WO2008123338A1 - Component for charged particle device and method for manufacturing the component - Google Patents

Component for charged particle device and method for manufacturing the component Download PDF

Info

Publication number
WO2008123338A1
WO2008123338A1 PCT/JP2008/055823 JP2008055823W WO2008123338A1 WO 2008123338 A1 WO2008123338 A1 WO 2008123338A1 JP 2008055823 W JP2008055823 W JP 2008055823W WO 2008123338 A1 WO2008123338 A1 WO 2008123338A1
Authority
WO
WIPO (PCT)
Prior art keywords
component
tube
charged particle
fitting section
metal
Prior art date
Application number
PCT/JP2008/055823
Other languages
French (fr)
Japanese (ja)
Inventor
Yoshinori Terui
Katsuyoshi Tsunoda
Toshiyuki Morishita
Shimpei Hirokawa
Original Assignee
Denki Kagaku Kogyo Kabushiki Kaisha
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo Kabushiki Kaisha filed Critical Denki Kagaku Kogyo Kabushiki Kaisha
Publication of WO2008123338A1 publication Critical patent/WO2008123338A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
    • H01J27/22—Metal ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/061—Construction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0805—Liquid metal sources

Abstract

Provided is a component for a charged particle device. In the component, a brazing material is not used for an electronic source or ion source, accuracy of a joint between an extraction electrode and an insulator is improved, and an alignment error of discharged charged particles is reduced. Furthermore, since the brazing material is not used, the component is advantageous from the aspect of cost. The component is composed of a plurality of components, which are a metal component and an insulating component. The component has a tube-like fitting section for connecting the metal component and the insulating component. An outer tube of the fitting section is made of a metal, and an inner tube is made of an insulating material. The inner size of the outer tube at a room temperature is slightly smaller than the outer size of the inner tube, and the fitting section is formed by connecting the outer tube and the inner tube by thermal shrink fitting.
PCT/JP2008/055823 2007-03-27 2008-03-27 Component for charged particle device and method for manufacturing the component WO2008123338A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-081037 2007-03-27
JP2007081037A JP2010135068A (en) 2007-03-27 2007-03-27 Component for charged particle device and manufacturing method for the same

Publications (1)

Publication Number Publication Date
WO2008123338A1 true WO2008123338A1 (en) 2008-10-16

Family

ID=39830826

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/055823 WO2008123338A1 (en) 2007-03-27 2008-03-27 Component for charged particle device and method for manufacturing the component

Country Status (3)

Country Link
JP (1) JP2010135068A (en)
TW (1) TWI428951B (en)
WO (1) WO2008123338A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012127963A1 (en) * 2011-03-18 2012-09-27 電気化学工業株式会社 Enclosure and method for handling electron gun or ion gun

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6332846A (en) * 1986-07-25 1988-02-12 Tadao Suganuma Electron gun
JPH06108831A (en) * 1991-09-13 1994-04-19 W R Grace & Co Electrode feed-through
JP2000260371A (en) * 1999-03-09 2000-09-22 Toshiba Corp Electrode for electron beam image forming device and its manufacture
JP2002116283A (en) * 2000-10-05 2002-04-19 Toshiba Corp Digital system for monitoring power range in nuclear reactor
JP2005122928A (en) * 2003-10-14 2005-05-12 Hitachi Ltd Bonding structure of metal body and ceramics, and vacuum switch using it
JP2005332677A (en) * 2004-05-19 2005-12-02 Denki Kagaku Kogyo Kk Manufacturing method of electron source and its use
WO2006011950A2 (en) * 2004-06-24 2006-02-02 Woodward Governor Company Pre-chamber spark plug

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6332846A (en) * 1986-07-25 1988-02-12 Tadao Suganuma Electron gun
JPH06108831A (en) * 1991-09-13 1994-04-19 W R Grace & Co Electrode feed-through
JP2000260371A (en) * 1999-03-09 2000-09-22 Toshiba Corp Electrode for electron beam image forming device and its manufacture
JP2002116283A (en) * 2000-10-05 2002-04-19 Toshiba Corp Digital system for monitoring power range in nuclear reactor
JP2005122928A (en) * 2003-10-14 2005-05-12 Hitachi Ltd Bonding structure of metal body and ceramics, and vacuum switch using it
JP2005332677A (en) * 2004-05-19 2005-12-02 Denki Kagaku Kogyo Kk Manufacturing method of electron source and its use
WO2006011950A2 (en) * 2004-06-24 2006-02-02 Woodward Governor Company Pre-chamber spark plug

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012127963A1 (en) * 2011-03-18 2012-09-27 電気化学工業株式会社 Enclosure and method for handling electron gun or ion gun
CN103430275A (en) * 2011-03-18 2013-12-04 电气化学工业株式会社 Enclosure and method for handling electron gun or ion gun
JP5925764B2 (en) * 2011-03-18 2016-05-25 デンカ株式会社 Handling method and container of electron gun or ion gun
US9496673B2 (en) 2011-03-18 2016-11-15 Denka Company Limited Enclosure and method for handling electron gun or ion gun
CN103430275B (en) * 2011-03-18 2018-01-16 电化株式会社 The processing method and packaging container of electron gun or ion gun

Also Published As

Publication number Publication date
JP2010135068A (en) 2010-06-17
TWI428951B (en) 2014-03-01
TW200903553A (en) 2009-01-16

Similar Documents

Publication Publication Date Title
EP3984971A4 (en) Housing assembly, preparation method therefor, and electronic device
IL188076A0 (en) Electrode for an electrical component, component with the electrode, and manufacturing method for the component
US8907238B2 (en) Push button, method for the production thereof, and medical manipulating part
WO2010141776A3 (en) Multipole ion transport apparatus and related methods
WO2012012108A3 (en) Galvanic isolation transformer
EP3955714A4 (en) Housing assembly and preparation method thereof, and electronic device
GB0620398D0 (en) Multi-reflecting time-of-flight mass analyser and a time-of-flight mass spectrometer including the time-of-flight mass analyser
WO2008055668A3 (en) Ion transfer arrangement
WO2008067182A3 (en) Interconnecting electrical devices
WO2007096463A3 (en) Element
WO2007082205A3 (en) Electrical connections made with dissimilar metals
EP1970719A4 (en) Anistropic conductive connector, conversion adapter for inspection device having the anisotropic conductive connector, and method for manufacturing the anistropic conductive connector
EP1850419A4 (en) Composite conductive sheet, method for producing the same, anisotropic conductive connector, adapter, and circuit device electric inspection device
WO2010018162A3 (en) Thermoelectric device
WO2008123087A1 (en) Anisotropic conductive paste
WO2009024669A3 (en) Device for providing a high energy x-ray beam
CN106169554A (en) Busbar and battery module
TW200802743A (en) High frequency device module and method for manufacturing the same
WO2015100233A8 (en) Atmospheric interface for electrically grounded electrospray
EP3982703A4 (en) Housing assembly, preparation method therefor and electronic device
WO2011045328A3 (en) Sealing device for individually shielded cable, and corresponding cable assembly
EP3584353A4 (en) Metallic material for electronic component, method for manufacturing said metallic material, and connector terminal, connector, and electronic component in which said metallic material is used
WO2005089203A3 (en) Compact ion gauge using micromachining and misoc devices
WO2013092317A3 (en) Electric motor
WO2008123338A1 (en) Component for charged particle device and method for manufacturing the component

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08738973

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08738973

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP