WO2009050240A1 - Transient plasma ball generation system at long distance - Google Patents

Transient plasma ball generation system at long distance Download PDF

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Publication number
WO2009050240A1
WO2009050240A1 PCT/EP2008/063978 EP2008063978W WO2009050240A1 WO 2009050240 A1 WO2009050240 A1 WO 2009050240A1 EP 2008063978 W EP2008063978 W EP 2008063978W WO 2009050240 A1 WO2009050240 A1 WO 2009050240A1
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WO
WIPO (PCT)
Prior art keywords
plasma
plasma ball
gas
ball generation
generation device
Prior art date
Application number
PCT/EP2008/063978
Other languages
French (fr)
Inventor
Christophe Cachoncinlle
Raymond Viladrosa
Eric Robert
Jean-Michel Pouvesle
Ahmed Khacef
Sébastien DOZIAS
Original Assignee
Centre National De La Recherche Scientifique (Cnrs)
Universite D'orleans
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National De La Recherche Scientifique (Cnrs), Universite D'orleans filed Critical Centre National De La Recherche Scientifique (Cnrs)
Priority to JP2010529386A priority Critical patent/JP2011501861A/en
Priority to US12/738,072 priority patent/US8482206B2/en
Priority to EP08838688.3A priority patent/EP2208404B1/en
Publication of WO2009050240A1 publication Critical patent/WO2009050240A1/en

