WO2008086792A1 - Laser scanning microscope and beam-uniting optical assembly - Google Patents

Laser scanning microscope and beam-uniting optical assembly Download PDF

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Publication number
WO2008086792A1
WO2008086792A1 PCT/DE2008/000093 DE2008000093W WO2008086792A1 WO 2008086792 A1 WO2008086792 A1 WO 2008086792A1 DE 2008000093 W DE2008000093 W DE 2008000093W WO 2008086792 A1 WO2008086792 A1 WO 2008086792A1
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Prior art keywords
polarization
maintaining
fiber
mode
fibers
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PCT/DE2008/000093
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German (de)
French (fr)
Inventor
Dieter Huhse
Stefan Wilhelm
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Carl Zeiss Microimaging Gmbh
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Publication of WO2008086792A1 publication Critical patent/WO2008086792A1/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
    • G02B6/2856—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers formed or shaped by thermal heating means, e.g. splitting, branching and/or combining elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0064—Optical details of the image generation multi-spectral or wavelength-selective arrangements, e.g. wavelength fan-out, chromatic profiling
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
    • G02B6/2821—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using lateral coupling between contiguous fibres to split or combine optical signals
    • G02B6/2843—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using lateral coupling between contiguous fibres to split or combine optical signals the couplers having polarisation maintaining or holding properties

Definitions

  • the invention relates to a laser scanning microscope and to a beam-combining optical assembly for a laser scanning microscope.
  • Confocal laser scanning microscopes in which the laser beams of different wavelengths originating from several lasers are guided over separate optical fibers and combined after passing through adjustable collimators with a free-beam optics, before a beam reflection takes place on a scanner via a main color splitter.
  • DE 197 02 753 C2 provides interchangeable and switchable trained divider mirrors in order to combine laser beams of different single and / or multi-wavelength lasers onto a collinear beam at the fiber input of an optical fiber leading to the scan head.
  • DE 196 33 185 C2 uses a monolithically designed beam combiner with a plurality of dichroic coupling-in points, to which the laser radiation of several lasers is directed either via optical fibers or directly. Since the beam combination takes place over free-jet sections, it is susceptible to changes in the ambient conditions as well as other external influences. Depending on the positioning of the beam combiner, losses of the laser power coupled into the laser scanning microscope and thus also instability of the laser intensity may occur, or the superimposition of the individual color channels required for the image overlap may become inaccurate. Furthermore, there are expenses for the production and in particular in the adjustment of the free-jet components, which are reflected in the assembly costs or generally in the production costs. The object of the invention is therefore to make the merging of the laser beams in a single beam path of a laser scanning microscope such that the power and polarization parameters of the input radiation remain largely unaffected by environmental influences.
  • the laser scanning microscope has an illumination device which contains a plurality of lasers emitting at different wavelengths and optical fibers provided as beam outputs of the lasers via a polarization-maintaining fiber-optic coupling device designed for the visible spectral range with a single fiber optic fiber coupled to the illumination beam path of the laser scanning microscope Connection stand.
  • the fiber optic coupling device accordingly acts as a polarization maintaining wavelength multiplexer.
  • optical fibers designed as polarization-maintaining single-mode fibers are optically connected via thermally welded single-mode fiber spacers without polarization maintenance.
  • the fiber-optic polarization-preserving single-mode fiber coupling according to the invention for the visible spectral range ensures, in particular in laser scanning microscopes, a stable, adjustment-free beam combination of laser beams of different wavelengths, by beams of at least two polarization-preserving single-mode fibers are coupled into a polarization-preserving single-mode fiber.
  • the beam-combining optical assembly which serves to couple a plurality of laser beams of different wavelengths guided in optical fibers into a common optical fiber coupled to the illumination beam path of the laser scanning microscope, has a polarization-maintaining fiber-optic coupling device designed for the visible spectral range Laser beams of different wavelengths provided optical fibers with the common optical fiber are in fiber optic communication.
  • FIG. 3 shows a fiber-based wavelength multiplexer produced by cascading polarization-maintaining fiber-optic coupling devices 4 shows a single polarization-maintaining fiber-optic coupling device which combines more than two polarization-maintaining single-mode fibers with another polarization-maintaining single-mode fiber in a fiber-optic manner
  • FIG. 5 shows a first embodiment of a lighting device for a laser scanning microscope
  • FIG. 6 shows a second embodiment of a lighting device for a laser scanning microscope
  • Stressrods 1 .1, 2.1 is made by splicing techniques over a short, 1 5 - 20 mm long
  • Fiber spacer 3 made of a single-mode fiber, which is not polarization-preserving and also as a connector to another
  • Fiber spacer 4 is used, which is spliced with a polarization-maintaining single-mode fiber 5 and a free, "unused" fiber end 5 'has.
