WO2008095432A1 - Multilayer piezoelectric actuator for micro-displacement - Google Patents

Multilayer piezoelectric actuator for micro-displacement Download PDF

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Publication number
WO2008095432A1
WO2008095432A1 PCT/CN2008/070169 CN2008070169W WO2008095432A1 WO 2008095432 A1 WO2008095432 A1 WO 2008095432A1 CN 2008070169 W CN2008070169 W CN 2008070169W WO 2008095432 A1 WO2008095432 A1 WO 2008095432A1
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conductive
piezoelectric ceramic
layer
ceramic stack
micro
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PCT/CN2008/070169
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French (fr)
Chinese (zh)
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Tiezheng Pan
Xiaofeng Wang
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Kunshan Pant Piezoelectric Tech Co., Ltd
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices

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  • the present invention relates to an improvement in a multilayer piezoelectric micro-displacement actuator. Background technique
  • Such multilayer piezoelectric micro-displacement actuators are well known.
  • the fabrication method of the multi-layer piezoelectric micro-displacement actuator is derived from a monolithic capacitor, which is formed by stacking a plurality of diaphragms having internal electrodes in a certain manner, pressing by isostatic pressing, and then cutting into a desired size. Burning; It is also possible to use a pseudo-monolithic method in which a piezoelectric ceramic monolith is first formed, and then the silver electrode is bonded at a high temperature or bonded by an adhesive.
  • a conventional microactuator two sets of internal electrodes are connected by a metal layer coated on both sides of the stack, as shown in FIG. 1, two sets of internal electrodes are formed between the plurality of piezoelectric ceramic layers 3.
  • the inner electrodes 1 are electrically connected to the two outer electrodes 4 on both sides of the piezoelectric ceramic layer 3, respectively.
  • these metal coatings are subjected to large alternating stresses, which easily cause cracks in the external electrodes, which can cause the resistance of the external electrodes to become large.
  • An arc is generated which causes the outer electrode to break quickly.
  • the external electrode breakage causes the current to be blocked, so that it cannot work normally.
  • the present invention provides a multilayer piezoelectric micro-displacement actuator which is very simple, easy, effective and economical, and has the function of preventing conductive ion migration and preventing A method of cracking a conductive material during telescoping.
  • the technical solution of the present invention is realized by a multi-layer piezoelectric micro-displacement actuator, which is formed by stacking a plurality of piezoelectric ceramics into a piezoelectric ceramic stack, and the plurality of piezoelectric ceramic layers are respectively disposed between two a plurality of internal electrodes forming two internal electrode groups that are not in contact with each other, the two internal electrode groups respectively extending to both sides of the piezoelectric ceramic stack in an alternating manner, And respectively connected to two external electrodes disposed on two sides of the piezoelectric ceramic stack, the two external electrodes respectively being located on the inner side of the piezoelectric ceramic stack, having a conductive barrier layer for preventing conductive ion migration and being located outside,
  • the anti-crack conductive elastic layer is composed.
  • the conductive barrier layer is composed of at least one of copper, nickel, palladium, aluminum, and alloys thereof.
  • the electroconductive elastic layer is a soft or elastic conductive paste or a conductive tape having a conductive medium.
  • an insulating spacer is formed between the inner electrode group on one side and the conductive barrier layer on the other side.
  • the electrodes of the multilayer piezoelectric micro-displacement actuator produced by the prior art have two problems: one is that the external electrode generates a large alternating stress due to the continuous expansion and contraction of the actuator. The external electrode is cracked or broken; the second is the problem that the insulation resistance of the other non-contact inner electrode and the outer electrode insulating portion is lowered due to the migration of silver ions of the outer electrode.
  • the outer electrode is divided into two layers, that is, a barrier layer and an elastic layer.
