WO2008085144A1 - Low shrinkage polyester thermosetting resins - Google Patents
Low shrinkage polyester thermosetting resins Download PDFInfo
- Publication number
- WO2008085144A1 WO2008085144A1 PCT/US2006/007943 US2006007943W WO2008085144A1 WO 2008085144 A1 WO2008085144 A1 WO 2008085144A1 US 2006007943 W US2006007943 W US 2006007943W WO 2008085144 A1 WO2008085144 A1 WO 2008085144A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- die
- compound
- substituted
- aliphatic
- bondline
- Prior art date
Links
- 229920000728 polyester Polymers 0.000 title abstract description 18
- 229920001187 thermosetting polymer Polymers 0.000 title description 13
- 229920005989 resin Polymers 0.000 title description 3
- 239000011347 resin Substances 0.000 title description 3
- 150000001875 compounds Chemical class 0.000 claims abstract description 81
- 239000000853 adhesive Substances 0.000 claims abstract description 71
- 230000001070 adhesive effect Effects 0.000 claims abstract description 71
- 238000007142 ring opening reaction Methods 0.000 claims abstract description 11
- 239000000203 mixture Substances 0.000 claims description 62
- 239000000758 substrate Substances 0.000 claims description 38
- 125000001931 aliphatic group Chemical group 0.000 claims description 33
- 125000003118 aryl group Chemical group 0.000 claims description 17
- 125000001072 heteroaryl group Chemical group 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 16
- 125000004432 carbon atom Chemical group C* 0.000 claims description 15
- -1 tetracyclododecyl Chemical group 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 12
- 238000004377 microelectronic Methods 0.000 claims description 12
- 125000000217 alkyl group Chemical group 0.000 claims description 11
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 11
- 239000000945 filler Substances 0.000 claims description 11
- 239000003999 initiator Substances 0.000 claims description 10
- 239000007822 coupling agent Substances 0.000 claims description 9
- 239000004593 Epoxy Substances 0.000 claims description 8
- 125000000623 heterocyclic group Chemical group 0.000 claims description 8
- 125000001424 substituent group Chemical group 0.000 claims description 8
- 125000003342 alkenyl group Chemical group 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 claims description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- 125000004104 aryloxy group Chemical group 0.000 claims description 4
- 239000004643 cyanate ester Substances 0.000 claims description 4
- 238000011049 filling Methods 0.000 claims description 4
- 125000000472 sulfonyl group Chemical group *S(*)(=O)=O 0.000 claims description 4
- IMSODMZESSGVBE-UHFFFAOYSA-N 2-Oxazoline Chemical compound C1CN=CO1 IMSODMZESSGVBE-UHFFFAOYSA-N 0.000 claims description 3
- CMLFRMDBDNHMRA-UHFFFAOYSA-N 2h-1,2-benzoxazine Chemical compound C1=CC=C2C=CNOC2=C1 CMLFRMDBDNHMRA-UHFFFAOYSA-N 0.000 claims description 3
- HRDCVMSNCBAMAM-UHFFFAOYSA-N 3-prop-2-ynoxyprop-1-yne Chemical compound C#CCOCC#C HRDCVMSNCBAMAM-UHFFFAOYSA-N 0.000 claims description 3
- 125000002868 norbornyl group Chemical group C12(CCC(CC1)C2)* 0.000 claims description 3
- AHHWIHXENZJRFG-UHFFFAOYSA-N oxetane Chemical compound C1COC1 AHHWIHXENZJRFG-UHFFFAOYSA-N 0.000 claims description 3
- 229920001296 polysiloxane Polymers 0.000 claims description 3
- 125000003107 substituted aryl group Chemical group 0.000 claims description 3
- 125000005346 substituted cycloalkyl group Chemical group 0.000 claims description 3
- SGUARWQDISKGTC-UHFFFAOYSA-N 2-hydroxyimino-2-nitroacetonitrile Chemical compound ON=C(C#N)[N+]([O-])=O SGUARWQDISKGTC-UHFFFAOYSA-N 0.000 claims description 2
- IZSHZLKNFQAAKX-UHFFFAOYSA-N 5-cyclopenta-2,4-dien-1-ylcyclopenta-1,3-diene Chemical group C1=CC=CC1C1C=CC=C1 IZSHZLKNFQAAKX-UHFFFAOYSA-N 0.000 claims description 2
- 229910052582 BN Inorganic materials 0.000 claims description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 2
- KXDHJXZQYSOELW-UHFFFAOYSA-M Carbamate Chemical compound NC([O-])=O KXDHJXZQYSOELW-UHFFFAOYSA-M 0.000 claims description 2
- 125000002252 acyl group Chemical group 0.000 claims description 2
- 125000003545 alkoxy group Chemical group 0.000 claims description 2
- 125000000304 alkynyl group Chemical group 0.000 claims description 2
- 125000003368 amide group Chemical group 0.000 claims description 2
- 229910000019 calcium carbonate Inorganic materials 0.000 claims description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical group Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 2
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 claims description 2
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 claims description 2
- 229910003460 diamond Inorganic materials 0.000 claims description 2
- 239000010432 diamond Substances 0.000 claims description 2
- 239000000428 dust Substances 0.000 claims description 2
- 229910021485 fumed silica Inorganic materials 0.000 claims description 2
- 125000001188 haloalkyl group Chemical group 0.000 claims description 2
- 229910052736 halogen Inorganic materials 0.000 claims description 2
- 150000002367 halogens Chemical class 0.000 claims description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 2
- 125000001624 naphthyl group Chemical group 0.000 claims description 2
- 125000004043 oxo group Chemical group O=* 0.000 claims description 2
- 125000005254 oxyacyl group Chemical group 0.000 claims description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 2
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 claims description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 2
- PXQLVRUNWNTZOS-UHFFFAOYSA-N sulfanyl Chemical class [SH] PXQLVRUNWNTZOS-UHFFFAOYSA-N 0.000 claims description 2
- 229940124530 sulfonamide Drugs 0.000 claims description 2
- 150000003456 sulfonamides Chemical class 0.000 claims description 2
- 239000003085 diluting agent Substances 0.000 claims 1
- 125000003518 norbornenyl group Chemical group C12(C=CC(CC1)C2)* 0.000 claims 1
- 230000000712 assembly Effects 0.000 abstract description 14
- 238000000429 assembly Methods 0.000 abstract description 14
- 238000004806 packaging method and process Methods 0.000 abstract description 5
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 30
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 12
- 239000000463 material Substances 0.000 description 12
- 239000011541 reaction mixture Substances 0.000 description 10
- 229920001169 thermoplastic Polymers 0.000 description 9
- 239000004416 thermosoftening plastic Substances 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- 238000004132 cross linking Methods 0.000 description 6
- 239000002253 acid Substances 0.000 description 5
- 238000002390 rotary evaporation Methods 0.000 description 5
- 239000007790 solid phase Substances 0.000 description 5
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 4
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 4
- 125000002947 alkylene group Chemical group 0.000 description 4
- 229910052681 coesite Inorganic materials 0.000 description 4
- 229910052906 cristobalite Inorganic materials 0.000 description 4
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 4
- 125000003700 epoxy group Chemical group 0.000 description 4
- QQVIHTHCMHWDBS-UHFFFAOYSA-N isophthalic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=C1 QQVIHTHCMHWDBS-UHFFFAOYSA-N 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- 229910052682 stishovite Inorganic materials 0.000 description 4
- 229910052905 tridymite Inorganic materials 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 3
- SJRJJKPEHAURKC-UHFFFAOYSA-N N-Methylmorpholine Chemical compound CN1CCOCC1 SJRJJKPEHAURKC-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 125000000732 arylene group Chemical group 0.000 description 3
- FDQSRULYDNDXQB-UHFFFAOYSA-N benzene-1,3-dicarbonyl chloride Chemical compound ClC(=O)C1=CC=CC(C(Cl)=O)=C1 FDQSRULYDNDXQB-UHFFFAOYSA-N 0.000 description 3
- 239000012267 brine Substances 0.000 description 3
- 229940125904 compound 1 Drugs 0.000 description 3
- 229940125782 compound 2 Drugs 0.000 description 3
- 229940126214 compound 3 Drugs 0.000 description 3
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 3
- 125000005702 oxyalkylene group Chemical group 0.000 description 3
- 235000013824 polyphenols Nutrition 0.000 description 3
- HPALAKNZSZLMCH-UHFFFAOYSA-M sodium;chloride;hydrate Chemical compound O.[Na+].[Cl-] HPALAKNZSZLMCH-UHFFFAOYSA-M 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000012815 thermoplastic material Substances 0.000 description 3
- CTKINSOISVBQLD-UHFFFAOYSA-N Glycidol Chemical compound OCC1CO1 CTKINSOISVBQLD-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 2
- 238000007171 acid catalysis Methods 0.000 description 2
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- BEVHTMLFDWFAQF-UHFFFAOYSA-N butyl(triphenyl)phosphanium Chemical compound C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(CCCC)C1=CC=CC=C1 BEVHTMLFDWFAQF-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 150000001913 cyanates Chemical class 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- ZSWFCLXCOIISFI-UHFFFAOYSA-N cyclopentadiene Chemical compound C1C=CC=C1 ZSWFCLXCOIISFI-UHFFFAOYSA-N 0.000 description 2
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical class C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 2
- 238000004100 electronic packaging Methods 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 125000001183 hydrocarbyl group Chemical group 0.000 description 2
- 229910052500 inorganic mineral Inorganic materials 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052943 magnesium sulfate Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229940098779 methanesulfonic acid Drugs 0.000 description 2
- 125000000325 methylidene group Chemical group [H]C([H])=* 0.000 description 2
- 239000011707 mineral Substances 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- 238000000518 rheometry Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 150000003512 tertiary amines Chemical class 0.000 description 2
- NHGXDBSUJJNIRV-UHFFFAOYSA-M tetrabutylammonium chloride Chemical compound [Cl-].CCCC[N+](CCCC)(CCCC)CCCC NHGXDBSUJJNIRV-UHFFFAOYSA-M 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 2
- 229920001567 vinyl ester resin Polymers 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- 150000003923 2,5-pyrrolediones Chemical class 0.000 description 1
- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- UIGULSHPWYAWSA-UHFFFAOYSA-N 3-amino-4-[(2-methylpropan-2-yl)oxy]-4-oxobutanoic acid;hydrochloride Chemical compound Cl.CC(C)(C)OC(=O)C(N)CC(O)=O UIGULSHPWYAWSA-UHFFFAOYSA-N 0.000 description 1
- KLBIWMUHQRCDCS-UHFFFAOYSA-N 4,4,4-trichlorobutylphosphane Chemical compound PCCCC(Cl)(Cl)Cl KLBIWMUHQRCDCS-UHFFFAOYSA-N 0.000 description 1
- PVFQHGDIOXNKIC-UHFFFAOYSA-N 4-[2-[3-[2-(4-hydroxyphenyl)propan-2-yl]phenyl]propan-2-yl]phenol Chemical compound C=1C=CC(C(C)(C)C=2C=CC(O)=CC=2)=CC=1C(C)(C)C1=CC=C(O)C=C1 PVFQHGDIOXNKIC-UHFFFAOYSA-N 0.000 description 1
- JVVRCYWZTJLJSG-UHFFFAOYSA-N 4-dimethylaminophenol Chemical compound CN(C)C1=CC=C(O)C=C1 JVVRCYWZTJLJSG-UHFFFAOYSA-N 0.000 description 1
- 229960000549 4-dimethylaminophenol Drugs 0.000 description 1
- VHYFNPMBLIVWCW-UHFFFAOYSA-N 4-dimethylaminopyridine Substances CN(C)C1=CC=NC=C1 VHYFNPMBLIVWCW-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- XVKRMWQDAAWGGH-UHFFFAOYSA-N CC([O-])C.CC([O-])C.CC([O-])C.[Ti+3].C(C(=C)C)(=O)OCCOC(CC(=O)C)=O Chemical compound CC([O-])C.CC([O-])C.CC([O-])C.[Ti+3].C(C(=C)C)(=O)OCCOC(CC(=O)C)=O XVKRMWQDAAWGGH-UHFFFAOYSA-N 0.000 description 1
- XAAHPDCHTFASLJ-UHFFFAOYSA-N CCCC(C1)C2C(CC(C3)OC(c4cccc(C(OC(CC)(C5CC5)C5OC5)=C)c4)=O)C3C1C2 Chemical compound CCCC(C1)C2C(CC(C3)OC(c4cccc(C(OC(CC)(C5CC5)C5OC5)=C)c4)=O)C3C1C2 XAAHPDCHTFASLJ-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920001651 Cyanoacrylate Polymers 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- LSDPWZHWYPCBBB-UHFFFAOYSA-N Methanethiol Chemical compound SC LSDPWZHWYPCBBB-UHFFFAOYSA-N 0.000 description 1
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- 239000005062 Polybutadiene Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- WDJHALXBUFZDSR-UHFFFAOYSA-M acetoacetate Chemical compound CC(=O)CC([O-])=O WDJHALXBUFZDSR-UHFFFAOYSA-M 0.000 description 1
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 150000008064 anhydrides Chemical class 0.000 description 1
- 238000005815 base catalysis Methods 0.000 description 1
- KXHPPCXNWTUNSB-UHFFFAOYSA-M benzyl(trimethyl)azanium;chloride Chemical compound [Cl-].C[N+](C)(C)CC1=CC=CC=C1 KXHPPCXNWTUNSB-UHFFFAOYSA-M 0.000 description 1
- NTXGQCSETZTARF-UHFFFAOYSA-N buta-1,3-diene;prop-2-enenitrile Chemical compound C=CC=C.C=CC#N NTXGQCSETZTARF-UHFFFAOYSA-N 0.000 description 1
- INUWWXIBGXPQNP-UHFFFAOYSA-M butyl(triphenyl)phosphanium;hydrogen carbonate Chemical compound OC([O-])=O.C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(CCCC)C1=CC=CC=C1 INUWWXIBGXPQNP-UHFFFAOYSA-M 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 239000013626 chemical specie Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 239000011231 conductive filler Substances 0.000 description 1
- 238000013036 cure process Methods 0.000 description 1
- NLCKLZIHJQEMCU-UHFFFAOYSA-N cyano prop-2-enoate Chemical class C=CC(=O)OC#N NLCKLZIHJQEMCU-UHFFFAOYSA-N 0.000 description 1
- 125000000392 cycloalkenyl group Chemical group 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 1
- 150000002009 diols Chemical class 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 150000002118 epoxides Chemical group 0.000 description 1
- 125000001033 ether group Chemical group 0.000 description 1
- HZZUMXSLPJFMCB-UHFFFAOYSA-M ethyl(triphenyl)phosphanium;acetate Chemical compound CC([O-])=O.C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(CC)C1=CC=CC=C1 HZZUMXSLPJFMCB-UHFFFAOYSA-M 0.000 description 1
- JHYNXXDQQHTCHJ-UHFFFAOYSA-M ethyl(triphenyl)phosphanium;bromide Chemical compound [Br-].C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(CC)C1=CC=CC=C1 JHYNXXDQQHTCHJ-UHFFFAOYSA-M 0.000 description 1
- NJXBVBPTDHBAID-UHFFFAOYSA-M ethyl(triphenyl)phosphanium;chloride Chemical compound [Cl-].C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(CC)C1=CC=CC=C1 NJXBVBPTDHBAID-UHFFFAOYSA-M 0.000 description 1
- SLAFUPJSGFVWPP-UHFFFAOYSA-M ethyl(triphenyl)phosphanium;iodide Chemical compound [I-].C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(CC)C1=CC=CC=C1 SLAFUPJSGFVWPP-UHFFFAOYSA-M 0.000 description 1
- XCGSMHBLIRBUGZ-UHFFFAOYSA-K ethyl(triphenyl)phosphanium;phosphate Chemical compound [O-]P([O-])([O-])=O.C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(CC)C1=CC=CC=C1.C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(CC)C1=CC=CC=C1.C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(CC)C1=CC=CC=C1 XCGSMHBLIRBUGZ-UHFFFAOYSA-K 0.000 description 1
- 230000009969 flowable effect Effects 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004356 hydroxy functional group Chemical group O* 0.000 description 1
- 150000002460 imidazoles Chemical class 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000003446 ligand Substances 0.000 description 1
- 150000002734 metacrylic acid derivatives Chemical class 0.000 description 1
- 229910000000 metal hydroxide Inorganic materials 0.000 description 1
- 150000004692 metal hydroxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 150000003003 phosphines Chemical class 0.000 description 1
- 150000004714 phosphonium salts Chemical class 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 150000008442 polyphenolic compounds Chemical class 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 150000003856 quaternary ammonium compounds Chemical class 0.000 description 1
- 238000007151 ring opening polymerisation reaction Methods 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 125000005017 substituted alkenyl group Chemical group 0.000 description 1
- 125000000547 substituted alkyl group Chemical group 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- GFZMLBWMGBLIDI-UHFFFAOYSA-M tetrabutylphosphanium;acetate Chemical compound CC([O-])=O.CCCC[P+](CCCC)(CCCC)CCCC GFZMLBWMGBLIDI-UHFFFAOYSA-M 0.000 description 1
- RKHXQBLJXBGEKF-UHFFFAOYSA-M tetrabutylphosphanium;bromide Chemical compound [Br-].CCCC[P+](CCCC)(CCCC)CCCC RKHXQBLJXBGEKF-UHFFFAOYSA-M 0.000 description 1
- IBWGNZVCJVLSHB-UHFFFAOYSA-M tetrabutylphosphanium;chloride Chemical compound [Cl-].CCCC[P+](CCCC)(CCCC)CCCC IBWGNZVCJVLSHB-UHFFFAOYSA-M 0.000 description 1
- CCIYPTIBRAUPLQ-UHFFFAOYSA-M tetrabutylphosphanium;iodide Chemical compound [I-].CCCC[P+](CCCC)(CCCC)CCCC CCIYPTIBRAUPLQ-UHFFFAOYSA-M 0.000 description 1
- NYHGQGKRPTYCBV-UHFFFAOYSA-K tetrabutylphosphanium;phosphate Chemical compound [O-]P([O-])([O-])=O.CCCC[P+](CCCC)(CCCC)CCCC.CCCC[P+](CCCC)(CCCC)CCCC.CCCC[P+](CCCC)(CCCC)CCCC NYHGQGKRPTYCBV-UHFFFAOYSA-K 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- IMFACGCPASFAPR-UHFFFAOYSA-N tributylamine Chemical compound CCCCN(CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-N 0.000 description 1
- TUQOTMZNTHZOKS-UHFFFAOYSA-N tributylphosphine Chemical compound CCCCP(CCCC)CCCC TUQOTMZNTHZOKS-UHFFFAOYSA-N 0.000 description 1
- GRAKJTASWCEOQI-UHFFFAOYSA-N tridodecylphosphane Chemical compound CCCCCCCCCCCCP(CCCCCCCCCCCC)CCCCCCCCCCCC GRAKJTASWCEOQI-UHFFFAOYSA-N 0.000 description 1
- DMEUUKUNSVFYAA-UHFFFAOYSA-N trinaphthalen-1-ylphosphane Chemical compound C1=CC=C2C(P(C=3C4=CC=CC=C4C=CC=3)C=3C4=CC=CC=C4C=CC=3)=CC=CC2=C1 DMEUUKUNSVFYAA-UHFFFAOYSA-N 0.000 description 1
- YFTHZRPMJXBUME-UHFFFAOYSA-N tripropylamine Chemical compound CCCN(CCC)CCC YFTHZRPMJXBUME-UHFFFAOYSA-N 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/293—Organic, e.g. plastic
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/20—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
- C08G59/22—Di-epoxy compounds
- C08G59/24—Di-epoxy compounds carbocyclic
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G63/00—Macromolecular compounds obtained by reactions forming a carboxylic ester link in the main chain of the macromolecule
- C08G63/02—Polyesters derived from hydroxycarboxylic acids or from polycarboxylic acids and polyhydroxy compounds
- C08G63/12—Polyesters derived from hydroxycarboxylic acids or from polycarboxylic acids and polyhydroxy compounds derived from polycarboxylic acids and polyhydroxy compounds
- C08G63/16—Dicarboxylic acids and dihydroxy compounds
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J163/00—Adhesives based on epoxy resins; Adhesives based on derivatives of epoxy resins
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J167/00—Adhesives based on polyesters obtained by reactions forming a carboxylic ester link in the main chain; Adhesives based on derivatives of such polymers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32135—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/0651—Wire or wire-like electrical connections from device to substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06575—Auxiliary carrier between devices, the carrier having no electrical connection structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0657—Stacked arrangements of devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01019—Potassium [K]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0102—Calcium [Ca]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01046—Palladium [Pd]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
- H01L2924/143—Digital devices
- H01L2924/1433—Application-specific integrated circuit [ASIC]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/157—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2924/15738—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950 C and less than 1550 C
- H01L2924/15747—Copper [Cu] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Definitions
- the present invention relates to low shrinkage, b-stageable thermosetting adhesive compositions, methods of preparation and uses therefor.
- the present invention relates to b-stageable thermosetting compounds and compositions containing polymerizable polyester compounds.
- Adhesive compositions are used for a variety of purposes in the fabrication and assembly of semiconductor packages and microelectronic devices. The more prominent uses include bonding of electronic elements such as integrated circuit chips to lead frames or other substrates, and bonding of circuit packages or assemblies to printed wire boards. Adhesives useful for electronic packaging applications typically exhibit properties such as good mechanical strength, curing properties that do not affect the component or the carrier, and rheological properties compatible with application to microelectronic and semiconductor components.