  • the two short fiber spacers 3, 4 are bonded together, in particular by known thermal fusion techniques, such that a polarization-maintaining fused coupler-based fiber optic coupler formed between a pair of polarization-maintaining single mode fibers 1 for the visible spectral range is formed 5 and another polarization-maintaining single-mode fiber 2 is produced.
  • three coupling devices 6, 7, 8 realize a fiber-based multiplexing, in which several, guided in polarization-preserving single-mode fibers 9 laser beams of different wavelengths from the visible spectral range on polarization-preserving single-mode fibers 10 finally in a polarization-preserving single mode Fiber 1 1 can be combined collinear so that the polarization properties are retained even after multiplexing.
  • FIGs. 3 and 4 are designated with 12 splices between the polarization-maintaining single-mode fibers 9 to 1 1 and non-polarization-preserving single-mode fiber pieces 13.
  • a polarization-maintaining fiber-optic coupling device 14 shown in FIG. 4 collinearly carries more than two fiber-guided laser beams polarization-maintaining in an optical fiber by providing the polarization-maintaining single-mode fibers 9 on the input side with a single polarization-maintaining single-mode fiber 11 at the output to be united.
  • the following wavelength ranges can be provided according to this exemplary embodiment:
  • Input -> wavelength 450 nm to 514 nm (argon ion laser);
  • Input -> wavelength 633 nm to 640 nm (HeNe or diode laser).
  • the illumination device according to FIG. 5 contains a plurality of single-line and / or multi-line lasers 1 5, 16, 17 which are coupled individually and with long-term stability to polarization-maintaining single-mode fibers 9 provided on the output side.
  • a polarization-maintaining fiber-optic coupling device 18 which may be formed cascade-like or as shown in FIG. 4, corresponding to FIG. 2, the individual fibers 9 are combined with low losses and maintaining the polarization extinction ratio on a single polarization-maintaining single-mode fiber 11, so that superimpose the laser beams of different wavelengths in this fiber 1 1 collinear.
  • the individual fiber 1 1 is aligned with its beam exit end fiber end to the optical axis 0-0 a scanning device 19 of a Laserscanmicroscope, so that the collinearly overlapping laser beams of different wavelengths of the scanning device 19 and thus the laser scanning microscope can be provided.
  • a scanning device 19 of a Laserscanmicroscope so that the collinearly overlapping laser beams of different wavelengths of the scanning device 19 and thus the laser scanning microscope can be provided.
  • the polarization-maintaining fiber optic coupling device 18 is integrated in a laser module 20.
  • This has the advantage that the scanning device 19 can be very easily connected to the laser module 20 via a plug-socket connection 21.
  • the direct integration of a polarization-maintaining fiber-optic coupling device 22 in the scan module 19 (FIG. 6) which is to be constructed very flat due to the splicing and melting technique also has advantages.
  • the laser module 20 is reduced to the individual fiber coupling of the laser 15, 16 used 17, which then only need to be mounted in a suitably ventilated housing.
  • the polarization-maintaining fiber-optic coupling device without an intermediate fiber piece by forming a fusion coupler by thermal fusion of two polarization-maintaining fibers.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

The object of the invention is to configure the uniting of the laser beams of a laser scanning microscope into a single beam path such that the performance and polarization parameters of the received beam remain substantially unaffected by the influence of environmental factors. The laser scanning microscope comprises an illumination device (20) with a plurality of lasers (15, 16, 17) emitting at different wavelengths. Optical fibers (9) are provided on the lasers on the side of the beam exit. Said fibers are coupled via a polarization-maintaining fiber optic coupling device (18) designed for the visible spectral region to a further optical fiber (11), which is coupled to the illumination beam path of the laser scanning microscope (19).

Description

Laserscanmikroskop und strahlvereinigende optische Baugruppe Laser scanning microscope and beam-blending optical assembly
Die Erfindung bezieht sich auf ein Laserscanmikroskop sowie auf eine strahlvereinigende optische Baugruppe für ein Laserscanmikroskop.The invention relates to a laser scanning microscope and to a beam-combining optical assembly for a laser scanning microscope.
Es sind konfokale Laserscanmikroskope bekannt, bei denen die von mehreren Lasern stammenden Laserstrahlen unterschiedlicher Wellenlängen über separate Lichtleitfasern geführt und nach dem Passieren verstellbarer Kollimatoren mit einer Freistrahloptik vereinigt werden, bevor über einen Hauptfarbteiler eine Strahlreflexion auf einen Scanner erfolgt.Confocal laser scanning microscopes are known, in which the laser beams of different wavelengths originating from several lasers are guided over separate optical fibers and combined after passing through adjustable collimators with a free-beam optics, before a beam reflection takes place on a scanner via a main color splitter.
Das Einkoppeln mehrerer unabhängiger Laser in eine Faser zur Übertragung zum Scankopf ist in Pawley : „Handbook of Confocal Microskopy", Plenum Press, 1994, Seite 151 beschrieben.The coupling of several independent lasers into a fiber for transmission to the scan head is described in Pawley: "Handbook of Confocal Microscopy", Plenum Press, 1994, page 151.
