WO2009052819A3 - Adaptable optical system - Google Patents

Adaptable optical system Download PDF

Info

Publication number
WO2009052819A3
WO2009052819A3 PCT/DE2008/001776 DE2008001776W WO2009052819A3 WO 2009052819 A3 WO2009052819 A3 WO 2009052819A3 DE 2008001776 W DE2008001776 W DE 2008001776W WO 2009052819 A3 WO2009052819 A3 WO 2009052819A3
Authority
WO
WIPO (PCT)
Prior art keywords
optical system
optical
adaptable
temperature
optical component
Prior art date
Application number
PCT/DE2008/001776
Other languages
German (de)
French (fr)
Other versions
WO2009052819A9 (en
WO2009052819A2 (en
Inventor
Stefan Franz
Original Assignee
Jenoptik Laser Optik Sys Gmbh
Stefan Franz
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Laser Optik Sys Gmbh, Stefan Franz filed Critical Jenoptik Laser Optik Sys Gmbh
Publication of WO2009052819A2 publication Critical patent/WO2009052819A2/en
Publication of WO2009052819A3 publication Critical patent/WO2009052819A3/en
Publication of WO2009052819A9 publication Critical patent/WO2009052819A9/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0081—Simple or compound lenses having one or more elements with analytic function to create variable power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B15/00—Optical objectives with means for varying the magnification
    • G02B15/02—Optical objectives with means for varying the magnification by changing, adding, or subtracting a part of the objective, e.g. convertible objective
    • G02B15/04—Optical objectives with means for varying the magnification by changing, adding, or subtracting a part of the objective, e.g. convertible objective by changing a part

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

With respect to an adaptable optical system, the task is to provide an active system prone to minimal failures, which can be used to vary different thermally dependent imaging properties in order to compensate for temperature fluctuations within a broad temperature range. The adaptable optical system comprises, in at least one embodiment, at least one optical component made of a material having a thermally dependent refractive index and/or coefficient of expansion, and means for introducing a temperature gradient into the optical system as a temperature difference between optical components, or into at least one optical component, wherein the refractive power or correction state of the optical system can be varied by way of the temperature gradient to be introduced in that a redistribution of the thermal energy takes place directly in an optical component and/or an exchange of the thermal energy takes place between the optical components. An energetically particularly advantageous variant is to combine cooling and heating elements.
PCT/DE2008/001776 2007-10-24 2008-10-24 Adaptable optical system WO2009052819A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200710051291 DE102007051291B4 (en) 2007-10-24 2007-10-24 Adaptable optical system
DE102007051291.2 2007-10-24

Publications (3)

Publication Number Publication Date
WO2009052819A2 WO2009052819A2 (en) 2009-04-30
WO2009052819A3 true WO2009052819A3 (en) 2009-07-09
WO2009052819A9 WO2009052819A9 (en) 2009-09-24

Family

ID=40473914

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2008/001776 WO2009052819A2 (en) 2007-10-24 2008-10-24 Adaptable optical system

Country Status (2)

