WO2008129062A1 - Component working with acoustic waves - Google Patents

Component working with acoustic waves Download PDF

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Publication number
WO2008129062A1
WO2008129062A1 PCT/EP2008/054928 EP2008054928W WO2008129062A1 WO 2008129062 A1 WO2008129062 A1 WO 2008129062A1 EP 2008054928 W EP2008054928 W EP 2008054928W WO 2008129062 A1 WO2008129062 A1 WO 2008129062A1
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WO
WIPO (PCT)
Prior art keywords
filter
ground
component according
stages
main
Prior art date
Application number
PCT/EP2008/054928
Other languages
German (de)
French (fr)
Inventor
Andreas Detlefsen
Andreas Waldherr
Original Assignee
Epcos Ag
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Filing date
Publication date
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Publication of WO2008129062A1 publication Critical patent/WO2008129062A1/en

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Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/54Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/58Multiple crystal filters
    • H03H9/60Electric coupling means therefor
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/0023Balance-unbalance or balance-balance networks
    • H03H9/0028Balance-unbalance or balance-balance networks using surface acoustic wave devices
    • H03H9/0047Balance-unbalance or balance-balance networks using surface acoustic wave devices having two acoustic tracks
    • H03H9/0052Balance-unbalance or balance-balance networks using surface acoustic wave devices having two acoustic tracks being electrically cascaded
    • H03H9/0057Balance-unbalance or balance-balance networks using surface acoustic wave devices having two acoustic tracks being electrically cascaded the balanced terminals being on the same side of the tracks
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/0538Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H03H9/0557Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement the other elements being buried in the substrate
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/0538Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0566Constructional combinations of supports or holders with electromechanical or other electronic elements for duplexers
    • H03H9/0571Constructional combinations of supports or holders with electromechanical or other electronic elements for duplexers including bulk acoustic wave [BAW] devices
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/0538Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0566Constructional combinations of supports or holders with electromechanical or other electronic elements for duplexers
    • H03H9/0576Constructional combinations of supports or holders with electromechanical or other electronic elements for duplexers including surface acoustic wave [SAW] devices
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/70Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source

Definitions

  • a component with acoustic filters is z. B. from the document DE 100 54 968 Al and DE 102005032058 Al known.
  • a demultiplexer which comprises a reception filter and a transmission filter. Both filters are designed in ladder-type-like structure with parallel resonators in parallel branches. On the ground side, the parallel branches of both filters are interconnected via inductive elements and. In addition, the grounded connections of the parallel branches of the reception filter are electrically connected to those of the transmission filter via an inductive element.
  • An object to be solved is to specify a working with acoustic waves device that has a small footprint.
  • acoustic waves device comprising at least two different frequency bands associated filter specified.
  • the device has ground connections which are galvanically connected to ground of the filter stages and provided as external terminals of the device.
  • Each filter stage is associated with a main ground terminal connected to the respective ground via a main ground path. At least parts of a main mass path are used simultaneously by at least two filter stages of different filters.
  • the main ground path of a filter stage is understood to mean the ground path or the connection of the respective ground with a main ground connection which forms the "path of least resistance", in particular the ground path having the lowest inductance, even if connections of the respective ground to several ground connections are present
  • there is one main ground path connected to the corresponding ground ground terminal and if there are several ground paths with the same lowest inductance per filter stage, connecting the ground to a ground terminal, these are all considered to be the main ground terminals.
  • ground connections are main ground connections.
  • each filter stage with only one ground path can be connected to only one ground terminal, so that a distinction between main ground connections and other ground connections is unnecessary. So it is possible, at least to design a ground connection as the main ground connection of at least two filter stages of different filters.
  • At least one ground connection as the main ground connection of at least two filter stages of the same filter.
  • the total number of ground connections can be smaller than the total number of filter stages. However, it is also possible to provide, in addition to the at least one main ground connection connected to a main ground path, at least one further ground connection which is not connected to a main ground path. One or more such “minor ground connections” can increase the number of ground connections again.
  • the z. B. may be one octave apart.
  • one filter may be assigned to a frequency band of approximately 1 GHz and the other filter to a frequency band of approximately 2 GHz.
  • the latter frequency band includes transmission bands between 1640 MHz and 2.45 GHz
  • all the filters of the component are provided as receive filters. In a further variant, all the filters of the component are provided as transmission filters. In a further variant, the filters of the component are provided as a transmission-receiving filter.
  • the component can also have multiplexed, ie interconnected, signal-carrying connections which at least in sections have the same signal path. - A -
  • the respective filter is electrically connected to at least two signal-carrying terminals, which are provided as external terminals of the component.
  • One port serves as the input and the other port as the output of the filter.
  • the area of the respective ground terminal is preferably not greater than twice the area of the respective signal-carrying terminal.
  • the ratio of the area is a maximum of 1.5.
  • all external connections of the component are the same size.
  • the arrangement or the pattern of all external connections of the component is referred to below as a footprint.
  • the external connections can be solderable or bondable surfaces. But they can also be realized as bumps, or provided with bumps.
  • the filter stages of a filter comprising several stages are preferably connected in an electrically cascaded manner.
  • Each filter stage has, in principle, a high frequency filter function, can be a full filter and can be used e.g. have a pass band and stop bands.
  • Different filter stages as well as different filters can be constructed the same or different, i. H. be realized as the same or different types of filters.
  • At least one of the filter stages comprises transducers operating in a variant with surface acoustic waves.
  • at least one of the filter stages comprises resonators operating with bulk acoustic waves.
  • At least one of the filter stages comprises, in a further variant, transducers operating with acoustic interface waves (GBAW Component).
  • GBAW Component acoustic interface waves
  • At least one filter stage may be formed by a single SAW or BAW parallel resonator.
  • the resonator is then connected to another filter stage, the z. B. is formed by a DMS track connected.
  • Two resonators, which together form a basic element of a ladder-type arrangement, are considered together as a filter stage, but not individual resonators of a fundamental element.
  • the acoustic track of the respective SAW or GBAW filter stage may be formed as a DMS track.
  • DMS stands for Double-Mode Surface Acoustic Wave.
  • At least one input transducer and at least one output transducer may be arranged in the strain gauge track.
  • output transducers and / or input transducers can each be replaced by coupling transducers.
  • Two by means of coupling transducers with each other e.g. Cascaded DMS traces, both of which are associated with the same filter, are preferably considered to be different filter stages.
  • At least two ground paths of the filters are connected to at least one common main ground path, which is connected to the corresponding associated main ground connection.
  • the masses of the different filter stages of the same filter are preferably conductively connected to different ground terminals.
  • the masses of the different filter stages of the respective filter are independently - in a variant galvanically separated from each other - led to the respective ground terminal.
  • it is also possible to de different filter stages of the same filter to merge into a common main ground path and connect to a common main ground connection.
  • the galvanic connection between these masses is possible outside of the device.
  • the respective filter has an input-side filter stage and an output-side filter stage. Masses of the input-side filter stages of different filters are combined to form a common main ground path, which is connected to a first ground terminal. Masses of the output-side filter stages of different filters can likewise be combined to form a common ground path, which is connected to a second main ground terminal.
  • the mass of an input-side filter stage of a first filter and the mass of an output-side filter stage of a second filter are combined to form a common main ground path, which is connected to a first main ground terminal.
  • the ground paths of an output-side filter stage of the first filter and a Input-side filter stage of the second filter are combined to form a common main ground path, which is connected to a second ground terminal.
  • the filters are preferably realized at least partially in at least one acoustic chip. Each filter can be realized in a separate chip. It is also possible to realize at least two filters in or on a common chip.
  • the filter stages of the same filter are preferably realized in or on a common chip. Different filter levels of the same filter used in different technologies, eg. B. SAW / BAW, may also be implemented in or on different substrates.
  • the device comprises e.g. a carrier substrate on which the chip is mounted or a plurality of chips are mounted.
  • the outer terminals of the device including the ground terminals, are arranged on the underside or the front side of the carrier substrate.
  • At least one of the filter stages comprises an acoustic track with at least two acoustically coupled transducers.
