WO2008072376A1 - Spatial phase modulation element, video display method using the spatial phase modulation element, and projection device using the spatial phase modulation element - Google Patents

Abstract

Provided is a spatial phase modulation element formed by: a substrate including a switch circuit for performing optical phase modulation or driving each of the sections for performing the optical phase modulation; a plurality of elastic members arranged at the partition positions; an electrode arranged below the elastic member; and a mirror. Moreover, it is possible to provide a novel video display method using the spatial phase modulation element and a projection device for realizing the video display method.

Description

 Specification

 Spatial phase modulation element, image display method using spatial phase modulation element, and projection apparatus equipped with spatial phase modulation element

 Technical field

 TECHNICAL FIELD [0001] The present invention relates to a technical field of a device for performing phase modulation of light and a projection apparatus (display), and more particularly, a novel spatial phase modulation element with improved light utilization efficiency and a space including the spatial phase modulation element The present invention relates to a novel holographic projection method using a phase modulation element and a projection apparatus for realizing the video display method. Background art

 [0002] Common spatial phase modulation elements include transmissive liquid crystal (Liquid Grysta to LG), reflective liquid crystal (Liquid Crystal On Si I icon 丄 G0S), or DMD (Digtal Micro-mirror Device). . In Patent Document 1, an element that adjusts the phase of light by bending a micromirror by recessing the micromirror by applying a voltage to the electrode and pulling it with a Coulomb force. It is disclosed.

 In the above, LG of the conventional spatial phase modulation element has a low aperture ratio because the switch structure for driving the liquid crystal existing in each pixel limits the aperture area through which the light is transmitted, and the light utilization efficiency There was a technical problem that was bad. In addition, LG0S has a technical problem that the light quantity decreases due to light reciprocating in the liquid crystal and the structure is complicated. In DMD, it is necessary to perform phase modulation using light intensity modulation because phase modulation of light cannot be performed directly, and there is a technical problem that the diffraction efficiency is lowered in principle.

[0004] Further, in an element that modulates the phase of light by bending a strip-shaped flexible micromirror with the Coulomb force of the electrode, the diffracted light peculiar to the direction perpendicular to the longitudinal direction of the strip In addition, there is a technical problem that an optimum diffraction pattern cannot be obtained because only one direction is connected to each pixel. As described above, the conventional spatial phase modulation elements have their respective drawbacks when performing phase modulation of light. [0005] On the other hand, a conventional general projection apparatus includes a light source, an illumination optical system, an image display element, and a projection lens. After the image is displayed once on an image display apparatus such as a liquid crystal, the projection lens is displayed. The method of enlarging and displaying the video is used. There are two types of color display of images in this projection device: single-plate color sequential (color_sequential) method and multi-plate method. In multi-plate type, color separation / synthesis optics for image display elements A system was needed.

 [0006] In a conventional projection apparatus, an incoherent light source such as a high-pressure mercury lamp is used. In this case, a large and complex optical system is required to illuminate the image display element efficiently and uniformly, and a large projection with high accuracy is required to project a high-definition image displayed on the image display element. A lens is required. Therefore, the conventional projection apparatus has a technical problem that the apparatus becomes large and the cost is high. Furthermore, along with the color display of the image, there is a technical problem that a very complicated color separation / combination optical system is required, which makes the projection apparatus larger and expensive.

 As means for solving the technical problem of such a conventional projection apparatus, Patent Literature

 2 and Non-Patent Document 1 disclose a projection apparatus as shown in FIG. 1 using LG0S as a spatial phase modulation element.

 [0008] In the following, a simplified overall configuration and principle of the projection apparatus using the LG0S of Fig. 1 will be described.

 The projection apparatus 1 in FIG. 1 includes a light source 10 that emits illumination light, a spatial phase modulation element LG0S11 that performs phase modulation of light, a polarization beam splitter (PBS) 12, and a projection lens 13 that projects diffracted light. The diffracted light 15 from the projection device 1 is projected onto the screen 14.

In the projection apparatus 1 of FIG. 1, linearly polarized light from the light source 10, eg, a laser, is incident on the PBS 12, and the incident light in the PBS 12 is reflected toward the LG0S11 1 that is a spatial phase modulation element. Is done. Here, a λ / 4 plate (not shown) is provided between PBS12 and LG0S11. The light reflected by the PBS 12 passes through the λ / 4 plate and enters the LG0S11. The incident light is phase-modulated by the LG0S11 according to the video information, and is diffracted by the 15th and 0th orders. Diffracted light 16 is emitted, and each diffracted light is reflected toward the screen 14. It should be noted that a binary modulation of the phase difference π can be obtained depending on the presence or absence of phase modulation in LG0S11 at this time.

 [0010] Then, the diffracted light 15 reflected by the phase modulation at LG0S11 passes through the λ / 4 plate again, passes through the PBS 12, and is then projected on the screen 14 through the projection lens 13. The On the other hand, the 0th-order diffracted light 16 reflected by LG0S11 is separated from the diffracted light 15 by an angle, and after passing through the λ / 4 plate again, passes through the PBS 12 and travels straight. is there.

 The projection apparatus 1 as described above has a simple configuration of the illumination optical system and can use a small projection lens 13, and can be miniaturized. However, this projector 1 uses LG0S11 as the spatial phase modulation element, so the light utilization efficiency is low, and the removal of the 0th-order diffracted light 16 is insufficient, and the 0th-order diffracted light is included in the projected image. There was a technical problem that the image was not clear due to the effect of incident 16 remaining.

 [0012] In addition, GLV (Grating Light Valve) is disclosed in Patent Document 3 and Patent Document 4 as a conventional element for diffracting light, but this is done by moving a fixed strip-shaped mirror up and down to cause interference. The light intensity of the image is modulated by 0N / 0FF of the light by reflection and non-reflection, but not the phase modulation of the light.

 Patent Document 1: US—5493439

 Patent Document 2: WO / 2005/059881 Publication

 Patent Document 3: US—5841579

 Patent Document 4: US— 5982553

 Non-Patent Document 1: SID2006 Digest 2018

 Disclosure of the invention

 [0013] A problem to be solved is that an input position that becomes an obstacle in an operation of manually scanning and inputting a high-definition diagram cannot be visually confirmed.

