WO2008127438A2 - Approche de contrôle de flux parallèle (pfc) pour un contrôle actif, une caractérisation, et la manipulation de nanofluides - Google Patents

Approche de contrôle de flux parallèle (pfc) pour un contrôle actif, une caractérisation, et la manipulation de nanofluides Download PDF

Info

Publication number
WO2008127438A2
WO2008127438A2 PCT/US2007/085630 US2007085630W WO2008127438A2 WO 2008127438 A2 WO2008127438 A2 WO 2008127438A2 US 2007085630 W US2007085630 W US 2007085630W WO 2008127438 A2 WO2008127438 A2 WO 2008127438A2
Authority
WO
WIPO (PCT)
Prior art keywords
channel
nanofluidic
pressure
flow
microfluidic channel
Prior art date
Application number
PCT/US2007/085630
Other languages
English (en)
Other versions
WO2008127438A3 (fr
Inventor
Stephen J. Fonash
Wook Jun Nam
Huinan Liang
Original Assignee
The Penn State Research Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by The Penn State Research Foundation filed Critical The Penn State Research Foundation
Publication of WO2008127438A2 publication Critical patent/WO2008127438A2/fr
Publication of WO2008127438A3 publication Critical patent/WO2008127438A3/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/088—Channel loops
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0896—Nanoscaled
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0475—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
    • B01L2400/0487—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure fluid pressure, pneumatics

