WO2009032820A1 - Silicide thermal heaters for silicon-on-insulator nanophotonic devices - Google Patents
Silicide thermal heaters for silicon-on-insulator nanophotonic devices Download PDFInfo
- Publication number
- WO2009032820A1 WO2009032820A1 PCT/US2008/075060 US2008075060W WO2009032820A1 WO 2009032820 A1 WO2009032820 A1 WO 2009032820A1 US 2008075060 W US2008075060 W US 2008075060W WO 2009032820 A1 WO2009032820 A1 WO 2009032820A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- waveguide
- heating element
- silicon layer
- optical waveguide
- optical
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
- G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12145—Switch
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12147—Coupler
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA2694526A CA2694526A1 (en) | 2007-09-04 | 2008-09-02 | Silicide thermal heaters for silicon-on-insulator nanophotonic devices |
JP2010523201A JP5552052B2 (en) | 2007-09-04 | 2008-09-02 | Silicide thermal heater for silicon-on-insulator nanophotonic devices |
CN200880105657A CN101796442A (en) | 2007-09-04 | 2008-09-02 | Silicide thermal heaters for silicon-on-insulator nanophotonic devices |
EP08799070A EP2185958A4 (en) | 2007-09-04 | 2008-09-02 | Silicide thermal heaters for silicon-on-insulator nanophotonic devices |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/849,591 US8098968B2 (en) | 2007-09-04 | 2007-09-04 | Silicide thermal heaters for silicon-on-insulator nanophotonic devices |
US11/849,591 | 2007-09-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009032820A1 true WO2009032820A1 (en) | 2009-03-12 |
Family
ID=40429319
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2008/075060 WO2009032820A1 (en) | 2007-09-04 | 2008-09-02 | Silicide thermal heaters for silicon-on-insulator nanophotonic devices |
Country Status (7)
Country | Link |
---|---|
US (1) | US8098968B2 (en) |
EP (1) | EP2185958A4 (en) |
JP (1) | JP5552052B2 (en) |
KR (1) | KR20100075464A (en) |
CN (1) | CN101796442A (en) |
CA (1) | CA2694526A1 (en) |
WO (1) | WO2009032820A1 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010117701A3 (en) * | 2009-03-31 | 2010-11-25 | Oracle America, Inc. Formerly Known As Sun Microsystems, Inc. | Optical device with large thermal impedance |
WO2012064472A3 (en) * | 2010-11-12 | 2012-07-05 | Alcatel Lucent | Thermally controlled semiconductor optical waveguide |
WO2016165708A1 (en) * | 2015-04-16 | 2016-10-20 | Technische Universität Berlin | Optoelectronic component having a resonator |
WO2017152256A1 (en) | 2016-03-05 | 2017-09-14 | Huawei Technologies Canada Co., Ltd. | Waveguide crossing having rib waveguides |
GB2571269A (en) * | 2018-02-21 | 2019-08-28 | Rockley Photonics Ltd | Optoelectronic device |
US11262603B2 (en) | 2019-06-13 | 2022-03-01 | Rockley Photonics Limited | Multilayer metal stack heater |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103787268B (en) * | 2014-01-21 | 2016-06-01 | 华进半导体封装先导技术研发中心有限公司 | The manufacture method of a kind of high-speed wideband silicon light pinboard and silicon-based optical interconnection device |
KR102171268B1 (en) | 2014-09-30 | 2020-11-06 | 삼성전자 주식회사 | manufacturing method of Hybrid silicon laser |
US10088697B2 (en) | 2015-03-12 | 2018-10-02 | International Business Machines Corporation | Dual-use electro-optic and thermo-optic modulator |
US9693124B2 (en) * | 2015-06-09 | 2017-06-27 | Oracle International Corporation | Macro-switch with a buffered switching matrix |
US9684191B2 (en) | 2015-11-05 | 2017-06-20 | International Business Machines Corporation | Efficient thermo-optic phase shifters using multi-pass heaters |
US10509244B1 (en) * | 2018-12-11 | 2019-12-17 | Globalfoundries Inc. | Optical switches and routers operated by phase-changing materials controlled by heaters |
US11452848B2 (en) | 2019-04-17 | 2022-09-27 | Bard Access Systems, Inc. | Catheter securement device including extended anchor pad and release liner clasping features |
US10642125B1 (en) | 2019-07-29 | 2020-05-05 | Globalfoundries Inc. | Optical beam steering with directionality provided by switched grating couplers |