- a b-stageable material is a material that is usually dispensed onto a substrate as a liquid, then is b-staged to achieve a first solid phase.
- the material acts like a thermoplastic, i.e., the material flows at an elevated temperature. At an even higher temperature, the material irreversibly crosslinks and becomes a thermoset material.
- the transition from the thermoplastic stage to the second solid phase is thermosetting.
- the material behaves similarly to a thermoplastic material. Thus, such a material would permit low lamination temperatures while providing high thermal stability.
- b-stageable adhesives eliminate many of the storage, handling, dispensing, and processing issues that exist when dispensing an adhesive in a flowable form.
- the invention is based on the discovery that a certain polyester compounds are useful as b-stageable adhesives for the microelectonic packaging industry.
- the polyester compounds described herein contain ring-opening or ring- forming polymerizable moieties and therefore exhibit little to no shrinkage upon cure.
- R and Q are each independently substituted or unsubstituted aliphatic, aryl, or heteroaryl; each E is independently a ring-opening or ring-forming polymerizable moiety; and n is 1 to about 10.
- R and Q are each independently substituted or unsubstituted aliphatic, aryl, or heteroaryl;
- each E is independently a ring-opening or ring-forming polymerizable moiety; and m is 3 or 4; and n is 1 to about 10.
- adhesive compositions including at least one of the above described compounds, and at least one curing initiator.
- b-stageable die-attach pastes including a) 2 weight percent to about 98 weight percent (wt %) of at least one of the above-described compounds, or combinations thereof, based on total weight of the composition, b) 0 to about 90 wt% of a filler; d) 0.05 wt % to about 5 wt % of at least one curing initiator, based on total weight of the composition; e) 0.05 wt% to about 4 wt%, of at least one coupling agent, based on total weight of the composition.
- assemblies including a first article permanently adhered to a second article by a cured aliquot of the die-attach pastes according to the invention.
- the invention provides assemblies wherein the b-stageable adhesive encapsulates a portion of the wiring members contained within the bondline gap between the stacked die.
- the b-stageable adhesive has the ability to flow through (i.e., encapsulate) the wires as the adhesive fills the bondline gap, thereby preventing any mold compound from covering the wires. This situation is quite advantageous since it is known that mold compound encapsulation of the wiring members creates a CTE (coefficient of thermal expansion) mismatch.
- the b-stageable adhesives of the invention include at least one polyester compound described herein.
- a semiconductor die assembly including: a) a substrate having wiring members extending from pads on the substrate for electrically connecting a die to the substrate, b) a bottom die having a bottom surface and a top surface, wherein the bottom surface contacts the substrate, and wherein the top surface of the bottom die has electrical pads for attaching a wiring member from the substrate, and wherein a first die-attach adhesive is disposed between the substrate and the bottom die, c) a first top die having a bottom surface and a top surface, wherein the first top die is positioned above the bottom die so that the bottom surface of the first top die is facing the top surface of the bottom die, thereby creating a first bondline gap between the bottom die and the top die, wherein a portion of the wiring members extending from the electrical pads on the top surface of the bottom die are located within the first bondline gap, and d) a second die-attach adhesive disposed between the bottom die and the top die, thereby filling the first bondline gap and creating
- Figure 1 depicts a cross-section of a semiconductor die assembly according to the invention.
- the assembly is a stacked die assembly containing 4 die, with a b-stageable adhesive according to the invention disposed between each die.
- Figure 2 is a cross-section in greater detail showing the adhesive of the invention encapsulating the gold wire bonds within the bondline, thereby preventing mold compound from flowing into the bondline and damaging the wire bonds.
- Figure 3 depicts a stacked die package containing a dummy die. As shown in the Figure, the wire bonds are not encapsulated by the die attach adhesive, and therefore are susceptible to damage when the mold compound is applied to the package.
- Figure 4 depicts a stacked die package using spacer paste as die attach adhesive.
- R and Q are each independently substituted or unsubstituted aliphatic, aryl, or heteroaryl; each E is independently a ring-opening or ring-forming polymerizable moiety; and n is 1 to about 10.
- aliphatic refers to any alkyl, alkenyl, cycloalkyl, or cycloalkenyl moiety.
- alkyl refers to straight or branched chain hydrocarbyl groups having from 1 up to about 100 carbon atoms. Whenever it appears herein, a numerical range, such as “1 to 100" or “C 1 -CiQo”, refers to each integer in the given range; e.g., "C 1 -C 100 alkyl” means that an alkyl group may comprise only 1 carbon atom, 2 carbon atoms, 3 carbon atoms, etc., up to and including 100 carbon atoms, although the term “alkyl” also includes instances where no numerical range of carbon atoms is designated).
- Substituted alkyl refers to alkyl moieties bearing substituents including alkyl, alkenyl, alkynyl, hydroxy, oxo, alkoxy, mercapto, cycloalkyl, substituted cycloalkyl, heterocyclic, substituted heterocyclic, aryl, substituted aryl, heteroaryl, substituted heteroaryl, aryloxy, substituted aryloxy, halogen, haloalkyl, cyano, nitro, nitrone, amino, amido, -C(O)H, -C(O)-, -C(O)-, -S-, -S(O) 2 , -OC(O)-O-, -NR-C(O), - NR-C(O)-NR, -OC(O)-NR, wherein R is H or lower alkyl, acyl, oxyacyl, carboxyl, carbamate, sulfonyl,
- cycloalkyl refers to cyclic ring-containing groups typically containing in the range of about 3 up to about 8 carbon atoms
- substituted cycloalkyl refers to cycloalkyl groups further bearing one or more substituents as set forth above.
- aryl refers to aromatic groups having in the range of 6 up to 14 carbon atoms and "substituted aryl” refers to aryl groups further bearing one or more substituents as set forth above.
- heterocyclic refers to cyclic (i.e., ring-containing) groups containing one or more heteroatoms (e.g., N, O, S, or the like) as part of the ring structure, and having in the range of 3 up to 14 carbon atoms and "substituted heterocyclic” refers to heterocyclic groups further bearing one or more substituents as set forth above.
- heterocyclic is also intended to refer to heteroaromatic moieties.
- alkenyl refers to straight or branched chain hydrocarbyl groups having at least one carbon-carbon double bond, and having in the range of about 2 up to about 100 carbon atoms
- substituted alkenyl refers to alkenyl groups further bearing one or more substituents as set forth above.
- alkylene refers to a divalent alkyl moiety
- oxyalkylene refers to an alkylene moiety containing at least one oxygen atom instead of a methylene (CH 2 ) unit.
- substituted alkylene and substituted oxyalkylene refer to alkylene and oxyalkylene groups further bearing one or more substituents as set forth above.
- arylene refers to a divalent aryl moiety.
- substituted arylene refers to arylene moieties bearing one or more substituents as set forth above.
- polymerizable moiety refers to a moiety that undergoes ring-opening polymerization, such as, for example, epoxy, oxetane, oxazoline, benzoxazine, and the like.
- polymerizable moiety refers to a moiety that forms a ring upon polymerization, such as, for example, cyanate esters, propargyl ethers, and the like.
- crosslinkable refers to any moiety that has the ability to crosslink with another moiety.
- crosslink refers to the attachment of two or more polymer chains by bridges of an element, a molecular moiety, or a compound. In general, crosslinking of the compounds of the invention takes place upon heating. As cross-linking density is increased, the properties of a material will be changed from thermoplastic to thermosetting.
- R is a substituted or unsubstituted cycloalkyl having from 5 to about 20 carbon atoms. In other embodiments, R is a substituted or unsubstituted cycloalkyl having from 5 to about 12 carbon atoms. In some embodiments, R is a substituted or unsubstituted cyclopentyl, cyclohexyl, norbornyl, tetracyclododecyl, or dicyclopentadienyl.
- R is a substituted or unsubstituted aliphatic. In some embodiments, R is C 2 to about C 500 aliphatic, m other embodiments, R is C 2 to about C 250 aliphatic. In still other embodiments, R is C 2 to about C 1 Oo aliphatic. In some embodiments, R is C 2 to about C 5 0 aliphatic. In still further embodiments, R is C 36 aliphatic.
- Q is a substituted or unsubstituted aryl or heteroaryl having from 6 to about 14 carbon atoms.
- Q is a substituted or unsubstituted phenyl or naphthyl.
- Q is a substituted or unsubstituted cycloalkyl, such as, for example, norbornyl.
- Q is a substituted or unsubstituted aliphatic. In some embodiments, Q is C 2 to about C 500 aliphatic.
- Q is C 2 to about C 2 5o aliphatic. In still other embodiments, Q is C 2 to about C 10O aliphatic. In some embodiments, Q is C 2 to about C 50 aliphatic. In still further embodiments, Q is C 36 aliphatic.
- Ring opening moieties include, for example, epoxy (such as glycidyl ethers of aliphatic alcohols, glycidyl esters, cylcoaliphatic epoxies such as cycloaliphatic epoxies derived from oligomers of cyclopentadiene, and the like) oxetane, oxazoline, benzoxazine, and the like.
- Ring forming moieties include, for example, cyanate ester, propargyl ether, and the like.
- esters and described herein are typically prepared by condensation of the appropriate acid and alcohols to the corresponding ester under acid catalysis; or alternatively, the compounds are prepared via transesterif ⁇ cation under acid or base catalysis.
- Another synthetic route to the compounds described herein is a condensation reaction of the appropriate alcohols and acid chlorides in the presence of a tertiary amine.
- Exemplary compounds according to the invention are set forth below:
- polyester compounds of the invention may be used independently in adhesive compositions, or may be combined with other adhesive compounds and resins, hi one embodiment, a polyester compound of the invention may be used as the sole thermoset monomer of the adhesive composition. In another embodiment, the polyester compound of the invention may be combined with other thermoset monomers to make a fully formulated adhesive, hi still another embodiment, the polyester compounds of the invention may be combined with thermoplastic polymers and/or oligomers to form interpenetrating networks. [0038] In one embodiment, there is provided an adhesive composition including at least one invention polyester compound and optionally at least one curing initiator.
- the polyester compound is present in the composition from 2 weight percent to about 98 weight percent (wt %) based on total weight of the composition.
- the at least one curing initiator is typically present in the composition from 0.05 wt % to about 5 wt % based on total weight of the composition.
- Suitable curing agents contemplated for use in the practice of the invention include, phenols, polyphenols, anhydrides, and the like.