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/30—Medical applications

Definitions

  • the invention concerns a new device based on very short pulsed discharges, generating plasmas balls and plumes over very long distances (up to several meters). These plasma balls are travelling in dielectric guide at the end of which there is generation of an apparent plasma plume like zone (which shape and intensity depend on the discharge repetition rate) wherein secondary mixture plasma can be produced close to a given surface by adding other gas fluxes in the main gas stream.
  • the plasmas balls can be generated in gases at a repetition rate in the range from single shot to multi-kilo hertz.
  • the invention relates to an apparatus generating on very short pulsed discharge basis plasma balls and plumes at long distances and under atmospheric pressure.
  • Plasma is typically an ionised gas.
  • the term "ionised” refers to presence of free electrons, which are not bound to an atom or molecule. The free electrons make the plasma conductive so that it responds strongly to electromagnetic fields.
  • Plasma is commonly used in plasma displays (including TVs), fluorescent lamps (low energy lighting), neon signs, fusion energy research, electric arc in an arc lamp, arc welder or plasma torch, etch dielectric layers in the production of integrated circuits.
  • plasma is generated by a periodical signal (for example a sinusoidal signal). But in this case the generation can be controlled (triggered in a single shot for example).
  • the present invention concerns a plasma generation system that allows control and trigger of the generated plasma.
  • the present invention also includes an apparatus that can generate plasma balls moving at very high speeds over distances of up to several meters in gas pressures ranging from one atmosphere (or less) to several atmospheres and decoupled from original plasma.
  • the plasma travels in a guide that may be of any shape or in an open gas volume (for example in open air).
  • Another aspect of the invention is to provide an apparatus generating atmospheric plasma plumes, having a flexible extension that can be easily held in hand and whose flexibility allows access in difficult zones (for example medical treatment in difficult access zones).
  • Yet another aspect of the invention is to generate plasma plumes over long distances and to allow modifications of plasma plumes characteristics.
  • Still another aspect of the invention is to provide an ultra- fast-high- voltage plasma switch with a high or low current (switching time of less than several nanoseconds) controlled remotely.
  • a plasma ball generation device comprising a dielectric barrier, the dielectric barrier comprising: a discharge cell made entirely in insulating materials, - two or more electrodes arranged in the discharge cell, the discharge cell being filled with high pressure gas and wherein a electrical discharge is generated between the two electrodes, the discharge duration being sub-microsecond.
  • the invention has at least one of the following features: - the discharge duration is sub-nanoseconds, an outlet of the cell is connected to an insulating guide, the guide comprises a secondary material inlet,
  • the guide comprises dielectric wall
  • the cell comprises a gas inlet connected with a gas source
  • - at least one of the electrodes is connected to the gas through a dielectric barrier
  • both of the electrodes are connected to the gas through a dielectric barrier, at least one of the electrodes is split in several pieces to enable a synchronisation.
  • the invention also concerns an ultra-fast switch device comprising: a plasma ball generation device according to the invention,
  • FIG. 1 is a schematic representation of an embodiment of the present invention
  • FIG. 2a and 2b are schematic representations of a second embodiment of the present invention
  • FIG. 3 a and 3b are schematic representations, explaining a plasma ball generation through a dielectric wall according the present invention
  • FIG. 4 is a schematic representation, explaining a plasma ball generation in a parallel guide according the present invention.
  • FIG. 5a to 5c are schematic representations of the discharge cell according the present invention,
  • FIG. 6 is a schematic representation of a third embodiment of the present invention.
  • the system consists of a generating apparatus and a flexible dielectric guide, whose length can vary from a few centimetres to several meters.
  • a grip system can be fixed so that the guide can be held in hand or can be mechanically manipulated.
  • the generating apparatus consists of an electric discharge 1 comprising a high-pressure discharge cell 10 (few hundred Torr to a few thousand Torr) made entirely in insulating materials.
  • the cell 10 is filled with gas 13 provided by a gas inlet 2a connected with a gas source 2, which can be of any type of gas.
  • the gas is a mix gas with elements chosen among noble gas, specially neon or helium.
  • the discharge 1 also comprises electrodes 14a and 14b connected to a potential 12 and to a potential 11 with a high voltage (positive or negative) between them.
  • the discharge configuration is either a direct discharge through metallic electrodes 14a and 14b or any of the two following so called dielectric barrier setup (DBD standing for Dielectric Barrier Discharge): double barrier discharge cell, where both of the metallic electrodes 14a and 14b are connected to the gas through a dielectric barrier 50, and single barrier discharge, where only one of the electrodes 14a is covered by a dielectric barrier layer 50.
  • DBD standing for Dielectric Barrier Discharge double barrier discharge cell, where both of the metallic electrodes 14a and 14b are connected to the gas through a dielectric barrier 50
  • single barrier discharge where only one of the electrodes 14a is covered by a dielectric barrier layer 50.
  • One electrode 14b (or both) can be split in several pieces so as to enable a synchronisation (electrode pieces powered one after the other) trough the discharge cell 10.