Definitions

  • the present invention relates to nanofluidics, including the novel parallel flow control (PFC) approach for nano-scale fluidics control, characterization, and manipulation thereof.
  • PFC parallel flow control
  • Nanofluidics which is generally ascribed to fluidic flow in channels with at least one cross-sectional dimension of about 100 nm or less, offers even more precise fluid control over the traditional microfluidic systems.
  • samples used in sensing, chemical reactions, or both can now even be in the pL range or smaller. Therefore, chemical, medical, and biological analysis/detection systems as well as chemical processing systems are now rapidly moving toward the use of nanofluidics to exploit smaller sample size, potentially more precise flow control, and new sensing and chemical reaction approaches [8-12].
  • nano-scale active flow is to have a nanochannel in communication with a microchannel which is, in turn, in communication with a reservoir.
  • fluid in the reservoir wets and fills the microchannel and capillary action then allows this fluid to fill the nanochannel.
  • active flow can be established by one of three ways [15, 16, 17]: (1) electroosmosis, (2) electrophoresis, or (3) pressure gradients.
  • electroosmosis (2) electrophoresis
  • pressure-driven flow is more general since it does not necessitate the presence of charged entities and therefore does not rely on the complexities of their motion.
  • the use of a direct, pump-imposed, pressure gradient across a nanochannel has been tried (See FIG. IA) but tends to be unstable for the pumps commonly used (e.g., syringes) and leads to very long sample residence times in the series-connected microchannels [17].
  • the present invention provides an active nanofluidic flow control approach which we term parallel flow control (PFC).
  • PFC employs a microfluidic flow which interfaces with the "outside world" to set up the pressure gradient across a nanofluidic channel and to thereby realize fine nanofluidic flow control.
  • the present invention provides two direct, accessible, and straightforward approaches to measuring nanofluidic flow rate with high accuracy.
  • the present invention allows for manipulating nano-scale (or smaller) volumes of fluid through a fluidic system for applications in technical, medical, and scientific areas that can profit from the ability to use limited sample volumes in analysis/detection (sensing), chemical reactions, or both.
  • a method of active nanofluidic flow control includes providing a nanofluidic channel and a pressure- driven microfluidic channel connected in parallel and actively controlling flow through the nanofluidic channel by using the pressure-driven microfluidic channel.
  • a method of nanofluidic flow measurement is provided using a geometrically determined flow rate ratio.
  • an additional method of nanofluidic flow measurement is provided. This option includes providing a nanofluidic channel, a pressure-driven microfluidic channel connected in parallel for flow control, and an additional measurement microfluidic channel connected in series for direct flow measurement of the nanofluidic flow rate by achieved by measuring the flow rate in the measurement microfluidic channel. This flow in the measurement microfluidic channel is monitored using detection approaches such as direct optical or electrical observation.
  • a method of nano-scale volume fluid manipulation includes providing a nanofluidic channel and a pressure-driven microfluidic channel connected in parallel and manipulating nano-scale volume fluid through the nanofluidic channel by using the pressure-driven microfluidic channel.
  • a method of fabricating a fluidic system includes forming a nanofluidic channel with an optional measurement microchannel in series and a pressure-driven microfluidic channel connected to the nanofluidic channel in parallel using micro-/nano-fabrication.
  • FIG. IA is a side view of a nanofluidic flow control system using the approach of a direct, pump-imposed, pressure gradient across a nanochannel.
  • FIG. IB is a top view of a nanofluidic flow control system using the approach of flow in independent microchannels causing a pressure gradient across a nanochannel.
  • FIG. 2A is a schematic of the parallel flow control (PFC) approach for nanofluidic flow control where the pressure gradient across the nanofluidic channel is controlled by the pressure-driven microfluidic flow at points A and B (Top and side views).
  • PFC parallel flow control
  • FIG. 2B is a schematic of the parallel flow control (PFC) approach for nanofluidic flow control where the pressure gradient across the nanofluidic channel is controlled by the pressure-driven microfluidic flow at A and by a fixed pressure (e.g., atmospheric pressure) at B (Top view).
  • FIG. 3 A Schematic of the approach of FIG. 2B with an additional measurement microfluidic channel designed to allow the direct measurement of flow through the nanofluidic channel.
  • FIG. 3B Schematic of the approach of FIG. 2B used to manipulate nano-scale volumes of fluid using another fluid (e.g., air).
  • FIG. 4A is a schematic of fluidic flow model.
  • FIG. 4B illustrates an electric circuit model corresponding to the nanofluidic flow control system.
  • R n and R m represent the flow resistance of nanofluidic channel and pressure- driven micro fluidic channel, respectively.
  • the current source represents the flow rate source controlled by a syringe pump.