Die DE 197 02 753 C2 sieht auswechselbar und schaltbar ausgebildete Teilerspiegel vor, um Laserstrahlen verschiedener Einzel- und/oder Multiwellenlängenlaser auf einen kollinearen Strahl am Fasereingang einer zum Scankopf führenden optischen Faser zu vereinen.DE 197 02 753 C2 provides interchangeable and switchable trained divider mirrors in order to combine laser beams of different single and / or multi-wavelength lasers onto a collinear beam at the fiber input of an optical fiber leading to the scan head.
Die DE 196 33 185 C2 verwendet einen monolithisch ausgebildeten Strahlvereiniger mit mehreren dichroitischen Einkoppelstellen, auf welche die Laserstrahlung mehrerer Laser entweder über optische Fasern oder direkt gerichtet ist. Da die Strahlvereinigung über Freistrahlstrecken erfolgt, liegt eine Anfälligkeit gegenüber Änderungen der Umgebungsbedingungen sowie anderen äußeren Einflüssen vor. Je nach Positionierung des Strahlvereinigers kann es zu Verlusten der in das Laserscanmikroskop eingekoppelten Laserleistung und damit auch zu einer Instabilität der Laserintensität kommen oder aber die für die Bildüberdeckung erforderliche Überlagerung der einzelnen Farbkanäle wird ungenau. Des Weiteren entstehen Aufwände für die Herstellung und insbesondere bei der Justage der Freistrahlkomponenten, die sich in den Montagekosten bzw. allgemein in den Herstellungskosten niederschlagen. Die Aufgabe der Erfindung besteht deshalb darin, die Zusammenführung der Laserstrahlen in einen einzigen Strahlengang eines Laserscanmikroskops derart zu gestalten, dass die Leistungs- und Polarisationsparameter der Eingangsstrahlung durch Umwelteinflüsse weitestgehend unbeeinflusst bleiben.DE 196 33 185 C2 uses a monolithically designed beam combiner with a plurality of dichroic coupling-in points, to which the laser radiation of several lasers is directed either via optical fibers or directly. Since the beam combination takes place over free-jet sections, it is susceptible to changes in the ambient conditions as well as other external influences. Depending on the positioning of the beam combiner, losses of the laser power coupled into the laser scanning microscope and thus also instability of the laser intensity may occur, or the superimposition of the individual color channels required for the image overlap may become inaccurate. Furthermore, there are expenses for the production and in particular in the adjustment of the free-jet components, which are reflected in the assembly costs or generally in the production costs. The object of the invention is therefore to make the merging of the laser beams in a single beam path of a laser scanning microscope such that the power and polarization parameters of the input radiation remain largely unaffected by environmental influences.
Diese Aufgabe wird bei einem Laserscanmikroskop durch die Merkmale des Anspruches 1 gelöst.This object is achieved in a laser scanning microscope by the features of claim 1.
Das Laserscanmikroskop weist eine Beleuchtungseinrichtung auf, die mehrere, bei unterschiedlichen Wellenlängen emittierende Laser enthält und bei der als Strahlausgänge der Laser vorgesehene optische Fasern über eine für den sichtbaren Spektralbereich ausgebildete polarisationserhaltende faseroptische Koppeleinrichtung mit einer einzigen, an den Beleuchtungsstrahlengang des Laserscanmikroskops gekoppelten optischen Faser in faseroptischer Verbindung stehen. Die faseroptische Koppelvorrichtung fungiert dementsprechend als polarisationserhaltender Wellenlängen-Multiplexer.The laser scanning microscope has an illumination device which contains a plurality of lasers emitting at different wavelengths and optical fibers provided as beam outputs of the lasers via a polarization-maintaining fiber-optic coupling device designed for the visible spectral range with a single fiber optic fiber coupled to the illumination beam path of the laser scanning microscope Connection stand. The fiber optic coupling device accordingly acts as a polarization maintaining wavelength multiplexer.
Von besonderem Vorteil ist es, wenn die als polarisationserhaltende Single-Mode-Fasem ausgebildeten optischen Fasern über thermisch verschweißte Single-Mode- Faserzwischenstücke ohne Polarisationserhaltung optisch verbunden sind.It is particularly advantageous if the optical fibers designed as polarization-maintaining single-mode fibers are optically connected via thermally welded single-mode fiber spacers without polarization maintenance.