  • the role of the barrier layer First, a good connection with the internal electrode, current flows through the barrier layer to the internal electrode, driving the actuator; Second, due to the use of anti-migration materials, can prevent the migration of conductive ions, thereby solving the migration due to conductive ions The problem of lowering the insulation resistance of the external electrode and the other set of non-contact internal electrodes is caused.
  • the barrier layer is coated on the two electrode faces by vapor deposition, chemical deposition or printing to cover a layer of nickel, or other metal or alloy which has good conductivity and prevents the migration of conductive ions.
  • the elastic layer is printed, bladed or bonded with a layer of elastic or soft conductive adhesive layer on the coated barrier layer.
  • the conductive adhesive used has strong tensile, flexural and fatigue resistance properties. It is guaranteed that it will not crack under the strong alternating stress and cause the conductivity to drop. Even in the case of cracking of the barrier layer, the electrode can have good conductivity.
  • the invention solves the problem that the conductive ion migration of the outer electrode of the multilayer piezoelectric micro-displacement actuator causes the insulation resistance to decrease and the conductive layer to cause cracking under the action of large alternating stress.
  • FIG. 1 is a schematic structural view of a known multilayer piezoelectric micro-displacement actuator
  • 2 is a schematic view showing cracking of an external electrode of a known multilayer piezoelectric micro-displacement actuator
  • 3 is a schematic side view showing the structure of a multilayer piezoelectric micro-displacement actuator according to the present invention
  • FIG. 4 is a schematic view showing the contact of the elastic layer when the barrier layer is broken in the multilayer piezoelectric micro-displacement actuator of the present invention.
  • a multi-layer piezoelectric micro-displacement actuator which is composed of a plurality of piezoelectric ceramic layers 3 stacked into a piezoelectric ceramic stack, and a plurality of internal electrodes 8 are respectively disposed between the two piezoelectric ceramic layers 3,
  • the plurality of internal electrodes 8 form two internal electrode groups 1 which are not in contact with each other, and the two internal electrode groups 1 respectively extend to both sides of the piezoelectric ceramic stack in an alternating manner, and are respectively disposed on both sides of the piezoelectric ceramic stack
  • the two outer electrodes 4 are electrically connected, and the two outer electrodes 4 are respectively composed of a conductive barrier layer 10 on the inner side of the piezoelectric ceramic stack, which has anti-conductive ion migration, and a conductive elastic layer 11 on the outer side and having crack prevention.
  • the conductive barrier layer is composed of at least one of copper, nickel, palladium, aluminum, and alloys thereof.
  • the conductive elastic layer is a soft or elastic conductive paste or conductive tape having a conductive medium. Between the inner electrode group on one side and the conductive barrier layer on the other side is 0. 2 ⁇ 1 to make the insulating spacer 9.
  • the stack of the piezoelectric ceramic layer 3 and the internal electrode 8 may be a monolithic co-firing method, or a piezoelectric monolith may be first formed and an internal electrode may be fabricated, and then the internal electrode may be bonded or used at a high temperature.
  • the outer electrode of the present invention is composed of a barrier layer 10 and an elastic layer 11.
  • the barrier layer 10 is formed by vapor deposition, chemical deposition or printing on the extended surface of the internal electrode of the piezoelectric ceramic stack, and the barrier layer is made of at least one of anti-migration metals such as copper, nickel, palladium, aluminum, and alloys of these materials. For material fabrication, the barrier layer should be in good contact with the extended internal electrode.
  • the elastic layer 11 of the outer electrode is formed by at least one of printing, doctoring, bonding or coating with a glue coater.
  • the elastic layer is made of soft or elastic conductive adhesive or conductive tape of various conductive media.
  • the conductive tape should have a certain thickness to withstand the specified current.
  • the voltage is transmitted to the barrier layer through the elastic layer of the outer electrode, and transmitted to the respective inner electrodes through the barrier layer, so that the multi-layer piezoelectric micro-displacement actuator generates corresponding telescopic displacement.
