WO2008093514A1 - Piezoelectric thin-film resonator - Google Patents

Piezoelectric thin-film resonator Download PDF

Info

Publication number
WO2008093514A1
WO2008093514A1 PCT/JP2008/050100 JP2008050100W WO2008093514A1 WO 2008093514 A1 WO2008093514 A1 WO 2008093514A1 JP 2008050100 W JP2008050100 W JP 2008050100W WO 2008093514 A1 WO2008093514 A1 WO 2008093514A1
Authority
WO
WIPO (PCT)
Prior art keywords
vibration part
piezoelectric thin
film resonator
element wafer
film
Prior art date
Application number
PCT/JP2008/050100
Other languages
French (fr)
Japanese (ja)
Inventor
Masaki Takeuchi
Original Assignee
Murata Manufacturing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co., Ltd. filed Critical Murata Manufacturing Co., Ltd.
Priority to JP2008556033A priority Critical patent/JPWO2008093514A1/en
Publication of WO2008093514A1 publication Critical patent/WO2008093514A1/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0595—Holders; Supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/105—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a cover cap mounted on an element forming part of the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/173—Air-gaps

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

A piezoelectric thin-film (14) is disposed between a pair of electrodes (13, 15) to constitute a vibration part (20) in cooperation with an insulation layer (12) and a temperature characteristic compensation film (16). The vibration part (20) is supported on an element wafer (11) through support parts (21, 22) and a gap (Ga) is formed between the vibration part (20) and the element wafer (11). The corners of the vibration part (20) are chamfered to suppress the maximum amount of the vertical displacement of the vibration part (20) at its corners due to warping thereof. With this constitution, the entire of the resonator is small-sized, deterioration of its characteristics is avoided and its reliability can be kept.
PCT/JP2008/050100 2007-02-02 2008-01-09 Piezoelectric thin-film resonator WO2008093514A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008556033A JPWO2008093514A1 (en) 2007-02-02 2008-01-09 Piezoelectric thin film resonator

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-023741 2007-02-02
JP2007023741 2007-02-02

Publications (1)

Publication Number Publication Date
WO2008093514A1 true WO2008093514A1 (en) 2008-08-07

Family

ID=39673828

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/050100 WO2008093514A1 (en) 2007-02-02 2008-01-09 Piezoelectric thin-film resonator

Country Status (2)

Country Link
JP (1) JPWO2008093514A1 (en)
WO (1) WO2008093514A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013506334A (en) * 2009-09-28 2013-02-21 テクノロギアン トゥトキムスケスクス ヴェーテーテー Micromechanical resonator

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08186467A (en) * 1994-12-29 1996-07-16 Murata Mfg Co Ltd Divergent oscillation type piezoelectric oscillator and its production
JP2003273693A (en) * 2002-01-08 2003-09-26 Murata Mfg Co Ltd Piezoelectric resonator, and piezoelectric filter, duplexer, and communication apparatus using the same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0865051A (en) * 1994-08-23 1996-03-08 Murata Mfg Co Ltd Piezoelectric oscillator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08186467A (en) * 1994-12-29 1996-07-16 Murata Mfg Co Ltd Divergent oscillation type piezoelectric oscillator and its production
JP2003273693A (en) * 2002-01-08 2003-09-26 Murata Mfg Co Ltd Piezoelectric resonator, and piezoelectric filter, duplexer, and communication apparatus using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013506334A (en) * 2009-09-28 2013-02-21 テクノロギアン トゥトキムスケスクス ヴェーテーテー Micromechanical resonator

Also Published As

Publication number Publication date
JPWO2008093514A1 (en) 2010-05-20

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