Damit wird erreicht, dass bei der Vereinigung mehrerer polarisationserhaltender Single- Mode-Fasem auf einen Faserausgang die Leistungsparameter der Eingangsstrahlung erhalten bleiben, da die erfindungsgemäße Koppeleinrichtung äußerst geringe Einfügeverluste aufweist. Durch den weitestgehenden Erhalt des Polarisationsauslöschungsverhältnisses (PER) beim faserbasierten einmodigen Multiplexing im sichtbaren Spektralbereich ist der Einsatz in der Laserscanmikroskopie gewährleistet.This ensures that the performance parameters of the input radiation are maintained when combining a plurality of polarization-maintaining single-mode fibers on a fiber output, since the coupling device according to the invention has extremely low insertion losses. By maintaining the polarization extinction ratio (PER) as far as possible in fiber-based single-mode multiplexing in the visible spectral range, use in laser scanning microscopy is guaranteed.
Die erfindungsgemäße faseroptische polarisationserhaltende Single-Mode- Faserkopplung für den sichtbaren Spektralbereich gewährleistet, insbesondere in Laserscanmikroskopen, eine stabile, justagefreie Strahlvereinigung von Laserstrahlen unterschiedlicher Wellenlängen, indem Strahlen aus mindestens zwei polarisationserhaltenden Single-Mode-Fasern in eine polarisationserhaltende Single- Mode-Faser eingekoppelt werden.The fiber-optic polarization-preserving single-mode fiber coupling according to the invention for the visible spectral range ensures, in particular in laser scanning microscopes, a stable, adjustment-free beam combination of laser beams of different wavelengths, by beams of at least two polarization-preserving single-mode fibers are coupled into a polarization-preserving single-mode fiber.
Die bestehende Aufgabe wird ferner bei einer strahlvereinigenden optischen Baugruppe für ein Laserscanmikroskop durch die Merkmale des Anspruches 12 gelöst.The existing task is further solved by a beam blending optical assembly for a laser scanning microscope by the features of claim 12.
Die strahlvereinigende optische Baugruppe, die zur Einkopplung von mehreren, in optischen Fasern geführten Laserstrahlen unterschiedlicher Wellenlängen in eine gemeinsame, an den Beleuchtungsstrahlengang des Laserscanmikroskops gekoppelte optische Faser dient, weist eine für den sichtbaren Spektralbereich ausgebildete polarisationserhaltende faseroptische Koppeleinrichtung auf, mit der die zur Strahlführung der Laserstrahlen unterschiedlicher Wellenlängen vorgesehenen optischen Fasern mit der gemeinsamen optischen Faser in faseroptischer Verbindung stehen.The beam-combining optical assembly, which serves to couple a plurality of laser beams of different wavelengths guided in optical fibers into a common optical fiber coupled to the illumination beam path of the laser scanning microscope, has a polarization-maintaining fiber-optic coupling device designed for the visible spectral range Laser beams of different wavelengths provided optical fibers with the common optical fiber are in fiber optic communication.
Weitere zweckmäßige und vorteilhafte Ausgestaltungen und Weiterbildungen des erfindungsgemäßen Laserscanmikroskops und der strahlvereinigenden optischen Baugruppe ergeben sich aus den abhängigen Ansprüchen.Further expedient and advantageous refinements and developments of the laser scanning microscope according to the invention and the beam-combining optical assembly result from the dependent claims.
Die Erfindung soll nachstehend anhand der schematischen Zeichnung näher erläutert werden. Es zeigen:The invention will be explained in more detail below with reference to the schematic drawing. Show it:
Fig. 1 zwei über ein Stück nicht polarisationserhaltende Single-Mode-Faser miteinander verlustarm verbundene polarisationserhaltende Single-Mode-Fasern1 shows two polarization-maintaining single-mode fibers connected to one another with little loss via one piece of non-polarization-preserving single-mode fiber
Fig. 2 eine einfache polarisationserhaltende faseroptische Koppeleinrichtung mit zwei miteinander thermisch verschmolzenen Single-Mode-Faser-Zwischenstücken2 shows a simple polarization-maintaining fiber-optic coupling device with two thermally fused single-mode fiber spacers
Fig. 3 einen durch Kaskadierung polarisationserhaltender faseroptischer Koppeleinrichtungen hergestellten faserbasierten Wellenlängen-Multiplexer Fig. 4 eine einzelne polarisationserhaltende faseroptische Koppeleinrichtung, die mehr als zwei polarisationserhaltende Single-Mode-Fasern mit einer weiteren polarisationserhaltenden Single-Mode-Faser faseroptisch verbindet3 shows a fiber-based wavelength multiplexer produced by cascading polarization-maintaining fiber-optic coupling devices 4 shows a single polarization-maintaining fiber-optic coupling device which combines more than two polarization-maintaining single-mode fibers with another polarization-maintaining single-mode fiber in a fiber-optic manner
Fig. 5 eine erste Ausführung einer Beleuchtungseinrichtung für ein Laserscanmikroskop5 shows a first embodiment of a lighting device for a laser scanning microscope
Fig. 6 eine zweite Ausführung einer Beleuchtungseinrichtung für ein Laserscanmikroskop6 shows a second embodiment of a lighting device for a laser scanning microscope
Die in Fig. 1 und 2 dargestellte Faserverbindung zwischen zwei aktiv zueinander justierten polarisationserhaltenden Single-Mode-Fasern 1 , 2 mit entsprechendenThe fiber connection shown in Fig. 1 and 2 between two actively aligned polarization-maintaining single-mode fibers 1, 2 with corresponding
Stressrods 1 .1 , 2.1 wird durch Spleißtechniken über ein kurzes, 1 5 - 20 mm langesStressrods 1 .1, 2.1 is made by splicing techniques over a short, 1 5 - 20 mm long
Faserzwischenstück 3 aus einer Single-Mode-Faser hergestellt, das nicht polarisationserhaltend ist und das außerdem als Verbindungstück zu einem anderenFiber spacer 3 made of a single-mode fiber, which is not polarization-preserving and also as a connector to another
Faserzwischenstück 4 dient, welches mit einer polarisationserhaltenden Single-Mode- Faser 5 verspleißt ist und ein freies, „ungenutztes" Faserende 5' aufweist.Fiber spacer 4 is used, which is spliced with a polarization-maintaining single-mode fiber 5 and a free, "unused" fiber end 5 'has.