  • At least one of the filter stages may also be designed as a ladder-type arrangement of transducers.
  • the ladder type arrangement has at least one series branch and at least one shunt branch connected to the series branch, a series converter being arranged in the series branch and a parallel converter being arranged in the shunt branch.
  • BAW bulk acoustic wave.
  • a ladder type arrangement of BAW resonators is also possible.
  • at least one of the filter stages has at least one series branch and at least one shunt branch connected to the series branch, wherein a series resonator is arranged in the series branch and a parallel resonator is arranged in the transverse branch, which together form a basic element that represents a filter stage.
  • An input-side matching network for adapting the input impedance of the respective filter to a specific impedance level can be arranged in the carrier substrate.
  • An output matching network for adapting the output impedance of the respective filter to a specific impedance level can be arranged in the carrier substrate.
  • the respective matching network has at least one passive element selected from a series capacitance, shunt capacitance, series inductance and a shunt inductance.
  • the input and / or the output of the respective filter can be single-ended.
  • the entrance and / or the output of the respective filter can also be differential (balanced).
  • Figure 1 shows the equivalent circuit of a device with two filters, in which the masses of the input and output side filter stages are brought together;
  • FIG. 2 shows the equivalent circuit diagram of a component with two filters, in which the masses of the input and output filter stages of different filters are combined;
  • FIG. 4 shows the equivalent circuit diagram of a component with two filters, in which the conductor sections which contribute to the ground paths, together with the associated inductances, are shown;
  • Figures 5, 6 each show the view of an exemplary footprint of the device.
  • Figures 1, 2 each show a component with two filters Fl, F2, which are arranged in a common housing or on a common carrier substrate TS.
  • the first filter Fl has an input-side filter stage Al and an output-side filter stage A2.
  • the second FiI- ter F2 has an input-side filter stage Bl and an output-side filter stage B2.
  • the input-side filter stage Al of the first filter Fl is connected in FIG. 1 to an input terminal IN a and in FIG. 2 to two input terminals IN a i, IN a2 .
  • the output-side filter stage A2 of the first filter Fl is connected in FIG. 1 to an output terminal OUT a and in FIG. 2 to two output terminals OUT a i, OUT a2 .
  • the masses of the input-side filter stages A1, B1 are combined and connected to a common ground terminal GND1.
  • the masses of the output-side filter stages A2, B2 are merged and connected to a common ground terminal GND2.
  • the mass of the input-side filter stage A1 of the first filter F1 is combined with the mass of the output-side filter stage B2 of the second filter F2 and connected to a common ground terminal GND1.
  • the mass of the input-side filter stage Bl of the second filter F2 is merged with the ground of the output-side filter stage A2 of the first filter Fl and connected to a common ground terminal GND2.
  • the corresponding filter stages are connected via the same ground path to a ground terminal, which represents the main terminal for the corresponding filter stages.
  • the total number of filter stages of the device is four. In both variants shown, the number of ground connections is two and is thus smaller than the total number of filter stages of the component.
  • the carrier substrate TS comprises at least two dielectric layers and metallization planes arranged alternately therewith. On the underside of the substrate are external terminals of the device and on top of the substrate contacts for contacting of at least one chip, in which the filters Fl, F2 are realized arranged.
  • FIG. 3 shows a variant in which the filters F1, F2 are implemented in separate acoustic chips. The merging of the masses of the filter stages takes place in an inner plane of the carrier substrate TS.
  • the component is preferably suitable for SMD mounting and has the outer terminals in the form of a metal layer applied to the underside of the carrier substrate.
  • FIG. 4 shows the equivalent circuit diagram of a component with two filters F1, F2, of which two filter stages A1, A2 or B1, B2 are shown here and one third filter stage A3, B3 each is indicated.
  • the picture explains the definition of the main mass paths and main ground connections.
  • Each ground path consists of conductor sections and also includes all electrical connections between the ground on the filter structure and the respective ground terminal on the underside of the substrate. These include, for example, bumps and through-contacts and other elements. For simplicity, these elements are in the equivalent circuit diagram as inductors Ll to L5. shown. For the sake of clarity, only the ground paths of the first two filter stages Al and Bl are considered. The other ground paths may be similarly constructed and interconnected.
  • Ground paths for the filter stage Al e.g. are all possible rungs between Al and a ground connection.
  • the main ground path is the one having the least total inductance in the sum of the single inductances. For the filter stage Al, this may be the path through Ll, L2 and L3 to GND2, if (L2 + L3) is less than L5. Then, the main ground path for the filter stage Bl via L4 and L3 also goes to the ground terminal, since L5> (L2 + L3). GND2 is then the main ground connection for the two filter stages Al and Bl.
  • FIGS. 5 and 6 Various variants of a footprint of the above-described device with four filter stages are shown in FIGS. 5 and 6.
  • the ground connection GND1 is arranged between the input connections IN a , IN b of the first and second filters F1, F2.
  • Ground terminal GND2 is between the output terminals OUT a , OUT b of the first and second filters Fl, F2 arranged.
  • the ground terminal GNDL between the terminals IN a, a OUT is disposed the first filter Fl and the ground terminal GND2 between the terminals in B, OUT b of the second filter F2.
  • the surface of the respective ground connection can, in all variants, as indicated in FIG. 5, be equal to the area of the signal-carrying connections.
  • the area of the ground connections may be slightly larger than the area of the signal-carrying terminals.
  • the ratio of these areas is preferably at most 1.5. This has the advantage that the dosage of the solder mass and thus the quality of the solder joint of the respective terminal z. B. can be controlled particularly well with a circuit board.
  • the number of filters and filter stages in the component is not limited to the variants explained in the figures.
  • the number of dielectric layers in the carrier substrate can also be arbitrary.

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

The invention relates to a component working with acoustic waves, comprising filters (F1, F2) associated with at least two different frequency bands. Each filter has at least one filter stage (A1, A2, B1, B2), wherein different filter stages are realized in separate acoustical tracks or as separate resonator stacks. The component comprises ground connections (GND1, GND2) that are galvanically connected to the ground of the filter stages and provided as exterior connections of the component. A main ground connection is associated with each filter stage, said connection being connected to the respective ground via a main ground path, wherein at least parts of a main ground path are used by at least two filter stages of different filters at the same time.

Description

Beschreibungdescription
Mit akustischen Wellen arbeitendes BauelementWorking with acoustic waves device
Ein Bauelement mit akustischen Filtern ist z. B. aus der Druckschrift DE 100 54 968 Al und DE 102005032058 Al bekannt.A component with acoustic filters is z. B. from the document DE 100 54 968 Al and DE 102005032058 Al known.
Aus der Druckschrift DE 196 33 954 Al ist eine Filtervorrichtung aus wenigstens zwei Filterelementen für verschiedene Frequenzbereiche beschrieben. Beide Filterelemente teilen sich zwei gemeinsam genutzte Masseanschlüsse.From the document DE 196 33 954 Al a filter device is described from at least two filter elements for different frequency ranges. Both filter elements share two shared ground connections.
Aus der Druckschrift US 2005/0070332 Al ist ein Demultiplexer bekannt, der ein Empfangsfilter und ein Sendefilter umfasst. Beide Filter sind in laddertypeähnlicher Struktur mit Parallelresonatoren in Parallelzweigen ausgebildet. Masseseitig sind die Parallelzweige beider Filter untereinander über induktive Elemente und verbunden. Zusätzlich sind die massesei- tigen Anschlüsse der Parallelzweige des Empfangsfilters mit denen des Sendefilters über ein induktives Element elektrisch verbunden .From the document US 2005/0070332 Al a demultiplexer is known which comprises a reception filter and a transmission filter. Both filters are designed in ladder-type-like structure with parallel resonators in parallel branches. On the ground side, the parallel branches of both filters are interconnected via inductive elements and. In addition, the grounded connections of the parallel branches of the reception filter are electrically connected to those of the transmission filter via an inductive element.
Eine zu lösende Aufgabe besteht darin, ein mit akustischen Wellen arbeitendes Bauelement, das eine kleine Grundfläche hat, anzugeben.An object to be solved is to specify a working with acoustic waves device that has a small footprint.