  • Electrodes also can be split in several pieces to layout pieces around the cell 10.
  • the discharge 1 is controlled by a control system 5 to have a very high electric field and a voltage rising (or a voltage dropping) very quickly (sub-microsecond and preferably from nanoseconds to ten nanoseconds) from null to few tens of kilo volt. In consequence, an extremely fast ionization front wave 6 is created inside the gas 13.
  • the discharge cell 10 is pulsed powered by sub-microsecond voltage waveforms, having a fast rising voltage edge. This later condition is essential for the efficient generation of high speed ionization front wave 6.
  • the discharge can be operated in single shot mode (single voltage pulse), in repetitive mode up to high frequency regimes (in the kHz range), and in burst mode (a few voltage pulses delivered at very high frequency, multi kHz range).
  • the system 5 can control the energy released. This is not the case of conventional devices that create atmospheric plasma plumes: they work on repetitive patterns at very high frequency, but neither in single shot nor low frequency.
  • the plasma ball production is controlled through the pulse forming setup and can be synchronized with a jitter as low as a few nanoseconds with any other machine, eventually a second plasma ball generator.
  • This wave of ionization 6 moves very quickly and the speed depends on the concentration obtained in the electronic environment.
  • This ionization wave 6 involves plasma 7.
  • the plasma duration depends on the conditions under which it has been created. It is pretty much equal to the duration of the high- voltage discharge.
  • a plasma "ball" 4 can circulate into the guide 15.
  • the guide 15 acts as a guide for plasma balls and, after a course of any form, to bring it to a desired location.
  • the combination between the discharge barrier (formed by the discharge cell and the electrodes) and the guide, the discharge cell being filled with high pressure gas and a pulsed electrical discharge being generated between the two electrodes, allows generating plasma balls moving at very high speeds over distances of up to several meters.
  • created plasma ball 4 is "autonomous" meaning that it does not depend electrically on original plasma 7 anymore.
  • the plasma ball 4 travels independently from the original plasma 7 generated in the discharge cell 10.
  • the plasma ball is thus electrically insulated from the high voltage plasma generated.
  • the plasma ball is first likely to travel through the gas volume inside of the dielectric guide connected with the plasma discharge cell 10. It has to be noted that these plasma balls 4 can be generated at a pressure of several atmospheres (or at a very low pressure). In neon, depending on conditions of discharge (energy injected in the plasma source, gas pressure, gas flow and distance from original plasma) plasma ball 4 speed may range from lOkm/s to 1000 km/s.
  • a conductive element can be connected to the ground potential (or a predetermined potential) at the desired distance.
  • the ball properties, time duration and propagation speed, can be controlled by the design of the discharge cell.
  • the length of the discharge cell or the pulse power waveform temporal profile can for instance be shaped for the production of a specific plasma ball.
  • a plasma ball 4 When a plasma ball 4 is released to open air, it generates a plasma plume 16 that can reach several centimetres, depending on the conditions of discharge. In fact, when the plasma ball 4 comes out of the dielectric guide 15, it expands in a mixture of the gas filling the guide and ambient air and generates a reactive plasma plume 16.
  • the plasma plume 16 can thus be produced at large distances from the discharge cell 10 by the use of an easy-to-handle dielectric guide.
  • the development of a cold plasma plume at atmospheric pressure may find applications in medicine, biology, decontamination, sterilisation and plasma-surface process.
  • the short duration and high speed plasma ball may also be of interest for the development of a new plasma based high voltage switch for pulsed power technologies as we will see later.
  • the plasma plume can be released directly outside the discharge cell (without any guide 15).
  • the gas can be static or dynamic depending on its flow.
  • Plasma balls and plumes characteristics depend on gas flow.
  • the plasma ball 4 may interact with another plasma ball, or with various materials (gas, fluid, liquid, powder, particles,...), before giving birth to the plasma plume 16.
  • the plasma plume 16 may contain reactive species matched to a specific application.
  • the guide 15 can be equipped with a secondary material inlet 3 which allows modifications of the plasma composition (chemical composition and / or physical characteristics) according to the needs or the application.
  • the apparatus comprises two electrodes 21a and 21b that allow above-described high-speed plasma balls 4 to be used to close remotely an electrical circuit that can involve strong currents and high voltages.
  • the plasma balls 4 are used to strongly drop resistance between the electrical contacts or electrodes 21a and 21b.
  • the switching time is less than three nanoseconds. This system allows remote switching circuits involving high currents (several kA) with no electrical coupling with the trigger element.
  • the gas in the dielectric guide and the switch guide is the same, but it can also work with two different gases.
  • the ionisation wave can still go through a thin dielectric wall 18, insulating the gas from the generator and gas of the switch.
  • This double guide system works also for a plumes generation system as described previously.
  • a ball of plasma 20 can create another ball of plasma 23 in another gas inside another dielectric guide 22 in parallel to the first dielectric guide 19.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Electrotherapy Devices (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