- catalysts contemplated include for example, compounds which can be employed to catalyze the reaction between a phenolic hydroxyl group and a vicinal epoxide group include, for example, tertiary amines such as, triethylamine, tripropylamine, tributylamine; 2-methylimidazole (such as, for example, the CurezolTM imidazoles available from Air Products), N-methylmorpholine, combinations thereof and the like; quaternary ammonium compounds such as, benzyl trimethyl ammonium chloride, tetrabutylammonium chloride, combinations thereof and the like; phosphines such as triphenylphosphine, tributylphosphine, trilaurylphosphine, trichlorobutylphosphine, trinaphthylphosphine, and the like; and phosphonium compounds such as, ethyltriphenylphosphonium chloride, e
- catalysts contemplated for use include alkali metal hydroxides such as, sodium hydroxide, potassium hydroxide, lithium hydroxide, combinations thereof and the like.
- die-attach pastes including 2 weight percent to about 98 weight percent (wt %) of at least one polyester compound described herein, or combinations thereof, based on total weight of the composition; optionally, 10 wt% to about 90 wt% of at least one additional compound selected from the group consisting of acrylates, methacrylates, maleimides, vinyl ethers, vinyl esters, styrenic compounds, and allyl functional compounds, and the like, based on total weight of the composition; 0 to about 90 wt% of a filler; 0.05 wt % to- about 5 wt % of at least one curing initiator, based on total weight of the composition; and 0.05 wt% to about 4 wt%, of at
- the additional compound includes, for example, phenolics epoxies, novalac epoxies, imides, cyanate esters, vinyl ethers, vinyl esters, amides, polyolefins (such as polyethylenes, polypropylenes, and the like) siloxanes, cyanoacrylates, and the like, or combinations thereof.
- a b-stageable die-attach paste including: a) 2 weight percent to about 98 weight percent (wt %) based on total weight of the composition, of a polyester compound having the structure:
- R and Q are each independently substituted or unsubstituted aliphatic, aryl, or heteroaryl; each E is independently a ring-opening or ring-forming polymerizable moiety; and n is 1 to about 10; b) 0 to about 90 wt% of a filler; d) 0.05 wt % to about 5 wt % of at least one curing initiator, based on total weight of the composition; e) 0.05 wt% to about 4 wt%, of at least one coupling agent, based on total weight of the composition.
- thermoplastic stage means that the adhesive has a first solid phase followed by a thermoplastic stage at elevated temperature, followed by another solid irreversibly crosslinked phase at an even higher temperature.
- the transition from the thermoplastic stage to the second solid phase is thermosetting.
- the material behaves similarly to a thermoplastic material.
- such an adhesive allows for low lamination temperatures while providing high thermal stability.
- Fillers contemplated for use in the practice of the present invention are typically thermally conductive, and/or fillers which act primarily to modify the rheology of the resulting composition.
- suitable thermally conductive fillers which can be employed in the practice of the present invention include graphite, aluminum nitride, silicon carbide, boron nitride, diamond dust, alumina, and the like.
- Compounds which act primarily to modify rheology include polysiloxanes (such as polydimethyl siloxanes) silica, fumed silica, alumina, titania, calcium carbonate, polytetrafluoroethylene, and the like.
- the term "coupling agent” refers to chemical species that are capable of bonding to a mineral surface and which also contain polymerizably reactive functional group(s) so as to enable interaction with the adhesive composition. Coupling agents thus facilitate linkage of the die-attach paste to the substrate to which it is applied.
- Exemplary coupling agents contemplated for use in the practice of the present invention include silicate esters, metal acrylate salts (e.g., aluminum methacrylate), titanates (e.g., titanium methacryloxyethylacetoacetate triisopropoxide), or compounds that contain a copolymerizable group and a chelating ligand (e.g., phosphine, mercaptan, acetoacetate, and the like).
- the coupling agents contain both a co-polymerizable function (e.g., glycidyl ether, cycloaliphatic epoxy, and the like), as well as a silicate ester function.
- the silicate ester portion of the coupling agent is capable of condensing with metal hydroxides present on the mineral surface of substrate, while the co-polymerizable function is capable of co-polymerizing with the other reactive components of invention die-attach paste.
- both photoinitiation and thermal initiation may be desirable.
- curing of a photoinitiator-containing adhesive can be started by UV irradiation, and in a later processing step, curing can be completed by the application of heat to accomplish a free-radical cure.
- Both UV and thermal initiators may therefore be added to the adhesive composition.
- these b-stageable compositions will cure within a temperature range of 80-220 0 C, and curing will be effected within a length of time of less than 1 minute to 180 minutes.
- the b-stageable die-attach paste may be preapplied onto either a semiconductor die or onto a substrate.
- the time and temperature curing profile for each adhesive composition will vary, and different compositions can be designed to provide the curing profile that will be suited to the particular industrial manufacturing process.
- the adhesive compositions may contain compounds that lend additional flexibility and toughness to the resultant cured adhesive.
- Such compounds may be any thermoset or thermoplastic material having a Tg of 50° C or less, and typically will be a polymeric material characterized by free rotation about the chemical bonds, the presence of ether groups, and the absence of ring structures.
- Suitable such modifiers include polyacrylates, poly(butadiene), hydrogenated polybutadiene, polyTHF (polymerized tetrahydrofuran, also known as poly(l,4-butanediol)), CTBN (carboxy-terminated butadiene-acrylonitrile) rubber, and polypropylene glycol.
- toughening compounds may be in an amount up to about 15 percent by weight of the total composition.
- compositions will perform within the commercially acceptable range for die attach adhesives.
- Commerically acceptable values for die shear for the adhesives on a 80 x 80 mil 2 silicon die are in the range of greater than or equal to 1 kg at room temperature, and greater than or equal to 0.5 kg at 240° C.
- Acceptable values for warpage for a 500 x 500 mil 2 die are in the range of less than or equal to 70 Nm at room temperature.
- assemblies of components adhered together employing the above-described b-stageable adhesive compositions and/or die attach pastes.
- assemblies comprising a first article permanently adhered to a second article by a cured aliquot of the above-described adhesive composition are provided.
- Articles contemplated for assembly employing invention compositions include memory devices, ASIC devices, microprocessors, flash memory devices, and the like.
- assemblies comprising a microelectronic device permanently adhered to a substrate by a cured aliquot of the above-described die attach paste.
- Microelectronic devices contemplated for use with invention die attach pastes include copper lead frames, Alloy 42 lead frames, silicon dice, gallium arsenide dice, germanium dice, and the like.
- Organic substrates contemplated for use include polyamide, FR4, bismaleimide-triazine (BT), and the like.
- the substrate is metal, such as, for example, copper, alloy 42, Ag-plated copper, and the like, hi other embodiments, the substrate is Ni-plated copper, Pd-plated copper, Au-plated copper, Ni-Pd- Au-plated copper, and the like. In other embodiments, the substrate includes nickel, palladium, and gold.
- the substrate is organic, such as for example, polyamide, FR4, bismaleimide-triazine (BT), BT-glass, and the like.
- the adhesive compositions can be prepared from (or at least contain a higher percentage of) mono-functional compounds to limit the cross-link density.
- a minor amount of poly-functional compounds can be added to provide some cross-linking and strength to the composition, provided the amount of poly-functional compounds is limited to an amount that does not diminish the desired thermoplastic properties.
- Cross-linking refers to the attachment of two or more polymer chains by bridges of an element, a molecular group, or a compound. In general, crosslinking of the compounds of the invention takes place upon heating. As cross- linking density is increased, the properties of a material will be changed from thermoplastic to thermosetting.
- the b-stageable die attach adhesive encapsulates a portion of the wiring members contained within the bondline gap between the stacked die.
- the b-stageable adhesive has the ability to flow through (i.e., encapsulate) the wires (prior to thermosetting) as the adhesive fills the bondline gap, thereby preventing any mold compound from covering the wires.
- Figure 1-3 show cross-sectional views of an assembly containing 4 stacked die, with a well-defined b-stageable die attach adhesive described herein disposed between each of the die.
- the bondline thickness is 1 to 10 mils. In other embodiments, the bondline thickness is 1 to 5 mils. In still other embodiments, the bondline thickness is 1 to 3 mils. In the assembly shown in Figures 1- 3, the die thickness and bondline thickness is 3 mils. This clearly demonstrates that the b-stageable die attach adhesive described herein is useful for producing stacked die packages with very thin die and bondlines.
- the assembly includes 2 die. In other embodiments, the assembly includes 3 die. In other embodiments, the assembly includes 4 die.
- the invention described herein has particular advantages over other stacked die assemblies using spacer pastes or dummy die.
- spacer pastes see Figure 6
- the invention described herein provides uniform bondline thickness and . die attach coverage.
- there is no die shift and no overflowing to the die top especially for thin die.
- the present invention is ideal for tight tolerance packages.
- reaction mixture was washed with brine (3 x 50 ml) and water (3 x 50 mL), and then passed over MgSo 4 (15 g) and SiO 2 (15 g). Toluene was removed by rotary evaporation. The product was a dried in an oven at 8O 0 C for 3 days to afford Compound 3 (29.6 g, 69.2 % yield) as an orange, friable solid.
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Adhesives Or Adhesive Processes (AREA)
Abstract
The invention is based on the discovery that a certain polyester compounds are useful as b-stageable adhesives for the microelectonic packaging industry. The polyester compounds described herein contain ring-opening or ring-forming polymerizable moieties and therefore exhibit little to no shrinkage upon cure. In addition, there are provided well-defined b-stageable adhesives useful in stacked die assemblies. Li particular, there are provided assemblies wherein the b-stageable adhesive encapsulates a portion of the wiring members contained within the bondline gap between the stacked die.
Description
LOW SHRINKAGE POLYESTER THERMOSETTING RESINS
RELATED APPLICATION DATA
[0001] This application claims the benefit of priority of U.S. Provisional
Application Ser. No. 60/657,889 filed March 2, 2005, the entire disclosure of which is incorporated herein by reference.
FIELD OF THE INVENTION
[0002] The present invention relates to low shrinkage, b-stageable thermosetting adhesive compositions, methods of preparation and uses therefor. In particular, the present invention relates to b-stageable thermosetting compounds and compositions containing polymerizable polyester compounds.
BACKGROUND OF THE INVENTION
[0003] Adhesive compositions, particularly conductive adhesives, are used for a variety of purposes in the fabrication and assembly of semiconductor packages and microelectronic devices. The more prominent uses include bonding of electronic elements such as integrated circuit chips to lead frames or other substrates, and bonding of circuit packages or assemblies to printed wire boards. Adhesives useful for electronic packaging applications typically exhibit properties such as good mechanical strength, curing properties that do not affect the component or the carrier, and rheological properties compatible with application to microelectronic and semiconductor components.
[0004] Recently, there has been an increased interest in b-stageable adhesives. A b-stageable material is a material that is usually dispensed onto a substrate as a liquid, then is b-staged to achieve a first solid phase. In this first solid phase the material acts like a thermoplastic, i.e., the material flows at an elevated temperature. At an even higher temperature, the material irreversibly crosslinks and becomes a thermoset material. The transition from the thermoplastic stage to the second solid phase is thermosetting.