Es wird ein mit akustischen Wellen arbeitendes Bauelement, umfassend mindestens zwei verschiedenen Frequenzbändern zugeordnete Filter, angegeben. Eines der Filter weist mindestens eine Filterstufe auf und ein anderes Filter weist mindestens zwei Filterstufen auf, wobei unterschiedliche Filterstufen als SAW Filterstufen (SAW = surface acoustic wave) in separaten akustischen Spuren oder als FBAR Filterstufe (FBAR = thin film bulk acoustic wave resonator) in separaten Resonatorstapeln oder in einem mehrere Resonatoren umfassenden Resonatorstapel realisiert sind. Eine Filterstufe kann auch mit akustischen Grenzwellen arbeiten und als GBAW Bauelement (GBAW = Guided bulk acoustic wave) ausgelegt sein.It is a working with acoustic waves device, comprising at least two different frequency bands associated filter specified. One of the filters has at least one filter stage and another filter has at least two filter stages, with different filter stages as SAW filter stages (SAW = surface acoustic wave) in separate acoustic tracks or as FBAR filter stage (FBAR = thin film bulk acoustic wave resonator) are realized in separate resonator stacks or in a resonator stack comprising a plurality of resonators. A filter stage can also work with acoustic boundary waves and be designed as a GBAW device (GBAW = guided bulk acoustic wave).
Das Bauelement weist Masseanschlüsse auf, die mit Masse der Filterstufen galvanisch verbunden und als Außenanschlüsse des Bauelements vorgesehen sind.The device has ground connections which are galvanically connected to ground of the filter stages and provided as external terminals of the device.
Jeder Filterstufe ist ein Hauptmasseanschluss zugeordnet, der mit der jeweiligen Masse über einen Hauptmassepfad verbunden ist. Dabei werden zumindest Teile eines Hauptmassepfads gleichzeitig von mindestens zwei Filterstufen verschiedener Filter genutzt.Each filter stage is associated with a main ground terminal connected to the respective ground via a main ground path. At least parts of a main mass path are used simultaneously by at least two filter stages of different filters.
Unter Hauptmassepfad einer Filterstufe wird der Massepfad bzw. die Verbindung der jeweiligen Masse mit einem Hauptmasseanschluss verstanden, die den „Weg des geringsten Widerstands" bildet, insbesondere der Massepfad, der die geringste Induktivität aufweist. Auch wenn Verbindungen der jeweiligen Masse zu mehreren Masseanschlüssen vorhanden sind, so gibt es jeweils einen Hauptmassepfad, der mit dem entsprechenden Hauptmasseanschluss verbunden ist. Existieren pro Filterstufe mehrere Massepfade mit der gleichen geringsten Induktivität, die die Masse mit einem Masseanschluss verbinden, so werden diese alle als Hauptmasseanschlüsse angesehen.The main ground path of a filter stage is understood to mean the ground path or the connection of the respective ground with a main ground connection which forms the "path of least resistance", in particular the ground path having the lowest inductance, even if connections of the respective ground to several ground connections are present Thus, there is one main ground path connected to the corresponding ground ground terminal, and if there are several ground paths with the same lowest inductance per filter stage, connecting the ground to a ground terminal, these are all considered to be the main ground terminals.
Es ist möglich, dass sämtliche Masseanschlüsse Hauptmasseanschlüsse sind. Auch kann jede Filterstufe mit nur einem Massepfad an nur einen Masseanschluss angeschlossen sein, so dass sich eine Unterscheidung in Hauptmasseanschlüsse und andere Masseanschlüsse erübrigt. So ist es möglich, mindestens einen Masseanschluss als Hauptmasseanschluss von mindestens zwei Filterstufen verschiedener Filter auszulegen.It is possible that all ground connections are main ground connections. Also, each filter stage with only one ground path can be connected to only one ground terminal, so that a distinction between main ground connections and other ground connections is unnecessary. So it is possible, at least to design a ground connection as the main ground connection of at least two filter stages of different filters.
Ebenso ist es möglich, mindestens einen Masseanschluss als Hauptmasseanschluss von mindestens zwei Filterstufen des gleichen Filters auszulegen.It is also possible to design at least one ground connection as the main ground connection of at least two filter stages of the same filter.
Dabei kann die Gesamtanzahl der Masseanschlüsse kleiner sein als die Gesamtanzahl der Filterstufen. Es ist aber auch möglich, neben dem zumindest einen mit einem Hauptmassepfad verbundenen Hauptmasseanschluss noch zumindest einen weiteren Masseanschluss vorzusehen, der nicht mit einem Hauptmassepfad verbunden ist. Ein oder mehrere solcher „Nebenmasseanschlüsse" können die Anzahl der Masseanschlüsse wieder erhöhen.The total number of ground connections can be smaller than the total number of filter stages. However, it is also possible to provide, in addition to the at least one main ground connection connected to a main ground path, at least one further ground connection which is not connected to a main ground path. One or more such "minor ground connections" can increase the number of ground connections again.
Unterschiedliche Filter sind vorzugsweise unterschiedlichen Übertragungsbändern, die z. B. eine Oktave auseinander liegen können, zugeordnet. Beispielsweise kann ein Filter einem Frequenzband von ca. 1 GHz und das andere Filter einem Frequenzband von ca. 2 GHz zugeordnet sein. Zum letztgenannten Frequenzband gehören beispielsweise Übertragungsbänder zwischen 1640 MHz und 2, 45 GHzDifferent filters are preferably different transmission bands, the z. B. may be one octave apart. For example, one filter may be assigned to a frequency band of approximately 1 GHz and the other filter to a frequency band of approximately 2 GHz. For example, the latter frequency band includes transmission bands between 1640 MHz and 2.45 GHz
In einer Variante sind alle Filter des Bauelements als Empfangsfilter vorgesehen. In einer weiteren Variante sind alle Filter des Bauelements als Sendefilter vorgesehen. In einer weiteren Variante sind die Filter des Bauelements als Sende- empfangsfilter vorgesehen. Das Bauelement kann auch gediplex- te d.h. miteinander verbundene signalführende Anschlüsse aufweisen, die zumindest abschnittsweise den gleichen Signalpfad aufweisen . - A -In a variant, all the filters of the component are provided as receive filters. In a further variant, all the filters of the component are provided as transmission filters. In a further variant, the filters of the component are provided as a transmission-receiving filter. The component can also have multiplexed, ie interconnected, signal-carrying connections which at least in sections have the same signal path. - A -
Das jeweilige Filter ist mit mindestens zwei signalführenden Anschlüssen, die als Außenanschlüsse des Bauelements vorgesehen sind, elektrisch verbunden. Ein Anschluss dient als Eingang und der andere Anschluss als Ausgang des Filters.The respective filter is electrically connected to at least two signal-carrying terminals, which are provided as external terminals of the component. One port serves as the input and the other port as the output of the filter.
Die Fläche des jeweiligen Masseanschlusses ist vorzugsweise nicht größer als die doppelte Fläche des jeweiligen signalführenden Anschlusses. In einer vorteilhaften Variante ist das Verhältnis der Fläche maximal 1,5. In einer weiteren vorteilhaften Variante sind alle Außenanschlüsse des Bauelements gleich groß. Die Anordnung bzw. das Muster aller Außenanschlüsse des Bauelements wird nachstehend als Footprint bezeichnet. Die Außenanschlüsse können löt- oder bondbare Flächen darstellen. Sie können aber auch als Bumps realisiert, bzw. mit Bumps versehen sein.The area of the respective ground terminal is preferably not greater than twice the area of the respective signal-carrying terminal. In an advantageous variant, the ratio of the area is a maximum of 1.5. In a further advantageous variant, all external connections of the component are the same size. The arrangement or the pattern of all external connections of the component is referred to below as a footprint. The external connections can be solderable or bondable surfaces. But they can also be realized as bumps, or provided with bumps.
In einer Variante des Bauelements sind die Filterstufen eines mehrere Stufen umfassenden Filters vorzugsweise elektrisch kaskadiert geschaltet.In a variant of the component, the filter stages of a filter comprising several stages are preferably connected in an electrically cascaded manner.