Wie Fig. 2 zu entnehmen ist, werden die zwei kurzen Faserzwischenstücke 3, 4, insbesondere durch bekannte Techniken des thermischen Verschmelzens miteinander verbunden, so dass eine für den sichtbaren Spektralbereich ausgebildete polarisationserhaltende faseroptische Koppeleinrichtung auf Schmelzkopplerbasis zwischen einem Paar polarisationserhaltender Single-Mode-Fasern 1 , 5 und einer weiteren polarisationserhaltenden Single-Mode-Faser 2 hergestellt wird.As shown in FIG. 2, the two short fiber spacers 3, 4 are bonded together, in particular by known thermal fusion techniques, such that a polarization-maintaining fused coupler-based fiber optic coupler formed between a pair of polarization-maintaining single mode fibers 1 for the visible spectral range is formed 5 and another polarization-maintaining single-mode fiber 2 is produced.
Auf diese Weise lässt sich gemäß Fig. 3 durch Kaskadierung z. B. über drei Koppeleinrichtungen 6, 7, 8 ein faserbasiertes Multiplexing realisieren, bei dem mehrere, in polarisationserhaltenden Single-Mode-Fasern 9 geführte Laserstrahlen unterschiedlicher Wellenlängen aus dem sichtbaren Spektralbereich über polarisationserhaltende Single-Mode-Fasern 10 schließlich in einer polarisationserhaltenden Single-Mode-Faser 1 1 derart kollinear vereint werden können, dass die Polarisationseigenschaften auch nach dem Multiplexing erhalten bleiben.In this way can be shown in FIG. 3 by cascading z. B. three coupling devices 6, 7, 8 realize a fiber-based multiplexing, in which several, guided in polarization-preserving single-mode fibers 9 laser beams of different wavelengths from the visible spectral range on polarization-preserving single-mode fibers 10 finally in a polarization-preserving single mode Fiber 1 1 can be combined collinear so that the polarization properties are retained even after multiplexing.
In Fig. 3 und 4 sind mit 12 Spleiße zwischen den polarisationserhaltenden Single-Mode- Fasern 9 bis 1 1 und nichtpolarisationserhaltenden Single-Mode-Faser-Stücken 13 bezeichnet. Eine in Fig. 4 gezeigte polarisationserhaltende faseroptische Koppeleinrichtung 14 führt mehr als zwei fasergeführte Laserstrahlen polarisationserhaltend in einer optischen Faser kollinear zusammen, indem die auf der Eingangsseite befindlichen polarisationserhaltenden Single-Mode-Fasern 9 mit einer einzigen polarisationserhaltenden Single-Mode-Faser 1 1 am Ausgang vereinigt werden.In Figs. 3 and 4 are designated with 12 splices between the polarization-maintaining single-mode fibers 9 to 1 1 and non-polarization-preserving single-mode fiber pieces 13. A polarization-maintaining fiber-optic coupling device 14 shown in FIG. 4 collinearly carries more than two fiber-guided laser beams polarization-maintaining in an optical fiber by providing the polarization-maintaining single-mode fibers 9 on the input side with a single polarization-maintaining single-mode fiber 11 at the output to be united.
Für die vier Eingänge können gemäß diesem Ausführungsbeispiel folgende Wellenlängenbereiche vorgesehen sein:For the four inputs, the following wavelength ranges can be provided according to this exemplary embodiment:
1 . Eingang -> Wellenlänge = 450 nm bis 514 nm (Argon Ionen Laser);1 . Input -> wavelength = 450 nm to 514 nm (argon ion laser);
2. Eingang -> Wellenlänge = 543 nm bis 561 nm (HeNe oder DPSS Laser);2. input -> wavelength = 543 nm to 561 nm (HeNe or DPSS laser);
3. Eingang -> Wellenlänge = 594 nm (HeNe Laser);3. input -> wavelength = 594 nm (HeNe laser);
4. Eingang -> Wellenlänge = 633 nm bis 640 nm (HeNe oder Diodenlaser).4. Input -> wavelength = 633 nm to 640 nm (HeNe or diode laser).
