WO2009034804A1 - Linear actuator with dustproof mechanism - Google Patents

Linear actuator with dustproof mechanism Download PDF

Info

Publication number
WO2009034804A1
WO2009034804A1 PCT/JP2008/064449 JP2008064449W WO2009034804A1 WO 2009034804 A1 WO2009034804 A1 WO 2009034804A1 JP 2008064449 W JP2008064449 W JP 2008064449W WO 2009034804 A1 WO2009034804 A1 WO 2009034804A1
Authority
WO
WIPO (PCT)
Prior art keywords
ball screw
linear actuator
dustproof
housing member
dustproof mechanism
Prior art date
Application number
PCT/JP2008/064449
Other languages
French (fr)
Japanese (ja)
Inventor
Toshiyuki Aso
Toshiya Tanaka
Norinobu Ogawa
Toshiaki Mizuno
Minoru Tsukada
Yukitoshi Kobayashi
Original Assignee
Thk Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thk Co., Ltd. filed Critical Thk Co., Ltd.
Priority to JP2009532117A priority Critical patent/JP5469459B2/en
Priority to US12/676,474 priority patent/US8272286B2/en
Priority to DE112008002379.4T priority patent/DE112008002379B4/en
Priority to KR1020107005482A priority patent/KR101516456B1/en
Priority to CN2008801067675A priority patent/CN101802455B/en
Publication of WO2009034804A1 publication Critical patent/WO2009034804A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
    • F16H25/2418—Screw seals, wipers, scrapers or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/08—Arrangements for covering or protecting the ways
    • F16C29/082—Arrangements for covering or protecting the ways fixed to the way
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H2025/2031—Actuator casings
    • F16H2025/2034—Extruded frame casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/22—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members
    • F16H25/2204—Screw mechanisms with balls, rollers, or similar members between the co-operating parts; Elements essential to the use of such members with balls
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18568—Reciprocating or oscillating to or from alternating rotary
    • Y10T74/18576—Reciprocating or oscillating to or from alternating rotary including screw and nut
    • Y10T74/18712—Contamination related
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/18—Mechanical movements
    • Y10T74/18568—Reciprocating or oscillating to or from alternating rotary
    • Y10T74/18576—Reciprocating or oscillating to or from alternating rotary including screw and nut
    • Y10T74/18712—Contamination related
    • Y10T74/1872—Imperforate enclosure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transmission Devices (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Provided is a linear actuator with a dustproof mechanism capable of surely fulfilling the dustproof function over the entire stroke range. The linear actuator (100) with a dustproof mechanism comprises a ball screw, a moving stage (4) which has a ball screw nut engaging with the ball screw and can linearly reciprocates in the axial direction of the ball screw in correlation with rotation of the ball screw, a housing member (2) so installed as to cover at least the ball screw, openings (27, 28) formed in the housing member (2) along the movement path of the moving stage (4), and dustproof belts (29, 30) disposed in the housing member (2) for closing the openings (27, 28), respectively. The linear actuator (100) can have a high dustproof performance since it is equipped with end plate covers (105a, 105b) for covering the end sides of the housing member (2).
PCT/JP2008/064449 2007-09-13 2008-08-12 Linear actuator with dustproof mechanism WO2009034804A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2009532117A JP5469459B2 (en) 2007-09-13 2008-08-12 Linear actuator with dustproof mechanism
US12/676,474 US8272286B2 (en) 2007-09-13 2008-08-12 Linear actuator with dustproof mechanism
DE112008002379.4T DE112008002379B4 (en) 2007-09-13 2008-08-12 Linear drive with a dust protection mechanism
KR1020107005482A KR101516456B1 (en) 2007-09-13 2008-08-12 Linear actuator with dustproof mechanism
CN2008801067675A CN101802455B (en) 2007-09-13 2008-08-12 Linear actuator with dustproof mechanism

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007237768 2007-09-13
JP2007-237768 2007-09-13

Publications (1)

Publication Number Publication Date
WO2009034804A1 true WO2009034804A1 (en) 2009-03-19

