WO2009038579A3 - Thermoelastic self-actuation in piezoresistive resonators - Google Patents

Thermoelastic self-actuation in piezoresistive resonators Download PDF

Info

Publication number
WO2009038579A3
WO2009038579A3 PCT/US2007/078886 US2007078886W WO2009038579A3 WO 2009038579 A3 WO2009038579 A3 WO 2009038579A3 US 2007078886 W US2007078886 W US 2007078886W WO 2009038579 A3 WO2009038579 A3 WO 2009038579A3
Authority
WO
WIPO (PCT)
Prior art keywords
thermoelastic
actuation
self
resonator
piezoresistive resonators
Prior art date
Application number
PCT/US2007/078886
Other languages
French (fr)
Other versions
WO2009038579A2 (en
Inventor
Igor Bargatin
Inna Kozinsky
Michael L. Roukes
John Sequoyah Aldridge
Jessica L. Arlett
Edward B. Myers
Original Assignee
California Institute Of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by California Institute Of Technology filed Critical California Institute Of Technology
Priority to PCT/US2007/078886 priority Critical patent/WO2009038579A2/en
Publication of WO2009038579A2 publication Critical patent/WO2009038579A2/en
Publication of WO2009038579A3 publication Critical patent/WO2009038579A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

Systems and methods for thermally actuating piezoresistive cantilevers are described. One embodiment includes a nanoelectromechanical resonator connected in at least one location to a substrate, an electrically conductive path formed on the resonator and a signal source connected to the electrically conductive path and configured to provide an oscillating actuation signal capable of exciting a resonant mode in the resonator.
PCT/US2007/078886 2007-09-19 2007-09-19 Thermoelastic self-actuation in piezoresistive resonators WO2009038579A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/US2007/078886 WO2009038579A2 (en) 2007-09-19 2007-09-19 Thermoelastic self-actuation in piezoresistive resonators

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2007/078886 WO2009038579A2 (en) 2007-09-19 2007-09-19 Thermoelastic self-actuation in piezoresistive resonators

Publications (2)

Publication Number Publication Date
WO2009038579A2 WO2009038579A2 (en) 2009-03-26
WO2009038579A3 true WO2009038579A3 (en) 2009-08-27

Family

ID=40468673

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/078886 WO2009038579A2 (en) 2007-09-19 2007-09-19 Thermoelastic self-actuation in piezoresistive resonators

Country Status (1)

Country Link
WO (1) WO2009038579A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11242241B2 (en) * 2015-07-13 2022-02-08 Intrepid Visions Inc. Systems and methods for micro-cantilever actuation by base excitation
CN105223421B (en) * 2015-11-09 2016-08-24 南京信息工程大学 Nano wire huge piezoresistive characteristic measurement apparatus and manufacture method thereof
CN106949910B (en) * 2017-05-09 2023-02-17 沈阳工业大学 Self-driven and self-sensing cantilever beam sensor based on nano composite material
CN111362226B (en) * 2020-03-12 2023-04-28 中国科学院上海微系统与信息技术研究所 Resonant micro-cantilever beam chip and preparation method thereof
CN113739903B (en) * 2021-07-21 2023-03-31 西安交通大学 Silicon carbide vibration sensor and manufacturing method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6722200B2 (en) * 2001-05-04 2004-04-20 California Institute Of Technology Apparatus and method for ultrasensitive nanoelectromechanical mass detection
US20040244488A1 (en) * 2003-04-08 2004-12-09 Hongxing Tang On-chip magnetic force actuation of microcantilevers by coplanar coils
US20060257286A1 (en) * 2003-10-17 2006-11-16 Adams Jesse D Self-sensing array of microcantilevers for chemical detection

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6722200B2 (en) * 2001-05-04 2004-04-20 California Institute Of Technology Apparatus and method for ultrasensitive nanoelectromechanical mass detection
US20040244488A1 (en) * 2003-04-08 2004-12-09 Hongxing Tang On-chip magnetic force actuation of microcantilevers by coplanar coils
US20060257286A1 (en) * 2003-10-17 2006-11-16 Adams Jesse D Self-sensing array of microcantilevers for chemical detection

Also Published As

Publication number Publication date
WO2009038579A2 (en) 2009-03-26

Similar Documents

Publication Publication Date Title
WO2009038579A3 (en) Thermoelastic self-actuation in piezoresistive resonators
ATE455376T1 (en) RECONFIGURABLE CAVITY RESONATOR WITH MOVABLE MICROELECTROMECHANICAL ELEMENTS AS ADJUSTMENT MEANS
WO2007028817A3 (en) Device comprising a piezoacoustic resonator element, method for producing the same and method for outputting a signal depending on a resonant frequency
TW200711298A (en) Small-sized piezoelectric resonator
WO2006098857A3 (en) Temperature compensated oscillator including mems resonator for frequency control
WO2004086027A3 (en) Mechanical resonator
WO2007072408A3 (en) A mems resonator, a method of manufacturing thereof, and a mems oscillator
WO2007023409A3 (en) Acoustic light-emitting device
WO2008054404A3 (en) Resonant vibratory device having high quality factor and methods of fabricating same
WO2009028027A1 (en) Piezoelectric thin film resonator, filter using the resonator, duplexer using the filter, and communication equipment using the filter or the duplexer
WO2007116157A3 (en) Thermal switch
WO2007114950A3 (en) Magnetic drive for high and low temperature mechanical oscillators used in senor applications
TW200644417A (en) Low-voltage MEMS oscillator
ATE453954T1 (en) PIEZOELECTRIC RESONATOR WITH OPTIMIZED MOVEMENT CAPABILITIES
AU2003303133A1 (en) Piezoelectric mems resonator
WO2007127088A3 (en) Pin diode network for multiband rf coupling
TW200644046A (en) Method for manufacturing a film bulk acoustic resonator
EP1968127A4 (en) Piezoelectric ceramic, process for producing said piezoelectric ceramic, piezoelectric resonator, and process for producing piezoelectric resonator
WO2008075208A3 (en) An antenna arrangement
TW200746628A (en) Coupled resonator for regulating system
WO2009008915A3 (en) Tunable bio-functionalized nanoelectromechanical systems having superhydrophobic surfaces for use in fluids
WO2005046108A3 (en) Acoustic wave device with digital data transmission functionality
WO2009041362A1 (en) Logical element
WO2010107211A3 (en) Multi-band antenna device and a communications device employing the same
WO2008133754A3 (en) Serrated mems resonators

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07868340

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 07868340

Country of ref document: EP

Kind code of ref document: A2