According to the present invention, each section used for light phase modulation or light phase modulation is dried. A substrate including a switch circuit for performing the operation, a plurality of elastic members arranged at the partition positions, an electrode for deforming each elastic member, and connected to the plurality of elastic members. Provided is a novel spatial phase modulation element composed of a mirror that changes the angle. We also propose a new image display method that displays a diffraction pattern on a spatial phase modulation element and projects the image by irradiating it with light to generate diffracted light. Then, a projection device is provided that includes a spatial phase modulation element and realizes an image display method.

 [0014] The novel spatial phase modulation element provided in the present invention has a simple configuration, good light utilization efficiency and diffraction efficiency, and is inexpensive. The new image display method using a spatial phase modulation element suppresses unnecessary diffraction orders, separates the diffracted light for displaying the image from the 0th order diffracted light, and shields the 0th order diffracted light to provide a clearer image. Can be projected. A projection apparatus that can realize an image display method including at least a spatial phase modulation element, a condensing lens, and a trap can be configured with a simple illumination optical system that uses a λ plate, and uses a simple projection lens. Or the projection lens can be omitted, and the light utilization efficiency is good and the cost can be reduced.

[0015] In the present invention, the novel spatial phase modulation element includes a substrate including a switch circuit that performs phase modulation, a plurality of elastic members arranged at the partition positions, an electrode that deforms each elastic member, and a plurality of Spatial phase modulation with almost no light loss can be achieved by using a mirror whose deformation or height changes as the elastic member deforms. In addition, the novel spatial phase modulation element of the present invention has a simple reflection type configuration and can be reduced in cost. In addition, by continuously deforming the mirror and changing the height, unnecessary diffraction orders can be suppressed and diffraction efficiency is good. Control is simple because the deformation of the elastic member can be controlled in binary by applying a voltage to the electrode. Furthermore, by setting the amount of change in the mirror height due to deformation of the elastic member to λ / 4, it is possible to create a phase difference of light between the mirror without deformation of the elastic member and the mirror with deformation of the elastic member. Can diffract light. In addition, the diffraction efficiency can be improved by continuously controlling the deformation amount of the elastic member. Also, here the maximum amount of change in mirror height due to deformation of the elastic member By suppressing the λ / 2 to λ / 2, it is possible to perform optimal control with a maximum phase difference of one wavelength.

 [001 6] As another embodiment, in the present invention, the spatial phase modulation element, a substrate including a switch circuit that drives each section for phase modulation, a plurality of elastic members, an electrode for deforming the elastic members, By using a mirror provided on the upper part of the elastic member, spatial phase modulation with almost no light loss can be achieved. This spatial phase modulation element is a reflection type and has a simple structure, and can be reduced in cost. Also, the control can be simplified by binary control of the deformation of the elastic member. Furthermore, by setting the amount of change in the height of the mirror to λ / 4, it is possible to cause a phase difference in the light and fold it. In addition, the diffraction efficiency can be improved by continuously controlling the deformation amount of the elastic member. Furthermore, optimal control is possible by suppressing the maximum change in the mirror height to λ / 2.

 [001 7] Also, for the number of partition rows Ν of the image to be displayed, the number of partition rows 空間 of the spatial phase modulation element

 [0018] [Equation 1]

Μ≥Ν

By adopting [001 9], it is possible to provide a projection apparatus with high definition and excellent image quality.

 Furthermore, for the number of pixel columns 画像 of the image to be displayed, the number of partition columns 空間 of the spatial phase modulation element

 [0020] [Equation 2]

Μ> 2Ν

[0021] By doing so, it is possible to perform high-definition and high-quality display in which diffracted light for image display and zero-order folding light unnecessary for image display are separated. Also, the pitch P between compartments is

[0022] [Equation 3]

_P

 One N

 [0023] By using the spatial phase modulation element, a high-definition and high-quality image can be projected in a relatively large section, and the burden on the spatial phase modulation element can be reduced. Here, D is the width of the spatial phase modulation element, and N is the number N of pixel columns of the image to be displayed.

 Furthermore, the pitch P of the spatial phase modulation element is

[0025] [Equation 4]

P

 2N

Thus, high-definition and high-quality video display can be optimally performed.

 Based on the above, by setting the pitch of the spatial phase modulation element to 6.4 to 3.2 U m, an optimum spatial phase modulation element for the projection apparatus can be obtained.

[0027] In the projection device of the present invention, the height changes depending on the substrate including a switch circuit that performs phase modulation, a plurality of elastic members, an electrode that deforms the elastic members, and the deformation of the plurality of elastic members. By using a spatial phase modulation element composed of a mirror, a small, inexpensive and high-performance projection becomes possible.

 [0028] As another form, in the projection apparatus of the present invention, a substrate including a switch circuit that drives each section, a plurality of elastic members, an electrode that deforms the elastic members, and an upper portion of each elastic member are provided. By using a mirror and a spatial phase modulation element composed of: a small, inexpensive and high-performance projection becomes possible.

[0029] In the present invention, a reflection type with improved light utilization efficiency and diffraction efficiency with a simple configuration. An MM D (Magic Mirror Device) element, which is a Spatial Phase Modulator (SPM), is provided. In addition, a novel holographic projection method using a spatial phase modulation element is provided. Furthermore, a projection apparatus including a spatial phase modulation element including an MMD that can realize the video display method is provided. Brief Description of Drawings

[Figure 1] Shows a conventional projector using LCOS as a spatial phase modulator

[FIG. 2A] As an embodiment, there is shown a perspective view in which a mirror element of an MM D (Magic Mirror Device) element composed of one mirror according to the present invention is arranged on a substrate.

[FIG. 2B] FIG. 2B shows a perspective view in which a substantially square mirror element is two-dimensionally arranged on a substrate in an MMD element composed of a plurality of mirror elements.

[FIG. 3A] —A cross-sectional view of the MMD element shown in FIG. 2A along line I I 卜 A is shown as one embodiment.