However, prior to that, the material behaves similarly to a thermoplastic material. Thus, such a material would permit low lamination temperatures while providing high thermal stability. In addition, b-stageable adhesives eliminate many of the storage, handling, dispensing, and processing issues that exist when dispensing an adhesive in a flowable form.
[0005] Moreover, a continuing challenge in the microelectronics packaging industry is the issue of shrinkage upon cure of the adhesives contained within the package. In many cases, the adhesive(s) used in a package shrinks when cured, thereby creating stress at the various interfaces inside the package. This leads to package failure and device failure and/or unreliability. Accordingly, there is a continuing need for b- stageable adhesives in the electronic packaging industry, and a particular need for adhesives with little to no shrinkage upon cure.
SUMMARY OF THE INVENTION
[0006] The invention is based on the discovery that a certain polyester compounds are useful as b-stageable adhesives for the microelectonic packaging industry. The polyester compounds described herein contain ring-opening or ring- forming polymerizable moieties and therefore exhibit little to no shrinkage upon cure. In one embodiment of the invention there are provided compounds having the structure:
R and Q are each independently substituted or unsubstituted aliphatic, aryl, or heteroaryl; each E is independently a ring-opening or ring-forming polymerizable moiety; and n is 1 to about 10.
[0007] In one embodiment, there are provided compounds having the structure:
O O O
RH -O— C— Q— C— O T R O— C- -Q C— θ4~R — E n - 1 m
wherein:
R and Q are each independently substituted or unsubstituted aliphatic, aryl, or heteroaryl;
' each E is independently a ring-opening or ring-forming polymerizable moiety; and m is 3 or 4; and n is 1 to about 10.
[0008] In another embodiment, there are provided adhesive compositions including at least one of the above described compounds, and at least one curing initiator.
[0009] In yet another embodiment, there are provided b-stageable die-attach pastes including a) 2 weight percent to about 98 weight percent (wt %) of at least one of the above-described compounds, or combinations thereof, based on total weight of the composition, b) 0 to about 90 wt% of a filler; d) 0.05 wt % to about 5 wt % of at least one curing initiator, based on total weight of the composition; e) 0.05 wt% to about 4 wt%, of at least one coupling agent, based on total weight of the composition.
[0010] In another embodiment, there are provided assemblies including a first article permanently adhered to a second article by a cured aliquot of the die-attach pastes according to the invention.
[0011] In another embodiment, there are provided methods for attaching a first article to a second article. Such methods can be performed, for example, by
(a) applying an aliquot of the adhesive composition of the invention to the first article,
(b) bringing the first and second article into intimate contact to form an assembly wherein the first article and the second article are separated only by the adhesive composition applied in (a), and thereafter,
(c) subjecting the assembly to conditions suitable to cure the adhesive composition.
[0012] In another embodiment, there are provided methods for attaching a semiconductor die to a substrate. Such methods can be performed, for example, by
(a) applying the die attach paste of the invention to the substrate and/or the microelectronic device,
(b) subjecting the substrate and/or the microelectronic device to conditions suitable to form a b-staged curable film,
(c) exposing the b-staged curable film to temperature conditions suitable to melt the film,
(d) bringing the substrate and the device into intimate contact to form an assembly wherein the substrate and the device are separated only by the die-attach paste, and
(e) subjecting the b-staged curable film to conditions suitable to cure the melted film.
[0013] In another embodiment of the invention, there are provided well-defined b-stageable adhesives useful in stacked die assemblies. In particular, the invention provides assemblies wherein the b-stageable adhesive encapsulates a portion of the wiring members contained within the bondline gap between the stacked die. Li other words, the b-stageable adhesive has the ability to flow through (i.e., encapsulate) the wires as the adhesive fills the bondline gap, thereby preventing any mold compound from covering the wires. This situation is quite advantageous since it is known that mold compound encapsulation of the wiring members creates a CTE (coefficient of thermal
expansion) mismatch. The b-stageable adhesives of the invention include at least one polyester compound described herein.
[0014] In one embodiment of the invention, there is provided a semiconductor die assembly including: a) a substrate having wiring members extending from pads on the substrate for electrically connecting a die to the substrate, b) a bottom die having a bottom surface and a top surface, wherein the bottom surface contacts the substrate, and wherein the top surface of the bottom die has electrical pads for attaching a wiring member from the substrate, and wherein a first die-attach adhesive is disposed between the substrate and the bottom die, c) a first top die having a bottom surface and a top surface, wherein the first top die is positioned above the bottom die so that the bottom surface of the first top die is facing the top surface of the bottom die, thereby creating a first bondline gap between the bottom die and the top die, wherein a portion of the wiring members extending from the electrical pads on the top surface of the bottom die are located within the first bondline gap, and d) a second die-attach adhesive disposed between the bottom die and the top die, thereby filling the first bondline gap and creating a first bondline, and encapsulating the portion of the wiring members located within the first bondline.
BRIEF DESCRIPTION OF THE FIGURES
[0015] Figure 1 depicts a cross-section of a semiconductor die assembly according to the invention. In this Figure, the assembly is a stacked die assembly containing 4 die, with a b-stageable adhesive according to the invention disposed between each die.
[0016] Figure 2 is a cross-section in greater detail showing the adhesive of the invention encapsulating the gold wire bonds within the bondline, thereby preventing mold compound from flowing into the bondline and damaging the wire bonds.
[0017] Figure 3 depicts a stacked die package containing a dummy die. As shown in the Figure, the wire bonds are not encapsulated by the die attach adhesive, and therefore are susceptible to damage when the mold compound is applied to the package.
[0018] Figure 4 depicts a stacked die package using spacer paste as die attach adhesive.
DETAILED DESCRIPTION OF THE INVENTION
[0019] It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the invention claimed. As used herein, the use of the singular includes the plural unless specifically stated otherwise. As used herein, "or" means "and/or" unless stated otherwise. Furthermore, use of the term "including" as well as other forms, such as "includes," and "included," is not limiting. The section headings used herein are for organizational purposes only and are not to be construed as limiting the subject matter described.
[0020] Unless specific definitions are provided, the nomenclatures utilized in connection with, and the laboratory procedures and techniques of analytical chemistry, synthetic organic and inorganic chemistry described herein are those known in the art. Standard chemical symbols are used interchangeably with the full names represented by such symbols. Thus, for example, the terms "hydrogen" and "H" are understood to have identical meaning. Standard techniques may be used for chemical syntheses, chemical analyses, and formulation.
[0021] The invention is based on the discovery that certain polyester compounds are useful as b-stageable adhesives for the microelectonic packaging industry. In one embodiment of the invention there are provided compounds having the structure:
R and Q are each independently substituted or unsubstituted aliphatic, aryl, or heteroaryl; each E is independently a ring-opening or ring-forming polymerizable moiety; and n is 1 to about 10.
[0022] As used herein, "aliphatic" refers to any alkyl, alkenyl, cycloalkyl, or cycloalkenyl moiety.
[0023] As used herein, "alkyl" refers to straight or branched chain hydrocarbyl groups having from 1 up to about 100 carbon atoms. Whenever it appears herein, a numerical range, such as "1 to 100" or "C1-CiQo", refers to each integer in the given range; e.g., "C1-C100 alkyl" means that an alkyl group may comprise only 1 carbon atom, 2 carbon atoms, 3 carbon atoms, etc., up to and including 100 carbon atoms, although the term "alkyl" also includes instances where no numerical range of carbon atoms is designated). "Substituted alkyl" refers to alkyl moieties bearing substituents including alkyl, alkenyl, alkynyl, hydroxy, oxo, alkoxy, mercapto, cycloalkyl, substituted cycloalkyl, heterocyclic, substituted heterocyclic, aryl, substituted aryl, heteroaryl, substituted heteroaryl, aryloxy, substituted aryloxy, halogen, haloalkyl, cyano, nitro, nitrone, amino, amido, -C(O)H, -C(O)-, -C(O)-, -S-, -S(O)2, -OC(O)-O-, -NR-C(O), - NR-C(O)-NR, -OC(O)-NR, wherein R is H or lower alkyl, acyl, oxyacyl, carboxyl, carbamate, sulfonyl, sulfonamide, sulfuryl, and the like.
[0024] As used herein, "cycloalkyl" refers to cyclic ring-containing groups typically containing in the range of about 3 up to about 8 carbon atoms, and "substituted cycloalkyl" refers to cycloalkyl groups further bearing one or more substituents as set forth above.
[0025] As used herein, "aryl" refers to aromatic groups having in the range of 6 up to 14 carbon atoms and "substituted aryl" refers to aryl groups further bearing one or more substituents as set forth above.
[0026] As used herein, "heterocyclic" refers to cyclic (i.e., ring-containing) groups containing one or more heteroatoms (e.g., N, O, S, or the like) as part of the ring structure, and having in the range of 3 up to 14 carbon atoms and "substituted heterocyclic" refers to heterocyclic groups further bearing one or more substituents as set forth above. The term heterocyclic is also intended to refer to heteroaromatic moieties. As used herein, "alkenyl" refers to straight or branched chain hydrocarbyl groups having at least one carbon-carbon double bond, and having in the range of about 2 up to about 100 carbon atoms, and "substituted alkenyl" refers to alkenyl groups further bearing one or more substituents as set forth above.
[0027] As used herein, "alkylene" refers to a divalent alkyl moiety, and
"oxyalkylene" refers to an alkylene moiety containing at least one oxygen atom instead of a methylene (CH2) unit. "Substituted alkylene" and "substituted oxyalkylene" refer to alkylene and oxyalkylene groups further bearing one or more substituents as set forth above.
[0028] As used herein, "arylene" refers to a divalent aryl moiety. "Substituted arylene" refers to arylene moieties bearing one or more substituents as set forth above.
[0029] As used herein, the term "polymerizable moiety" refers to a moiety that undergoes ring-opening polymerization, such as, for example, epoxy, oxetane, oxazoline, benzoxazine, and the like. In other embodiments, the term "polymerizable moiety" refers to a moiety that forms a ring upon polymerization, such as, for example, cyanate esters, propargyl ethers, and the like.
[0030] As used herein, the term "crosslinkable" refers to any moiety that has the ability to crosslink with another moiety. As used herein, the term "crosslink" refers to the attachment of two or more polymer chains by bridges of an element, a molecular moiety, or a compound. In general, crosslinking of the compounds of the invention takes place upon heating. As cross-linking density is increased, the properties of a material will be changed from thermoplastic to thermosetting.
[0031] In certain embodiments, R is a substituted or unsubstituted cycloalkyl having from 5 to about 20 carbon atoms. In other embodiments, R is a substituted or unsubstituted cycloalkyl having from 5 to about 12 carbon atoms. In some embodiments, R is a substituted or unsubstituted cyclopentyl, cyclohexyl, norbornyl, tetracyclododecyl, or dicyclopentadienyl.
[0032] In some embodiments, R is a substituted or unsubstituted aliphatic. In some embodiments, R is C2 to about C500 aliphatic, m other embodiments, R is C2 to about C250 aliphatic. In still other embodiments, R is C2 to about C1Oo aliphatic. In some embodiments, R is C2 to about C50 aliphatic. In still further embodiments, R is C36 aliphatic.
[0033] A wide variety of aryl and heteroaryl moieties are contemplated for Q in the practice of the invention. In some embodiments, Q is a substituted or unsubstituted aryl or heteroaryl having from 6 to about 14 carbon atoms. In other embodiments, Q is a substituted or unsubstituted phenyl or naphthyl. In further embodiments, Q is a substituted or unsubstituted cycloalkyl, such as, for example, norbornyl.
[0034] In some embodiments, Q is a substituted or unsubstituted aliphatic. In some embodiments, Q is C2 to about C500 aliphatic. In other embodiments, Q is C2 to about C25o aliphatic. In still other embodiments, Q is C2 to about C10O aliphatic. In some embodiments, Q is C2 to about C50 aliphatic. In still further embodiments, Q is C36 aliphatic.
[0035] A wide variety of ring opening and/or ring forming polymerizable moieties are contemplated for use in the practice of the invention. Ring opening moieties include, for example, epoxy (such as glycidyl ethers of aliphatic alcohols, glycidyl esters, cylcoaliphatic epoxies such as cycloaliphatic epoxies derived from oligomers of cyclopentadiene, and the like) oxetane, oxazoline, benzoxazine, and the like. Ring forming moieties include, for example, cyanate ester, propargyl ether, and the like.
[0036] The compounds of the invention are readily prepared according to organic chemistry techniques well-known to those skilled in the art. For example, the esters and described herein are typically prepared by condensation of the appropriate acid and alcohols to the corresponding ester under acid catalysis; or alternatively, the compounds are prepared via transesterifϊcation under acid or base catalysis. Another synthetic route to the compounds described herein is a condensation reaction of the appropriate alcohols and acid chlorides in the presence of a tertiary amine. Exemplary compounds according to the invention are set forth below:
Compound 3
Compound 4
[0037] The polyester compounds of the invention may be used independently in adhesive compositions, or may be combined with other adhesive compounds and resins, hi one embodiment, a polyester compound of the invention may be used as the sole thermoset monomer of the adhesive composition. In another embodiment, the polyester compound of the invention may be combined with other thermoset monomers to make a fully formulated adhesive, hi still another embodiment, the polyester compounds of the invention may be combined with thermoplastic polymers and/or oligomers to form interpenetrating networks.
[0038] In one embodiment, there is provided an adhesive composition including at least one invention polyester compound and optionally at least one curing initiator.
[0039] In some embodiments, the polyester compound is present in the composition from 2 weight percent to about 98 weight percent (wt %) based on total weight of the composition.
[0040] The at least one curing initiator is typically present in the composition from 0.05 wt % to about 5 wt % based on total weight of the composition. Suitable curing agents contemplated for use in the practice of the invention include, phenols, polyphenols, anhydrides, and the like. Certain catalysts contemplated, include for example, compounds which can be employed to catalyze the reaction between a phenolic hydroxyl group and a vicinal epoxide group include, for example, tertiary amines such as, triethylamine, tripropylamine, tributylamine; 2-methylimidazole (such as, for example, the Curezol™ imidazoles available from Air Products), N-methylmorpholine, combinations thereof and the like; quaternary ammonium compounds such as, benzyl trimethyl ammonium chloride, tetrabutylammonium chloride, combinations thereof and the like; phosphines such as triphenylphosphine, tributylphosphine, trilaurylphosphine, trichlorobutylphosphine, trinaphthylphosphine, and the like; and phosphonium compounds such as, ethyltriphenylphosphonium chloride, ethyltriphenylphosphonium bromide, ethyltriphenylphosphonium iodide, ethyltriphenylphosphonium phosphate, ethyltriphenylphosphonium acetate.acetic acid complex, tetrabutylphosphonium chloride, tetrabutylphosphonium bromide, tetrabutylphosphonium iodide, tetrabutylphosphonium phosphate, tetrabutylphosphonium acetate.acetic acid complex, butyltriphenylphosphonium tetrabromobisphenate, butyltriphenylphosphonium bisphenate, butyltriphenylphosphonium bicarbonate, combinations thereof and the like. In addition, for applications outside the microelectronic packaging industry, catalysts contemplated for use include alkali metal hydroxides such as, sodium hydroxide, potassium hydroxide, lithium hydroxide, combinations thereof and the like.
[0041] In another embodiment of the invention, there are provided die-attach pastes including 2 weight percent to about 98 weight percent (wt %) of at least one polyester compound described herein, or combinations thereof, based on total weight of the composition; optionally, 10 wt% to about 90 wt% of at least one additional compound selected from the group consisting of acrylates, methacrylates, maleimides, vinyl ethers, vinyl esters, styrenic compounds, and allyl functional compounds, and the like, based on total weight of the composition; 0 to about 90 wt% of a filler; 0.05 wt % to- about 5 wt % of at least one curing initiator, based on total weight of the composition; and 0.05 wt% to about 4 wt%, of at least one coupling agent, based on total weight of the composition. In some embodiments, the additional compound includes, for example, phenolics epoxies, novalac epoxies, imides, cyanate esters, vinyl ethers, vinyl esters, amides, polyolefins (such as polyethylenes, polypropylenes, and the like) siloxanes, cyanoacrylates, and the like, or combinations thereof.
[0042] In one embodiment, there is provided a b-stageable die-attach paste including: a) 2 weight percent to about 98 weight percent (wt %) based on total weight of the composition, of a polyester compound having the structure:
R and Q are each independently substituted or unsubstituted aliphatic, aryl, or heteroaryl; each E is independently a ring-opening or ring-forming polymerizable moiety; and n is 1 to about 10;
b) 0 to about 90 wt% of a filler; d) 0.05 wt % to about 5 wt % of at least one curing initiator, based on total weight of the composition; e) 0.05 wt% to about 4 wt%, of at least one coupling agent, based on total weight of the composition.
[0043] As used herein, "b-stageable" means that the adhesive has a first solid phase followed by a thermoplastic stage at elevated temperature, followed by another solid irreversibly crosslinked phase at an even higher temperature. The transition from the thermoplastic stage to the second solid phase is thermosetting. However, prior to that, the material behaves similarly to a thermoplastic material. Thus, such an adhesive allows for low lamination temperatures while providing high thermal stability.
[0044] Fillers contemplated for use in the practice of the present invention are typically thermally conductive, and/or fillers which act primarily to modify the rheology of the resulting composition. Examples of suitable thermally conductive fillers which can be employed in the practice of the present invention include graphite, aluminum nitride, silicon carbide, boron nitride, diamond dust, alumina, and the like. Compounds which act primarily to modify rheology include polysiloxanes (such as polydimethyl siloxanes) silica, fumed silica, alumina, titania, calcium carbonate, polytetrafluoroethylene, and the like.
[0045] As used herein, the term "coupling agent" refers to chemical species that are capable of bonding to a mineral surface and which also contain polymerizably reactive functional group(s) so as to enable interaction with the adhesive composition. Coupling agents thus facilitate linkage of the die-attach paste to the substrate to which it is applied.
[0046] Exemplary coupling agents contemplated for use in the practice of the present invention include silicate esters, metal acrylate salts (e.g., aluminum methacrylate), titanates (e.g., titanium methacryloxyethylacetoacetate triisopropoxide), or
compounds that contain a copolymerizable group and a chelating ligand (e.g., phosphine, mercaptan, acetoacetate, and the like). In some embodiments, the coupling agents contain both a co-polymerizable function (e.g., glycidyl ether, cycloaliphatic epoxy, and the like), as well as a silicate ester function. The silicate ester portion of the coupling agent is capable of condensing with metal hydroxides present on the mineral surface of substrate, while the co-polymerizable function is capable of co-polymerizing with the other reactive components of invention die-attach paste.
[0047] In some embodiments, both photoinitiation and thermal initiation may be desirable. For example, curing of a photoinitiator-containing adhesive can be started by UV irradiation, and in a later processing step, curing can be completed by the application of heat to accomplish a free-radical cure. Both UV and thermal initiators may therefore be added to the adhesive composition.
[0048] In general, these b-stageable compositions will cure within a temperature range of 80-2200C, and curing will be effected within a length of time of less than 1 minute to 180 minutes. The b-stageable die-attach paste may be preapplied onto either a semiconductor die or onto a substrate. As will be understood by those skilled in the art, the time and temperature curing profile for each adhesive composition will vary, and different compositions can be designed to provide the curing profile that will be suited to the particular industrial manufacturing process.
[0049] In certain embodiments, the adhesive compositions may contain compounds that lend additional flexibility and toughness to the resultant cured adhesive. Such compounds may be any thermoset or thermoplastic material having a Tg of 50° C or less, and typically will be a polymeric material characterized by free rotation about the chemical bonds, the presence of ether groups, and the absence of ring structures. Suitable such modifiers include polyacrylates, poly(butadiene), hydrogenated polybutadiene, polyTHF (polymerized tetrahydrofuran, also known as poly(l,4-butanediol)), CTBN (carboxy-terminated butadiene-acrylonitrile) rubber, and polypropylene glycol. When
present, toughening compounds may be in an amount up to about 15 percent by weight of the total composition.
[0050] These compositions will perform within the commercially acceptable range for die attach adhesives. Commerically acceptable values for die shear for the adhesives on a 80 x 80 mil2 silicon die are in the range of greater than or equal to 1 kg at room temperature, and greater than or equal to 0.5 kg at 240° C. Acceptable values for warpage for a 500 x 500 mil2 die are in the range of less than or equal to 70 Nm at room temperature.
[0051] In yet another embodiment of the invention, there are provided assemblies of components adhered together employing the above-described b-stageable adhesive compositions and/or die attach pastes. Thus, for example, assemblies comprising a first article permanently adhered to a second article by a cured aliquot of the above-described adhesive composition are provided. Articles contemplated for assembly employing invention compositions include memory devices, ASIC devices, microprocessors, flash memory devices, and the like. Also contemplated are assemblies comprising a microelectronic device permanently adhered to a substrate by a cured aliquot of the above-described die attach paste. Microelectronic devices contemplated for use with invention die attach pastes include copper lead frames, Alloy 42 lead frames, silicon dice, gallium arsenide dice, germanium dice, and the like. Organic substrates contemplated for use include polyamide, FR4, bismaleimide-triazine (BT), and the like.
