WO2009019316A3 - Method for forming mems structures comprising narrow gaps - Google Patents

Method for forming mems structures comprising narrow gaps Download PDF

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Publication number
WO2009019316A3
WO2009019316A3 PCT/EP2008/060486 EP2008060486W WO2009019316A3 WO 2009019316 A3 WO2009019316 A3 WO 2009019316A3 EP 2008060486 W EP2008060486 W EP 2008060486W WO 2009019316 A3 WO2009019316 A3 WO 2009019316A3
Authority
WO
WIPO (PCT)
Prior art keywords
gaps
narrow gaps
forming
mems structures
narrow
Prior art date
Application number
PCT/EP2008/060486
Other languages
French (fr)
Other versions
WO2009019316A2 (en
Inventor
Steve Stoffels
Ann Witvrouw
Original Assignee
Imec Inter Uni Micro Electr
Univ Leuven Kath
Steve Stoffels
Ann Witvrouw
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imec Inter Uni Micro Electr, Univ Leuven Kath, Steve Stoffels, Ann Witvrouw filed Critical Imec Inter Uni Micro Electr
Publication of WO2009019316A2 publication Critical patent/WO2009019316A2/en
Publication of WO2009019316A3 publication Critical patent/WO2009019316A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00055—Grooves
    • B81C1/00063—Trenches
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H03H3/0076—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients
    • H03H3/0077—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients by tuning of resonance frequency
    • H03H3/0078—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients by tuning of resonance frequency involving adjustment of the transducing gap
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0271—Resonators; ultrasonic resonators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0145—Hermetically sealing an opening in the lid
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1057—Mounting in enclosures for microelectro-mechanical devices

Abstract

A method for forming narrow gaps, for ex ample gaps narrower than 400nm, e.g. less than 200nm or 100 nm, between elements of a MEMS structure is described, as well as a method for forming micromachined or MEMS structures comprising narrow gaps. The method may for example be used for forming high frequency micromechanical resonators comprising narrow transduction gaps.
PCT/EP2008/060486 2007-08-08 2008-08-08 Method for forming mems structures comprising narrow gaps WO2009019316A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US96396807P 2007-08-08 2007-08-08
US60/963,968 2007-08-08
US2058608P 2008-01-11 2008-01-11
US61/020,586 2008-01-11

Publications (2)

Publication Number Publication Date
WO2009019316A2 WO2009019316A2 (en) 2009-02-12
WO2009019316A3 true WO2009019316A3 (en) 2009-05-22

Family

ID=40341814

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/060486 WO2009019316A2 (en) 2007-08-08 2008-08-08 Method for forming mems structures comprising narrow gaps

Country Status (1)

Country Link
WO (1) WO2009019316A2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10105187A1 (en) * 2001-02-06 2002-08-08 Bosch Gmbh Robert Method for generating surface micromechanical structures and sensor
EP1232996A2 (en) * 2001-02-14 2002-08-21 Robert Bosch Gmbh Micromechanical device and process for its manufacture
EP1435336A2 (en) * 2002-12-31 2004-07-07 Robert Bosch Gmbh Gap tuning for surface micromachined structures in an epitaxial reactor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10105187A1 (en) * 2001-02-06 2002-08-08 Bosch Gmbh Robert Method for generating surface micromechanical structures and sensor
EP1232996A2 (en) * 2001-02-14 2002-08-21 Robert Bosch Gmbh Micromechanical device and process for its manufacture
EP1435336A2 (en) * 2002-12-31 2004-07-07 Robert Bosch Gmbh Gap tuning for surface micromachined structures in an epitaxial reactor

Also Published As

Publication number Publication date
WO2009019316A2 (en) 2009-02-12

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