 [FIG. 3B] FIG. 3B shows a cross-sectional view of the MMD element of FIG. 3A during phase modulation of light as one embodiment.

 [FIG. 4A] As another embodiment, a sectional view taken along line IV-A of the MMD element shown in FIG. 2B is shown.

 [FIG. 4B] As another embodiment, a cross-sectional view of the MMD element of FIG. 4A during phase modulation of light is shown.

 [FIG. 5A] —As one embodiment, an example is shown in which the electrode arrangement of the MMD element shown in FIGS. 3A and 3B is different.

 [FIG. 5B] —As one embodiment, an example is shown in which the electrode arrangement of the MMD element shown in FIGS. 4A and 4B is different.

 [FIG. 6] As an embodiment, in the MMD element of the present invention, a schematic diagram in which a support and an elastic member are arranged over the entire substrate.

 FIG. 7A shows an example of the shape of the support and the elastic member used in the MMD element of the present invention as one embodiment.

[FIG. 7B] As another embodiment, an MMD element which is a spatial phase modulation element of the present invention is used. FIG. 7A shows an example of a pillar having a different shape.

 FIG. 8 shows one embodiment of a novel video display method using a transmissive spatial phase modulation element.

 FIG. 9 shows a flow chart of signal processing of a signal input to a spatial phase modulation element when spatial phase distribution information is displayed on the spatial phase modulation element as one embodiment.

 FIG. 10 is a schematic diagram of a switch circuit provided on a substrate of a spatial phase modulation element in one embodiment.

 [Fig. 11] This diagram schematically shows how the readout light is diffracted by the spatial phase distribution information displayed by the spatial phase modulation element and the diffracted light is projected onto the screen.

[FIG. 12] As one embodiment, the incident light incident angle Θ _R = 0 ° incident on the diffraction grating with the grating interval d displayed on the transmissive spatial phase modulation element and the illumination light wavelength λ FIG. 6 is a diagram showing the relationship between the exit angle 0 _S of diffracted light and the distance d between diffraction gratings when = 0.5 m.

 FIG. 13 shows a plan view of a projection apparatus including a transmissive spatial phase modulation element capable of realizing a novel video display method as one embodiment.

FIG. 14 shows a plan view of a projection apparatus provided with a reflective spatial phase modulation element as another embodiment.

 FIG. 15 shows a plan view of a projection apparatus having a configuration different from that of FIG. 14 using a reflective spatial phase modulation element as a further different embodiment.

 [FIG. 16A] As an embodiment, a plan view of a projection apparatus that is configured as a multi-plate type using a reflective spatial phase modulation element and displays a full color image is shown.

[FIG. 16B] As one embodiment, a side view of FIG. 16 A, which is a projection device configured with a multi-plate type using a reflective spatial phase modulation element and performing full color display of an image, is shown. .

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, examples of embodiments of the present invention will be described with reference to the drawings. FIG. 2A and FIG. 2B are perspective views of the MMD elements 2 and 3 which are the reflection type spatial phase modulation elements (SPM) of the present invention.

 A plurality of partition portions are provided on the spatial phase modulation element. This partition part is the area on the spatial phase modulation element divided into a number of small sections, each of which has the desired phase by controlling the physical state of each section independently. Diffracted light can be emitted.

 [0033] As shown in FIGS. 2A and 2B, the MMD element basically includes a mirror composed of an electrode (not shown), an elastic member (not shown), a column (not shown), and mirrors 31, 41. One element 30, 40 is arranged on the substrate 37. For example, the mirror used for the MMD element may be the integral type 31, or the integral type 31 may be divided into a plurality of substantially square shapes 41. As for the electrode for the mirror, a plurality of electrodes may correspond to one mirror, or the operation of the mirror may be controlled in a one-to-one correspondence. Here, in the case where control is performed with a plurality of electrodes for one mirror, it is necessary to use a mirror having flexibility. FIG. 2A shows a state in which the MMD element 2 is configured by associating a plurality of electrodes with one mirror -31 as an example. Further, in FIG. 2B, as an example, one mirror corresponds to one substantially square mirror 41, and a plurality of mirror elements 40 while maintaining a constant spacing between mirror sections in the vertical and horizontal directions, the so-called pitch. This shows how the MMD element 3 is configured by arranging. At this time, the pitch of each mirror may not be constant. It is desirable that the distance between the mirrors be as close as possible to the extent that the mirrors do not interfere during operation. Here, for example, the number of mirrors required to display an image having a resolution of 1 980 X 1 080 in horizontal X length is 1 920 X 1 080 = 2, 073,600.

 [0034] The details of the MMD element of the present invention will be described below with reference to the cross sections of the MMD elements 2 and 3 indicated by lines II 卜 A and IV-A in FIGS. 2A and 2B. .

 FIG. 3A shows a cross-sectional view of the MMD element of FIG.

An insulating layer 36 is overlaid on a substrate 37 including a switch circuit that drives each section of the MM D element 2 to perform phase modulation of light, and an elastic member 3 is stacked on the insulating layer 36. 4 is provided. An electrode 35 connected to a switch circuit is provided below each elastic member 34. Further, a support 33 is provided on the elastic member 34, and the support 33 is integrally connected to the mirror 31 through a thin film 32. The mirror 31 here is flexible and can be bent. Preferably, the mirror 31 is formed of a highly reflective metal or dielectric multilayer film. The thin film 32 is formed of a material that is rich in flexibility and durability. The thin film 32 is preferably made of a flexible organic film or Si ₂ N ₃ . The thin film 32 may be omitted. For the elastic member 34, a flexible metal or a conductive organic film is used. An organic film coated with a conductive material may be used. For the electrode 35, AI, Cu, W or the like is used as a conductor. Then, the insulating layer 36, S i 0 ₂ and S i G etc. can and Mochiiruko, the substrate 37 can be used for S i. Therefore, by using a mirror, it is possible to provide a spatial phase modulation element with high light utilization efficiency that can reflect light almost 100%.

 FIG. 3B shows a cross-sectional view of the MMD element of FIG. 3A during light phase modulation.