The invention concerns a new device based on very short pulsed discharges, generating plasmas balls and plumes over very long distances (up to several meters). These plasma balls are travelling in dielectric guide at the end of which there is generation of an apparent plasma plume like zone (which shape and intensity depend on the discharge repetition rate) wherein secondary mixture plasma can be produced close to a given surface by adding other gas fluxes in the main gas stream. The plasmas balls can be generated in gases at a repetition rate in the range from single shot to multi-kilohertz.

Description

TRANSIENT PLASMA BALL GENERATION SYSTEM AT LONG DISTANCE
ABSTRACT
The invention concerns a new device based on very short pulsed discharges, generating plasmas balls and plumes over very long distances (up to several meters). These plasma balls are travelling in dielectric guide at the end of which there is generation of an apparent plasma plume like zone (which shape and intensity depend on the discharge repetition rate) wherein secondary mixture plasma can be produced close to a given surface by adding other gas fluxes in the main gas stream. The plasmas balls can be generated in gases at a repetition rate in the range from single shot to multi-kilo hertz.
FIELD OF THE INVENTION
The invention relates to an apparatus generating on very short pulsed discharge basis plasma balls and plumes at long distances and under atmospheric pressure.
BACKGROUND OF THE INVENTION
Plasma is typically an ionised gas. The term "ionised" refers to presence of free electrons, which are not bound to an atom or molecule. The free electrons make the plasma conductive so that it responds strongly to electromagnetic fields.
Plasma is commonly used in plasma displays (including TVs), fluorescent lamps (low energy lighting), neon signs, fusion energy research, electric arc in an arc lamp, arc welder or plasma torch, etch dielectric layers in the production of integrated circuits. Usually plasma is generated by a periodical signal (for example a sinusoidal signal). But in this case the generation can be controlled (triggered in a single shot for example).
Among the new plasma technology applications, plasma for medicine and biology are the most rising. The demonstration of spectacular effects in the treatment of diseases of the skin or very encouraging results on changes in the behaviour of the tumor cells are in the process of literally explode research in this area, like all processes concerning the processing of materials in the framework of the implementation of biocompatible surfaces. For these reasons, there is an increase interest for generation of atmospheric plasma plumes or "needles" for use in sterilization and decontamination, skin and tumor treatment, or dental care. In most cases the discharge device generating the plasma medium is at short distances of several centimetres or very close to the surface to be treated due to plasma production (direct DBD) or due to the rather rapid extinction of the plasma plume travelling in air.
SUMMARY OF THE INVENTION
The present invention concerns a plasma generation system that allows control and trigger of the generated plasma.
The present invention also includes an apparatus that can generate plasma balls moving at very high speeds over distances of up to several meters in gas pressures ranging from one atmosphere (or less) to several atmospheres and decoupled from original plasma.
The plasma travels in a guide that may be of any shape or in an open gas volume (for example in open air).
Another aspect of the invention is to provide an apparatus generating atmospheric plasma plumes, having a flexible extension that can be easily held in hand and whose flexibility allows access in difficult zones (for example medical treatment in difficult access zones).
Yet another aspect of the invention is to generate plasma plumes over long distances and to allow modifications of plasma plumes characteristics.
Still another aspect of the invention is to provide an ultra- fast-high- voltage plasma switch with a high or low current (switching time of less than several nanoseconds) controlled remotely.
Other objects, advantages and applications of the present invention will become apparent to those skilled in the art when the following description of the best mode contemplated for practicing the invention is read in conjunction with the accompanying drawings. The present invention accomplishes these objects by providing a plasma ball generation device comprising a dielectric barrier, the dielectric barrier comprising: a discharge cell made entirely in insulating materials, - two or more electrodes arranged in the discharge cell, the discharge cell being filled with high pressure gas and wherein a electrical discharge is generated between the two electrodes, the discharge duration being sub-microsecond.