US11860412B2 (en) * | 2020-10-27 | 2024-01-02 | Cisco Technology, Inc. | Temperature-stabilized integrated waveguides |
ES2913576B2 (en) | 2020-12-02 | 2022-10-11 | Univ Malaga | SINGLE BEAM SIDE DEFLECTOR, MULTIPLEXER/DEMULTIPLEXER, AND OPTICAL ANTENNA FEED DEVICE INCORPORATING THE DEFLECTOR, AND METHODS USING THEM |
CN112462534B (en) * | 2020-12-21 | 2022-04-29 | 华中科技大学 | Ultra-close range metal electrode thermal modulation phase shifter |
CN113359328A (en) * | 2021-06-28 | 2021-09-07 | 苏州极刻光核科技有限公司 | Thermo-optic phase modulation module and optical modulator |
US11555964B1 (en) | 2021-06-30 | 2023-01-17 | Globalfoundries U.S. Inc. | Optical device with low-loss thermally tunable closed-curve optical waveguide |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002031555A2 (en) | 2000-10-10 | 2002-04-18 | Lightcross, Inc. | Optical attenuator |
US6415066B1 (en) * | 1997-10-16 | 2002-07-02 | Bookham Technology Plc | Thermally isolated silicon layer |
US20030057428A1 (en) | 1998-07-17 | 2003-03-27 | Bookham Technology Plc | Thermo-optic semiconductor device |
US6738543B1 (en) * | 2002-05-30 | 2004-05-18 | E. I. Du Pont De Nemours And Company | Hitless tunable wavelength filters |
US20050084213A1 (en) * | 2003-10-15 | 2005-04-21 | Hamann Hendrik F. | Method and apparatus for thermo-optic modulation of optical signals |
US20060133754A1 (en) | 2004-12-21 | 2006-06-22 | Vipulkumar Patel | Ultra low-loss CMOS compatible silicon waveguides |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4517581A (en) | 1982-11-16 | 1985-05-14 | Itt Industries, Inc. | Photodetector |
EP0233725B1 (en) | 1986-02-18 | 1995-04-19 | Kabushiki Kaisha Toshiba | Opto-Electronic Device and Method for its Manufacture |
JPH04204523A (en) | 1990-11-30 | 1992-07-24 | Omron Corp | Optical waveguide device |
US5726462A (en) | 1996-02-07 | 1998-03-10 | Sandia Corporation | Semiconductor structures having electrically insulating and conducting portions formed from an AlSb-alloy layer |
US6936839B2 (en) | 1996-10-16 | 2005-08-30 | The University Of Connecticut | Monolithic integrated circuit including a waveguide and quantum well inversion channel devices and a method of fabricating same |
JPH10221549A (en) | 1997-02-07 | 1998-08-21 | Hitachi Ltd | Plastic optical-waveguide, and optical switch using it |
CN1285931A (en) * | 1997-11-12 | 2001-02-28 | 布克哈姆技术有限公司 | Optical system and method for changing the lengths of optical paths and the phases of light beams |
EP1018042A1 (en) | 1998-07-24 | 2000-07-12 | Akzo Nobel N.V. | Optical waveguide component |
US6317526B1 (en) * | 1998-12-21 | 2001-11-13 | Fujitsu Limited | Optical phase controller and optical switch |
US6442311B1 (en) | 1999-07-09 | 2002-08-27 | Agere Systems Guardian Corp. | Optical device having modified transmission characteristics by localized thermal treatment |
US6370307B1 (en) | 1999-07-15 | 2002-04-09 | Agere Systems Guardian Corp. | Optical device formed on a substrate with thermal isolation regions formed therein |
JP2001194633A (en) * | 2000-01-14 | 2001-07-19 | Sumitomo Electric Ind Ltd | Optical wave guide circuit device and its manufacturing method |
US6539143B1 (en) | 2000-07-31 | 2003-03-25 | Sarcon Microsystems, Inc. | Optical switching system |
US20020018636A1 (en) * | 2000-08-02 | 2002-02-14 | Gemfire Corporation | Device and method for variable attenuation of an optical channel |
JP2002156537A (en) * | 2000-11-21 | 2002-05-31 | Sumitomo Electric Ind Ltd | Optical waveguide |
US20030121906A1 (en) | 2000-11-29 | 2003-07-03 | Abbott Richard C. | Resistive heaters and uses thereof |
JP2002250905A (en) * | 2000-12-22 | 2002-09-06 | Nec Corp | Optical waveguide device and its manufacturing method |
JP2003021814A (en) * | 2001-07-09 | 2003-01-24 | Communication Research Laboratory | Optical delay multiple circuit |
US7103090B2 (en) * | 2001-08-13 | 2006-09-05 | Mediatek Inc. | Timing estimation of direct sequence spread spectrum communications systems over frequency-selective, slowly fading channels |
US6760496B2 (en) * | 2002-01-31 | 2004-07-06 | Photodigm, Inc. | Inline ferromagnetic-composite isolator and method |