In FIG. 3B, by applying a voltage to the electrode 35 from the initial state of FIG. 3A, the Coulomb force acts between the mirror 31 and the electrode 35, whereby the elastic member 34 approaches the substrate 37 and has flexibility. The mirror 31 is curved so that the surface of the mirror 31 is recessed. At this time, a mirror height change Δh occurs. Here, the phase modulation is enabled by the difference in the optical path between the incident light reflected by the non-curved mirror and the incident light reflected by the curved mirror. . If the mirror is bent and recessed, that is, the mirror height change Δh is 1/4 wavelength, it is reflected back and forth by 1/2 wavelength, that is, uncurved mirror. The phase difference of π can be created by reciprocating between the reflected light and the light reflected by the curved mirror. As described above, in the MMD element of the present invention, the phase can be inverted by a binary operation in which the voltage is applied to the electrode by 0N / 0FF. Similarly, when the mirror height change Δh is bent by a maximum of 1/2 wavelength, the reflected light reflected by the curved mirror is not curved. Not Mira Compared with the reflected light that is reflected at one point, it is possible to create a phase difference of up to one wavelength by reciprocation.

 [0037] Here, by appropriately selecting the elastic constant of the elastic member 34, the depression of the elastic member 34, that is, the amount of change in mirror height Δh due to the curvature of the mirror can be controlled by the voltage. . In addition, by controlling the amount of change Δh in the height of this mirror and successively and slowly changing the height of the integrated mirror 31, unnecessary effects caused by binary one-phase modulation due to binary operation are eliminated. It is possible to suppress the diffraction order.

 It should be noted that the elastic member 34 can be returned to the initial state by the restoring force of the elastic member 34 by setting the voltage to zero after the voltage is applied and then depressed.

 As described above, phase modulation can be performed by applying a voltage to a specific electrode 35 and curving a specific part of the mirror 31 connected together, and the change in the height of the mirror 31 can be continuously measured. In addition, the generation of unnecessary diffraction orders can be suppressed by performing gently, and higher diffraction efficiency than binary one modulation can be obtained.

 FIG. 4A shows a cross-sectional view of the MMD element shown in FIG. 2B along line I V—A.

 In the MMD element of Fig. 4A, the integrated mirror 31 is divided into a plurality of parts, and the support 33, the elastic member 34, and the electrode 35 are arranged so as to have a one-to-one correspondence with each divided mirror 41. FIG. 3A and FIG. 3B have the same configuration as the MMD element. In this configuration, when the thin film 42 is used in the lower part of the mirror, a hard organic film or Si may be used for the thin film 42.

[0040] In this configuration as well, since a mirror is used as in FIGS. 3A and 3B, it is possible to provide a spatial phase modulation element that can reflect light at almost 100% and has high light utilization efficiency. Can do.

 FIG. 4B shows a cross-sectional view of the MMD element of FIG. 4A during light phase modulation.

[0041] In FIG. 4B, by applying a voltage to the electrode 35 from the state of FIG. 4A, the elastic member 34 approaches the substrate 37 by the Coulomb force acting between each mirror 41 and each electrode 35. It shows how it works. Here, as the elastic member 34 approaches the substrate 37, the mirror 41 on the elastic member 34 moves downward via the support pillar 33. When this mirror 41 moves downward, the amount of change in the height of the mirror A with respect to the light incident on the mirror 41 between other mirrors to which no voltage is applied and the mirror moving downward A h ₂ , that is, the optical path difference is generated, so that phase modulation of light is possible. When the mirror height change A h ₂ is 1/4 wavelength of the light phase, it moves 1/2 wavelength back and forth, that is, down to other mirrors to which no voltage is applied. A phase difference of π can be created by reciprocating the incident light with the mirror. In this way, it is possible to invert the phase by performing binary one control to make the electrode voltage 0N / 0FF. Similarly, the variation △ h ₂ of the height of the mirror is moved so that the 1/2 wavelengths, light of a mirror which is moved to the mirror and lower other voltage is not applied A phase difference of up to one wavelength can be created in both directions.

The spatial phase modulation element shown in FIGS. 4A and 4B can simplify the control by performing binary control on the deformation of the elastic member 34, as in FIGS. 3A and 3B. Diffraction can be performed by creating a phase difference of light by setting the mirror height change Δh ₂ to λ / 4. In addition, optimal control can be achieved by setting the maximum phase difference of light to one wavelength by limiting the maximum change in mirror height △ ₂ to / 2. The depression amount of the elastic member 34 of the elastic constant elastic due to the applied voltage value by selecting appropriately the member 34, i.e. it is possible that control the variation delta h ₂ of the height of the mirror 41. By continuously changing the height of this mirror 41, it is possible to suppress unnecessary diffraction orders caused by binary one-phase modulation by binary operation.

 It should be noted that the elastic member 34 returns to the initial state by the restoring force of the elastic member 34 by setting the voltage to zero after being depressed by applying a voltage.

As described above, it is possible to perform phase modulation by applying a voltage to a specific electrode 35 and changing the height of the mirror 41, and continuously changing the height of the mirror 41. Therefore, the generation of unnecessary diffraction orders can be suppressed. Higher diffraction efficiency can be obtained.

 Note that US-patent 5, 835, 255, US-patent 6, 040, 937, etc. can be referred to for the structure and binary control of the elastic member used in the present invention. However, these documents describe a technique related to an element that performs color display using the principle of the Fabry-Perot etalon, which is different from the present invention.

 FIG. 5A shows an example in which the arrangement of the electrodes in the MMD elements of FIG. 3A and FIG. 3B is different.

 FIG. 5A shows a configuration in which the electrode 35 provided above the insulating layer 36 in FIGS. 3A and 3B is provided on the insulating layer 36. All are the same except that the arrangement of the electrode 35 above the insulating layer 36 is changed to the arrangement of the electrode 51 on the insulating layer 36.

FIG. 5B shows an example in which the arrangement of the electrodes in the MMD elements in FIGS. 4A and 4B is different, as in FIG. 5A.

 FIG. 5B shows a configuration in which the electrode 35 provided above the insulating layer 36 in FIGS. 4A and 4B is provided on the insulating layer 36. Place the electrode 35 in the insulating layer 36 in the insulating layer 3

All are the same except that the arrangement of electrodes 51 on 6 is changed.