Preferably but optionally, the invention has at least one of the following features: - the discharge duration is sub-nanoseconds, an outlet of the cell is connected to an insulating guide, the guide comprises a secondary material inlet,
- the guide comprises dielectric wall, the cell comprises a gas inlet connected with a gas source, - at least one of the electrodes is connected to the gas through a dielectric barrier,
- both of the electrodes are connected to the gas through a dielectric barrier, at least one of the electrodes is split in several pieces to enable a synchronisation.
The invention also concerns an ultra-fast switch device comprising: a plasma ball generation device according to the invention,
- two electrodes arranged along the guide so as to be electrically connected by a plasma ball generated by the plasma ball generation inside the guide.
BRIEF DESCRIPTION OF THE DRAWINGS
The description herein makes reference to the accompanying drawings wherein like reference numerical refer to like apparatus elements throughout the several views, and wherein:
FIG. 1 is a schematic representation of an embodiment of the present invention,
FIG. 2a and 2b are schematic representations of a second embodiment of the present invention, FIG. 3 a and 3b are schematic representations, explaining a plasma ball generation through a dielectric wall according the present invention,
FIG. 4 is a schematic representation, explaining a plasma ball generation in a parallel guide according the present invention. FIG. 5a to 5c are schematic representations of the discharge cell according the present invention, FIG. 6 is a schematic representation of a third embodiment of the present invention.
DESRIPTION OF THE PREFERRED EMBODIMENTS
The system consists of a generating apparatus and a flexible dielectric guide, whose length can vary from a few centimetres to several meters. At its end, a grip system can be fixed so that the guide can be held in hand or can be mechanically manipulated.
In reference to figure 1, the generating apparatus consists of an electric discharge 1 comprising a high-pressure discharge cell 10 (few hundred Torr to a few thousand Torr) made entirely in insulating materials. The cell 10 is filled with gas 13 provided by a gas inlet 2a connected with a gas source 2, which can be of any type of gas. Advantageously the gas is a mix gas with elements chosen among noble gas, specially neon or helium. The discharge 1 also comprises electrodes 14a and 14b connected to a potential 12 and to a potential 11 with a high voltage (positive or negative) between them.
In reference to figures 5a to 5c, the discharge configuration is either a direct discharge through metallic electrodes 14a and 14b or any of the two following so called dielectric barrier setup (DBD standing for Dielectric Barrier Discharge): double barrier discharge cell, where both of the metallic electrodes 14a and 14b are connected to the gas through a dielectric barrier 50, and single barrier discharge, where only one of the electrodes 14a is covered by a dielectric barrier layer 50. One electrode 14b (or both) can be split in several pieces so as to enable a synchronisation (electrode pieces powered one after the other) trough the discharge cell 10.
Electrodes also can be split in several pieces to layout pieces around the cell 10.
The discharge 1 is controlled by a control system 5 to have a very high electric field and a voltage rising (or a voltage dropping) very quickly (sub-microsecond and preferably from nanoseconds to ten nanoseconds) from null to few tens of kilo volt. In consequence, an extremely fast ionization front wave 6 is created inside the gas 13.
Thus the discharge cell 10 is pulsed powered by sub-microsecond voltage waveforms, having a fast rising voltage edge. This later condition is essential for the efficient generation of high speed ionization front wave 6. The discharge can be operated in single shot mode (single voltage pulse), in repetitive mode up to high frequency regimes (in the kHz range), and in burst mode (a few voltage pulses delivered at very high frequency, multi kHz range).
In that way, the system 5 can control the energy released. This is not the case of conventional devices that create atmospheric plasma plumes: they work on repetitive patterns at very high frequency, but neither in single shot nor low frequency. The plasma ball production is controlled through the pulse forming setup and can be synchronized with a jitter as low as a few nanoseconds with any other machine, eventually a second plasma ball generator.
This wave of ionization 6 moves very quickly and the speed depends on the concentration obtained in the electronic environment. This ionization wave 6 involves plasma 7. The plasma duration depends on the conditions under which it has been created. It is pretty much equal to the duration of the high- voltage discharge.
If the end of a guide 15, made of insulating material that can contain or transport gas, is connected to the discharge cell 10 next to the plasma 7, a plasma "ball" 4 can circulate into the guide 15. The guide 15 acts as a guide for plasma balls and, after a course of any form, to bring it to a desired location.