Jede Filterstufe hat im Prinzip eine Filterfunktion für Hochfrequenz, kann ein vollwertiges Filter darstellen und z.B. ein Passband und Sperrbereiche aufweisen. Unterschiedliche Filterstufen können ebenso wie unterschiedliche Filter gleich oder unterschiedlich aufgebaut, d. h. als gleiche oder unterschiedliche Filtertypen realisiert sein.Each filter stage has, in principle, a high frequency filter function, can be a full filter and can be used e.g. have a pass band and stop bands. Different filter stages as well as different filters can be constructed the same or different, i. H. be realized as the same or different types of filters.
Mindestens eine der Filterstufen umfasst in einer Variante mit akustischen Oberflächenwellen arbeitende Wandler. In einer anderen Variante umfasst mindestens eine der Filterstufen mit akustischen Volumenwellen arbeitende Resonatoren. Mindestens eine der Filterstufen umfasst in einer weiteren Variante mit akustischen Grenzflächenwellen arbeitende Wandler (GBAW Bauelement) . Die Filterstufen unterschiedlicher Filter können gleich oder unterschiedlich sein.At least one of the filter stages comprises transducers operating in a variant with surface acoustic waves. In another variant, at least one of the filter stages comprises resonators operating with bulk acoustic waves. At least one of the filter stages comprises, in a further variant, transducers operating with acoustic interface waves (GBAW Component). The filter levels of different filters may be the same or different.
Mindestens eine Filterstufe kann durch einen einzigen mit SAW oder BAW arbeitenden Parallelresonator gebildet sein. Der Resonator ist dann mit einer anderen Filterstufe, die z. B. durch eine DMS-Spur gebildet ist, verbunden. Zwei Resonatoren, die zusammen ein Grundglied einer Laddertype Anordnung bilden, werden zusammen als eine Filterstufe betrachtet, nicht aber einzelne Resonatoren eines Grundglieds.At least one filter stage may be formed by a single SAW or BAW parallel resonator. The resonator is then connected to another filter stage, the z. B. is formed by a DMS track connected. Two resonators, which together form a basic element of a ladder-type arrangement, are considered together as a filter stage, but not individual resonators of a fundamental element.
Die akustische Spur der jeweiligen SAW oder GBAW Filterstufe kann als eine DMS-Spur ausgebildet sein. DMS steht für Double-Mode Surface Acoustic Wave . In der DMS-Spur können mindestens ein Eingangswandler und mindestens ein Ausgangswandler angeordnet sein. In einer Variante können Ausgangswandler und/oder Eingangswandler jeweils durch Koppelwandler ersetzt sein. Zwei mittels Koppelwandlern miteinander z.B. durch Kaskadierung verbundene DMS-Spuren, die beide ein und demselben Filter zugeordnet sind, werden vorzugsweise als unterschiedliche Filterstufen betrachtet.The acoustic track of the respective SAW or GBAW filter stage may be formed as a DMS track. DMS stands for Double-Mode Surface Acoustic Wave. At least one input transducer and at least one output transducer may be arranged in the strain gauge track. In one variant, output transducers and / or input transducers can each be replaced by coupling transducers. Two by means of coupling transducers with each other e.g. Cascaded DMS traces, both of which are associated with the same filter, are preferably considered to be different filter stages.
In einer vorteilhaften Variante sind zumindest zwei Massepfade der Filter, deren Durchlassbereiche in unterschiedlichen Frequenzbändern liegen, zu mindestens einem gemeinsamen Hauptmassepfad verbunden, der an den entsprechenden zugeordneten Hauptmasseanschluss angeschlossen ist. Die Massen der unterschiedlichen Filterstufen des gleichen Filters sind vorzugsweise mit unterschiedlichen Masseanschlüssen leitend verbunden. Die Massen der unterschiedlichen Filterstufen des jeweiligen Filters werden unabhängig voneinander - in einer Variante galvanisch voneinander getrennt - bis zum jeweiligen Masseanschluss geführt. Es ist jedoch auch möglich, Massepfa- de unterschiedlicher Filterstufen des gleichen Filters zu einem gemeinsamen Hauptmassepfad zusammenzuführen und mit einem gemeinsamen Hauptmasseanschluss zu verbinden. Die galvanische Verbindung zwischen diesen Massen ist jedoch außerhalb des Bauelements möglich.In an advantageous variant, at least two ground paths of the filters, the pass-bands of which lie in different frequency bands, are connected to at least one common main ground path, which is connected to the corresponding associated main ground connection. The masses of the different filter stages of the same filter are preferably conductively connected to different ground terminals. The masses of the different filter stages of the respective filter are independently - in a variant galvanically separated from each other - led to the respective ground terminal. However, it is also possible to de different filter stages of the same filter to merge into a common main ground path and connect to a common main ground connection. However, the galvanic connection between these masses is possible outside of the device.
Durch die Zusammenführung von Massepfaden der in unterschiedlichen Bereichen durchlässigen Filter kann die Anzahl von Masseanschlüssen und somit die Grundfläche des Gesamtbauteils verringert werden.By merging ground paths of the filters which are permeable in different areas, the number of ground connections and thus the base area of the overall component can be reduced.
Durch die getrennte Masseanbindung der in einem gemeinsamen Frequenzbereich durchlässigen Filterstufen ein und desselben Filters gelingt es, im Gesamtfilter eine besonders hohe Selektion zu erzielen, da z.B. das Signalübersprechen über Massepfade vermieden wird.Due to the separate ground connection of the filter stages of one and the same filter which are permeable in a common frequency range, it is possible to achieve a particularly high selection in the overall filter, since e.g. the signal cross talk over ground paths is avoided.
In einer Variante weist das jeweilige Filter eine eingangs- seitige Filterstufe und eine ausgangsseitige Filterstufe auf. Massen der eingangsseitigen Filterstufen unterschiedlicher Filter sind zu einem gemeinsamen Hauptmassepfad zusammengeführt, der an einen ersten Masseanschluss angeschlossen ist. Massen der ausgangsseitigen Filterstufen unterschiedlicher Filter können ebenfalls zu einem gemeinsamen Massepfad, der an einen zweiten Hauptmasseanschluss angeschlossen ist, zusammengeführt sein.In one variant, the respective filter has an input-side filter stage and an output-side filter stage. Masses of the input-side filter stages of different filters are combined to form a common main ground path, which is connected to a first ground terminal. Masses of the output-side filter stages of different filters can likewise be combined to form a common ground path, which is connected to a second main ground terminal.
In einer weiteren Variante sind die Masse einer eingangsseitigen Filterstufe eines ersten Filters und die Masse einer ausgangsseitigen Filterstufe eines zweiten Filters zu einem gemeinsamen Hauptmassepfad zusammengeführt, der an einen ersten Hauptmasseanschluss angeschlossen ist. Die Massepfade einer ausgangsseitigen Filterstufe des ersten Filters und einer eingangsseitigen Filterstufe des zweiten Filters sind zu einem gemeinsamen Hauptmassepfad, der an einen zweiten Massean- schluss angeschlossen ist, zusammengeführt.In a further variant, the mass of an input-side filter stage of a first filter and the mass of an output-side filter stage of a second filter are combined to form a common main ground path, which is connected to a first main ground terminal. The ground paths of an output-side filter stage of the first filter and a Input-side filter stage of the second filter are combined to form a common main ground path, which is connected to a second ground terminal.
Die Filter sind vorzugsweise zumindest teilweise in mindestens einem akustischen Chip realisiert. Jedes Filter kann in einem separaten Chip realisiert sein. Es besteht auch die Möglichkeit, mindestens zwei Filter in oder auf einem gemeinsamen Chip zu realisieren. Die Filterstufen ein und desselben Filters sind vorzugsweise in oder auf einem gemeinsamen Chip realisiert. Unterschiedliche Filterstufen des gleichen Filters, die in voneinander verschiedenen Technologien, z. B. SAW/BAW, ausgeführt sind, können auch in oder auf unterschiedlichen Substraten realisiert sein.The filters are preferably realized at least partially in at least one acoustic chip. Each filter can be realized in a separate chip. It is also possible to realize at least two filters in or on a common chip. The filter stages of the same filter are preferably realized in or on a common chip. Different filter levels of the same filter used in different technologies, eg. B. SAW / BAW, may also be implemented in or on different substrates.