FIG. 6 is a schematic diagram showing the overall arrangement of the support pillars 33 and the elastic members 34 on the base plate 37 in the MMD element which is the reflective spatial phase modulation element of the present invention.

 In this figure, the M shown in Figures 3A and 3B and Figures 4A and 4B

A mode that the elastic member 33 and the support | pillar 34 in MD element 2 and 3 are arrange | positioned two-dimensionally vertically and horizontally on the board | substrate 37 is shown typically.

Next, a specific example of the shape of the column 33 will be described with reference to FIGS. 7A and 7B.

 In FIG. 7A, the cross section of the column 33 is circular.

 In Fig. 7B, the cross section of the support 33a is rectangular.

[0049] Of course, the cross-sectional shape of the column may be other than this, and an arbitrary cross-section such as an ellipse or a rectangle may be appropriately selected.

Note that the elastic member 34 has a support with respect to the substrate 37 as shown in FIG. Although the target shape is centered, it may be asymmetrical, or it may be a shape in which the contact portion with the substrate 37 exists only on one side centered on the support column.

 [0050] Next, details of a novel video display method using the spatial phase modulation element and a projection apparatus including a transmissive spatial phase modulation element will be clarified.

 FIG. 8 shows an embodiment of a novel video display method using a transmissive spatial phase modulation element.

 In FIG. 8, a luminous flux 85 of illumination light emitted from a light source (not shown) is condensed by a condensing lens 81 and then irradiated to a transmissive spatial phase modulation element 82 to obtain a spatial phase modulation element 82. 4 shows a projection device 4 that projects the diffracted light 87 modulated and diffracted in FIG. 0 is the diffraction angle.

 In this projection device 4, the illumination light beam 85 is converted into convergent light by the condensing lens 81, so that the 0th-order diffracted light 86 can be captured by the trap 83, and the 0th-order diffracted light is projected on the screen 84. This prevents the contrast from being lowered. In FIG. 8, the screen 84 is a force drawn in the vicinity of the spatial phase modulation element 82. Actually, the screen 84 is sufficiently far from the spatial phase modulation element 82.

 [0053] In addition, when this configuration is used, a projection lens is basically not required. However, when adjusting the distance from the screen 84 or changing the spread angle of the diffracted light 87, the projection lens is used. May be provided. Even when a projection lens is provided, a simple lens can be used because it projects spatially phase-modulated light, unlike a conventional projection device that projects an image drawn on an image display element.

 FIG. 9 shows a flowchart of signal processing of a signal input to the spatial phase modulation element.

 The processing flow until the signal is input to the spatial phase modulation element is described in detail below.

[0055] First, video data 91 is input from an external circuit, and the video data (image) 91 is subjected to Fourier transform to become spatial phase distribution information. In this state, the intensity distribution is generated together with the spatial phase distribution. The phase information 92 is superimposed. After the random phase is added to the video data, Fourier transform 93 is performed. This method of adding random phases is a technique known as Kynoff Ohm, eg, WH Lee: “Computer-generated holograms: techniques and applications, in Progress in Optics, E. Wolf, ed. , (North-Hol land, Amsterdam, 1978), Vol.16, pp.119-232, etc. By superimposing random phase information on video data 91 in this way, It is possible to obtain a spatial distribution that satisfies the video information using only the phase information.

[0056] The video data to which the random phase is given becomes the spatial phase distribution information of only the phase by performing the Fourier transform 93. Then, after applying the correction processing 94 based on the optical arrangement to the spatial phase distribution information of only the phase, it is input to the SPM driver 95. The SPM driver 95 creates a drive signal for driving the spatial phase modulation element (SPM). By applying this drive signal to the spatial phase modulation element, the spatial phase distribution information corresponding to the image to be projected on the spatial phase modulation element (SPM) can be displayed.

Here, as one example of signal processing, assuming that the MMD element of the present invention, which is a spatial phase modulation element, is a 3 × 3 section, the operation of the signal and the spatial phase modulation element will be briefly described. To do. In FIG. 10, only 2 X 2 is shown as the transistor circuit 103 which is a switch circuit provided on the substrate of the MMD element in the 3 X 3 section. In Fig. 10, the MMD element drive circuit sends sequential video signals from Y1 to Y3 of the signal line 101 in each section, while sequentially sending scanning signals from X1 to X3 of the scanning line 102 in each section. Such normal X_Y scanning shall be performed. Here, when a drive signal is sent from the signal line 走 査 1 and a scan signal from the scan line Ν1 to 0 送 る is sent, the transistor circuit 103 in the section (X1, Y1) becomes 0N, and the electrode 104 is driven according to the drive signal of the signal line Y1. A voltage is applied to. At this time, a charge is accumulated between the elastic member 106 of the MMD element and the electrode 104 due to the capacitor 105, and a Coulomb force is generated according to the charge. This charge is maintained until the next signal.

[0058] Next, a drive signal is sent from the signal line Y2, and a scan signal of 0N is sent from the scan line X1. When applied, a voltage is applied to the electrodes 104 in the compartments (X1, Y2). Similarly, a drive signal is sent from the signal line Υ3 to the section (Χ1, Υ3) and scanned by the scan line Χ1, and then a drive signal is sent from the signal line Y1 to the partition (X2, YD). The information of the drive signal is reflected in the spatial phase modulation element by sending an ON scanning signal from the scanning line Χ 2. In this way, information is written to the entire spatial phase modulation element as needed. By controlling the operation as described above, it is possible to display spatial phase distribution information corresponding to the image to be projected on the spatial phase modulation element (SPM).

 Further, the correction processing 94 based on the optical arrangement here is, for example, in the case of the optical arrangement shown in FIG. 8, the light irradiated on the transmissive spatial phase modulation element by the condenser lens is Means correcting the spatial phase distribution displayed on the spatial phase modulation element to be diffracted towards the screen 84 illustrated in FIG.

Note that this series of data processing is executed at high speed in an external circuit so that video can be displayed in real time. For example, FPGA or AS I G is used as the external circuit here.

 Next, as one embodiment, diffracted light is generated by inputting read light into the spatial phase distribution information displayed on the transmission type spatial phase modulation element as shown in FIG. 8, and the image is projected onto the screen. How to do is described.

[0061] FIG. 11 shows how the readout light is diffracted by the transmissive spatial phase modulation element.

In Fig. 11, consider the case where a diffraction grating 1 1 1 is displayed on the spatial phase modulator for simplicity. The spatial phase modulation element here displays spatial phase distribution information corresponding to the image to be projected, for example, Fourier transform information. When reading light (reference li ght), that is, illumination light beam 112, is incident on the diffraction grating 1 1 1 displayed on this spatial phase modulation element, signal light, that is, diffracted light (di ff ract i on I i ght ) 1 13 is fired. An image can be obtained by projecting the diffracted light 1 13 onto a screen 1 14 arranged at an appropriate distance. [0062] In the following, in order to briefly explain the mathematical principle of the method of projecting diffracted light, a simple diffraction grating 111 having a constant grating spacing d is displayed as an example in a transmissive spatial phase modulation element. In this case, the explanation will be made with reference to FIG.

[0063] When the displayed diffraction grating interval is d, the incident angle 0 _R of the illumination light beam of the readout light 112 in Fig. 11 and the exit angle 0 s of the diffracted light are

 [0064] [Equation 5]

, λ one

 d = (1)

[0065] There is a relationship. For example, for simplicity, if e _R = o degrees,

[0066] [Equation 6] ά ⁼ ^ ~ ~ (2)

[0067] Further, when the wavelength λ of the readout light is assumed here, a correspondence table as shown in FIG. 12 is obtained between the distance d of the diffraction grating and the exit angle 0 _S of the diffracted light.

Figure 12 shows the incident angle Θ _R = 0 ° and the wavelength λ = 0.5 for the illumination beam that is the readout light to the diffraction grating with the grating spacing d displayed on the transmissive spatial phase modulator. FIG. 6 is a diagram showing a correspondence relationship between an exit angle 0 _S of the diffracted light and an interval d of the diffraction grating.

As is clear from FIG. 12, the emission angle 0 _S of the diffracted light 113 can be increased by reducing the grating interval d of the diffraction grating 111. By suitably using this relationship, it is possible to separate the diffracted light 113 that projects an image from the 0th-order diffracted light that is not diffracted by a spatial phase modulation element that is unnecessary for image display.

Next, consider a case where video data, that is, an image is actually displayed. When the horizontal width of the phase distribution information display surface of the spatial phase modulation element is D, the spread angle θ _δ due to the diffracted light when the illumination light beam of wavelength λ is irradiated to the spatial phase modulation element is

[0070] [Equation 7] θ _δ = — [rad] (3)

[0071] This represents the definition of the image that can be projected onto a screen by a spatial phase modulation element with a horizontal width of D on the phase distribution information display surface. Here, as an example, consider a transmission type spatial phase modulation element in which the width of the phase distribution information display surface is D = 0. 6 inch and the aspect ratio of the spatial phase modulation element is 4/5. At this time, the horizontal width D of the phase distribution information display surface in the transmission type spatial phase modulation element is 0.6 X 4/5 X 25. 4 = 1 2.2 mm, and the wavelength λ of the readout light is 0.5 m as a spread angle 0 s by the diffraction becomes 2. 35 X 1 0- ³ degrees. In other words, the resolution of the image that can be expressed by the transmissive spatial phase modulation element with the horizontal width D = 0.6 inch of this phase distribution information display surface is 2.35 X 1 0_ ³ degrees in angular resolution. Means

[0072] Next, the conditions imposed on the spatial phase modulation element in order to express the number of pixels necessary for projecting an image will be examined. If the image you want to display is an NTS C (National Television Standard Committee) video, that is, if the number of pixels in the horizontal direction is 720, the change in the diffraction angle 0 of the diffracted light is at least 2. 35 X 1 0- ³ X 720 = 1.7 degrees is required. In the case of HDTV (High Definition Television), if the number of pixels in the horizontal direction is 1,920, a change in diffraction angle 0 of at least 4.5 degrees is required. In the case of Super Hi-Vision, the number of pixels in the horizontal direction is 7680, and the required change in diffraction angle 0 reaches 18 degrees. In order to project these images, it is necessary to display a diffraction grating with a spacing of d = 17, 7, 6.4, or 1.6 m on the spatial phase modulation element according to Eq. (2). Therefore, the spatial phase modulation element needs to have the ability to display spatial phase distribution information with such a fine lattice spacing d.

 [0073] Here, in order to display the spatial phase distribution information of the diffraction grating having the grating interval d, the pitch between the sections constituting the spatial phase modulation element is P,

[0074] [Equation 8] d = 2P (4)

A spatial phase modulation element that satisfies the conditions is required. Here, the size of one section of the spatial phase modulation element corresponding to NTSC, HDTV, and Super Hi-Vision is preferably about 8.5 m, 3.2 m, and 0.8 m.

[0076] Since the spatial phase change element with the pitch P between sections cannot display a diffraction grating with a lattice spacing d smaller than that in Eq. (4), the diffraction angle 0 _S expressed by Eq. (2) is The largest diffraction angle that can be displayed. For simplicity, assuming that the diffraction angle 0 _S of the diffracted light is not so large, the equation (2) is

[0077] [Equation 9]

[0078] and can be approximated. Furthermore, in order to display the image by avoiding the 0th-order diffracted light, where N is the number of pixel columns in the horizontal direction of the image to be displayed, it is necessary to display the number N of pixel columns in the horizontal direction of the image to be displayed. It is necessary that the diffracted light spreading angle N 1 0 _δ is smaller than the diffraction angle 0 _S. Therefore, to display the image by avoiding the 0th order diffracted light,

 [0079] [Equation 10]

Νθ _δ <θ ₈ (6)

It is necessary to satisfy the condition of [0080]. Substituting (3) and (5) into this conditional expression,

[0081] [Equation 11]

^> 2Ν (7) [0082] is obtained. Here, D / P is the number of partition rows in the horizontal direction of the spatial phase modulation element corresponding to the image to be displayed. If the number of partition rows in the horizontal direction of this spatial phase modulation element is M,

 [0083] [Equation 12]

M> 2N (8)

[0084] This is the necessary number of division columns in the horizontal direction of the spatial phase modulation element corresponding to the image to be displayed, and is a necessary condition for expressing the spatial phase distribution information in the spatial phase modulation element.