The combination between the discharge barrier (formed by the discharge cell and the electrodes) and the guide, the discharge cell being filled with high pressure gas and a pulsed electrical discharge being generated between the two electrodes, allows generating plasma balls moving at very high speeds over distances of up to several meters.
Once launched, created plasma ball 4 is "autonomous" meaning that it does not depend electrically on original plasma 7 anymore. Along the output guide 15, the plasma ball 4 travels independently from the original plasma 7 generated in the discharge cell 10. The plasma ball is thus electrically insulated from the high voltage plasma generated. The plasma ball is first likely to travel through the gas volume inside of the dielectric guide connected with the plasma discharge cell 10. It has to be noted that these plasma balls 4 can be generated at a pressure of several atmospheres (or at a very low pressure). In neon, depending on conditions of discharge (energy injected in the plasma source, gas pressure, gas flow and distance from original plasma) plasma ball 4 speed may range from lOkm/s to 1000 km/s.
Insofar as the plasma does not meet conductive elements, it can move into the environment up to its auto-extinction. To control the plasma in a course of given length, a conductive element can be connected to the ground potential (or a predetermined potential) at the desired distance.
The ball properties, time duration and propagation speed, can be controlled by the design of the discharge cell. The length of the discharge cell or the pulse power waveform temporal profile can for instance be shaped for the production of a specific plasma ball.
When a plasma ball 4 is released to open air, it generates a plasma plume 16 that can reach several centimetres, depending on the conditions of discharge. In fact, when the plasma ball 4 comes out of the dielectric guide 15, it expands in a mixture of the gas filling the guide and ambient air and generates a reactive plasma plume 16. The plasma plume 16 can thus be produced at large distances from the discharge cell 10 by the use of an easy-to-handle dielectric guide. The development of a cold plasma plume at atmospheric pressure may find applications in medicine, biology, decontamination, sterilisation and plasma-surface process. The short duration and high speed plasma ball may also be of interest for the development of a new plasma based high voltage switch for pulsed power technologies as we will see later. In reference to figure 6, the plasma plume can be released directly outside the discharge cell (without any guide 15).
The gas can be static or dynamic depending on its flow. Plasma balls and plumes characteristics (speed, shape, projection distance) depend on gas flow.
Moreover, the plasma ball 4 may interact with another plasma ball, or with various materials (gas, fluid, liquid, powder, particles,...), before giving birth to the plasma plume 16. In this way, the plasma plume 16 may contain reactive species matched to a specific application. So the guide 15 can be equipped with a secondary material inlet 3 which allows modifications of the plasma composition (chemical composition and / or physical characteristics) according to the needs or the application.
In reference in figures 2a and 2b, the apparatus comprises two electrodes 21a and 21b that allow above-described high-speed plasma balls 4 to be used to close remotely an electrical circuit that can involve strong currents and high voltages. The plasma balls 4 are used to strongly drop resistance between the electrical contacts or electrodes 21a and 21b. The switching time is less than three nanoseconds. This system allows remote switching circuits involving high currents (several kA) with no electrical coupling with the trigger element.
In the above-described case, the gas in the dielectric guide and the switch guide is the same, but it can also work with two different gases. In reference to the figures 3a and 3b, the ionisation wave can still go through a thin dielectric wall 18, insulating the gas from the generator and gas of the switch. This double guide system works also for a plumes generation system as described previously.
It creates a plasma ball in the switching guide 19 leading to the same result than previously. This allows choosing the gas according to switch voltages. In reference to figure 4, a ball of plasma 20 can create another ball of plasma 23 in another gas inside another dielectric guide 22 in parallel to the first dielectric guide 19.
While the invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not to be limited to the disclosed embodiments but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of appended claims, which scope is to be accorded the broadest interpretation so as to en compass all such modifications and equivalent structures as is permitted under the law.