  • the barrier layer may be broken due to inelasticity, but the barrier layer is tightly bonded to the elastic layer, and the elastic layer has sufficient tensile resistance. The ability does not affect the conductive area 7 of the outer and inner electrodes.

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

A multilayer piezoelectric actuator for micro-displacement, which comprises a piezoelectric ceramic stack laminated by a plurality of piezoelectric ceramic layers (3), the piezoelectric ceramic stack comprises a plurality of internal electrode (8) between the piezoelectric ceramic layers (3) and two external electrodes (4) on the two sides of the piezoelectric ceramic stack with being connected alternately to the said internal electrode (8), the two external electrodes inspectively are composed of a conductive blocking layer (10) on the inside of the piezoelectric ceramic stack to prevent the conductive ions' migration and a conductive elastic layer (11) on the outer side to prevent the occurrence of cracks. The conductive blocking layer is made of at least a material selected from Cu, Ni, Pd and alloys thereof, the conductive elastic layer is a conductive glue or conductive adhesive tape each of which has soft or elastic characteristics and has a conductive medium.

Description

说明书 多层压电式微位移致动器 技术领域  Specification Multilayer Piezoelectric Micro Displacement Actuator Technical Field
本发明涉及一种多层压电式微位移致动器的改进。 背景技术  The present invention relates to an improvement in a multilayer piezoelectric micro-displacement actuator. Background technique
这种多层压电式微位移致动器是公知的。  Such multilayer piezoelectric micro-displacement actuators are well known.
多层压电式微位移致动器的制作方法来源于独石电容器，它是利用多个具有内电极的 膜片按照一定的方式叠堆， 通过等静压压制， 然后切割成所需大小后共烧； 也可采用先制 成压电陶瓷单片， 再利用其银电极在加高温时粘接或采用胶粘剂粘接的假独石方法。  The fabrication method of the multi-layer piezoelectric micro-displacement actuator is derived from a monolithic capacitor, which is formed by stacking a plurality of diaphragms having internal electrodes in a certain manner, pressing by isostatic pressing, and then cutting into a desired size. Burning; It is also possible to use a pseudo-monolithic method in which a piezoelectric ceramic monolith is first formed, and then the silver electrode is bonded at a high temperature or bonded by an adhesive.
在传统的微致动器中，两组内电极通过涂覆在堆垛的两个侧面的金属层连接引出，如 图 1所示， 由多个压电陶瓷层 3之间内电极形成两组内电极 1， 并分别于该压电陶瓷层 3 两侧的两个外电极 4导通连接。当微致动器在外加电压的作用下不断伸长或缩短，这些金 属涂层受到较大的交变应力的作用，很易导致外电极产生裂纹，该裂纹能导致外电极的电 阻变大而产生电弧， 电弧使外电极很快断裂。外电极断裂导致电流的阻断， 从而不能正常 的工作， 这些都是传统的微致动器的制作方法所存在的问题， 如图 2所示， 出现外电极断 裂层 6。  In a conventional microactuator, two sets of internal electrodes are connected by a metal layer coated on both sides of the stack, as shown in FIG. 1, two sets of internal electrodes are formed between the plurality of piezoelectric ceramic layers 3. The inner electrodes 1 are electrically connected to the two outer electrodes 4 on both sides of the piezoelectric ceramic layer 3, respectively. When the microactuator is continuously elongated or shortened by the applied voltage, these metal coatings are subjected to large alternating stresses, which easily cause cracks in the external electrodes, which can cause the resistance of the external electrodes to become large. An arc is generated which causes the outer electrode to break quickly. The external electrode breakage causes the current to be blocked, so that it cannot work normally. These are the problems of the conventional microactuator manufacturing method. As shown in Fig. 2, the outer electrode fracture layer 6 appears.