 In addition, the pitch P between the sections constituting the spatial phase modulation element is

[0085] [Equation 13]

2N

[0086] can also be expressed.

 From the above, the number M of horizontal division columns of the spatial phase modulation element is set to the number N of pixel columns of the image to be displayed.

[0087] [Equation 14]

M> 2N

Thus, it is possible to provide an excellent projection device with high definition and high image quality.

 Furthermore, the width P of the spatial phase modulation element and the pitch P between the sections constituting the spatial phase modulation element are defined as the width D of the spatial phase modulation element and the number N of pixel columns of the image to be displayed.

[0089] [Equation 15] p < ^D

2N [0090] By using the spatial phase modulation element described above, high-definition and high-quality image display can be optimally performed.

 Next, a projection apparatus provided with a spatial phase modulation element that satisfies the above-described conditions will be described.

 FIG. 13 shows a projection apparatus configured using a transmissive spatial phase modulation element.

 In FIG. 13, the projector 5 having a transmissive spatial phase modulation element includes a light source 130, a spatial filter 131 for removing illumination noise, a collimator 132, a condenser lens 1 33, and a transmissive spatial phase modulation element. 134 and a 0th-order diffracted light trap 135. In this way, a simple optical configuration that can omit the λ plate is sufficient, and no projection lens is required.

 In FIG. 13, illumination light from a light source 130, for example, a laser beam, passes through a spatial filter 131 and a collimator 132, is collected by a condenser lens 133, and then is transmitted through a spatial phase modulation element 134. Is incident as illumination light beam 137. Illumination light that has entered the spatial phase modulation element 134 is phase-modulated by the spatial phase modulation element 134 that is modulated by video information obtained by converting video data, and generates diffracted light 139. The diffracted light 139 is projected onto the screen 136 and a desired image can be displayed on the screen 136. Here, the trap 135 prevents the 0th-order diffracted light that is not diffracted by the spatial phase modulation element 134 so that the displayed image is not adversely affected. In FIG. 13, the trap 135 is drawn within the divergence angle 20 of the diffracted light 139, but in reality, the screen 136 is far away from the position of the trap 135, so the shadow of the trap 135 The image displayed on 136 has little adverse effect.

On the screen 136, the diffracted light 139 modulated by the video information obtained by converting the video data 91 and diffracted from the spatial phase modulation element 134 is projected. The correction processing 94 shown in FIG. 9 performed during this series of operation processing is performed so that the spatial phase distribution displayed on the spatial phase modulation element 134 is diffracted toward the screen 136 shown in FIG. This means that the spatial phase distribution of the video obtained in the conversion 93 is corrected. The correction is performed corresponding to the arrangement position of each optical element. The Fourier transform data displayed and corrected on the spatial phase modulation element is again subjected to Fourier transform on the screen 136 at a far position, and a desired image can be reproduced.

Here, the conditions imposed on the transmission type spatial phase modulation element 134 for obtaining a desired image in the configuration of FIG. 13 will be examined below.

 In the case of the configuration shown in FIG. 13, since the diffracted light 139 is generated with the 0th-order diffracted light sandwiched between them, a condition considering the minus first-order diffracted light is necessary.

In FIG. 11, the conditions imposed on the spatial phase modulation element 111 for obtaining a desired image based on the diffracted light 113 of only one of the plus first order or the minus first order are derived. Therefore, in the case of the configuration shown in Fig. 13, it can be considered that the diffraction angle in Fig. 11 is 0 ₃ times << 2 times, so equation (6) is

[0096] [Equation 16]

(Νθ _δ ≤2θ ₈ do)

[0097] The condition required for the spatial phase modulation element is

[0098] [Equation 17]

Μ≥Ν (! _1}

[0099] Here, for example, when displaying an HDTV video signal, the number M of partitions in the horizontal direction of the spatial phase modulation element is preferably 192 or more. At this time, when the horizontal width D of the spatial phase modulation element is 0.6 inches, the size of one section is 6.4 m. In other words, the size of one section in FIG. 13 may be double the size of one section of the spatial phase modulation element shown in FIG. In the case of NTSG, the size of the division is 17 m, and in the case of the super high vision, the size of the division is 1.6 m.

 [0100] Also, the pitch P between compartments is

[0101] [Equation 18]

P≤ ~ (ι 2)

N ^Z)

[0102] is imposed.

 From the above, the number M of partition columns of the transmissive spatial phase modulation element is set to the number N of pixel columns of the video to be displayed.

[0103] [Equation 19]

M≥N

Thus, it is possible to separate diffracted light for image display from unnecessary 0th-order diffracted light, and display with high definition and high image quality can be performed.

 Furthermore, the width D of the spatial phase modulation element, the number of pixel columns N of the image to be displayed, and the partition pitch P of the spatial phase modulation element

 [0105] [Equation 20]

N

With this configuration, it is possible to project a high-definition and high-quality image with relatively large pixels, and the burden on the spatial phase modulation element can be reduced.

 Fig. 14 shows a projection apparatus configured with a reflective spatial phase modulation element.

 Projector 6 in FIG. 14 includes light source 141, reflective spatial phase modulator 143, trap

 144 and at least a lens 142. Here, the spatial filter is omitted. This optical configuration is very simple, low cost and can be miniaturized.

[0108] In this projection device 6, the transmission type spatial phase modulation element used in Fig. 13 and In contrast, the diffracted light 148 is generated by the reflective spatial phase modulation element 143 and projected onto the screen 145 through the lens 142. The spatial phase modulation element 143 also reflects the 0th-order diffracted light 147, but it is configured so that the reflected 0th-order diffracted light is shielded by the trap 144 and does not adversely affect the image displayed on the screen 145. I am doing so.