Claims

1. A plasma ball generation device comprising a dielectric barrier, the dielectric barrier comprising : - a discharge cell made entirely in insulating materials,
- two or more electrodes arranged in the discharge cell,
- the discharge cell being filled with high pressure gas and wherein a electrical discharge is generated between the two electrodes, the discharge duration being sub-microsecond.
2. The plasma ball generation device according to claim 1, wherein the discharge duration is subnanoseconds.
3. The plasma ball generation device according to claim 1 or 2, wherein an outlet of the cell is connected to an insulating guide.
4. The plasma ball generation device according to claim 3, wherein the guide comprises a secondary material inlet.
5. The plasma ball generation device according to anyone of claims 3 to 4, wherein the guide comprises dielectric wall.
6. The plasma ball generation device according to anyone of claims 1 to 5, wherein the cell comprises a gas inlet connected with a gas source.
7. The plasma ball generation device according to anyone of claims 1 to 6, wherein at least one of the electrodes is connected to the gas through a dielectric barrier.
8. The plasma ball generation device according to claim 7, wherein both of the electrodes are connected to the gas through a dielectric barrier.
9. The plasma ball generation device according to anyone of claims 1 to 8, wherein at least one of the electrodes is split in several pieces to enable a synchronisation.
10. An ultra- fast switch device comprising a plasma ball generation device according to anyone of the claims 3 to 9, - two electrodes arranged along the guide so as to be electrically connected by a plasma ball generated by the plasma ball generation inside the guide.
PCT/EP2008/063978 2007-10-16 2008-10-16 Transient plasma ball generation system at long distance WO2009050240A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010529386A JP2011501861A (en) 2007-10-16 2008-10-16 Long-range transient plasma ball generation system
US12/738,072 US8482206B2 (en) 2007-10-16 2008-10-16 Transient plasma ball generation system at long distance
EP08838688.3A EP2208404B1 (en) 2007-10-16 2008-10-16 Transient plasma ball generation system at long distance

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US99908307P 2007-10-16 2007-10-16
US60/999,083 2007-10-16

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Publication number Priority date Publication date Assignee Title
WO2011092186A1 (en) 2010-01-26 2011-08-04 Leibniz-Institut Für Plasmaforschung Und Technologie E. V. Device and method for generating an electrical discharge in hollow bodies
WO2011091842A1 (en) 2010-01-26 2011-08-04 Leibniz-Institut Für Plasmaforschung Und Technologie E. V. Device and method for dry-cleaning, activating, coating, modifying, and biologically decontaminating the inner walls of hoses, pipes, and other hollow bodies
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WO2016083539A1 (en) 2014-11-26 2016-06-02 Centre National De La Recherche Scientifique (Cnrs) Method and device for generating a plurality of cold-plasma jets at atmospheric pressure
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US9498637B2 (en) * 2014-05-30 2016-11-22 Plasmology4, Inc. Wearable cold plasma system
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WO2022240706A1 (en) * 2021-05-08 2022-11-17 Perriquest Defense Research Enterprises, Llc Plasma engine using reactive species

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6406759B1 (en) * 1998-01-08 2002-06-18 The University Of Tennessee Research Corporation Remote exposure of workpieces using a recirculated plasma
EP1383359A2 (en) * 2002-07-19 2004-01-21 Fuji Photo Film B.V. Method and arrangement for treating a substrate with an atmospheric pressure glow plasma (APG)
US6831421B1 (en) * 2003-03-24 2004-12-14 The United States Of America As Represented By The Secretary Of The Air Force Shunt-induced high frequency excitation of dielectric barrier discharges
WO2006048649A1 (en) * 2004-11-05 2006-05-11 Dow Corning Ireland Limited Plasma system