  • the flow through the nanofluidic channel can be controlled by the flow through the pressure-driven microfluidic channel with the flow rate ratio decided by Eq. (5).
  • FIG. 5 A illustrates a nanofluidic channel patterned in glass by drying etching.
  • FIG. 5B illustrates a microfluidic channel patterned in glass by wet etching.
  • FIG. 5C illustrates access ports drilled through glass.
  • FIG. 5D is a schematic of the active nanofluidic flow control system after glass bonding.
  • FIG. 6 A illustrates bonded nanofluidic flow control device as seen under optical microscopy.
  • FIG. 6B illustrates cross-sectional FESEM picture of bonded nanofluidic channel.
  • the channel is about 1 OOnm high and 15 ⁇ m wide.
  • FIG. 7A illustrates an additional measurement microfluidic channel in series with the nanofluidic channel, the bonded nanofluidic flow rate measurement system under optical microscopy.
  • FIG. 7B illustrates the same system with water infused by a syringe pump and the water-air interface visible in the measurement microfluidic channel.
  • FIG. 8 A is an optical fluorescence picture of the active nanofluidic flow control system. The flow through the nanofluidic channel is controlled by pressure-driven microfluidic flow. (Inset: device on silicon to enhance contrast).
  • FIG. 8B is an optical fluorescence picture of the fluidic system after infusing DI water for 5 mins.
  • FIG. 9A illustrates optical fluorescence spectra produced in the nanofluidic channel region with fluorescein solution infused through the system.
  • FIG. 9B illustrates a temporal fluorescence spectrum (integrated between 505nm and 525nm) behavior in the nanochannel region on syringe infusion of a fluorescein solution at constant rates of 0.5 ml/hr or 1 ml/hr.
  • FIG. 9C illustrates temporal fluorescence spectrum (integrated between 505nm and 525nm) behavior in the nanochannel region after stopping the fluorescein syringe infusion. The previously infused fluorescein molecules bleach under the incident laser causing a 25% light intensity decrease within 20 mins.
  • FIG. 10 illustrates nanochannel flow rates as a function of syringe, or equivalently, pressure-driven microchannel flow rates. Shown are the experimental values obtained by tracking flow in the measurement microchannel, the calculated values from the product of
  • nanofluidic channel generally means a fluidic channel having a cross-section with at least one of the dimensions being on the order of about 1 to about 100 nm.
  • micro fluidic channel generally means a fluidic channel having a cross-section with dimensions being on the order of about 0.2 micrometers or larger.
  • the present invention focuses on the active flow control, flow rate measurement, and nano-scale volume manipulation through a nanofluidic channel which is a component in analytical, chemical reaction or both systems.
  • parallel flow control PFC uses flow in the microfluidic channel, which interfaces with the
  • PFC parallel flow control
  • the pressure gradient across the nanochannel 14 is controlled by the microfluidic channel flow at points A and B.
  • the pressure gradient is controlled by the microfluidic channel flow established pressure at A and a fixed pressure at point B (e.g., point B is at atmospheric pressure), the same pressure being maintained at ports 18A and 18B.
  • Air bubble avoidance is easily attained by first filling the up-stream reservoir and then the pressure-driven microfluidic channel 12 in both versions.
  • the PFC approach of either the first embodiment (FIG. 2A) or the second embodiment (FIG. 2B) can provide essentially infinitely fine nanofluidic channel flow control by using one pump such as a syringe pump, the most universal fluid handling instrument.
  • the flow rate through the pressure-driven microfluidic channel 12 can be varied for example, from 1 ⁇ L/hr to lL/hr in either embodiment by using a syringe pump, for example, the flow rate through the nanofluidic channel 14 can be adjusted by changing the dimensions of the two channel types. Based on the size-scale differences between nano- and microfluidic channels, flow rate ratios of 10 ⁇ 4 : 1 and lower value are easily attainable with the PFC approach thereby allowing the attainment of a broad range of fine nanofluidic flow control. Both version 1 and 2 of Fig 2 allow the
  • nanochannel flow rate to be determined and thereby controlled by using the product of — - ,
  • the geometrically determined flow rate ratio of the nanochannel flow rate to the microchannel flow rate, and the pressure-driving (e.g., syringe) flow rates are included in the geometrically determined flow rate ratio of the nanochannel flow rate to the microchannel flow rate, and the pressure-driving (e.g., syringe) flow rates.
  • An option in the PFC configuration also allows the direct observation and therefore additional measurement of the actual nanofluidic flow rate which is controlled by the pressure-driven microfluidic flow.
  • This PFC option is based on the embodiment of FIG. 2B and is shown in FIG. 3A. This option is seen to have an additional measurement microfluidic channel 20, which may be serpentine to extend the time of observation, which is connected with the nanofluidic channel 14 in series to work as a real-time, nanochannel flow monitor.
