WO2008152696A1 - Method of forming magnetic pole of thin-film magnetic head - Google Patents

Method of forming magnetic pole of thin-film magnetic head Download PDF

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Publication number
WO2008152696A1
WO2008152696A1 PCT/JP2007/061821 JP2007061821W WO2008152696A1 WO 2008152696 A1 WO2008152696 A1 WO 2008152696A1 JP 2007061821 W JP2007061821 W JP 2007061821W WO 2008152696 A1 WO2008152696 A1 WO 2008152696A1
Authority
WO
WIPO (PCT)
Prior art keywords
film
forming
magnetic
magnetic pole
thin
Prior art date
Application number
PCT/JP2007/061821
Other languages
French (fr)
Japanese (ja)
Inventor
Mutsuo Yoshinami
Mamoru Tsuruta
Original Assignee
Fujitsu Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Limited filed Critical Fujitsu Limited
Priority to PCT/JP2007/061821 priority Critical patent/WO2008152696A1/en
Publication of WO2008152696A1 publication Critical patent/WO2008152696A1/en

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks

Abstract

A method of forming a magnetic pole of thin-film magnetic head in which even a magnetic pole of limited core width can be formed without the occurrence of inclination, deformation, fall, etc. The method comprises the nonmagnetic film forming step of forming nonmagnetic film (39) provided on its surface with surface level difference area (39a); the magnetic film forming step of forming magnetic film (12) on the nonmagnetic film (39) so as to cover the surfaces of inclined plane (39c) and inferior plane (39d) of the surface level difference area (39a); the first mask layer forming step of forming first mask layer (14) over the region extending from the surface of superior plane (39b) of the surface level difference area (39a) of the nonmagnetic film (39) to an area of the surface of the magnetic film (12); and the magnetic pole forming step of removing magnetic film (12) exposed from the first mask layer (14) to thereby form magnetic pole (80) consisting of remaining magnetic film (12).
PCT/JP2007/061821 2007-06-12 2007-06-12 Method of forming magnetic pole of thin-film magnetic head WO2008152696A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/061821 WO2008152696A1 (en) 2007-06-12 2007-06-12 Method of forming magnetic pole of thin-film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/061821 WO2008152696A1 (en) 2007-06-12 2007-06-12 Method of forming magnetic pole of thin-film magnetic head

Publications (1)

Publication Number Publication Date
WO2008152696A1 true WO2008152696A1 (en) 2008-12-18

Family

ID=40129314

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/061821 WO2008152696A1 (en) 2007-06-12 2007-06-12 Method of forming magnetic pole of thin-film magnetic head

Country Status (1)

Country Link
WO (1) WO2008152696A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013065389A (en) * 2011-09-19 2013-04-11 Headway Technologies Inc Method of manufacturing plasmon generator

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08147625A (en) * 1994-11-25 1996-06-07 Victor Co Of Japan Ltd Thin-film magnetic head and its manufacture
JP2004094997A (en) * 2002-08-29 2004-03-25 Tdk Corp Thin film magnetic head and its manufacturing method
JP2006073058A (en) * 2004-08-31 2006-03-16 Tdk Corp Magnetic head for vertical magnetic recording and its manufacturing method
JP2006269061A (en) * 2005-03-24 2006-10-05 Samsung Electronics Co Ltd Magnetic recording head and method of manufacturing the same, and magnetic recording device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08147625A (en) * 1994-11-25 1996-06-07 Victor Co Of Japan Ltd Thin-film magnetic head and its manufacture
JP2004094997A (en) * 2002-08-29 2004-03-25 Tdk Corp Thin film magnetic head and its manufacturing method
JP2006073058A (en) * 2004-08-31 2006-03-16 Tdk Corp Magnetic head for vertical magnetic recording and its manufacturing method
JP2006269061A (en) * 2005-03-24 2006-10-05 Samsung Electronics Co Ltd Magnetic recording head and method of manufacturing the same, and magnetic recording device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013065389A (en) * 2011-09-19 2013-04-11 Headway Technologies Inc Method of manufacturing plasmon generator

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