[0052] In another embodiment of the invention, there are provided methods for attaching a first article to a second article. Such methods can be performed, for example, by
(a) applying an aliquot of the adhesive composition of the invention to the first article,
(b) bringing the first and second article into intimate contact to form an assembly wherein
the first article and the second article are separated only by the adhesive composition applied in (a), and
(c) subjecting the assembly to conditions suitable to cure the adhesive composition.
[0053] In another embodiment of the invention, there are provided methods for attaching a semiconductor die to a substrate. Such methods can be performed, for example, by
(a) applying the b-stageable die attach paste of the invention to the substrate and/or the microelectronic device,
(b) subjecting the substrate and/or the microelectronic device to conditions suitable to form a b-staged curable film,
(c) exposing the b-staged curable film to temperature conditions suitable to melt the film,
(d) bringing the substrate and the device into intimate contact to form an assembly wherein the substrate and the device are separated only by the die-attach paste, and
(e) subjecting the b-staged curable film to conditions suitable to cure the melted film.
[0054] hi some embodiments, the substrate is metal, such as, for example, copper, alloy 42, Ag-plated copper, and the like, hi other embodiments, the substrate is Ni-plated copper, Pd-plated copper, Au-plated copper, Ni-Pd- Au-plated copper, and the like. In other embodiments, the substrate includes nickel, palladium, and gold.
[0055] In some embodiments, the substrate is organic, such as for example, polyamide, FR4, bismaleimide-triazine (BT), BT-glass, and the like.
[0056] It is understood that using the compounds and methods of the present invention, it is possible to prepare adhesives having a wide range of cross-link density by the judicious choice and amount of polyester compounds. The greater proportion of polyfunctional compounds reacted, the greater the cross-link density. If thermoplastic properties are desired, the adhesive compositions can be prepared from (or at least contain a higher percentage of) mono-functional compounds to limit the cross-link density. A minor amount of poly-functional compounds can be added to provide some
cross-linking and strength to the composition, provided the amount of poly-functional compounds is limited to an amount that does not diminish the desired thermoplastic properties. Within these parameters, the strength and elasticity of individual adhesives can be tailored to a particular end-use application.
[0057] "Cross-linking," as used herein, refers to the attachment of two or more polymer chains by bridges of an element, a molecular group, or a compound. In general, crosslinking of the compounds of the invention takes place upon heating. As cross- linking density is increased, the properties of a material will be changed from thermoplastic to thermosetting.
[0058] In another embodiment of the invention, there are provided stacked die assemblies wherein the b-stageable die attach adhesive encapsulates a portion of the wiring members contained within the bondline gap between the stacked die. In other words, the b-stageable adhesive has the ability to flow through (i.e., encapsulate) the wires (prior to thermosetting) as the adhesive fills the bondline gap, thereby preventing any mold compound from covering the wires.
[0059] For example, Figure 1-3 show cross-sectional views of an assembly containing 4 stacked die, with a well-defined b-stageable die attach adhesive described herein disposed between each of the die. In some embodiments, the bondline thickness is 1 to 10 mils. In other embodiments, the bondline thickness is 1 to 5 mils. In still other embodiments, the bondline thickness is 1 to 3 mils. In the assembly shown in Figures 1- 3, the die thickness and bondline thickness is 3 mils. This clearly demonstrates that the b-stageable die attach adhesive described herein is useful for producing stacked die packages with very thin die and bondlines. In certain embodiments, the assembly includes 2 die. In other embodiments, the assembly includes 3 die. In other embodiments, the assembly includes 4 die.
[0060] The invention described herein has particular advantages over other stacked die assemblies using spacer pastes or dummy die. With respect to spacer pastes (see Figure 6), the invention described herein provides uniform bondline thickness and . die attach coverage. In addition, in contrast to assemblies using spacer pastes, there is no die shift and no overflowing to the die top (especially for thin die). Thus, the present invention is ideal for tight tolerance packages.
[0061] With respect to assemblies containing dummy die (see Figure 5), the assemblies described herein have a significantly reduced bondline gap. hi addition, the additional die attach process for the dummy die is eliminated, thus reducing all oven cure processes down to one (prior to molding).
[0062] The invention will now be further described with reference to the following non-limiting examples.
EXAMPLES
Example 1
Compound 1
[0063] To a 500 niL flask was added isophthalic acid (33.2 g, 200 mmol), 4,8- bis(hydroxymethyl)tricyclo[5.2.1.0 2>6]decane (58.8 g, 300 mmol), Empol 1008 (hydrogenated dimmer acid, available from Cognis) (28.3 g, 50 mmol), and toluene (150 mL). The reaction mixture was heated to 7O0C5 at which time methanesulfonic acid (3 g) was added. The flask was equipped with a reflux condenser and Dean-Stark trap, and the reaction mixture was refluxed for 21 hrs yielding the expected amount of water (9.0 mL). After cooling, toluene (110 mL) and Siθ2 (10 g) were added to the flask and the mixture was stirred for 30 min. The mixture was then passed over SiO2 (20 g). After removal of toluene by rotary evaporation, Dow ERL 4140 (17.2 g, 1 lOmmol) and DMAP (0.76 g) were added to the mixture. The Dean-Stark trap was filled with octane and an additional aliquot of octane (8 mL) was added to the reaction mixture, and the mixture was refluxed for 2.5 days. Removal of octane by rotary evaporation afforded Compound 1 (92.1 g, 74.4 % yield) as a viscous, red-brown liquid.
Example 2
Compound 2
[0064] To a 500 niL flask was added isophthaloyl dichloride (20.3 g, 100 mmol) and toluene (100 niL). A mixture containing the dimer diol Solvermol 908 (Cognis, 26.8 g, 50 mmol) and triethylamine (15.2 g, 150 mmol) was added over a 90 min period. The reaction mixture was stirred at room temperature for 30 min and then cooled to -150C. Glycidol (8.2 g, 110 mmol) was added to the mixture over a 20 min period. The reaction mixture was stirred at room temperature for 3 hrs. Next, the reaction mixture was washed with brine (3 x 50 ml) and water (3 x 50 mL), and then passed over MgSO4 (15 g) and SiO2 (15 g). Rotary evaporation of toluene afforded Compound 2 (37.3 g, 79 % yield).
Example 3
Compound 3
[0065] To a 500 mL flask was added isophthaloyl dichloride (20.3 g, 100 mmol) triethylamine (22.3 g, 220 mmol), and toluene (100 mL). A solution of bisphenol-M (26.0 g, 75 mmol) in toluene (100 mL) was added dropwise over a 10 minute period. The mixture stirred for 45 minutes, and then was cooled to 2O0C. Glycidol (4.5 g, 60 mmol) was added dropwise over a 10 minute period, and the reaction was allowed to stir overnight. The reaction mixture was washed with brine (3 x 50 ml) and water (3 x 50 mL), and then passed over MgSo4 (15 g) and SiO2 (15 g). Toluene was removed by rotary evaporation. The product was a dried in an oven at 8O0C for 3 days to afford Compound 3 (29.6 g, 69.2 % yield) as an orange, friable solid.
Example 4
Compound 4
[0066] To a 1 L flask was added isophthalic acid (16.6 g, 100 mmol), 4,8- bis(hydroxymethyl)tricyclo[5.2.1.02>6]decane (39.2 g, 200 mmol), Empol 1008 (hydrogenated dimmer acid, available from Cognis) (56.5 g, 100 mmol), Pripol 2033 (Cognis, 26.8, 50 mmol) and toluene (300 niL). The reaction mixture was heated to 7O0C, at which time methanesulfonic acid (5 g) was added. The flask was equipped with a reflux condenser and Dean-Stark trap, and the reaction mixture was refluxed for 20.5 hrs. After cooling, triethylamine (22.3 g, 220 mmol) and isophthaloyl dichloride (20.3 g, 100 mmol) were added and the mixture was stirred at room temperature for 3 hrs. The reaction mixture was washed with brine and water, and then passed over MgSO4 and SiO2 Toluene was removed by rotary evaporation and the product was dried at 8O0C for 6.5 hrs to afford Compound 4 (148.5 g, 97.5 % yield)
[0067] While this invention has been described with respect to these specific examples, it should be clear that other modifications and variations would be possible without departing from the spirit of this invention.
WHAT IS CLAIMED IS:
Claims
1. An compound having the structure:
R and Q are each independently substituted or unsubstituted aliphatic, aryl, or heteroaryl; each E is independently a ring-opening or ring-forming polymerizable moiety; and n is 1 to about 10.
2. The compound of claim 1 , wherein R is substituted or unsubstituted aliphatic.
3. The compound of claim 1, wherein R is a C2 to about C500 aliphatic.
4. The compound of claim 1, wherein R is a C2 to about C25O aliphatic.
5. The compound of claim 1, wherein R is a C2 to about C100 aliphatic.
6. The compound of claim 1, wherein R is a C2 to about C50 aliphatic.
7. The compound of claim 1, wherein R is a C36 aliphatic.
8. The compound of claim 1 , wherein R is a substituted or unsubstituted cycloalkyl having from 5 to about 20 carbon atoms.
9. The compound of claim 1, wherein R is a substituted or unsubstituted cycloalkyl having from 5 to about 12 carbon atoms.
10. The compound of claim 1, wherein R is a substituted or unsubstituted cyclopentyl, cyclohexyl, norbornyl, tetracyclododecyl, or dicyclopentadienyl.
11. The compound of claim 1 , wherein Q is a substituted or unsubstituted aryl or heteroaryl having from 6 to about 14 carbon atoms.
12. The compound of claim 1 , wherein Q is a substituted or unsubstituted phenyl or naphthyl.
13. The compound of claim 1 , wherein Q is a substituted or unsubstituted cycloalkyl.
14. The compound of claim 1, wherein Q is a substituted or unsubstituted norbornenyl.
15. The compound of claim 1, wherein Q is a substituted or unsubstituted aliphatic.
16. The compound of claim 1, wherein Q is C2 to about C500 aliphatic.
17. The compound of claim 1, wherein Q is C2 to about C250 aliphatic.
18. The compound of claim 1, wherein Q is C2 to about C100 aliphatic.
19. The compound of claim 1, wherein Q is C2 to about C50 aliphatic.
20. The compound of claim 1 , wherein Q is C36 aliphatic.
21. The compound of claim 1 , wherein substituted aliphatic, aryl, or heteroaryl moieties comprise substituents selected from alkyl, alkenyl, alkynyl, hydroxy, oxo, alkoxy, mercapto, cycloalkyl, substituted cycloalkyl, heterocyclic, substituted heterocyclic, aryl, substituted aryl, heteroaryl, substituted heteroaryl, aryloxy, substituted aryloxy, halogen, haloalkyl, cyano, nitro, nitrone, amino, amido, --C(O)H,
-C(O)-, -C(O)-, -S-, -S(O)2, -OC(O)-O-, -NR-C(O), -NR-C(O)-NR, -OC(O)-NR, wherein R is H or lower alkyl, acyl, oxyacyl, carboxyl, carbamate, sulfonyl, sulfonamide, or sulfuryl.