另外在传统器件的绝缘边部分是不具备任何保护，而一般使用的电极材料为银，它的 迁移能力较强，在一定的程度上会导致绝缘下降。在传统器件的绝缘边部分就存在着很大 的隐患。 发明内容  In addition, there is no protection in the insulating side portion of the conventional device, and the electrode material generally used is silver, and its migration ability is strong, which may cause the insulation to drop to a certain extent. There is a great hidden danger in the insulating side of conventional devices. Summary of the invention
为了弥补多层压电式微位移致动器传统制作方法的不足，本发明提供一种多层压电式 微位移致动器， 非常简单、 易行、 有效和经济， 并具有防止导电离子迁移、 防止伸缩过程 中导电材料裂缝的方法。  In order to make up for the deficiencies of the conventional fabrication method of the multilayer piezoelectric micro-displacement actuator, the present invention provides a multilayer piezoelectric micro-displacement actuator which is very simple, easy, effective and economical, and has the function of preventing conductive ion migration and preventing A method of cracking a conductive material during telescoping.
本发明的技术方案是这样实现的：一种多层压电式微位移致动器， 由多个压电陶瓷层 叠堆成压电陶瓷堆，该多个压电陶瓷层两两之间分别设有多个内电极，该多个内电极形成 两个彼此非接触的内电极组， 该两个内电极组以交替方式分别向该压电陶瓷堆两侧延伸， 并分别与设于该压电陶瓷堆两侧的两个外电极导通连接，该两个外电极分别由位于该压电 陶瓷堆内侧、具有防导电离子迁移的导电阻挡层和位于外侧、具有防裂缝的导电弹性层组 成。 The technical solution of the present invention is realized by a multi-layer piezoelectric micro-displacement actuator, which is formed by stacking a plurality of piezoelectric ceramics into a piezoelectric ceramic stack, and the plurality of piezoelectric ceramic layers are respectively disposed between two a plurality of internal electrodes forming two internal electrode groups that are not in contact with each other, the two internal electrode groups respectively extending to both sides of the piezoelectric ceramic stack in an alternating manner, And respectively connected to two external electrodes disposed on two sides of the piezoelectric ceramic stack, the two external electrodes respectively being located on the inner side of the piezoelectric ceramic stack, having a conductive barrier layer for preventing conductive ion migration and being located outside, The anti-crack conductive elastic layer is composed.
作为本发明的进一步改进， 该导电阻挡层由至少包含铜、 镍、 钯、铝及其合金中一种 材料组成。  As a further improvement of the present invention, the conductive barrier layer is composed of at least one of copper, nickel, palladium, aluminum, and alloys thereof.
作为本发明的进一步改进，该导电弹性层为具有导电介质的软性或弹性导电胶或导电 胶带。  As a further improvement of the present invention, the electroconductive elastic layer is a soft or elastic conductive paste or a conductive tape having a conductive medium.
作为本发明的进一步改进，一侧的该内电极组与另一侧的导电阻挡层之间形成绝缘间 隔区。  As a further improvement of the present invention, an insulating spacer is formed between the inner electrode group on one side and the conductive barrier layer on the other side.
本发明的有益技术效果:原有技术生产的多层压电式微位移致动器的电极存在两个问 题：一是由于致动器的持续伸缩，使外电极产生较大的交变应力的作用而导致外电极产生 裂纹或断裂;二是由于外电极的银离子迁移而导致另一组非接触内电极与外电极绝缘部分 的绝缘阻抗下降的问题。  Advantageous technical effects of the present invention: the electrodes of the multilayer piezoelectric micro-displacement actuator produced by the prior art have two problems: one is that the external electrode generates a large alternating stress due to the continuous expansion and contraction of the actuator. The external electrode is cracked or broken; the second is the problem that the insulation resistance of the other non-contact inner electrode and the outer electrode insulating portion is lowered due to the migration of silver ions of the outer electrode.
本发明中将外电极分成两层， 即阻挡层及弹性层。  In the present invention, the outer electrode is divided into two layers, that is, a barrier layer and an elastic layer.