Die Beleuchtungseinrichtung gemäß Fig. 5 enthält mehrere Einzellinien- und/oder Multilinienlaser 1 5, 16, 1 7, die individuell sowie transport- und langzeitstabil an ausgangsseitig vorgesehene polarisationserhaltende Single-Mode-Fasern 9 gekoppelt sind.The illumination device according to FIG. 5 contains a plurality of single-line and / or multi-line lasers 1 5, 16, 17 which are coupled individually and with long-term stability to polarization-maintaining single-mode fibers 9 provided on the output side.
Mittels einer polarisationserhaltenden faseroptischen Koppeleinrichtung 18, die sowohl entsprechend Fig. 2 kaskadenartig oder gemäß Fig. 4 ausgebildet sein kann, sind die einzelnen Fasern 9 verlustarm und unter Beibehaltung des Polarisationsauslöschungsverhältnisses auf eine einzelne polarisationserhaltende Single- Mode-Faser 1 1 zusammengeführt, so dass sich die Laserstrahlen unterschiedlicher Wellenlängen in dieser Faser 1 1 kollinear überlagern. Die einzelne Faser 1 1 ist mit ihrem strahlausgangsseitigen Faserende zur optischen Achse 0-0 einer Scaneinrichtung 19 eines Laserscanmikroskops ausgerichtet, so dass die sich kollinear überlagernden Laserstrahlen unterschiedlicher Wellenlängen der Scaneinrichtung 19 und damit dem Laserscanmikroskop bereitgestellt werden können. Bei der in Fig. 5 gezeigten bevorzugten Ausführung ist die polarisationserhaltende faseroptische Koppeleinrichtung 18 in einem Lasermodul 20 integriert. Das hat den Vorteil, dass die Scaneinrichtung 19 über eine Stecker-Buchse-Verbindung 21 sehr einfach mit dem Lasermodul 20 verbunden werden kann. Aber auch die direkte Integration einer aufgrund der Spleiß- und Schmelztechnik sehr flach zu bauenden polarisationserhaltenden faseroptischen Koppeleinrichtung 22 im Scanmodul 19 (Fig. 6) weist Vorteile auf. Das Lasermodul 20 reduziert sich auf die individuelle Faserkopplung der verwendeten Laser 15, 16 17, die dann lediglich noch in einem entsprechend belüfteten Gehäuse montiert werden müssen.By means of a polarization-maintaining fiber-optic coupling device 18, which may be formed cascade-like or as shown in FIG. 4, corresponding to FIG. 2, the individual fibers 9 are combined with low losses and maintaining the polarization extinction ratio on a single polarization-maintaining single-mode fiber 11, so that superimpose the laser beams of different wavelengths in this fiber 1 1 collinear. The individual fiber 1 1 is aligned with its beam exit end fiber end to the optical axis 0-0 a scanning device 19 of a Laserscanmicroscope, so that the collinearly overlapping laser beams of different wavelengths of the scanning device 19 and thus the laser scanning microscope can be provided. In the preferred embodiment shown in FIG. 5, the polarization-maintaining fiber optic coupling device 18 is integrated in a laser module 20. This has the advantage that the scanning device 19 can be very easily connected to the laser module 20 via a plug-socket connection 21. However, the direct integration of a polarization-maintaining fiber-optic coupling device 22 in the scan module 19 (FIG. 6) which is to be constructed very flat due to the splicing and melting technique also has advantages. The laser module 20 is reduced to the individual fiber coupling of the laser 15, 16 used 17, which then only need to be mounted in a suitably ventilated housing.
In einer weiteren nicht dargestellten Ausführung der Erfindung ist es auch möglich, die polarisationserhaltende faseroptische Koppeleinrichtung ohne Faserzwischenstück aufzubauen, indem durch thermische Verschmelzung zweier polarisationserhaltender Fasern ein Schmelzkoppler ausgebildet wird. In a further embodiment of the invention, not shown, it is also possible to construct the polarization-maintaining fiber-optic coupling device without an intermediate fiber piece by forming a fusion coupler by thermal fusion of two polarization-maintaining fibers.