22. The compound of claim 1 , wherein E is epoxy, oxetane, oxazoline, or benzoxazine.
23. The compound of claim 1 , wherein E is cyanate ester or propargyl ether.
24. An adhesive composition comprising at least one compound of claim 1, and optionally at least one curing initiator.
25. The adhesive composition of claim 24, wherein the at least one curing initiator comprises 0.05 wt % to about 5 wt % based on total weight of the composition.
26. The adhesive composition of claim 24, further comprising a reactive diluent.
27. The adhesive composition of claim 24, further comprising a filler.
28. The adhesive composition of claim 27, wherein the filler is conductive.
29. The adhesive composition of claim 27, wherein the filler is thermally conductive.
30. The composition of claim 29, wherein the filler is aluminum nitride, silicon carbide, boron nitride, diamond dust, alumina, polysiloxanes, silica, calcium carbonate, fumed silica, alumina, titania, polytetrafluoroethylene, or silicone.
31. The adhesive composition of claim 27, wherein the filler is non-conductive.
32. A b-stageable die-attach paste comprising: a) 2 weight percent to about 98 weight percent (wt %) of at least one compound of claim 1, or combinations thereof, based on total weight of the composition. b) 0 to about 90 wt% of a filler; d) 0.05 wt % to about 5 wt % of at least one curing initiator, based on total weight of the composition; e) 0.05 wt% to about 4 wt%, of at least one coupling agent, based on total weight of the composition. '
33. An assembly comprising a first article permanently adhered to a second article by a cured aliquot of the die-attach paste of claim 32.
34. A method for attaching a semiconductor die to a substrate comprising:
(a) applying the die attach paste of claim 32 to the substrate and/or the microelectronic device,
(b) subjecting the substrate and/or the microelectronic device to conditions suitable to form a b-staged curable film,
(c) exposing the b-staged curable film to temperature conditions suitable to melt the film, (d) bringing the substrate and the device into intimate contact to form an assembly wherein the substrate and the device are separated only by the die-attach paste, and
(e) subjecting the b-staged curable film to conditions suitable to cure the melted film.
35. A semiconductor die assembly comprising: a) a substrate having wiring members extending from pads on the substrate for electrically connecting a die to the substrate, b) a bottom die having a bottom surface and a top surface, wherein the bottom surface contacts the substrate, and wherein the top surface of the bottom die has electrical pads for attaching a wiring member from the substrate, and wherein a first die-attach adhesive is disposed between the substrate and the bottom die, c) a first top die having a bottom surface and a top surface, wherein the first top die is positioned above the bottom die so that the bottom surface of the first top die is facing the top surface of the bottom die, thereby creating a first bondline gap between the bottom die and the top die, wherein a portion of the wiring members extending from the electrical pads on the top surface of the bottom die are located within the first bondline gap, and d) a second die-attach adhesive disposed between the bottom die and the top die, thereby filling the first bondline gap and creating a first bondline, and encapsulating the portion of the wiring members located within the first bondline.
36. The semiconductor die assembly of claim 35, further comprising a second top die having a bottom surface and a top surface positioned above the first top die as in claim 35(c), wherein the second die-attach adhesive is disposed between the second top die and the first top die, thereby filling a second bondline gap and creating a second bondline, and encapsulating the portion of the wiring members located within the second bondline.
37. The semiconductor die assembly of claim 36, further comprising a third top die having a bottom surface and a top surface positioned above the second top die as in claim 35(c), wherein the second die-attach adhesive is disposed between the third top die and the second top die, thereby filling a third bondline gap and creating a third bondline, and encapsulating the portion of the wiring members located within the third bondline.
38. The semiconductor die assembly of claim 35, wherein the second die-attach adhesive comprises a compound having the structure:
R and Q are each independently substituted or unsubstituted aliphatic, aryl, or heteroaryl; each E is independently a ring-opening or ring-forming polymerizable moiety; and n is 1 to about 10.
39. The semiconductor die assembly of claim 38, wherein n is 1 to about 5.
40. The semiconductor die assembly of claim 38, wherein n is 1 to about 3.
41. The semiconductor die assembly of claim 35, wherein the bondline is 1 to about 10 mils.
42. The semiconductor die assembly of claim 35, wherein the bondline is 1 to about 5 mils.
43. A compound having the structure: 0 O O
RH -O — C — Q — C-O- -R O— C — Q — C— O+-R — E n - 1 m
wherein:
R and Q are each independently substituted or unsubstituted aliphatic, aryl, or heteroaryl; each E is independently a ring-opening or ring-forming polymerizable moiety; and m is 3 or 4; and n is 1 to about 10.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2006/007943 WO2008085144A1 (en) | 2006-03-06 | 2006-03-06 | Low shrinkage polyester thermosetting resins |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2006/007943 WO2008085144A1 (en) | 2006-03-06 | 2006-03-06 | Low shrinkage polyester thermosetting resins |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008085144A1 true WO2008085144A1 (en) | 2008-07-17 |
Family
ID=39608912
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2006/007943 WO2008085144A1 (en) | 2006-03-06 | 2006-03-06 | Low shrinkage polyester thermosetting resins |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO2008085144A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114874159A (en) * | 2022-04-15 | 2022-08-09 | 西安瑞联新材料股份有限公司 | Aliphatic epoxy compound and composition and application thereof |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3336266A (en) * | 1967-08-15 | Epoxidized x-methylenecyclohex- anemethyl esters and resins therefrom | ||
US3739041A (en) * | 1967-01-25 | 1973-06-12 | Ciba Geigy Ag | Curable composition of matter of carboxyl terminated polyesters and diepoxy compounds |
JPS5736125A (en) * | 1980-08-11 | 1982-02-26 | Toyobo Co Ltd | Preparation of high-viscosity modified polyester elastomer |
US6403757B1 (en) * | 1998-05-07 | 2002-06-11 | Kanegafuchi Kagaku Kogyo Kabushiki Kaisah | Modified polyamide resin and heat-resistant composition containing the same |
US6451929B1 (en) * | 1999-10-29 | 2002-09-17 | Resolution Performance Products, Llc | Glycidyl ester by reacting COOH polyester with epihalohydrin |
US6482899B2 (en) * | 1998-04-17 | 2002-11-19 | Ajinomoto Co., Inc. | Curable resin composition |
US6577013B1 (en) * | 2000-09-05 | 2003-06-10 | Amkor Technology, Inc. | Chip size semiconductor packages with stacked dies |
US20040067606A1 (en) * | 2002-10-02 | 2004-04-08 | Fehr Gerald K. | Method for stack-packaging integrated circuit die using at least one die in the package as a spacer |
-
2006
- 2006-03-06 WO PCT/US2006/007943 patent/WO2008085144A1/en active Application Filing
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3336266A (en) * | 1967-08-15 | Epoxidized x-methylenecyclohex- anemethyl esters and resins therefrom | ||
US3739041A (en) * | 1967-01-25 | 1973-06-12 | Ciba Geigy Ag | Curable composition of matter of carboxyl terminated polyesters and diepoxy compounds |
JPS5736125A (en) * | 1980-08-11 | 1982-02-26 | Toyobo Co Ltd | Preparation of high-viscosity modified polyester elastomer |
US6482899B2 (en) * | 1998-04-17 | 2002-11-19 | Ajinomoto Co., Inc. | Curable resin composition |
US6403757B1 (en) * | 1998-05-07 | 2002-06-11 | Kanegafuchi Kagaku Kogyo Kabushiki Kaisah | Modified polyamide resin and heat-resistant composition containing the same |
US6451929B1 (en) * | 1999-10-29 | 2002-09-17 | Resolution Performance Products, Llc | Glycidyl ester by reacting COOH polyester with epihalohydrin |
US6577013B1 (en) * | 2000-09-05 | 2003-06-10 | Amkor Technology, Inc. | Chip size semiconductor packages with stacked dies |
US20040067606A1 (en) * | 2002-10-02 | 2004-04-08 | Fehr Gerald K. | Method for stack-packaging integrated circuit die using at least one die in the package as a spacer |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114874159A (en) * | 2022-04-15 | 2022-08-09 | 西安瑞联新材料股份有限公司 | Aliphatic epoxy compound and composition and application thereof |
CN114874159B (en) * | 2022-04-15 | 2023-09-29 | 西安瑞联新材料股份有限公司 | Aliphatic epoxy compound, composition and application thereof |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7868113B2 (en) | Low shrinkage polyester thermosetting resins | |
EP3331959B1 (en) | Anionic curable compositions | |
US20100056671A1 (en) | Polyfunctional epoxy oligomers | |
KR101069047B1 (en) | B-stageable die attach adhesives | |
US6342577B1 (en) | Thermosetting resin compositions useful as underfill sealants | |
US20090061244A1 (en) | Thermosetting polyether oligomers, compostions and methods for use thereof | |
TW200304936A (en) | Dual cure B-stageable adhesive for die attach | |
TW201033317A (en) | Adhesive tape for manufacturing electronic components | |
JPH10245539A (en) | Polymer sealant/adhesive and its use in assembling electronic package | |
WO2016009730A1 (en) | Resin composition for sealing and semiconductor device | |
JP2003502484A (en) | Controllable degradable compositions of heteroatom carbocyclic or epoxy resins and curing agents | |
JP2002241617A (en) | Thermosetting resin composition and semiconductor device | |
JPH1117075A (en) | Semiconductor device | |
WO2008085144A1 (en) | Low shrinkage polyester thermosetting resins | |
JP7373073B2 (en) | Underfill film for semiconductor packages and method for manufacturing semiconductor packages using the same | |
JP2000036505A (en) | Manufacture of electronic assembly | |
JP2011111556A (en) | Adhesive composition, circuit connecting material, connector and connection method of circuit member, and semiconductor device | |
TW202226473A (en) | Underfill film for semiconductor package and method for manufacturing semiconductor package using the same | |
JP2870903B2 (en) | Resin composition for semiconductor encapsulation | |
JP2012131903A (en) | Epoxy resin composition for sealing semiconductor, and semiconductor device using the same | |
TWI303248B (en) | Vinyl silane compounds containing epoxy functionality | |
JP3852540B2 (en) | Phosphonium borate compound, method for producing the same, curing catalyst for epoxy resin composition, and epoxy resin composition | |
JP2001055432A (en) | Epoxy resin composition for sealing semiconductor device, semiconductor device using the same and method and apparatus for producing semiconductor device | |
JP2904536B2 (en) | Adhesive composition for semiconductor device | |
KR100524858B1 (en) | Method for the preparation of the adhesive tape for the electronic parts |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 06737158 Country of ref document: EP Kind code of ref document: A1 |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 06737158 Country of ref document: EP Kind code of ref document: A1 |