阻挡层的作用： 一是与内电极良好连接， 电流通过阻挡层流到内电极， 驱动致动器; 二是由于采用了防迁移材料，能阻止导电离子的迁移，从而解决了由于导电离子迁移而引 起该外电极与另一组非接触的内电极的绝缘阻抗下降的问题。阻挡层在两个电极面上采用 气相沉积法，化学沉积法或印刷法使之覆盖上一层镍，或者其他具有良好传导性能而且是 能阻止导电离子迁移的金属或者合金。  The role of the barrier layer: First, a good connection with the internal electrode, current flows through the barrier layer to the internal electrode, driving the actuator; Second, due to the use of anti-migration materials, can prevent the migration of conductive ions, thereby solving the migration due to conductive ions The problem of lowering the insulation resistance of the external electrode and the other set of non-contact internal electrodes is caused. The barrier layer is coated on the two electrode faces by vapor deposition, chemical deposition or printing to cover a layer of nickel, or other metal or alloy which has good conductivity and prevents the migration of conductive ions.
弹性层是在涂覆的阻挡层上采用印刷、刮涂或粘接一层弹性或软性的导电胶层，所采 用的导电胶具有极强的抗拉、抗折以及抗疲劳的特性，能保证在受强烈的交变应力作用下 不会开裂及引起导电性下降， 即使在这阻挡层开裂的情况下， 电极还能具有良好的传导性 能。  The elastic layer is printed, bladed or bonded with a layer of elastic or soft conductive adhesive layer on the coated barrier layer. The conductive adhesive used has strong tensile, flexural and fatigue resistance properties. It is guaranteed that it will not crack under the strong alternating stress and cause the conductivity to drop. Even in the case of cracking of the barrier layer, the electrode can have good conductivity.
本发明很好的解决了多层压电式微位移致动器的外电极的导电离子迁移而使绝缘阻 抗下降及导电层在较大的交变应力的作用下引起开裂的问题。 附图说明  The invention solves the problem that the conductive ion migration of the outer electrode of the multilayer piezoelectric micro-displacement actuator causes the insulation resistance to decrease and the conductive layer to cause cracking under the action of large alternating stress. DRAWINGS
图 1为公知的多层压电式微位移致动器结构示意图； 1 is a schematic structural view of a known multilayer piezoelectric micro-displacement actuator;
图 2为公知的多层压电式微位移致动器外电极开裂的示意图； 图 3为本发明中多层压电式微位移致动器的一侧结构示意图； 2 is a schematic view showing cracking of an external electrode of a known multilayer piezoelectric micro-displacement actuator; 3 is a schematic side view showing the structure of a multilayer piezoelectric micro-displacement actuator according to the present invention;
图 4为本发明中多层压电式微位移致动器当阻挡层断裂时弹性层接触良好的示意图。 具体实施方式 4 is a schematic view showing the contact of the elastic layer when the barrier layer is broken in the multilayer piezoelectric micro-displacement actuator of the present invention. detailed description
结合图 1、 图 2、 图 3和图 4， 以下作进一步描述：  Referring to Figure 1, Figure 2, Figure 3 and Figure 4, the following is further described:
一种多层压电式微位移致动器， 由多个压电陶瓷层 3叠堆成压电陶瓷堆， 该多个压 电陶瓷层 3两两之间分别设有多个内电极 8，该多个内电极 8形成两个彼此非接触的内电 极组 1， 该两个内电极组 1以交替方式分别向该压电陶瓷堆两侧延伸， 并分别与设于该压 电陶瓷堆两侧的两个外电极 4导通连接， 该两个外电极 4分别由位于该压电陶瓷堆内侧、 具有防导电离子迁移的导电阻挡层 10和位于外侧、具有防裂缝的导电弹性层 11组成。该 导电阻挡层由至少包含铜、 镍、 钯、 铝及其合金中一种材料组成。 该导电弹性层为具有导 电介质的软性或弹性导电胶或导电胶带。一侧的该内电极组与另一侧的导电阻挡层之间有 0. 2〜1讓绝缘间隔区 9。  