  • both the pressure-driven microfluidic channel 12 and the measurement microfluidic channel 20 are open to the same pressure (e.g., atmosphere) at one end, and since the pressure across the measurement (e.g., serpentine) microfluidic channel 20 is essentially negligible compared with the pressure across the nanofluidic channel 14, the same pressure exists across both the pressure-driven microfluidic channel 12 and nanofluidic channel 14.
  • Flow in the nanochannel can be directly monitored by measuring flow in the series connected measurement microchannel in this arrangement. For example the filling rate of fluid into measurement microfluidic channel 20 can be observed from the position of fluid- air interface and by knowing the cross-section area of the measurement microfluidic channel 20.
  • any PFC system can always be calculated from the product of — — and the pressure-driving
  • the PFC concept also provides the ability to manipulate small (e.g., nano-scale or smaller) volumes of fluid through the nanofluidic channel 14 in case of limited sample volumes.
  • small volumes of fluid e.g., nano-scale or smaller volumes of fluid through the nanofluidic channel 14 in case of limited sample volumes.
  • FIG. 3B a fluid sample can be transported down the pressure-driven microfluidic channel 12 to access the nanofluidic channel 14 at point A (FIG. 3B) as seen in the enlargement in this figure.
  • some fluid e.g., a gas such as air
  • the fluid sample can be driven through the nanofluidic channel 14 by impacting pressure at left port 16.
  • the devices used in our demonstration and preliminary evaluation of the PFC concept were fabricated in a class- 10/100 cleanroom.
  • the fabrication processes are CMOS compatible allowing potential application in future integrated micro-/nano-total analysis systems.
  • the overall fabrication processes for the first embodiment is shown in FIG. 5.
  • the nanofluidic channel (1 OOnm high, 15 ⁇ m wide, and 200 ⁇ m long) was first dry etched into a glass wafer in a magnetically enhanced reactive ion etching (MERIE) tool using photoresist as the etching mask.
  • MIE magnetically enhanced reactive ion etching
  • FIGS. 6A-6B The specific processing steps for the first embodiment PFC devices are seen in FIGS. 6A-6B.
  • FIG. 6 A shows an actual PFC device under optical microscopy after glass bonding.
  • FIG. 6B is the FESEM picture of the nanofluidic channel cross section showing the approximate channel dimensions of 1 OOnm deep and 15 ⁇ m wide.
  • FIG. 3 A The fabrication for the second embodiment of devices was carried out following the same basic processes illustrated in FIG. 5.
  • the particular device to be discussed here is that of FIG. 3 A; i.e., it had a pressure-driven microfluidic channel (10 ⁇ m high, 10 // m wide, and 4350// m long) and an additional measurement microfluidic channel (10// m high, 20// m wide) in series with the nanofluidic channel.
  • the serpentine feature, or any other length extending feature may be used for the measurement microchannel to extend the real-time observation of nanochannel flow.
  • FIG 7A shows this flow rate measurement device under optical microscopy. Since the pressure drop across the measurement (e.g.
  • FIG. 7B shows the device with DI water infused into the system by a syringe pump.
  • the water-air interface progression with time can be used to measure the filling rate of the measurement (e.g., serpentine) microfluidic channel thereby showing flow through the nanofluidic channel.
  • a purposefully introduced marker such as a bubble can also be used to measure the flow rate.
  • FIG. 9A shows the optical fluorescence spectra produced with fluorescein solution infused through the system.
  • FIG. 9B shows the temporal fluorescence spectrum (integrated between 505nm and 525nm) behavior on infusing fluorescein solution at syringe pump flow rates of 0.5 ml/hr or 1 ml/hr.
  • the emission light intensity remained at a constant level for both these steady-state flow rates implying the molecules traversed the nanochannel measuring region before bleaching for both flow rates.
  • FIG. 9c shows the temporal fluorescence spectrum behavior in the nanochannel after stopping fluorescein solution infusion into the microchannel.
  • the previously infused fluorescein molecules in the nanochannel bleach under the incident laser light and, therefore, the total emission light intensity decays as seen. About 25% light intensity decrease is detected within 20 minutes.
  • a nanochannel flow rate at least as low as 30 nl/hr with an average fluorescein molecule speed of 0.5 cm/s can stop bleaching.
  • Nanofluidics with its advantages of nano-scale or smaller volume use and manipulation offers great potential for integration and application in different types of analytical/detection and chemical processing systems.
  • Applications include sample preparation, biochemical reactions, and analysis on one single "chip".
  • the analysis systems are now rapidly moving towards the use of nanofluidics to exploit smaller sample size, potentially precise flow control, and new sensing approaches.
  • Chemical processing work is also rapidly moving toward the use of nanofluidics to exploit mixing and reaction effects at nano-scale.
  • Our novel active nanofluidic flow control configuration allows the primary problems of fluidic systems including interfacing, measuring, and manipulating, which have been plaguing nanofluidics, to be successfully solved. This invention has established the effectiveness and utility of our PFC configuration.