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5075594A (en) * 1989-09-13 1991-12-24 Hughes Aircraft Company Plasma switch with hollow, thermionic cathode
EP0586370B1 (en) * 1991-05-28 1997-04-02 KONKOLA, Seppo Taneli A method for generating and exploiting a plasma ball or a similar phenomenon in a chamber and the chamber
JP3147137B2 (en) * 1993-05-14 2001-03-19 セイコーエプソン株式会社 Surface treatment method and device, semiconductor device manufacturing method and device, and liquid crystal display manufacturing method
JP3972393B2 (en) * 1995-12-19 2007-09-05 セイコーエプソン株式会社 Surface treatment method and apparatus, piezoelectric element manufacturing method, inkjet printhead manufacturing method, liquid crystal panel manufacturing method, and microsampling method
JP2001357999A (en) * 2000-06-15 2001-12-26 Yoshihiko Otsuki Plasma generation device
JP2003036996A (en) * 2001-07-23 2003-02-07 Kikuchi Jun Microplasma generator of parallel flat plate volume coupling type
TWI315966B (en) * 2002-02-20 2009-10-11 Panasonic Elec Works Co Ltd Plasma processing device and plasma processing method
JP4546032B2 (en) * 2002-03-19 2010-09-15 パナソニック株式会社 Plasma processing apparatus and method
JP4506110B2 (en) * 2003-06-26 2010-07-21 コニカミノルタホールディングス株式会社 Thin film forming method and thin film manufacturing apparatus
EP1743351B1 (en) * 2004-03-24 2014-06-18 Richard Auchterlonie Pulsed power system including a plasma opening switch
JP2005332783A (en) * 2004-05-21 2005-12-02 Sekisui Chem Co Ltd Plasma treatment device and plasma treatment method
JP4475517B2 (en) * 2004-12-10 2010-06-09 シャープ株式会社 Plastic waste material recycling method, plastic molded body manufacturing method and plastic molded body, and plastic recycling apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6406759B1 (en) * 1998-01-08 2002-06-18 The University Of Tennessee Research Corporation Remote exposure of workpieces using a recirculated plasma
EP1383359A2 (en) * 2002-07-19 2004-01-21 Fuji Photo Film B.V. Method and arrangement for treating a substrate with an atmospheric pressure glow plasma (APG)
US6831421B1 (en) * 2003-03-24 2004-12-14 The United States Of America As Represented By The Secretary Of The Air Force Shunt-induced high frequency excitation of dielectric barrier discharges
WO2006048649A1 (en) * 2004-11-05 2006-05-11 Dow Corning Ireland Limited Plasma system

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011092186A1 (en) 2010-01-26 2011-08-04 Leibniz-Institut Für Plasmaforschung Und Technologie E. V. Device and method for generating an electrical discharge in hollow bodies
WO2011091842A1 (en) 2010-01-26 2011-08-04 Leibniz-Institut Für Plasmaforschung Und Technologie E. V. Device and method for dry-cleaning, activating, coating, modifying, and biologically decontaminating the inner walls of hoses, pipes, and other hollow bodies
JP2013519188A (en) * 2010-01-26 2013-05-23 ライプニッツ−インスティテュート ファー プラズマフォーチュング ウント テクノロジー イー．ヴイ． Apparatus and method for generating discharge in hollow body
CN104602590A (en) * 2012-03-30 2015-05-06 德普伊新特斯产品有限责任公司 Methods and devices for tissue retraction
US9521997B2 (en) 2012-03-30 2016-12-20 DePuy Synthes Products, Inc. Methods and devices for tissue retraction
WO2016083539A1 (en) 2014-11-26 2016-06-02 Centre National De La Recherche Scientifique (Cnrs) Method and device for generating a plurality of cold-plasma jets at atmospheric pressure
WO2016108125A1 (en) 2014-12-30 2016-07-07 Gea Procomac S.P.A. Apparatus and method for filling containers
WO2016108124A1 (en) 2014-12-30 2016-07-07 Gea Procomac S.P.A. Process station for a parison or a container made of thermoplastic material, apparatus for processing parisons or containers, production and packaging line for producing and packaging the containers and method for producing and packaging containers
US10287152B2 (en) 2014-12-30 2019-05-14 Gea Procomac S.P.A. Apparatus and method for filling containers
US10800088B2 (en) 2014-12-30 2020-10-13 Gea Procomac S.P.A. Process station for a parison or a container made of thermoplastic material, apparatus for processing parisons or containers, production and packaging line for producing and packaging the containers and method for producing and packaging containers
EP3685779A1 (en) 2019-01-24 2020-07-29 Universite Libre De Bruxelles Device for cold plasma treatment, cold plasma endoscopic system, and method for generating and transporting a cold plasma
WO2020152355A1 (en) 2019-01-24 2020-07-30 Universite Libre De Bruxelles Device for cold plasma treatment and cold plasma endoscopic system
WO2023194563A1 (en) 2022-04-08 2023-10-12 Centre National De La Recherche Scientifique System and method for surface treatment of materials
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