Family

ID=40451814

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/064449 WO2009034804A1 (en) 2007-09-13 2008-08-12 Linear actuator with dustproof mechanism

Country Status (7)

Country Link
US (1) US8272286B2 (en)
JP (2) JP5469459B2 (en)
KR (1) KR101516456B1 (en)
CN (1) CN101802455B (en)
DE (1) DE112008002379B4 (en)
TW (1) TWI431211B (en)
WO (1) WO2009034804A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011086791A1 (en) * 2010-01-15 2011-07-21 Thk株式会社 Linear actuator equipped with dustproof mechanism
WO2012141222A1 (en) 2011-04-15 2012-10-18 Thk株式会社 Grease composition and motion guiding device lubricated thereby
WO2014061688A1 (en) * 2012-10-17 2014-04-24 Ntn株式会社 Linear motion guide device
CN108568699A (en) * 2017-03-08 2018-09-25 宁波米控机器人科技有限公司 A kind of dust guard for lathe feed screw

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102590955B (en) * 2011-01-18 2014-09-24 富士康(昆山)电脑接插件有限公司 Optical fiber connector
TWM425959U (en) * 2011-12-07 2012-04-01 Univ Nat Formosa Nut structure of ball screw having micro fan
JP2013143824A (en) * 2012-01-11 2013-07-22 Smc Corp Electric actuator
JP5934585B2 (en) * 2012-06-19 2016-06-15 シャープ株式会社 Fluorescence detection device
DE102013100019A1 (en) * 2013-01-02 2014-07-03 Conductix-Wampfler Gmbh Delivery unit for positioning a pantograph unit
CN104750106A (en) * 2013-12-30 2015-07-01 鸿富锦精密工业（深圳）有限公司 Single axis robot
JP6506508B2 (en) * 2014-06-26 2019-04-24 日本トムソン株式会社 Actuator
DE102016219923A1 (en) * 2016-10-13 2018-04-19 Robert Bosch Gmbh Linear movement device with cover plate which has sealing lips
CN106438897A (en) * 2016-11-07 2017-02-22 东莞市汉翔机械设备有限公司 Fully-sealed dustproof screw-slide table structure
CN107327481A (en) * 2017-06-30 2017-11-07 成都福誉科技有限公司 A kind of closed straight line module and preparation method thereof
TWI644033B (en) * 2017-08-10 2018-12-11 銀泰科技股份有限公司 Linear module
KR101956462B1 (en) * 2017-08-16 2019-06-24 에스케이에프코리아(주) Linear module
CN109424709B (en) * 2017-08-31 2022-02-15 上海微电子装备（集团）股份有限公司 Linear module and working method thereof
TWI655375B (en) * 2017-11-23 2019-04-01 上銀科技股份有限公司 Linear module
JP2023104051A (en) * 2022-01-17 2023-07-28 株式会社日立ハイテク Stage device, charged particle beam device, and vacuum device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63172545U (en) * 1987-04-30 1988-11-09
JPH02145235A (en) * 1988-11-28 1990-06-04 Hitachi Electron Eng Co Ltd Linear transfer device for work mechanism
JPH08290384A (en) * 1995-04-18 1996-11-05 Nippon Seiko Kk Direct driven actuator to generate smaller amount of dust
JPH09201002A (en) * 1996-01-19 1997-07-31 Smc Corp Actuator
JP2002206530A (en) * 2000-10-25 2002-07-26 Nippon Thompson Co Ltd Sealing structure of slide device

Family Cites Families (14)