Das Bauelement umfasst z.B. ein Trägersubstrat, auf dem der Chip montiert ist oder mehrere Chips montiert sind. Die Außenanschlüsse des Bauelements, darunter die Masseanschlüsse, sind auf der Unterseite oder der Stirnseite des Trägersubstrats angeordnet.The device comprises e.g. a carrier substrate on which the chip is mounted or a plurality of chips are mounted. The outer terminals of the device, including the ground terminals, are arranged on the underside or the front side of the carrier substrate.
In einer weiteren Ausführung können bei einem Bauteil ohne Trägersubstrat die Außenanschlüsse durch auf dem Chip verankerte Bump-Reihen eines BGA (BGA = ball grid array) realisiert sein.In a further embodiment, in the case of a component without a carrier substrate, the external connections can be realized by bump rows of a BGA (BGA = ball grid array) anchored on the chip.
Die Zusammenführung von Massen oder besser die Verbindung von Massepfaden unterschiedlicher Filterstufen kann im oder auf dem Trägersubstrat realisiert sein. Alternativ ist die Zusammenführung von Massen unterschiedlicher Filterstufen bereits auf dem Chip möglich. Letzteres ist möglich, wenn die Filter in einem gemeinsamen Chip realisiert sind. In einer Variante umfasst mindestens eine der Filterstufen eine akustische Spur mit mindestens zwei akustisch gekoppelten Wandlern. Mindestens eine der Filterstufen kann auch als eine Laddertype-Anordnung von Wandlern ausgebildet sein. Die Laddertype-Anordnung weist mindestens einen Serienzweig und mindestens einen an den Serienzweig angeschlossenen Querzweig auf, wobei im Serienzweig ein Serienwandler und im Querzweig ein Parallelwandler angeordnet ist.The merging of masses or better the connection of ground paths of different filter stages can be realized in or on the carrier substrate. Alternatively, the merging of masses of different filter levels is already possible on the chip. The latter is possible if the filters are realized in a common chip. In one variant, at least one of the filter stages comprises an acoustic track with at least two acoustically coupled transducers. At least one of the filter stages may also be designed as a ladder-type arrangement of transducers. The ladder type arrangement has at least one series branch and at least one shunt branch connected to the series branch, a series converter being arranged in the series branch and a parallel converter being arranged in the shunt branch.
In einer Variante umfasst mindestens eine der Filterstufen einen Stapel mit übereinander angeordneten, akustisch gekoppelten BAW Resonatoren (BAW = bulk acoustic wave) . Eine Laddertype-Anordnung von BAW Resonatoren ist auch möglich. Mindestens eine der Filterstufen weist in diesem Fall mindestens einen Serienzweig und mindestens einen an den Serienzweig angeschlossenen Querzweig auf, wobei im Serienzweig ein Serienresonator und im Querzweig ein Parallelresonator angeordnet sind, die zusammen ein Grundglied bilden, das eine Filterstufe darstellt.In one variant, at least one of the filter stages comprises a stack of superposed, acoustically coupled BAW resonators (BAW = bulk acoustic wave). A ladder type arrangement of BAW resonators is also possible. In this case, at least one of the filter stages has at least one series branch and at least one shunt branch connected to the series branch, wherein a series resonator is arranged in the series branch and a parallel resonator is arranged in the transverse branch, which together form a basic element that represents a filter stage.
Im Trägersubstrat kann ein eingangsseitiges Anpassnetzwerk zur Anpassung der Eingangsimpedanz des jeweiligen Filters an einen bestimmten Impedanzpegel angeordnet sein. Im Trägersubstrat kann ein ausgangsseitiges Anpassnetzwerk zur Anpassung der Ausgangsimpedanz des jeweiligen Filters an einen bestimmten Impedanzpegel angeordnet sein. Das jeweilige Anpassnetzwerk weist mindestens ein passives Element, ausgewählt aus einer Serienkapazität, Parallelkapazität, Serieninduktivität und einer Parallelinduktivität, auf.An input-side matching network for adapting the input impedance of the respective filter to a specific impedance level can be arranged in the carrier substrate. An output matching network for adapting the output impedance of the respective filter to a specific impedance level can be arranged in the carrier substrate. The respective matching network has at least one passive element selected from a series capacitance, shunt capacitance, series inductance and a shunt inductance.
Der Eingang und/oder der Ausgang des jeweiligen Filters kann erdunsymmetrisch (single-ended) sein. Der Eingang und/oder der Ausgang des jeweiligen Filters kann auch differentiell (balanced) sein.The input and / or the output of the respective filter can be single-ended. The entrance and / or the output of the respective filter can also be differential (balanced).
Im Folgenden wird das angegebene Bauelement und seine vorteilhaften Ausgestaltungen anhand von schematischen und nicht maßstabgetreuen Figuren erläutert. Es zeigen:In the following, the specified component and its advantageous embodiments will be explained with reference to schematic and not to scale figures. Show it:
Figur 1 das Ersatzschaltbild eines Bauelements mit zwei Filtern, bei dem die Massen der ein- bzw. ausgangsseitigen Filterstufen zusammengeführt sind;Figure 1 shows the equivalent circuit of a device with two filters, in which the masses of the input and output side filter stages are brought together;
Figur 2 das Ersatzschaltbild eines Bauelements mit zwei Filtern, bei dem die Massen der ein- und ausgangsseitigen Filterstufen unterschiedlicher Filter zusammengeführt sind;FIG. 2 shows the equivalent circuit diagram of a component with two filters, in which the masses of the input and output filter stages of different filters are combined;
Figur 3 im Querschnitt das Bauelement, bei dem die Massen unterschiedlicher Filterstufen im Trägersubstrat zusammengeführt werden;3 shows in cross-section the component in which the masses of different filter stages are brought together in the carrier substrate;
Figur 4 das Ersatzschaltbild eines Bauelements mit zwei Filtern, bei dem die zu den Massepfaden beitragenden Leiterabschnitte samt dazugehöriger Induktivitäten dargestellt sind;FIG. 4 shows the equivalent circuit diagram of a component with two filters, in which the conductor sections which contribute to the ground paths, together with the associated inductances, are shown;
Figuren 5, 6 jeweils die Ansicht eines beispielhaften Footprints des Bauelements.Figures 5, 6 each show the view of an exemplary footprint of the device.
Die Figuren 1, 2 zeigen jeweils ein Bauelement mit zwei Filtern Fl, F2, die in einem gemeinsamen Gehäuse oder auf einem gemeinsamen Trägersubstrat TS angeordnet sind.Figures 1, 2 each show a component with two filters Fl, F2, which are arranged in a common housing or on a common carrier substrate TS.
Das erste Filter Fl weist eine eingangsseitige Filterstufe Al und eine ausgangsseitige Filterstufe A2 auf. Das zweite FiI- ter F2 weist eine eingangsseitige Filterstufe Bl und eine ausgangsseitige Filterstufe B2 auf.The first filter Fl has an input-side filter stage Al and an output-side filter stage A2. The second FiI- ter F2 has an input-side filter stage Bl and an output-side filter stage B2.
Die eingangsseitige Filterstufe Al des ersten Filters Fl ist in Fig. 1 an einen Eingangsanschluss INa und in Fig. 2 an zwei Eingangsanschlüsse INai, INa2 angeschlossen. Die ausgangsseitige Filterstufe A2 des ersten Filters Fl ist in Fig. 1 an einen Ausgangsanschluss OUTa und in Fig. 2 an zwei Ausgangsanschlüsse OUTai, OUTa2 angeschlossen. Dies gilt in entsprechender Weise für die eingangsseitige Filterstufe Bl sowie ausgangsseitige Filterstufe B2 des zweiten Filters F2 und die Eingangsanschlüsse INb, INbi, INb2 bzw. Ausgangsanschlüsse OUTb, OUTbi, OUTb2.The input-side filter stage Al of the first filter Fl is connected in FIG. 1 to an input terminal IN a and in FIG. 2 to two input terminals IN a i, IN a2 . The output-side filter stage A2 of the first filter Fl is connected in FIG. 1 to an output terminal OUT a and in FIG. 2 to two output terminals OUT a i, OUT a2 . This applies correspondingly to the input-side filter stage Bl and the output-side filter stage B2 of the second filter F2 and the input terminals IN b , IN b i, IN b2 and output terminals OUT b , OUTbi, OUT b2 .
