WO2008143198A1 - Appearance inspection system - Google Patents

Appearance inspection system Download PDF

Info

Publication number
WO2008143198A1
WO2008143198A1 PCT/JP2008/059090 JP2008059090W WO2008143198A1 WO 2008143198 A1 WO2008143198 A1 WO 2008143198A1 JP 2008059090 W JP2008059090 W JP 2008059090W WO 2008143198 A1 WO2008143198 A1 WO 2008143198A1
Authority
WO
WIPO (PCT)
Prior art keywords
judgment
image data
forming state
reference image
remaking
Prior art date
Application number
PCT/JP2008/059090
Other languages
French (fr)
Japanese (ja)
Inventor
Masatoshi Sasai
Original Assignee
Mega Trade Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mega Trade Corp filed Critical Mega Trade Corp
Publication of WO2008143198A1 publication Critical patent/WO2008143198A1/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects

Abstract

[PROBLEMS] To provide a system that does not require drastic remaking of a program even when a judgment method, a display method, and the like are changed and also does not require drastic remaking of a program even when an inspection is performed by an inspection apparatus having a plurality of processors. [MEANS FOR SOLVING PROBLEMS] In an appearance inspection system (1) for inspecting the forming state of a printed circuit board (3), a reference data storage means (17a) stores reference image data and a core processing means (21) reads the reference image data. When receiving a read request for the reference image data from a plurality of judgment means (22) for judging the forming state of the printed circuit board (3), judgment means (22a, 22b) generate corresponding reference data based on their own judgment programs and judges, using the corresponding reference data and an inspected image, whether the forming state is good or not. This judgment result is then sent to the core processing means (21) and stored in a judgment result storage means (17b).
PCT/JP2008/059090 2007-05-18 2008-05-18 Appearance inspection system WO2008143198A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-132950 2007-05-18
JP2007132950A JP2008286692A (en) 2007-05-18 2007-05-18 Visual inspection system

Publications (1)

Publication Number Publication Date
WO2008143198A1 true WO2008143198A1 (en) 2008-11-27

Family

ID=40031897

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/059090 WO2008143198A1 (en) 2007-05-18 2008-05-18 Appearance inspection system

Country Status (2)

Country Link
JP (1) JP2008286692A (en)
WO (1) WO2008143198A1 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003086645A (en) * 2001-09-13 2003-03-20 Hitachi Ltd Inspection device, inspection system and method for manufacturing semiconductor device
JP2003098098A (en) * 2001-09-21 2003-04-03 Matsushita Electric Works Ltd Image processing device and image processing system
JP2004020356A (en) * 2002-06-17 2004-01-22 Kita Denshi Corp Method and apparatus for inspecting printed matter
JP2005037243A (en) * 2003-07-15 2005-02-10 Mega Trade:Kk Printed board inspection device
JP2005351631A (en) * 2004-06-08 2005-12-22 Dainippon Screen Mfg Co Ltd Defect detection device and method
JP2007064642A (en) * 2005-08-29 2007-03-15 Mega Trade:Kk Visual inspection device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03154807A (en) * 1989-11-13 1991-07-02 Matsushita Electron Corp Pattern inspecting method
JPH06147855A (en) * 1992-11-10 1994-05-27 Hiyuu Burein:Kk Image inspection method
JPH09161074A (en) * 1995-12-04 1997-06-20 Matsushita Electric Ind Co Ltd Picture processor
JP2001283195A (en) * 2000-03-30 2001-10-12 Kobe Steel Ltd Method and device for inspecting defect
JP2002031605A (en) * 2000-07-13 2002-01-31 Hitachi Ltd Defect-confirming apparatus and automatic visual inspection apparatus
JP3993044B2 (en) * 2002-08-09 2007-10-17 株式会社トプコン Appearance inspection method, appearance inspection device
JP4220333B2 (en) * 2003-08-25 2009-02-04 株式会社サキコーポレーション Appearance inspection device
JP3589424B1 (en) * 2003-12-22 2004-11-17 株式会社メガトレード Board inspection equipment
JP4812482B2 (en) * 2006-03-22 2011-11-09 株式会社メガトレード Printing state inspection apparatus and printing state inspection method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003086645A (en) * 2001-09-13 2003-03-20 Hitachi Ltd Inspection device, inspection system and method for manufacturing semiconductor device
JP2003098098A (en) * 2001-09-21 2003-04-03 Matsushita Electric Works Ltd Image processing device and image processing system
JP2004020356A (en) * 2002-06-17 2004-01-22 Kita Denshi Corp Method and apparatus for inspecting printed matter
JP2005037243A (en) * 2003-07-15 2005-02-10 Mega Trade:Kk Printed board inspection device
JP2005351631A (en) * 2004-06-08 2005-12-22 Dainippon Screen Mfg Co Ltd Defect detection device and method
JP2007064642A (en) * 2005-08-29 2007-03-15 Mega Trade:Kk Visual inspection device

Also Published As

Publication number Publication date
JP2008286692A (en) 2008-11-27

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