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JPS62175972A (en) * 1986-01-29 1987-08-01 Hitachi Ltd Linear actuator assembly
JPS63172545A (en) 1987-01-10 1988-07-16 Bijikon Kk Card index type contactless selection automatic dialing device
JPH05283509A (en) * 1992-03-31 1993-10-29 Nippon Seiko Kk Dust absorber
DE9211093U1 (en) 1992-08-19 1992-10-22 INA Wälzlager Schaeffler KG, 8522 Herzogenaurach Protective cover for the track and the drive mechanism of a linear guide
JPH07217607A (en) * 1994-02-03 1995-08-15 Smc Corp Positioning device for load
GB2323716B (en) * 1997-02-10 2001-02-07 Matsushita Electric Ind Co Ltd Linear actuator and optical equipment using the same
JP4311801B2 (en) 1999-03-15 2009-08-12 Ｔｈｋ株式会社 Linear actuator with dustproof mechanism
US6460859B1 (en) * 2000-04-12 2002-10-08 Parker-Hannifin Corporation Resilient elastomer and metal retainer gasket for sealing between curved surfaces
EP1229578B1 (en) * 2000-07-03 2011-12-28 Thk Co. Ltd. Linear actuator with dustproof mechanism
US6588289B2 (en) * 2001-07-06 2003-07-08 Danaher Motion Technology, Llc Linear actuator with protective guide chassis enclosing the lead screw
JP2003090411A (en) * 2001-09-19 2003-03-28 Hitachi Electronics Eng Co Ltd Ball screw moving mechanism
JP3750637B2 (en) * 2002-07-12 2006-03-01 日本精工株式会社 Low dust generation linear motion actuator
JP4568497B2 (en) 2003-12-25 2010-10-27 Ｔｈｋ株式会社 Dust-proof actuator and dust-proof motion guide device
JP4452551B2 (en) * 2004-05-11 2010-04-21 日本トムソン株式会社 Low dust generation slide device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63172545U (en) * 1987-04-30 1988-11-09
JPH02145235A (en) * 1988-11-28 1990-06-04 Hitachi Electron Eng Co Ltd Linear transfer device for work mechanism
JPH08290384A (en) * 1995-04-18 1996-11-05 Nippon Seiko Kk Direct driven actuator to generate smaller amount of dust
JPH09201002A (en) * 1996-01-19 1997-07-31 Smc Corp Actuator
JP2002206530A (en) * 2000-10-25 2002-07-26 Nippon Thompson Co Ltd Sealing structure of slide device

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011086791A1 (en) * 2010-01-15 2011-07-21 Thk株式会社 Linear actuator equipped with dustproof mechanism
JP2011144897A (en) * 2010-01-15 2011-07-28 Thk Co Ltd Linear actuator with dust-proof mechanism
CN102713354A (en) * 2010-01-15 2012-10-03 Thk株式会社 Linear actuator equipped with dustproof mechanism
KR101234438B1 (en) * 2010-01-15 2013-02-18 티에치케이 가부시끼가이샤 Linear actuator equipped with dustproof mechanism
CN102713354B (en) * 2010-01-15 2013-09-11 Thk株式会社 Linear actuator equipped with dustproof mechanism
US8650978B2 (en) 2010-01-15 2014-02-18 Thk Co., Ltd. Linear actuator provided with dust-proof mechanism
WO2012141222A1 (en) 2011-04-15 2012-10-18 Thk株式会社 Grease composition and motion guiding device lubricated thereby
WO2014061688A1 (en) * 2012-10-17 2014-04-24 Ntn株式会社 Linear motion guide device
US20150260220A1 (en) * 2012-10-17 2015-09-17 Ntn Corporation Linear motion guide device
US10294989B2 (en) 2012-10-17 2019-05-21 Ntn Corporation Linear motion guide device
US10294990B2 (en) 2012-10-17 2019-05-21 Ntn Corporation Linear motion guide device
CN108568699A (en) * 2017-03-08 2018-09-25 宁波米控机器人科技有限公司 A kind of dust guard for lathe feed screw

Also Published As

Publication number Publication date
CN101802455B (en) 2012-07-04
DE112008002379B4 (en) 2018-07-05
TWI431211B (en) 2014-03-21
TW200925461A (en) 2009-06-16
KR101516456B1 (en) 2015-05-04
JP5469459B2 (en) 2014-04-16
JP2013174356A (en) 2013-09-05
DE112008002379T5 (en) 2010-07-22
JPWO2009034804A1 (en) 2010-12-24
KR20100061474A (en) 2010-06-07
US20100206102A1 (en) 2010-08-19
US8272286B2 (en) 2012-09-25
CN101802455A (en) 2010-08-11
JP5728046B2 (en) 2015-06-03

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