A multi-layer piezoelectric micro-displacement actuator, which is composed of a plurality of piezoelectric ceramic layers 3 stacked into a piezoelectric ceramic stack, and a plurality of internal electrodes 8 are respectively disposed between the two piezoelectric ceramic layers 3, The plurality of internal electrodes 8 form two internal electrode groups 1 which are not in contact with each other, and the two internal electrode groups 1 respectively extend to both sides of the piezoelectric ceramic stack in an alternating manner, and are respectively disposed on both sides of the piezoelectric ceramic stack The two outer electrodes 4 are electrically connected, and the two outer electrodes 4 are respectively composed of a conductive barrier layer 10 on the inner side of the piezoelectric ceramic stack, which has anti-conductive ion migration, and a conductive elastic layer 11 on the outer side and having crack prevention. The conductive barrier layer is composed of at least one of copper, nickel, palladium, aluminum, and alloys thereof. The conductive elastic layer is a soft or elastic conductive paste or conductive tape having a conductive medium. Between the inner electrode group on one side and the conductive barrier layer on the other side is 0. 2~1 to make the insulating spacer 9.
该压电陶瓷层 3及内电极 8的叠堆可采用独石共烧法， 也可采用先制成压电单片并 制作好内电极， 再利用其内电极在加高温时粘接或采用胶粘剂粘接的假独石方法。  The stack of the piezoelectric ceramic layer 3 and the internal electrode 8 may be a monolithic co-firing method, or a piezoelectric monolith may be first formed and an internal electrode may be fabricated, and then the internal electrode may be bonded or used at a high temperature. A pseudo-monolithic method of bonding adhesives.
通过下面的叙述来描述本发明外电极制作方法。 如图 3所示， 本发明的外电极有阻 挡层 10及弹性层 11组成。  The method of fabricating the outer electrode of the present invention will be described by the following description. As shown in Fig. 3, the outer electrode of the present invention is composed of a barrier layer 10 and an elastic layer 11.
在压电陶瓷堆的内电极的延伸面采用气相沉积、 化学沉积或印刷的方法制作阻挡层 10， 阻挡层采用铜、 镍、 钯、 铝等抗迁移金属及这些材料的合金中的至少一种材料制作， 阻挡层应与延伸的内电极良好接触。  The barrier layer 10 is formed by vapor deposition, chemical deposition or printing on the extended surface of the internal electrode of the piezoelectric ceramic stack, and the barrier layer is made of at least one of anti-migration metals such as copper, nickel, palladium, aluminum, and alloys of these materials. For material fabrication, the barrier layer should be in good contact with the extended internal electrode.
在制作好的阻挡层上， 采用印刷、 刮涂、 粘接或利用打胶机涂覆的至少一种方法制 作外电极的弹性层 11。弹性层采用各种导电介质的软性或弹性的导电胶或导电胶带制作， 导电胶带应有一定厚度， 使之能承受规定的电流。  On the formed barrier layer, the elastic layer 11 of the outer electrode is formed by at least one of printing, doctoring, bonding or coating with a glue coater. The elastic layer is made of soft or elastic conductive adhesive or conductive tape of various conductive media. The conductive tape should have a certain thickness to withstand the specified current.
多层压电式微位移致动器在工作时， 电压通过外电极的弹性层输给阻挡层， 通过阻 挡层传输到各个内电极， 使多层压电式微位移致动器产生相应的伸缩位移。  When the multi-layer piezoelectric micro-displacement actuator is in operation, the voltage is transmitted to the barrier layer through the elastic layer of the outer electrode, and transmitted to the respective inner electrodes through the barrier layer, so that the multi-layer piezoelectric micro-displacement actuator generates corresponding telescopic displacement.
