WO2008137951A3 - Plating apparatus and method - Google Patents
Plating apparatus and method Download PDFInfo
- Publication number
- WO2008137951A3 WO2008137951A3 PCT/US2008/062943 US2008062943W WO2008137951A3 WO 2008137951 A3 WO2008137951 A3 WO 2008137951A3 US 2008062943 W US2008062943 W US 2008062943W WO 2008137951 A3 WO2008137951 A3 WO 2008137951A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- plating
- support member
- processing volume
- point
- shaft
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/04—Removal of gases or vapours ; Gas or pressure control
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/003—Electroplating using gases, e.g. pressure influence
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/10—Electroplating with more than one layer of the same or of different metals
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/12—Semiconductors
- C25D7/123—Semiconductors first coated with a seed layer or a conductive layer
Abstract
A plating computer having a plating cell with an interior processing volume configured to contain a plating solution for a plating process, a cell mounting platform connected at least at a first point to an actuator and at a second point to a movable attachment member, a rotatable substrate support member positioned in the processing volume and having a longitudinally extending shaft extending from a non-substrate engaging side of the support member, a transducer coupled to the longitudinally extending shaft and being configured to impart energy to the substrate support member via the shaft, and at least one detachable chemistry module in fluid communication with the processing volume.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US91656307P | 2007-05-07 | 2007-05-07 | |
US60/916,563 | 2007-05-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2008137951A2 WO2008137951A2 (en) | 2008-11-13 |
WO2008137951A3 true WO2008137951A3 (en) | 2009-03-19 |
Family
ID=39590887
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2008/062943 WO2008137951A2 (en) | 2007-05-07 | 2008-05-07 | Plating apparatus and method |
Country Status (2)
Country | Link |
---|---|
TW (1) | TW200923134A (en) |
WO (1) | WO2008137951A2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10385471B2 (en) | 2013-03-18 | 2019-08-20 | Spts Technologies Limited | Electrochemical deposition chamber |
GB2512056B (en) | 2013-03-18 | 2018-04-18 | Spts Technologies Ltd | Electrochemical deposition chamber |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6261433B1 (en) * | 1998-04-21 | 2001-07-17 | Applied Materials, Inc. | Electro-chemical deposition system and method of electroplating on substrates |
EP1170402A1 (en) * | 2000-07-07 | 2002-01-09 | Applied Materials, Inc. | Coated anode system |
US20040016637A1 (en) * | 2002-07-24 | 2004-01-29 | Applied Materials, Inc. | Multi-chemistry plating system |
US20040124090A1 (en) * | 2002-12-30 | 2004-07-01 | Chen-Chung Du | Wafer electroplating apparatus and method |
US20050245083A1 (en) * | 1998-03-20 | 2005-11-03 | Semitool, Inc. | Apparatus and method for electrochemically depositing metal on a semiconductor workpiece |
-
2008
- 2008-05-07 WO PCT/US2008/062943 patent/WO2008137951A2/en active Application Filing
- 2008-05-07 TW TW097116842A patent/TW200923134A/en unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050245083A1 (en) * | 1998-03-20 | 2005-11-03 | Semitool, Inc. | Apparatus and method for electrochemically depositing metal on a semiconductor workpiece |
US6261433B1 (en) * | 1998-04-21 | 2001-07-17 | Applied Materials, Inc. | Electro-chemical deposition system and method of electroplating on substrates |
EP1170402A1 (en) * | 2000-07-07 | 2002-01-09 | Applied Materials, Inc. | Coated anode system |
US20040016637A1 (en) * | 2002-07-24 | 2004-01-29 | Applied Materials, Inc. | Multi-chemistry plating system |
US20040124090A1 (en) * | 2002-12-30 | 2004-07-01 | Chen-Chung Du | Wafer electroplating apparatus and method |
Also Published As
Publication number | Publication date |
---|---|
WO2008137951A2 (en) | 2008-11-13 |
TW200923134A (en) | 2009-06-01 |
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