Claims

Patentansprüche claims
1 . Laserscanmikroskop mit einer Beleuchtungseinrichtung, die mehrere, bei unterschiedlichen Wellenlängen emittierende Laser enthält und bei der als Strahlausgänge der Laser vorgesehene optische Fasern über eine für den sichtbaren1 . Laserscanmicroscope with a lighting device containing a plurality of lasers emitting at different wavelengths and in which provided as the beam outputs of the laser optical fibers on one for the visible
Spektralbereich ausgebildete polarisationserhaltende faseroptischeSpectral region formed polarization-maintaining fiber optic
Koppeleinrichtung (6, 7, 8, 14) mit einer einzigen, an den Beleuchtungsstrahlengang des Laserscanmikroskops gekoppelten optischen Faser in faseroptischer Verbindung stehen.Coupling device (6, 7, 8, 14) with a single, coupled to the illumination beam path of the Laserscanmicroscope optical fiber in fiber-optic connection.
2. Laserscanmikroskop nach Anspruch 1 , wobei die faseroptische Koppeleinrichtung (6, 7, 8, 14) als polarisationserhaltender Wellenlängenmultiplexer ausgebildet ist.2. Laserscanmikroskop according to claim 1, wherein the fiber optic coupling means (6, 7, 8, 14) is designed as a polarization-maintaining wavelength multiplexer.
3. Laserscanmikroskop nach Anspruch 2, wobei die optischen Fasern als polarisationserhaltende Single-Mode-Fasern (1 , 2, 5, 9, 10, 1 1 ) ausgebildet sind.3. Laserscanmikroskop according to claim 2, wherein the optical fibers as polarization-maintaining single-mode fibers (1, 2, 5, 9, 10, 1 1) are formed.
4. Laserscanmikroskop nach Anspruch 3, wobei die polarisationserhaltende faseroptische Koppeleinrichtung (6, 7, 8, 14) als Schmelzkoppler ausgebildet ist.4. Laserscanmikroskop according to claim 3, wherein the polarization-maintaining fiber optic coupling device (6, 7, 8, 14) is designed as a fusion coupler.
5. Laserscanmikroskop nach Anspruch 4, wobei die polarisationserhaltenden Single- Mode-Fasern (9, 10, 1 1 ) über thermisch verschweißte Single-Mode- Faserzwischenstücke (3, 4, 13) ohne Polarisationserhaltung optisch verbunden sind.5. Laserscanmikroskop according to claim 4, wherein the polarization-maintaining single-mode fibers (9, 10, 1 1) via thermally welded single-mode fiber spacers (3, 4, 13) are optically connected without polarization maintenance.
6. Laserscanmikroskop nach Anspruch 4, wobei die Schmelzkopplung zwischen den polarisationserhaltenden Single-Mode-Fasern (9, 1 1 ) hergestellt ist.6. Laserscanmikroskop according to claim 4, wherein the fusion coupling between the polarization-maintaining single-mode fibers (9, 1 1) is prepared.
7. Laserscanmikroskop nach Anspruch 5, wobei die polarisationserhaltende faseroptische Koppeleinrichtung (6, 7, 8) als Kaskade ausgebildet ist, bei der jeweils ein Paar polarisationserhaltender Single-Mode-Fasern (9, 10) mit einer weiteren polarisationserhaltenden Single-Mode-Faser (10, 1 1 ) optisch verbunden sind. 7. Laserscanmikroskop according to claim 5, wherein the polarization-maintaining fiber optic coupling device (6, 7, 8) is formed as a cascade, in each case a pair of polarization-maintaining single-mode fibers (9, 10) with another polarization-maintaining single-mode fiber ( 10, 1 1) are optically connected.
8. Laserscan mikroskop nach Anspruch 8, wobei die polarisationserhaltende faseroptische Koppeleinrichtung (14) für eine direkte optische Verbindung zwischen mehr als zwei polarisationserhaltenden Single-Mode-Fasern (9) mit einer weiteren polarisationserhaltenden Single-Mode-Faser (1 1) ausgebildet ist.8. Laserscan microscope according to claim 8, wherein the polarization-maintaining fiber optic coupling device (14) for a direct optical connection between more than two polarization-maintaining single-mode fibers (9) with a further polarization-maintaining single-mode fiber (1 1) is formed.
9. Laserscanmikroskop nach einem der Ansprüche 1 bis 8, wobei die polarisationserhaltende faseroptische Koppeleinrichtung (6, 7, 8, 14) in einem Lasermodul (20) untergebracht ist und die weitere polarisationserhaltende Single- Mode-Faser (1 1 ) den Strahlausgang des Lasermoduls (1 1 ) bildet.9. Laserscanmikroskop according to one of claims 1 to 8, wherein the polarization-maintaining fiber optic coupling device (6, 7, 8, 14) in a laser module (20) is housed and the further polarization-preserving single-mode fiber (1 1) the beam output of the laser module (1 1) forms.
10. Laserscanmikroskop nach Anspruch 9, wobei die Scaneinrichtung (19) über eine Stecker-Buchse- Verbindung (21 ) mit dem Lasermodul (20) verbunden ist.10. Laserscanmikroskop according to claim 9, wherein the scanning device (19) via a male-female connection (21) to the laser module (20) is connected.