多层压电式微位移致动器在产生较大的交变位移时， 阻挡层因没弹性， 有可能会产 生断裂层 6， 但阻挡层与弹性层紧密结合， 弹性层具有足够的抗拉伸能力， 不会影响外电 极与内电极的导电区 7。  When a multi-layer piezoelectric micro-displacement actuator produces a large alternating displacement, the barrier layer may be broken due to inelasticity, but the barrier layer is tightly bonded to the elastic layer, and the elastic layer has sufficient tensile resistance. The ability does not affect the conductive area 7 of the outer and inner electrodes.
在较强的电场作用下， 很易引起导电离子的迁移， 由于本发明使用了阻挡层， 抑制 了导电离子的迁移， 所以其绝缘性能很稳定。 Under the action of a strong electric field, it is easy to cause the migration of conductive ions. Since the present invention uses a barrier layer, the suppression The migration of conductive ions is very stable.

Claims

权利要求书 Claim
1、 一种多层压电式微位移致动器， 由多个压电陶瓷层 （3) 叠堆成压电 陶瓷堆， 该多个压电陶瓷层 （3 )两两之间分别设有多个内电极（8)， 该多个 内电极（8)形成两组彼此非接触的内电极组（1 )， 该两组内电极组以交替方 式分别向该压电陶瓷堆两侧延伸， 并分别与设于该压电陶瓷堆两侧的两个外 电极 （4) 导通连接， 其特征在于， 该两个外电极 （4) 分别由贴合于该压电 陶瓷堆两侧的、 防导电离子迁移的两导电阻挡层 （10 ) 和贴合于该两导电阻 挡层 （10) 的、 防裂缝的导电弹性层 （11 ) 组成。 A multi-layer piezoelectric micro-displacement actuator, which is composed of a plurality of piezoelectric ceramic layers (3) stacked into a piezoelectric ceramic stack, and the plurality of piezoelectric ceramic layers (3) are respectively provided between two Inner electrodes (8), the plurality of internal electrodes (8) form two sets of internal electrode groups (1) that are not in contact with each other, and the two sets of internal electrode groups respectively extend to both sides of the piezoelectric ceramic stack in an alternating manner, and And respectively connected to two external electrodes (4) disposed on two sides of the piezoelectric ceramic stack, wherein the two external electrodes (4) are respectively adhered to the two sides of the piezoelectric ceramic stack The conductive ion-transporting two conductive barrier layers (10) and the crack-proof conductive elastic layer (11) attached to the two conductive barrier layers (10) are composed.
2、 如权利要求 1所述的一种多层压电式微位移致动器， 其特征在于， 该导电阻挡层由至少包含铜、 镍、 钯、 铝及其合金中一种材料组成。  2. A multilayer piezoelectric micro-displacement actuator according to claim 1, wherein the conductive barrier layer is composed of at least one of copper, nickel, palladium, aluminum and alloys thereof.
3、 如权利要求 1所述的一种多层压电式微位移致动器， 其特征在于， 该导电弹性层为具有导电介质的软性或弹性导电胶或导电胶带。  3. A multilayer piezoelectric micro-displacement actuator according to claim 1, wherein the conductive elastic layer is a soft or elastic conductive adhesive or conductive tape having a conductive medium.
4、 如权利要求 1所述的一种多层压电式微位移致动器， 其特征在于， 该压电陶瓷堆一侧的该内电极组与该压电陶瓷堆另一侧的导电阻挡层之间形 成绝缘间隔区 （9)。  4. The multilayer piezoelectric micro-displacement actuator according to claim 1, wherein the inner electrode group on one side of the piezoelectric ceramic stack and the conductive barrier layer on the other side of the piezoelectric ceramic stack An insulating spacer (9) is formed between them.
PCT/CN2008/070169 2007-02-01 2008-01-23 Multilayer piezoelectric actuator for micro-displacement WO2008095432A1 (en)

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