Abstract

Un procédé de contrôle de fluide nanofluidique actif (commande de flux parallèle-PFC) comprend la fourniture d'un canal nanofluidique et d'un canal microfluidique commandé par pression reliés en parallèle et contrôlant activement le flux à travers le canal nanofluidique, en utilisant le canal microfluidique commandé par pression. Un procédé de mesure de flux nanofluidique comprend la fourniture d'un canal nanofluidique, d'un canal microfluidique commandé par pression, reliés en parallèle pour le contrôle de flux et un canal microfluidique de mesure supplémentaire relié en série pour la mesure de flux et la mesure du débit nanofluidique en mesurant le taux de remplissage dans le canal microfluidique de mesure. Un procédé de manipulation de fluide en volume à l'échelle nano comprend la fourniture d'un canal nanofluidique et d'un canal microfluidique commandé par pression reliés en parallèle et manipulant un fluide à l'échelle nano, à travers le canal nanofluidique par le biais du canal microfluidique commandé par pression. Un procédé de fabrication d'un système fluidique est proposé. Le procédé comprend la formation d'un canal nanofluidique et d'un canal microfluidique commandé par pression relié au canal nanofluidique en parallèle.
PCT/US2007/085630 2006-11-27 2007-11-27 Approche de contrôle de flux parallèle (pfc) pour un contrôle actif, une caractérisation, et la manipulation de nanofluides WO2008127438A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US86729306P 2006-11-27 2006-11-27
US60/867,293 2006-11-27

Publications (2)

Publication Number Publication Date
WO2008127438A2 true WO2008127438A2 (fr) 2008-10-23
WO2008127438A3 WO2008127438A3 (fr) 2008-12-24

Family

ID=39864554

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/085630 WO2008127438A2 (fr) 2006-11-27 2007-11-27 Approche de contrôle de flux parallèle (pfc) pour un contrôle actif, une caractérisation, et la manipulation de nanofluides

Country Status (1)

Country Link
WO (1) WO2008127438A2 (fr)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8435415B2 (en) 2009-11-24 2013-05-07 The United States of America, as represented by the Secretary of Commerce, The National Institute of Standards and Technology Nanofabrication process and nanodevice
US8438903B2 (en) 2010-01-27 2013-05-14 International Business Machines Corporation Molecule detection device formed in a semiconductor structure
CN105129722A (zh) * 2015-07-01 2015-12-09 北京工业大学 单面微米级薄膜微通道的制作方法
WO2018060263A1 (fr) * 2016-09-30 2018-04-05 Wageningen Universiteit Dispositif nanofluidique, système fluidique et procédé de réalisation d'un test
US10046322B1 (en) 2018-03-22 2018-08-14 Talis Biomedical Corporation Reaction well for assay device
CN108855256A (zh) * 2018-04-25 2018-11-23 南开大学 一种检测红细胞变形性的微流控芯片及其方法
CN110975953A (zh) * 2019-12-14 2020-04-10 深圳先进技术研究院 一种微纳流控芯片及其制备方法与应用
CN112652842A (zh) * 2020-12-18 2021-04-13 武汉轻工大学 一种微流控光催化燃料电池及其制备方法和应用

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030136679A1 (en) * 2001-10-18 2003-07-24 The Board Of Trustees Of The University Of Illinois Hybrid microfluidic and nanofluidic system
US20030230486A1 (en) * 2002-03-05 2003-12-18 Caliper Technologies Corp. Mixed mode microfluidic systems

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030136679A1 (en) * 2001-10-18 2003-07-24 The Board Of Trustees Of The University Of Illinois Hybrid microfluidic and nanofluidic system
US20030230486A1 (en) * 2002-03-05 2003-12-18 Caliper Technologies Corp. Mixed mode microfluidic systems

