WO2009066011A3 - Surface processing method - Google Patents

Surface processing method Download PDF

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Publication number
WO2009066011A3
WO2009066011A3 PCT/FI2008/050677 FI2008050677W WO2009066011A3 WO 2009066011 A3 WO2009066011 A3 WO 2009066011A3 FI 2008050677 W FI2008050677 W FI 2008050677W WO 2009066011 A3 WO2009066011 A3 WO 2009066011A3
Authority
WO
WIPO (PCT)
Prior art keywords
target
ablation
plume
spot area
beam radiation
Prior art date
Application number
PCT/FI2008/050677
Other languages
French (fr)
Other versions
WO2009066011A2 (en
Inventor
Vesa MYLLYMÄKI
Reijo Lappalainen
Original Assignee
Picodeon Ltd Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Picodeon Ltd Oy filed Critical Picodeon Ltd Oy
Publication of WO2009066011A2 publication Critical patent/WO2009066011A2/en
Publication of WO2009066011A3 publication Critical patent/WO2009066011A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B23K26/0821—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

Abstract

The invention shows a method of producing high-quality ablation plume by processing a target, on a target body, with a pulsed laser beam radiation, so that the method comprises: selecting a spot area for a beam cross-section on the target to correspond the ablation threshold of the target material to being exceeded throughout the spot area of which the plume is ablated by the pulsed beam radiation within a controlled ablation depth so providing the fine quality plasma, to be used for coating and/or particle synthesis.
PCT/FI2008/050677 2007-11-21 2008-11-21 Surface processing method WO2009066011A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20070889 2007-11-21
FI20070889A FI20070889L (en) 2007-11-21 2007-11-21 Surface treatment method

Publications (2)

Publication Number Publication Date
WO2009066011A2 WO2009066011A2 (en) 2009-05-28
WO2009066011A3 true WO2009066011A3 (en) 2009-11-26

Family

ID=38786671

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FI2008/050677 WO2009066011A2 (en) 2007-11-21 2008-11-21 Surface processing method

Country Status (2)

Country Link
FI (1) FI20070889L (en)
WO (1) WO2009066011A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9849512B2 (en) 2011-07-01 2017-12-26 Attostat, Inc. Method and apparatus for production of uniformly sized nanoparticles
US9919363B2 (en) * 2014-09-23 2018-03-20 Attostat, Inc. System and method for making non-spherical nanoparticles and nanoparticle compositions made thereby
US9434006B2 (en) * 2014-09-23 2016-09-06 Attostat, Inc. Composition containing spherical and coral-shaped nanoparticles and method of making same
US9839652B2 (en) 2015-04-01 2017-12-12 Attostat, Inc. Nanoparticle compositions and methods for treating or preventing tissue infections and diseases
US10774429B2 (en) 2015-04-13 2020-09-15 Attostat, Inc. Anti-corrosion nanoparticle compositions
US11473202B2 (en) 2015-04-13 2022-10-18 Attostat, Inc. Anti-corrosion nanoparticle compositions
US11018376B2 (en) 2017-11-28 2021-05-25 Attostat, Inc. Nanoparticle compositions and methods for enhancing lead-acid batteries
US11646453B2 (en) 2017-11-28 2023-05-09 Attostat, Inc. Nanoparticle compositions and methods for enhancing lead-acid batteries

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0442163A1 (en) * 1990-01-12 1991-08-21 Philips Patentverwaltung GmbH Method for production of ultrafine particles and their use
WO2001051907A1 (en) * 2000-01-11 2001-07-19 Guenther Detlef Radially homogeneous high energy density uv sample ablating laser radiation in 'pure' solid to gas sample preparation, for analysis by icp-ms and icp-oes
WO2007096461A2 (en) * 2006-02-23 2007-08-30 Picodeon Ltd Oy Method for producing high-quality surfaces and a product having a high-quality surface
WO2008102062A2 (en) * 2007-02-23 2008-08-28 Picodeon Ltd Oy Method and arrangement for photon ablation of a target

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0442163A1 (en) * 1990-01-12 1991-08-21 Philips Patentverwaltung GmbH Method for production of ultrafine particles and their use
WO2001051907A1 (en) * 2000-01-11 2001-07-19 Guenther Detlef Radially homogeneous high energy density uv sample ablating laser radiation in 'pure' solid to gas sample preparation, for analysis by icp-ms and icp-oes
WO2007096461A2 (en) * 2006-02-23 2007-08-30 Picodeon Ltd Oy Method for producing high-quality surfaces and a product having a high-quality surface
WO2008102062A2 (en) * 2007-02-23 2008-08-28 Picodeon Ltd Oy Method and arrangement for photon ablation of a target

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
DATABASE WPI Derwent World Patents Index; AN 2008-B99763, XP002548699 *
PARK M ET AL: "Ultrafast laser ablation of indium tin oxide thin films for organic light-emitting diode application", OPTICS AND LASERS IN ENGINEERING, ELSEVIER, vol. 44, no. 2, 1 February 2006 (2006-02-01), pages 138 - 146, XP025097981, ISSN: 0143-8166, [retrieved on 20060201] *

Also Published As

Publication number Publication date
FI20070889L (en) 2009-05-22
FI20070889A0 (en) 2007-11-21
WO2009066011A2 (en) 2009-05-28

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