WO2009060531A1 - Angular velocity sensor and electronic device having same - Google Patents

Angular velocity sensor and electronic device having same Download PDF

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Publication number
WO2009060531A1
WO2009060531A1 PCT/JP2007/071787 JP2007071787W WO2009060531A1 WO 2009060531 A1 WO2009060531 A1 WO 2009060531A1 JP 2007071787 W JP2007071787 W JP 2007071787W WO 2009060531 A1 WO2009060531 A1 WO 2009060531A1
Authority
WO
WIPO (PCT)
Prior art keywords
angular velocity
same
electronic device
velocity sensor
sensor
Prior art date
Application number
PCT/JP2007/071787
Other languages
French (fr)
Japanese (ja)
Inventor
Hiroshi Ishikawa
Takashi Katsuki
Hiroaki Inoue
Fumihiko Nakazawa
Original Assignee
Fujitsu Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Limited filed Critical Fujitsu Limited
Priority to PCT/JP2007/071787 priority Critical patent/WO2009060531A1/en
Publication of WO2009060531A1 publication Critical patent/WO2009060531A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

An angular velocity sensor comprises a first sensor section (10), a second sensor section (20), and a first frame (31) in which a torsion bar (33) formed in the first sensor section (10) and a torsion bar (34) formed in the second sensor section (20) are connected. The torsion bars (33) and (34) are connected to the first frame (31) so as to be parallel to each other in the position in which their central axes are different to each other. With the configuration, the first and second sensor sections (10) and (20) can be prevented from being driven in phase, thus enabling accurate angular velocity to be detected.
PCT/JP2007/071787 2007-11-09 2007-11-09 Angular velocity sensor and electronic device having same WO2009060531A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/071787 WO2009060531A1 (en) 2007-11-09 2007-11-09 Angular velocity sensor and electronic device having same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/071787 WO2009060531A1 (en) 2007-11-09 2007-11-09 Angular velocity sensor and electronic device having same

Publications (1)

Publication Number Publication Date
WO2009060531A1 true WO2009060531A1 (en) 2009-05-14

Family

ID=40625446

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/071787 WO2009060531A1 (en) 2007-11-09 2007-11-09 Angular velocity sensor and electronic device having same

Country Status (1)

Country Link
WO (1) WO2009060531A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013094208A1 (en) * 2011-12-23 2013-06-27 株式会社デンソー Vibration-type angular velocity sensor
WO2021131780A1 (en) * 2019-12-26 2021-07-01 ソニーグループ株式会社 Drive control device, drive control method, and program

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007024864A (en) * 2005-06-16 2007-02-01 Mitsubishi Electric Corp Oscillating gyroscope
JP2007155489A (en) * 2005-12-05 2007-06-21 Hitachi Ltd Inertial sensor
JP2007199469A (en) * 2006-01-27 2007-08-09 Nikon Corp Lens unit, interchangeable lens, and camera system
JP2007255890A (en) * 2004-04-20 2007-10-04 Murata Mfg Co Ltd Gyroscope device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007255890A (en) * 2004-04-20 2007-10-04 Murata Mfg Co Ltd Gyroscope device
JP2007024864A (en) * 2005-06-16 2007-02-01 Mitsubishi Electric Corp Oscillating gyroscope
JP2007155489A (en) * 2005-12-05 2007-06-21 Hitachi Ltd Inertial sensor
JP2007199469A (en) * 2006-01-27 2007-08-09 Nikon Corp Lens unit, interchangeable lens, and camera system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013094208A1 (en) * 2011-12-23 2013-06-27 株式会社デンソー Vibration-type angular velocity sensor
JP2013134064A (en) * 2011-12-23 2013-07-08 Denso Corp Oscillatory angular velocity sensor
US9910055B2 (en) 2011-12-23 2018-03-06 Denso Corporation Vibration angular velocity sensor
WO2021131780A1 (en) * 2019-12-26 2021-07-01 ソニーグループ株式会社 Drive control device, drive control method, and program
JP7459882B2 (en) 2019-12-26 2024-04-02 ソニーグループ株式会社 Drive control device, drive control method, and program

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