the sensor portion precursor 7 and the kind of additives added to the sensor portion precursor 7. Preferably, the sensor portion precursor 7 is pyrolyzed by heating the same to a temperature of from 5000C to 7000C for 0.5 to 2 hours in an oven. This produces a sensor portion 8 made from a pyrolyzed photo-sensitive sensor portion precursor.
[22] Fig. 4 illustrates the substrate provided with connector portions in accordance with one preferred embodiment of the present invention. Referring to Fig. 4, connector portions 9 for electrically interconnecting the sensor portion 8 and the electrodes 3 are formed through a photolithography process. More specifically, a polymer mask having patterns of the connector portions 9 pierced therethrough is attached to the underlying insulation layer 2 in alignment with the alignment marks 4 so that the connector portions 9 can be formed between the sensor portion 8 and the electrodes 3. A metallic material is applied on the polymer mask, at which time the metallic material is filled in the patterns of the connector portions 9. If the polymer mask is removed, the connector portions 9 for electrically interconnecting the sensor portion 8 and the electrodes 3 are formed on the underlying insulation layer 2.
[23] Fig. 5 illustrates a biosensor having an exposure window in accordance with one embodiment of the present invention. Referring to Fig. 5, a covering insulation layer 10 is formed to the upper surface of the underlying insulation layer 2 on which the connector portions 9 are formed. The task of forming the covering insulation layer 10 on the underlying insulation layer 2 is performed by applying PMMA (polymethyl methacrylate), SOG (spin-on-glass), polyimide or the like on the upper surface of the underlying insulation layer 2 in a liquid or gas phase.
[24] An exposure window 11 through which to expose the sensor portion 8 to biomolecules is formed in the covering insulation layer 10 to lie just above the sensor portion 8. If a test solution is allowed to flow over the covering insulation layer 10 of the biosensor, a part of the test solution enters the exposure window 11 and makes contact with the sensor portion 8. Thus the biomolecules contained in the test solution adhere to the sensor portion 8. In this case, the electric resistance of the sensor portion 8 varies with the kind and amount of the biomolecules adhering to the sensor portion 8. The electric resistance of the sensor portion 8 can be measured by supplying an electric current to the sensor portion 8 through the electrodes 3 and the connector portions 9. Based on the electric resistance thus measured, it is possible to detect the kind and amount of the biomolecules adhering to the sensor portion 8.
[25] Fig. 6 is a section view of a biosensor in accordance with another embodiment of the present invention, specifically illustrating a sensor portion and its vicinity. Referring to Fig. 6, a portion of the underlying insulation layer 2 positioned below the sensor portion 8 is etched away to form a vacant space 12 between the sensor portion 8 and the substrate 1. Formation of the vacant space 12 makes it possible to reduce the electric resistance attributable to the contact between the underlying insulation layer 2 and the sensor portion 8. Accordingly, it is possible to accurately measure the change in electric resistance of the sensor portion 8 caused by the biomolecules adhering thereto. Industrial Applicability
[26] With the present invention, it is possible to cost-effectively and easily manufacture a micro biosensor by forming a sensor portion precursor with a high molecular polymer through a photolithography process and then pyrolyzing the sensor portion precursor to form a sensor portion composed of conductive carbon.
[27] In addition, the present biosensor is capable of accurately detecting biomolecules adhering to the sensor portion. This is because the biosensor is provided with an exposure window for allowing the biomolecules to make contact with the sensor portion with ease and because a vacant space is formed between the sensor portion and the substrate.
[28] The embodiments set forth hereinabove have been presented for illustrative purpose only and, therefore, the present invention is not limited to these embodiments. It will be understood by those skilled in the art that various changes and modifications may be made without departing from the scope of the invention defined in the claims.

Claims

Claims
[1] A biosensor for detecting biomolecules, comprising: a sensor portion for making contact with biomolecules to be detected; an electrode for supplying an electric current to the sensor portion; and a connector portion for electrically interconnecting the sensor portion and the electrode, wherein the sensor portion is made from a pyrolyzed photo-sensitive sensor portion precursor obtained through a lithography process.
[2] The biosensor as recited in claim 1, further comprising an covering insulation layer formed on the sensor portion, the electrode and the connector portion, the covering insulation layer having an exposure window through which the sensor portion is exposed to the biomolecules to be detected.
[3] The biosensor as recited in claim 2, further comprising a substrate and an underlying insulation layer formed on the substrate, and wherein the sensor portion, the electrode and the connector portion are formed on the underlying insulation layer.
[4] The biosensor as recited in claim 3, wherein a portion of the underlying insulation layer positioned below the sensor portion is etched away to form a vacant space between the sensor portion and the substrate.
PCT/KR2007/006801 2007-11-26 2007-12-24 Bio-sensor having sensing unit made from nano-sized resist-derived carbon WO2009069845A1 (en)

Applications Claiming Priority (2)

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KR10-2007-0121047 2007-11-26
KR1020070121047A KR100927616B1 (en) 2007-11-26 2007-11-26 Biosensor with Carbon Sensing

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11275312B1 (en) 2020-11-30 2022-03-15 Waymo Llc Systems and methods for verifying photomask cleanliness

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020088521A (en) * 2001-05-18 2002-11-29 주식회사 아이센스 Biosensors with porous chromatographic membranes and enhanced sampling capability
KR20070033794A (en) * 2005-09-22 2007-03-27 전자부품연구원 Nanowire Device Manufacturing Method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020088521A (en) * 2001-05-18 2002-11-29 주식회사 아이센스 Biosensors with porous chromatographic membranes and enhanced sampling capability
KR20070033794A (en) * 2005-09-22 2007-03-27 전자부품연구원 Nanowire Device Manufacturing Method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11275312B1 (en) 2020-11-30 2022-03-15 Waymo Llc Systems and methods for verifying photomask cleanliness

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