In der Variante gemäß der Figur 1 werden die Massen der ein- gangsseitigen Filterstufen Al, Bl zusammengeführt und an einen gemeinsamen Masseanschluss GNDl angeschlossen. Auch die Massen der ausgangsseitigen Filterstufen A2, B2 werden zusammengeführt und an einen gemeinsamen Masseanschluss GND2 angeschlossen .In the variant according to FIG. 1, the masses of the input-side filter stages A1, B1 are combined and connected to a common ground terminal GND1. The masses of the output-side filter stages A2, B2 are merged and connected to a common ground terminal GND2.
In der Variante gemäß der Figur 2 wird die Masse der ein- gangsseitigen Filterstufe Al des ersten Filters Fl mit der Masse der ausgangsseitigen Filterstufe B2 des zweiten Filters F2 zusammengeführt und an einen gemeinsamen Masseanschluss GNDl angeschlossen. Die Masse der eingangsseitigen Filterstufe Bl des zweiten Filters F2 wird mit der Masse der ausgangsseitigen Filterstufe A2 des ersten Filters Fl zusammengeführt und an einen gemeinsamen Masseanschluss GND2 angeschlossen. Zumindest abschnittsweise sind die entsprechenden Filterstufen über den gleichen Massepfad mit einem Masseanschluss verbunden, der für die entsprechenden Filterstufen den Hauptmas- seanschluss darstellt. Die Gesamtanzahl der Filterstufen des Bauelements beträgt vier. In beiden gezeigten Varianten beträgt die Anzahl der Masseanschlüsse zwei und ist somit kleiner als die Gesamtanzahl der Filterstufen des Bauelements.In the variant according to FIG. 2, the mass of the input-side filter stage A1 of the first filter F1 is combined with the mass of the output-side filter stage B2 of the second filter F2 and connected to a common ground terminal GND1. The mass of the input-side filter stage Bl of the second filter F2 is merged with the ground of the output-side filter stage A2 of the first filter Fl and connected to a common ground terminal GND2. At least in sections, the corresponding filter stages are connected via the same ground path to a ground terminal, which represents the main terminal for the corresponding filter stages. The total number of filter stages of the device is four. In both variants shown, the number of ground connections is two and is thus smaller than the total number of filter stages of the component.
Das Trägersubstrat TS umfasst mindestens zwei dielektrische Schichten sowie abwechselnd mit diesen angeordnete Metallisierungsebenen. Auf der Unterseite des Substrats sind Außenanschlüsse des Bauelements und auf der Oberseite des Substrats Kontakte zur Kontaktierung von mindestens einem Chip, in dem die Filter Fl, F2 realisiert sind, angeordnet.The carrier substrate TS comprises at least two dielectric layers and metallization planes arranged alternately therewith. On the underside of the substrate are external terminals of the device and on top of the substrate contacts for contacting of at least one chip, in which the filters Fl, F2 are realized arranged.
In der Figur 3 ist eine Variante vorgestellt, bei der die Filter Fl, F2 in separaten akustischen Chips realisiert sind. Die Zusammenführung der Massen der Filterstufen erfolgt in einer innen liegenden Ebene des Trägersubstrats TS.FIG. 3 shows a variant in which the filters F1, F2 are implemented in separate acoustic chips. The merging of the masses of the filter stages takes place in an inner plane of the carrier substrate TS.
Das Bauelement ist vorzugsweise zur SMD-Montage geeignet und weist die Außenanschlüsse in Form von einer auf die Unterseite des Trägersubstrats aufgetragenen Metallschicht auf.The component is preferably suitable for SMD mounting and has the outer terminals in the form of a metal layer applied to the underside of the carrier substrate.
Figur 4 zeigt das Ersatzschaltbild eines Bauelements mit zwei Filtern Fl, F2, von denen hier je zwei Filterstufen Al, A2 bzw. Bl, B2 dargestellt und je eine dritte Filterstufe A3, B3 angedeutet sind. Am Bild soll die Definition der Hauptmassepfade und Hauptmassesanschlüsse erläutert werden.FIG. 4 shows the equivalent circuit diagram of a component with two filters F1, F2, of which two filter stages A1, A2 or B1, B2 are shown here and one third filter stage A3, B3 each is indicated. The picture explains the definition of the main mass paths and main ground connections.
Jeder Massepfad besteht aus Leiterabschnitten und umfasst außerdem alle elektrischen Verbindungen zwischen der Masse an der Filterstruktur und dem jeweiligen Masseanschluss an der Unterseite des Substrats. Dazu zählen z.B. Bumps und Durch- kontaktieren und andere Elemente. Der Einfachheit halber sind diese Elemente im Ersatzschaltbild als Induktivitäten Ll bis L5. dargestellt . Es werden der Übersichtlichkeit halber nur die Massepfade der beiden ersten Filterstufen Al und Bl betrachtet. Die anderen Massepfade können ähnlich aufgebaut und miteinander verbunden sein.Each ground path consists of conductor sections and also includes all electrical connections between the ground on the filter structure and the respective ground terminal on the underside of the substrate. These include, for example, bumps and through-contacts and other elements. For simplicity, these elements are in the equivalent circuit diagram as inductors Ll to L5. shown. For the sake of clarity, only the ground paths of the first two filter stages Al and Bl are considered. The other ground paths may be similarly constructed and interconnected.
Massepfade für die Filterstufe Al z.B. sind alle möglichen Strompfade zwischen Al und einem Masseanschluss . Der Hauptmassepfad ist derjenige, der in der Summe der Einzelinduktivitäten die geringste Gesamtinduktivität aufweist. Für die Filterstufe Al ist kann dies der Pfad über Ll, L2 und L3 zu GND2 sein, wenn (L2 + L3) kleiner als L5. Dann verläuft der Hauptmassepfad für die Filterstufe Bl über L4 und L3 ebenfalls zum Masseanschluss, da L5 > (L2+L3) . GND2 ist dann Hauptmasseanschluss für die beiden Filterstufen Al und Bl. Die weiteren Massepfade von Al über Ll und L5 zu GNDl sowie der von Bl über L4, L2 und L5 sind dann „Nebenmassepfade" mit höherer Gesamtinduktivität als die jeweiligen Hauptmassepfade. Der Leiterabschnitt mit der Induktivität L3 ist beiden Hauptmassepfaden gemein. Dargestellt sind hier auf dem Trägersubstrat realisierte Elemente der Massepfade. Es wirken natürlich alle Abschnitte der entsprechenden elektrischen Verbindungen mit, die auch auf den Filterchips realisiert sein können. Auch kann die Verbindung der Massepfade Filterstufen zweier unterschiedlicher Filter bereits auf dem oder auf einem der Filterchips erfolgen.Ground paths for the filter stage Al e.g. are all possible rungs between Al and a ground connection. The main ground path is the one having the least total inductance in the sum of the single inductances. For the filter stage Al, this may be the path through Ll, L2 and L3 to GND2, if (L2 + L3) is less than L5. Then, the main ground path for the filter stage Bl via L4 and L3 also goes to the ground terminal, since L5> (L2 + L3). GND2 is then the main ground connection for the two filter stages Al and Bl. The further ground paths from Al via Ll and L5 to GNDl and from Bl via L4, L2 and L5 are then "secondary ground paths" with higher total inductance than the respective main ground paths Inductance L3 is common to both main ground paths, here represented on the carrier substrate realized elements of the ground paths, of course, all sections of the corresponding electrical connections, which can also be realized on the filter chips, or the connection of the ground paths filter stages of two different filters already on take place on or on one of the filter chips.
