WO2009061704A3 - Atomic layer deposition encapsulation - Google Patents

Atomic layer deposition encapsulation Download PDF

Info

Publication number
WO2009061704A3
WO2009061704A3 PCT/US2008/082295 US2008082295W WO2009061704A3 WO 2009061704 A3 WO2009061704 A3 WO 2009061704A3 US 2008082295 W US2008082295 W US 2008082295W WO 2009061704 A3 WO2009061704 A3 WO 2009061704A3
Authority
WO
WIPO (PCT)
Prior art keywords
layer deposition
atomic layer
deposition encapsulation
encapsulation
ald
Prior art date
Application number
PCT/US2008/082295
Other languages
French (fr)
Other versions
WO2009061704A2 (en
Inventor
Neil Gough
Arrelaine Dameron
Original Assignee
Hcf Partners L P
Neil Gough
Arrelaine Dameron
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hcf Partners L P, Neil Gough, Arrelaine Dameron filed Critical Hcf Partners L P
Publication of WO2009061704A2 publication Critical patent/WO2009061704A2/en
Publication of WO2009061704A3 publication Critical patent/WO2009061704A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/52—Encapsulations
    • H01L33/56—Materials, e.g. epoxy or silicone resin
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/44—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

The invention provides devices that are conformally encapsulated using ALD and methods for producing the same.
PCT/US2008/082295 2007-11-06 2008-11-03 Atomic layer deposition encapsulation WO2009061704A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US98593607P 2007-11-06 2007-11-06
US60/985,936 2007-11-06

Publications (2)

Publication Number Publication Date
WO2009061704A2 WO2009061704A2 (en) 2009-05-14
WO2009061704A3 true WO2009061704A3 (en) 2009-08-20

Family

ID=40626410

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2008/082295 WO2009061704A2 (en) 2007-11-06 2008-11-03 Atomic layer deposition encapsulation

Country Status (1)

Country Link
WO (1) WO2009061704A2 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009058796A1 (en) 2009-12-18 2011-06-22 OSRAM Opto Semiconductors GmbH, 93055 Optoelectronic component and method for producing an optoelectronic component
DE102011016302A1 (en) * 2011-04-07 2012-10-11 Osram Opto Semiconductors Gmbh Optoelectronic semiconductor chip
DE102011016935A1 (en) * 2011-04-13 2012-10-18 Osram Opto Semiconductors Gmbh A method of manufacturing a semiconductor light emitting device and light emitting semiconductor device
DE102011114641B4 (en) 2011-09-30 2021-08-12 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Optoelectronic semiconductor component and method for producing an optoelectronic semiconductor component
JP6307707B2 (en) * 2012-08-13 2018-04-11 株式会社昭和真空 Light emitting device manufacturing system
DE102013100818B4 (en) * 2013-01-28 2023-07-27 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Optoelectronic semiconductor chip and method for producing an optoelectronic semiconductor chip
DE102013103079A1 (en) * 2013-03-26 2014-10-02 Osram Opto Semiconductors Gmbh Optoelectronic semiconductor chip and method for producing an optoelectronic semiconductor chip
FI20135967L (en) * 2013-09-27 2015-03-28 Lumichip Oy MULTIFUNCTIONAL ENCAPSULATING LAYER FOR ASSEMBLIES AND PROCEDURE FOR MANUFACTURE THEREOF
WO2017188947A1 (en) * 2016-04-27 2017-11-02 Applied Materials, Inc. System for atomic layer deposition on flexible substrates and method for the same

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060270081A1 (en) * 2005-05-27 2006-11-30 Chua Janet B Y Light emitting device having a layer of photonic crystals and a region of diffusing material and method for fabricating the device
US20070004080A1 (en) * 2005-06-30 2007-01-04 Ouyang Mike X Hermetic seals for micro-electromechanical system devices
US20070085092A1 (en) * 2005-10-14 2007-04-19 Hon Hai Precision Industry Co., Ltd. Light-emitting device, planar light source and direct type backlight module
US20070164376A1 (en) * 1999-10-25 2007-07-19 Burrows Paul E Method for edge sealing barrier films

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070164376A1 (en) * 1999-10-25 2007-07-19 Burrows Paul E Method for edge sealing barrier films
US20060270081A1 (en) * 2005-05-27 2006-11-30 Chua Janet B Y Light emitting device having a layer of photonic crystals and a region of diffusing material and method for fabricating the device
US20070004080A1 (en) * 2005-06-30 2007-01-04 Ouyang Mike X Hermetic seals for micro-electromechanical system devices
US20070085092A1 (en) * 2005-10-14 2007-04-19 Hon Hai Precision Industry Co., Ltd. Light-emitting device, planar light source and direct type backlight module

Also Published As

Publication number Publication date
WO2009061704A2 (en) 2009-05-14

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