US6823097B2 (en) * | 2002-04-24 | 2004-11-23 | Fujitsu Limited | Optical switching apparatus with divergence correction |
US6999670B1 (en) | 2002-08-27 | 2006-02-14 | Luxtera, Inc. | Active waveguides for optoelectronic devices |
US7136544B1 (en) | 2003-08-15 | 2006-11-14 | Luxtera, Inc. | PN diode optical modulators fabricated in strip loaded waveguides |
JP2005122091A (en) * | 2003-09-26 | 2005-05-12 | Mitsumi Electric Co Ltd | Optical device and optical device unit |
JP2005156855A (en) * | 2003-11-25 | 2005-06-16 | Nec Corp | Multi-channel mach-zehnder interferometer type optical circuit |
US7447395B2 (en) * | 2006-06-15 | 2008-11-04 | Sioptical, Inc. | Silicon modulator offset tuning arrangement |
JP4777170B2 (en) * | 2006-07-20 | 2011-09-21 | 浜松ホトニクス株式会社 | Optical waveguide device |
US7565038B2 (en) * | 2007-01-31 | 2009-07-21 | Alcatel-Lucent Usa Inc. | Thermo-optic waveguide apparatus |
-
2007
- 2007-09-04 US US11/849,591 patent/US8098968B2/en not_active Expired - Fee Related
-
2008
- 2008-09-02 WO PCT/US2008/075060 patent/WO2009032820A1/en active Application Filing
- 2008-09-02 CA CA2694526A patent/CA2694526A1/en not_active Abandoned
- 2008-09-02 JP JP2010523201A patent/JP5552052B2/en not_active Expired - Fee Related
- 2008-09-02 CN CN200880105657A patent/CN101796442A/en active Pending
- 2008-09-02 EP EP08799070A patent/EP2185958A4/en not_active Withdrawn
- 2008-09-02 KR KR1020107006938A patent/KR20100075464A/en not_active Application Discontinuation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6415066B1 (en) * | 1997-10-16 | 2002-07-02 | Bookham Technology Plc | Thermally isolated silicon layer |
US20030057428A1 (en) | 1998-07-17 | 2003-03-27 | Bookham Technology Plc | Thermo-optic semiconductor device |
WO2002031555A2 (en) | 2000-10-10 | 2002-04-18 | Lightcross, Inc. | Optical attenuator |
US6738543B1 (en) * | 2002-05-30 | 2004-05-18 | E. I. Du Pont De Nemours And Company | Hitless tunable wavelength filters |
US20050084213A1 (en) * | 2003-10-15 | 2005-04-21 | Hamann Hendrik F. | Method and apparatus for thermo-optic modulation of optical signals |
US20060133754A1 (en) | 2004-12-21 | 2006-06-22 | Vipulkumar Patel | Ultra low-loss CMOS compatible silicon waveguides |
Non-Patent Citations (1)
Title |
---|
See also references of EP2185958A4 |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010117701A3 (en) * | 2009-03-31 | 2010-11-25 | Oracle America, Inc. Formerly Known As Sun Microsystems, Inc. | Optical device with large thermal impedance |
US9122085B2 (en) | 2010-10-07 | 2015-09-01 | Alcatel Lucent | Thermally controlled semiconductor optical waveguide |
WO2012064472A3 (en) * | 2010-11-12 | 2012-07-05 | Alcatel Lucent | Thermally controlled semiconductor optical waveguide |
WO2016165708A1 (en) * | 2015-04-16 | 2016-10-20 | Technische Universität Berlin | Optoelectronic component having a resonator |
US10025030B2 (en) | 2015-04-16 | 2018-07-17 | Technische Universitaet Berlin | Optoelectronic component having a resonator |
WO2017152256A1 (en) | 2016-03-05 | 2017-09-14 | Huawei Technologies Canada Co., Ltd. | Waveguide crossing having rib waveguides |
EP3405823B1 (en) * | 2016-03-05 | 2023-08-30 | Huawei Technologies Canada Co., Ltd. | Waveguide crossing having rib waveguides |
GB2571269A (en) * | 2018-02-21 | 2019-08-28 | Rockley Photonics Ltd | Optoelectronic device |
GB2571269B (en) * | 2018-02-21 | 2021-07-07 | Rockley Photonics Ltd | Optoelectronic device |
US11209678B2 (en) | 2018-02-21 | 2021-12-28 | Rockley Photonics Limited | Optoelectronic device |
US11815748B2 (en) | 2018-02-21 | 2023-11-14 | Rockley Photonics Limited | Optoelectronic device |
US11262603B2 (en) | 2019-06-13 | 2022-03-01 | Rockley Photonics Limited | Multilayer metal stack heater |
Also Published As
Publication number | Publication date |
---|---|
US20110002576A1 (en) | 2011-01-06 |
CA2694526A1 (en) | 2009-03-12 |
EP2185958A1 (en) | 2010-05-19 |
JP5552052B2 (en) | 2014-07-16 |
US8098968B2 (en) | 2012-01-17 |
JP2011507002A (en) | 2011-03-03 |
EP2185958A4 (en) | 2011-08-03 |
CN101796442A (en) | 2010-08-04 |
KR20100075464A (en) | 2010-07-02 |
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