Verschiedene Varianten eines Footprints des vorstehend erläuterten Bauelements mit vier Filterstufen sind in den Figuren 5 und 6 gezeigt. In der Variante gemäß der Figur 5 ist der Masseanschluss GNDl zwischen den Eingangsanschlüssen INa, INb des ersten und des zweiten Filters Fl, F2 angeordnet. Der Masseanschluss GND2 ist zwischen den Ausgangsanschlüssen OUTa, OUTb des ersten und des zweiten Filters Fl, F2 angeordnet .Various variants of a footprint of the above-described device with four filter stages are shown in FIGS. 5 and 6. In the variant according to FIG. 5, the ground connection GND1 is arranged between the input connections IN a , IN b of the first and second filters F1, F2. Ground terminal GND2 is between the output terminals OUT a , OUT b of the first and second filters Fl, F2 arranged.
In der Variante gemäß der Figur 6 ist der Masseanschluss GNDl zwischen den Anschlüssen INa, OUTa des ersten Filters Fl und der Masseanschluss GND2 zwischen den Anschlüssen INb, OUTb des zweiten Filters F2 angeordnet.In the variant according to Figure 6, the ground terminal GNDL between the terminals IN a, a OUT is disposed the first filter Fl and the ground terminal GND2 between the terminals in B, OUT b of the second filter F2.
Die Fläche des jeweiligen Masseanschlusses kann in allen Varianten, wie in Fig. 5 angedeutet, gleich der Fläche der signalführenden Anschlüsse sein. Die Fläche der Masseanschlüsse kann alternativ, wie in Fig. 6 angedeutet, etwas größer als die Fläche der signalführenden Anschlüsse sein. Jedoch beträgt das Verhältnis dieser Flächen vorzugsweise maximal 1,5. Dies hat den Vorteil, dass die Dosierung der Lotmasse und somit die Qualität der Lotverbindung des jeweiligen Anschlusses z. B. mit einer Leiterplatte besonders gut kontrolliert werden kann.The surface of the respective ground connection can, in all variants, as indicated in FIG. 5, be equal to the area of the signal-carrying connections. Alternatively, as indicated in FIG. 6, the area of the ground connections may be slightly larger than the area of the signal-carrying terminals. However, the ratio of these areas is preferably at most 1.5. This has the advantage that the dosage of the solder mass and thus the quality of the solder joint of the respective terminal z. B. can be controlled particularly well with a circuit board.
Die Anzahl der Filter und Filterstufen im Bauelement ist nicht auf die in den Figuren erläuterten Varianten begrenzt. Auch die Anzahl dielektrischer Schichten im Trägersubstrat kann beliebig sein. The number of filters and filter stages in the component is not limited to the variants explained in the figures. The number of dielectric layers in the carrier substrate can also be arbitrary.
BezugszeichenlisteLIST OF REFERENCE NUMBERS
Fl erstes FilterFl first filter
F2 zweites FilterF2 second filter
Al eingangsseitige Filterstufe des ersten Filters FlAl input side filter stage of the first filter Fl
A2 ausgangsseitige Filterstufe des ersten Filters FlA2 output-side filter stage of the first filter Fl
Bl eingangsseitige Filterstufe des zweiten Filters F2Bl input side filter stage of the second filter F2
B2 ausgangsseitige Filterstufe des zweiten Filters F2B2 output-side filter stage of the second filter F2
GNDl, GND2 MasseanschlüsseGNDl, GND2 ground connections
INa, INai, INa2 Eingangsanschlüsse des ersten Filters FlIN a , IN a i, IN a 2 Input terminals of the first filter Fl
OUTa, OUTai, OUTa2 Ausgangsanschlüsse des ersten Filters FlOUT a , OUT a i, OUT a2 Output terminals of the first filter Fl
INb, INbi, INb2 Eingangsanschlüsse des zweiten Filters F2IN b , INbi, IN b 2 input terminals of the second filter F2
OUTb, OUTbi, 0UTb2 Ausgangsanschlüsse des zweiten Filters F2OUT b , OUT b i, 0 OUT b 2 output terminals of the second filter F2
TS TrägersubstratTS carrier substrate
Ll, L2, ...L5 Induktivitäten im Massepfad Ll, L2, ... L5 inductors in the ground path

Claims

Patentansprüche claims
1. Mit akustischen Wellen arbeitendes Bauelement1. Working with acoustic waves device
- umfassend mindestens zwei verschiedenen Frequenzbändern zugeordnete Filter (Fl, F2),comprising filters (Fl, F2) associated with at least two different frequency bands,
- wobei eines der Filter mindestens eine Filterstufe (Al, A2) aufweist und ein anderes Filter mindestens zwei Filterstufen (Bl, B2) aufweist, wobei unterschiedliche Filterstufen in separaten akustischen Spuren oder als separate Resonatorstapel realisiert sind,wherein one of the filters has at least one filter stage (A1, A2) and another filter has at least two filter stages (B1, B2), wherein different filter stages are realized in separate acoustic tracks or as separate resonator stacks,
- mit Masseanschlüssen (GNDl, GND2), die mit Masse der Filterstufen galvanisch verbunden und als Außenanschlüsse des Bauelements vorgesehen sind, wobei jeder Filterstufe ein Hauptmasseanschluss zugeordnet ist, der mit der jeweiligen Masse über einen Hauptmassepfad verbunden ist, wobei zumindest Teile eines Hauptmassepfads gleichzeitig von mindestens zwei Filterstufen verschiedener Filter genutzt werden.- With ground terminals (GNDL, GND2), which are galvanically connected to ground of the filter stages and provided as external terminals of the device, each filter stage is associated with a main ground terminal, which is connected to the respective ground via a main ground path, wherein at least parts of a Hauptmassepfad simultaneously at least two filter stages of different filters are used.
2. Bauelement nach Anspruch 1, bei dem mindestens ein Masseanschluss als Hauptmasseanschluss von mindestens zwei Filterstufen verschiedener Filter ausgelegt ist.2. The component according to claim 1, wherein at least one ground connection is designed as the main ground connection of at least two filter stages of different filters.
3. Bauelement nach Anspruch 1, bei dem mindestens ein Masseanschluss als Hauptmasseanschluss von mindestens zwei Filterstufen des gleichen Filters ausgelegt ist.3. The component according to claim 1, wherein at least one ground connection is designed as the main ground connection of at least two filter stages of the same filter.
4. Bauelement nach einem der Ansprüche 1-3, bei dem neben dem zumindest einen mit einem Hauptmassepfad verbundenen Hauptmasseanschluss noch zumindest ein weiterer Masseanschluss vorhanden ist, der nicht mit einem Hauptmassepfad verbunden ist.4. The component according to one of claims 1-3, wherein, in addition to the at least one main ground connection connected to a main ground connection at least one further Ground connection is present, which is not connected to a main ground path.
5. Bauelement nach einem der Ansprüche 1-4,5. Component according to one of claims 1-4,
- wobei das jeweilige Filter mit mindestens zwei signalführenden Anschlüssen (INa, INb, OUTa, OUTb) , die als Außenanschlüsse des Bauelements vorgesehen sind, elektrisch verbunden ist,wherein the respective filter is electrically connected to at least two signal-carrying terminals (IN a , IN b , OUT a , OUT b ), which are provided as external terminals of the component,
- wobei die Fläche des jeweiligen Masseanschlusses (GNDl, GND2) nicht größer ist als die doppelte Fläche des jeweiligen signalführenden Anschlusses (INa, INb, OUTa, OUTb) .- Wherein the surface of the respective ground terminal (GNDL, GND2) is not greater than twice the area of the respective signal-carrying terminal (IN a , IN b , OUT a , OUT b ).
6. Bauelement nach einem der Ansprüche 1-5,6. Component according to one of claims 1-5,
- wobei zumindest zwei Filterstufen des jeweiligen Filters (Fl, F2) elektrisch kaskadiert geschaltet sind.- Wherein at least two filter stages of the respective filter (Fl, F2) are connected electrically cascaded.