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8435415B2 (en) 2009-11-24 2013-05-07 The United States of America, as represented by the Secretary of Commerce, The National Institute of Standards and Technology Nanofabrication process and nanodevice
US8438903B2 (en) 2010-01-27 2013-05-14 International Business Machines Corporation Molecule detection device formed in a semiconductor structure
CN105129722A (zh) * 2015-07-01 2015-12-09 北京工业大学 单面微米级薄膜微通道的制作方法
WO2018060263A1 (fr) * 2016-09-30 2018-04-05 Wageningen Universiteit Dispositif nanofluidique, système fluidique et procédé de réalisation d'un test
US10046322B1 (en) 2018-03-22 2018-08-14 Talis Biomedical Corporation Reaction well for assay device
US10618047B2 (en) 2018-03-22 2020-04-14 Talis Biomedical Corporation Reaction well for assay device
CN108855256A (zh) * 2018-04-25 2018-11-23 南开大学 一种检测红细胞变形性的微流控芯片及其方法
CN110975953A (zh) * 2019-12-14 2020-04-10 深圳先进技术研究院 一种微纳流控芯片及其制备方法与应用
CN112652842A (zh) * 2020-12-18 2021-04-13 武汉轻工大学 一种微流控光催化燃料电池及其制备方法和应用
CN112652842B (zh) * 2020-12-18 2024-01-26 武汉轻工大学 一种微流控光催化燃料电池及其制备方法和应用

Also Published As

Publication number Publication date
WO2008127438A3 (fr) 2008-12-24

Similar Documents

Publication Publication Date Title
WO2008127438A2 (fr) Approche de contrôle de flux parallèle (pfc) pour un contrôle actif, une caractérisation, et la manipulation de nanofluides
Berthier et al. Open microfluidics
Bu et al. A new masking technology for deep glass etching and its microfluidic application
Walker et al. A passive pumping method for microfluidic devices
Sammarco et al. Thermocapillary pumping of discrete drops in microfabricated analysis devices
US7708873B2 (en) Induced-charge electro-osmotic microfluidic devices
Xie et al. An electrochemical pumping system for on-chip gradient generation
US6382254B1 (en) Microfluidic valve and method for controlling the flow of a liquid
Huang et al. The implementation of a thermal bubble actuated microfluidic chip with microvalve, micropump and micromixer
Wu et al. Optic imaging of single and two-phase pressure-driven flows in nano-scale channels
US20020150502A1 (en) Surface tension reduction channel
Tas et al. Nanofluidic bubble pump using surface tension directed gas injection
JP2001511520A (ja) 参照ｔセンサ装置での同時の分析物測定および参照平衡
EP2786019A1 (fr) Dispositif microfluidique à clapet déformable
Lee et al. Micromachined pre-focused 1× N flow switches for continuous sample injection
EP1607748B1 (fr) Trousse d'extraction d'acide nucleique et procede d'extraction d'acide nucleique
Ford et al. Piezoelectric mechanical pump with nanoliter per minute pulse-free flow delivery for pressure pumping in micro-channels
Lee et al. Microfluidic chip for biochemical reaction and electrophoretic separation by quantitative volume control
Choi et al. An active micro mixer using electrohydrodynamic (EHD) convection
Hug et al. Fabrication and electroosmotic flow measurements in micro-and nanofluidic channels
Moreno et al. High-integrated microvalve for lab-on-chip biomedical applications
KR100865634B1 (ko) 열공압 구동 방식 모세관 마이크로 펌프 및 그 제조 방법
Namasivayam et al. Microfabricated valveless pump for delivering nonpulsatile flow
Berthier et al. Wetting of solid walls and spontaneous capillary flow
Kutter et al. Microfluidics--Components

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07873631

Country of ref document: EP

Kind code of ref document: A2

NENP Non-entry into the national phase in:

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 07873631

Country of ref document: EP

Kind code of ref document: A2