Country Link
DE (1) DE102007051291B4 (en)
WO (1) WO2009052819A2 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011005840A1 (en) * 2011-03-21 2012-09-27 Carl Zeiss Smt Gmbh A controllable multi-mirror arrangement, optical system with a controllable multi-mirror arrangement and method for operating a controllable multi-mirror arrangement
DE102011084117A1 (en) 2011-10-07 2013-04-11 Carl Zeiss Smt Gmbh Reflective optical element for the EUV wavelength range, method for generating and correcting such an element, projection objective for microlithography with such an element and projection exposure apparatus for microlithography with such a projection objective
US9606419B2 (en) 2014-03-21 2017-03-28 Fundació Institut De Ciències Fotòniques Adaptive photothermal lens
US10274648B2 (en) 2014-05-28 2019-04-30 Fundació Institut De Ciències Fotòniques Adaptive thermal micro lens
DE102015116962A1 (en) * 2015-10-06 2017-04-06 Connaught Electronics Ltd. Camera with a lens and a heating unit for heating the lens, and motor vehicle
GB201703356D0 (en) * 2017-03-02 2017-04-19 Cambridge Mechatronics Ltd SMA actuator for zoom camera OIS
CN107272188B (en) * 2017-07-31 2020-03-10 信利光电股份有限公司 Zoom lens and electronic equipment
DE102017217121A1 (en) * 2017-09-26 2019-03-28 Robert Bosch Gmbh Arrangement of an optical system and tempering method
CN107948513A (en) * 2017-11-30 2018-04-20 信利光电股份有限公司 A kind of zoom camera module and its Zooming method
DE102018211596A1 (en) 2018-07-12 2020-01-16 Carl Zeiss Smt Gmbh Method for producing a reflective optical element of a projection exposure system and reflective optical element for a projection exposure system, projection objective and projection exposure system
DE102019132003A1 (en) * 2019-04-12 2020-10-15 Jenoptik Optical Systems Gmbh Optical unit and method for operating an optical unit
DE102020203750A1 (en) 2020-03-24 2021-09-30 Carl Zeiss Smt Gmbh Device for recording a temperature, system for manufacturing an optical element and method for manufacturing an optical element
DE102022200976A1 (en) 2022-01-31 2023-01-05 Carl Zeiss Smt Gmbh Calibration bodies and methods for calibration
DE102022210037A1 (en) 2022-09-23 2024-03-28 Carl Zeiss Smt Gmbh Arrangement for tempering at least a partial area of an optical element

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4872743A (en) * 1983-04-18 1989-10-10 Canon Kabushiki Kaisha Varifocal optical element
EP0678768A2 (en) * 1994-04-22 1995-10-25 Canon Kabushiki Kaisha Projection exposure apparatus and microdevice manufacturing method
EP0965871A1 (en) * 1998-06-20 1999-12-22 Carl Zeiss Method for correcting rotationally asymmetric imaging aberrations
EP1376192A2 (en) * 2002-06-20 2004-01-02 Nikon Corporation Adaptive optic with discrete actuators for continuous deformation of a deformable mirror system
JP2005140999A (en) * 2003-11-06 2005-06-02 Nikon Corp Optical system, adjustment method of optical system, exposure device and exposure method
DE102005062401A1 (en) * 2005-12-23 2007-06-28 Carl Zeiss Smt Ag Mirror`s imaging characteristics variation device for projection exposure system, has actuators formed such that changeable forces are introduced in mirror by variation in temperature, where forces lead to deformation of mirror surface

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4505535A (en) 1982-02-06 1985-03-19 Barr & Stroud Limited Infrared objective lens systems
JPS6197608A (en) 1984-10-17 1986-05-16 Canon Inc Lens holding part
GB9809739D0 (en) 1998-05-08 1998-07-08 Pilkington Perkin Elmer Ltd Afocal telescope
DE19956353C1 (en) * 1999-11-24 2001-08-09 Zeiss Carl Optical arrangement
JP2005062632A (en) 2003-08-19 2005-03-10 Konica Minolta Opto Inc Lens system
DE102006059091B4 (en) * 2005-12-16 2011-03-31 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Micro-optical reflective component and its use

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4872743A (en) * 1983-04-18 1989-10-10 Canon Kabushiki Kaisha Varifocal optical element
EP0678768A2 (en) * 1994-04-22 1995-10-25 Canon Kabushiki Kaisha Projection exposure apparatus and microdevice manufacturing method
EP0965871A1 (en) * 1998-06-20 1999-12-22 Carl Zeiss Method for correcting rotationally asymmetric imaging aberrations
EP1376192A2 (en) * 2002-06-20 2004-01-02 Nikon Corporation Adaptive optic with discrete actuators for continuous deformation of a deformable mirror system
JP2005140999A (en) * 2003-11-06 2005-06-02 Nikon Corp Optical system, adjustment method of optical system, exposure device and exposure method
DE102005062401A1 (en) * 2005-12-23 2007-06-28 Carl Zeiss Smt Ag Mirror`s imaging characteristics variation device for projection exposure system, has actuators formed such that changeable forces are introduced in mirror by variation in temperature, where forces lead to deformation of mirror surface

Also Published As

Publication number Publication date
DE102007051291B4 (en) 2010-02-11
DE102007051291A1 (en) 2009-04-30
WO2009052819A9 (en) 2009-09-24
WO2009052819A2 (en) 2009-04-30

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