7. Bauelement nach einem der Ansprüche 1 bis 6,7. The component according to one of claims 1 to 6,
- wobei die Hauptmassepfade von zwei unterschiedlichen Filtern, deren Durchlassbereiche in unterschiedlichen Frequenzbändern liegen, zumindest teilweise und zumindest abschnittsweise zusammenfallen und an einen gemeinsamen Hauptmassean- schluss angeschlossen sind.- Wherein the main ground paths of two different filters, the pass bands are in different frequency bands, at least partially and at least partially coincide and are connected to a common main ground connection.
8. Bauelement nach einem der Ansprüche 1 bis 7,8. Component according to one of claims 1 to 7,
- wobei die Hauptmassepfade von unterschiedlichen Filterstufen des gleichen Filters mit unterschiedlichen Hauptmasseanschlüssen leitend verbunden sind.- Wherein the main ground paths of different filter stages of the same filter with different main ground connections are conductively connected.
9. Bauelement nach Anspruch 8,9. The component according to claim 8,
- wobei die Hauptmassepfade der unterschiedlichen Filterstufen des jeweiligen Filters galvanisch voneinander getrennt bis zum jeweiligen Hauptmasseanschluss geführt werden. - Wherein the main mass paths of the different filter stages of the respective filter are galvanically separated from each other to the respective main ground connection.
10. Bauelement nach einem der Ansprüche 1 bis 9,10. The component according to one of claims 1 to 9,
- wobei das jeweilige Filter (Fl, F2) eine eingangsseitige Filterstufe (Al, Bl) und eine ausgangsseitige Filterstufe (A2, B2) aufweist,- wherein the respective filter (Fl, F2) has an input-side filter stage (Al, Bl) and an output-side filter stage (A2, B2),
- wobei Massepfade der eingangsseitigen Filterstufen (Al, Bl) unterschiedlicher Filter zu einem gemeinsamen Massepfad, der an einen ersten Hauptmasseanschluss angeschlossen ist, zusammengeführt sind,- Wherein ground paths of the input-side filter stages (Al, Bl) of different filters to a common ground path, which is connected to a first main ground terminal, merged,
- wobei Massepfade der ausgangsseitigen Filterstufen (A2, B2) unterschiedlicher Filter zu einem gemeinsamen Massepfad, der an einen zweiten Hauptmasseanschluss angeschlossen ist, zusammengeführt sind.- Wherein ground paths of the output side filter stages (A2, B2) of different filters to a common ground path, which is connected to a second main ground terminal, merged.
11. Bauelement nach einem der Ansprüche 1 bis 9,11. The component according to one of claims 1 to 9,
- wobei das jeweilige Filter (Fl, F2) eine eingangsseitige Filterstufe (Al, Bl) und eine ausgangsseitige Filterstufe (A2, B2) aufweist,- wherein the respective filter (Fl, F2) has an input-side filter stage (Al, Bl) and an output-side filter stage (A2, B2),
- wobei ein mit der Masse einer eingangsseitigen Filterstufe eines ersten Filters und ein mit der Masse einer ausgangsseitigen Filterstufe eines zweiten Filters verbundener Massepfad zu einem gemeinsamen Hauptmassepfad, der an einen ersten Hauptmasseanschluss (GNDl) angeschlossen ist, zusammengeführt sind,wherein a ground path connected to the ground of an input side filter stage of a first filter and a ground connected to the ground of an output side filter stage of a second filter are merged to a common ground ground path connected to a first main ground terminal (GND1);
- wobei ein mit der Masse einer ausgangsseitigen Filterstufe des ersten Filters und ein mit der Masse einer eingangsseitigen Filterstufe des zweiten Filters verbundener Massepfad zu einem gemeinsamen Hauptmassepfad, der an einen zweiten Hauptmasseanschluss (GND2) angeschlossen ist, zusammengeführt sind.wherein a ground path connected to the ground of an output side filter stage of the first filter and a ground connected to the ground of an input side filter stage of the second filter are merged to a common ground ground path connected to a second main ground terminal (GND2).
12. Bauelement nach einem der Ansprüche 1 bis 11,12. Component according to one of claims 1 to 11,
- mit einem Trägersubstrat (TS) und mindestens einem akustischen Chip, der auf der Oberseite des Trägersubstrats mon- t iert i s t ,- With a carrier substrate (TS) and at least one acoustic chip, which on the top of the carrier substrate mon- t is
- wobei die Filter (Fl, F2) zumindest teilweise in oder auf dem mindestens einem Chip realisiert sind,- wherein the filters (Fl, F2) are realized at least partially in or on the at least one chip,
- wobei die Masseanschlüsse (GNDl, GND2) und signalführenden Anschlüsse (INa, INb, OUTa, OUTb) der Filter auf der Unterseite des Trägersubstrats (TS) angeordnet sind.- Wherein the ground terminals (GNDL, GND2) and signal-carrying terminals (IN a , IN b , OUT a , OUT b ) of the filter on the underside of the carrier substrate (TS) are arranged.
13. Bauelement nach einem der Ansprüche 1 bis 12,13. Component according to one of claims 1 to 12,
- wobei die Zusammenführung von Massen unterschiedlicher Filterstufen auf dem Chip realisiert ist.- Wherein the merging of masses of different filter stages is realized on the chip.
14. Bauelement nach einem der Ansprüche 1 bis 12,14. Component according to one of claims 1 to 12,
- wobei die Zusammenführung von Massepfaden unterschiedlicher Filterstufen im Trägersubstrat (TS) realisiert ist.- Wherein the combination of ground paths of different filter stages in the carrier substrate (TS) is realized.
15. Bauelement nach einem der Ansprüche 1 bis 14,15. Component according to one of claims 1 to 14,
- wobei mindestens eine der Filterstufen (Al, A2, Bl, B2) mit akustischen Oberflächenwellen arbeitende Wandler umfasst.- Wherein at least one of the filter stages (Al, A2, Bl, B2) comprises acoustic surface acoustic waves transducer operates.
16. Bauelement nach Anspruch 15,16. Component according to claim 15,
- wobei mindestens eine der Filterstufen (Al, A2, Bl, B2) eine akustische Spur mit mindestens zwei akustisch gekoppelten Wandlern umfasst, und/oder- Wherein at least one of the filter stages (Al, A2, Bl, B2) comprises an acoustic track with at least two acoustically coupled transducers, and / or
- wobei mindestens eine der Filterstufen mindestens einen Serienzweig und mindestens einen an den Serienzweig angeschlossenen Querzweig aufweist, wobei im Serienzweig ein Serienwandler und im Querzweig ein Parallelwandler angeordnet ist.- Wherein at least one of the filter stages has at least one series branch and at least one connected to the series branch transverse branch, wherein in the series branch a series converter and in the transverse branch a parallel converter is arranged.
17. Bauelement nach einem der Ansprüche 1 bis 16,17. Component according to one of claims 1 to 16,
- wobei mindestens eine der Filterstufen (Al, A2, Bl, B2) mit akustischen Volumenwellen arbeitende Resonatoren umfasst. - Wherein at least one of the filter stages (Al, A2, Bl, B2) comprises working with bulk acoustic waves resonators.
18. Bauelement nach Anspruch 17,18. Component according to claim 17,
- wobei mindestens eine der Filterstufen einen Stapel mit ü- bereinander angeordneten, akustisch gekoppelten Resonatoren umfasst, und/oderwherein at least one of the filter stages comprises a stack of acoustically coupled resonators arranged above one another, and / or
- wobei mindestens eine der Filterstufen mindestens einen Serienzweig und mindestens einen an den Serienzweig angeschlossenen Querzweig aufweist, wobei im Serienzweig ein Serienresonator und im Querzweig ein Parallelresonator angeordnet ist . - Wherein at least one of the filter stages has at least one series branch and at least one connected to the series branch transverse branch, wherein in the series branch a series resonator and in the transverse branch a parallel resonator is arranged.
PCT/EP2008/054928 2007-04-24 2008-04-23 Component working with acoustic waves WO2008129062A1 (en)

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