1 1. Laserscanmikroskop nach einem der Ansprüche 1 bis 8, wobei die polarisationserhaltende faseroptische Koppeleinrichtung (6, 7, 8, 14) in der1 laser scanning microscope according to one of claims 1 to 8, wherein the polarization-maintaining fiber-optic coupling device (6, 7, 8, 14) in the
Scaneinrichtung (19) untergebracht ist. ■Scanning device (19) is housed. ■
12. Strahlvereinigende optische Baugruppe für ein Laserscanmikroskop, die zur Einkopplung von mehreren, in optischen Fasern geführten Laserstrahlen unterschiedlicher Wellenlängen in eine gemeinsame, an den12. Beam blending optical assembly for a laser scanning microscope, for the coupling of several, guided in optical fibers laser beams of different wavelengths in a common, to the
Beleuchtungsstrahlengang des Laserscanmikroskops gekoppelte optische Faser, eine für den sichtbaren Spektralbereich ausgebildete polarisationserhaltende faseroptische Koppeleinrichtung (6, 7, 8, 14) aufweist, mit der die zur Strahlführung der Laserstrahlen unterschiedlicher Wellenlängen vorgesehenen optischen Fasern mit der gemeinsamen optischen Faser in faseroptischerIllumination beam path of the laser scanning microscope coupled optical fiber, a formed for the visible spectral polarization-maintaining fiber optic coupling device (6, 7, 8, 14), with which provided for the beam guidance of the laser beams of different wavelengths optical fibers with the common optical fiber in fiber optic
Verbindung stehen.Connection stand.
13. Optische Baugruppe nach Anspruch 12, wobei die faseroptische Koppeleinrichtung (6, 7, 8, 14) als polarisationserhaltender Wellenlängenmultiplexer ausgebildet ist.13. Optical assembly according to claim 12, wherein the fiber optic coupling device (6, 7, 8, 14) is designed as a polarization-maintaining wavelength multiplexer.
14. Optische Baugruppe nach Anspruch 13, wobei die optischen Fasern als polarisationserhaltende Single-Mode-Fasern (1 , 2, 5, 9, 10, 1 1 ) ausgebildet sind. 14. Optical assembly according to claim 13, wherein the optical fibers as polarization-maintaining single-mode fibers (1, 2, 5, 9, 10, 1 1) are formed.
15. Optische Baugruppe nach Anspruch 14, wobei die polarisationserhaltende faseroptische Koppeleinrichtung (6, 7, 8, 14) als Schmelzkoppler ausgebildet ist.15. Optical assembly according to claim 14, wherein the polarization-maintaining fiber-optic coupling device (6, 7, 8, 14) is designed as a fusion coupler.
16. Optische Baugruppe nach Anspruch 15, wobei die polarisationserhaltenden Single- Mode-Fasern (9, 10, 1 1) über thermisch verschweißte Single-Mode-16. Optical assembly according to claim 15, wherein the polarization-maintaining single-mode fibers (9, 10, 1 1) via thermally welded single-mode
Faserzwischenstücke (3, 13) ohne Polarisationserhaltung optisch verbunden sind.Fiber spacers (3, 13) are optically connected without polarization maintenance.
17. Optische Baugruppe nach Anspruch 15, wobei die Schmelzkopplung zwischen den polarisationserhaltenden Single-Mode-Fasem (9, 1 1 ) hergestellt ist.17. Optical assembly according to claim 15, wherein the fusion coupling between the polarization-maintaining single-mode fibers (9, 1 1) is prepared.
18. Optische Baugruppe nach Anspruch 16, wobei die polarisationserhaltende faseroptische Koppeleinrichtung (6, 7, 8) als Kaskade ausgebildet ist, bei der jeweils ein Paar polarisationserhaltender Single-Mode-Fasem (9, 10) mit einer weiteren polarisationserhaltenden Single-Mode-Faser (10, 1 1 ) optisch verbunden sind.18. Optical assembly according to claim 16, wherein the polarization-maintaining fiber-optic coupling device (6, 7, 8) is formed as a cascade, in each case a pair of polarization-preserving single-mode fibers (9, 10) with a further polarization-maintaining single-mode fiber (10, 1 1) are optically connected.
19. Optische Baugruppe nach Anspruch 16, wobei die polarisationserhaltende faseroptische Koppeleinrichtung (14) für eine direkte optische Verbindung zwischen mehr als zwei polarisationserhaltenden Single-Mode-Fasern (9) mit einer weiteren polarisationserhaltenden Single-Mode-Faser (1 1 ) ausgebildet ist. 19. Optical assembly according to claim 16, wherein the polarization-maintaining fiber optic coupling device (14) for a direct optical connection between more than two polarization-maintaining single-mode fibers (9) with a further polarization-maintaining single-mode fiber (1 1) is formed.
PCT/DE2008/000093 2007-01-18 2008-01-17 Laser scanning microscope and beam-uniting optical assembly WO2008086792A1 (en)

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