 [0109] The optical arrangement shown in Fig. 14 also requires correction corresponding to the arrangement position of each optical element. This correction is caused by the spatial phase distribution displayed on the spatial phase modulation element being diffracted toward the screen 145. This means that the spatial phase distribution of the image obtained by Fourier transform is corrected so as to be projected.

 [01 10] Figure 15 shows a projection apparatus equipped with a different reflective spatial phase modulation element.

 The projector 7 in FIG. 15 has at least a light source 151, a condenser lens 152, a reflective spatial phase modulation element 153, and a trap 154. Spatial filters are omitted here. This optical configuration is very simple, requires low cost, and can be miniaturized.

 [01 1 1] In the projection apparatus of FIG. 15, the illumination light from the light source 151, for example, the laser beam, is converted into the illumination light beam 156 by the condensing lens 152 and is incident on the reflective spatial phase modulation element 153. . Then, the illumination light beam is phase-modulated by the reflective spatial phase modulation element 153, the diffracted light 158 is emitted, and the diffracted light 158 is projected onto the screen 155. In this spatial phase modulation element 153, the 0th-order diffracted light 157 is also reflected and emitted within the divergence angle 0 of the diffracted light 158, but displayed on the screen 155 by being configured to be shielded by the trap 154. The video is not adversely affected.

 [01 12] The optical arrangement of FIG. 15 also requires correction corresponding to the arrangement position of each optical element, and this correction causes the spatial phase distribution displayed on the spatial phase modulation element to be diffracted toward the screen 155. This means that the spatial phase distribution of the image obtained by the Fourier transform is corrected so that it is projected.

[01 13] As described above, in FIGS. 14 and 15, the projections equipped with the reflective spatial phase modulation elements are shown. Although the apparatus is shown, a projection lens may be provided in a projection apparatus that does not use a projection lens. When the distance to the screen 155 is long with respect to the size of the spatial phase modulation element 153, since it is not necessary to adjust the focus, the projection lens can be eliminated. On the other hand, if the distance to the screen 155 is close to the size of the spatial phase modulation element 153, a projection lens may be necessary for focus adjustment. In addition, if you want to change the size of the field of view, that is, if you want to add a zoom function, you need a projection lens that takes care of the zoom function. However, even with the projection lens added at this time, the projection lens used in the conventional projection apparatus can be inexpensive and small.

[0114] Further, in any of the embodiments of Figs. 14 and 15, the colors are sequentially displayed in a time-sharing manner using red, green, and blue illumination lights, for example, R, G, and B lasers. It is possible to display full color. Here, the normal one-color video display is 60 Hz, so when switching between the three colors, 180 Hz is the minimum requirement. In order to reduce the color break phenomenon, switching between three colors of 54 OHz or more is preferable. Therefore, the switching speed of the spatial phase distribution corresponding to the image of the spatial phase modulation element for full color display must be at least 18 OHz.

 Next, FIG. 16A and FIG. 16 B show a projection apparatus 8 that has a multi-plate configuration using a plurality of reflective spatial phase modulation elements and performs full color display of an image.

 16A is a plan view of the projection device 8, and FIG. 16B is a side view of the portion including the spatial phase modulation element 163b corresponding to the blue color in FIG. Is shown.

[0116] The projection device 8 includes R, G, B light sources, collimators 161r, 161g, 161b corresponding to the light sources of each color, total reflection prisms 162r, 162g, 162b, corresponding to the light sources of each color, Reflective spatial phase modulators corresponding to the light source 163r, 163g, 163b, 0th-order diffracted light traps corresponding to each color light source It has a lens 168. [0117] In FIG. 16B, the blue illumination light emitted from the light source, for example, the blue laser _164b, is reflected by the total reflection prism 162b and then becomes parallel light by the collimator 161b. The light enters the spatial phase modulation element 163b. Then, the diffracted light emitted after being phase-modulated by the spatial phase distribution information for blue video displayed on the spatial phase modulation element 163b passes through the collimator 161b again to become a substantially parallel light beam, The light enters the color synthesis prism 167. The blue zero-order diffracted light here is reflected by the spatial phase modulation element 163b, then again passes through the collimator 161b, is totally reflected by the total reflection prism 162b, and is blocked by reaching the trap 166b. .

 Here, also in the portions corresponding to the green and red spatial phase modulation elements 163g and 163r in FIG. 16A, diffracted light can be obtained by the same principle as that of the blue spatial phase modulation element 163b. The diffracted light emitted from the spatial phase modulation element enters the color combining prism 167. The 0th-order diffracted light of red and green is removed by the trap 166 in the same way as the blue 0-order folded light. In FIG. 16A, the diffracted lights emitted from the portions corresponding to the blue, green, and red spatial phase modulation elements 163b, 163g, and 163r are incident on the color combining prism 167, and the diffracted lights of the respective colors are combined. Then, the projection light 168 becomes a diffracted light 170 through the projection lens 168 and is projected onto the screen 169, so that a full color image can be projected.

 [0119] In this multi-plate configuration, light is constantly illuminated, and unlike the color sequential method, there is no need to switch light, so there is no worry of a color break phenomenon.

 As described above, it is possible to provide a small, inexpensive and high-performance projection apparatus that is configured by using a plurality of reflective spatial phase modulation elements and performs full color display of an image.

 The present invention is not limited to the examples described above, and various modifications can be made without departing from the spirit of the present invention.

Claims

 The scope of the claims

 [1] A substrate including a switch circuit for performing phase modulation or driving each section for performing phase modulation;

 A plurality of elastic members respectively disposed at positions corresponding to a plurality of sections on the substrate;

 A plurality of electrodes disposed below each elastic member;

 A spatial phase modulation element comprising: a mirror that is connected to the plurality of elastic members and deforms the elastic body at a position corresponding to the electrode when a voltage is applied to the electrode.

[2] A substrate including a switch circuit for driving each section for performing phase modulation or phase modulation;

 A plurality of elastic members respectively disposed at positions corresponding to a plurality of sections on the substrate;

 A plurality of electrodes disposed below each elastic member;

 A plurality of mirrors that are connected to the respective elastic members and whose height positions are changed by applying a voltage to the electrodes;

 A spatial phase modulation element comprising:

[3] By controlling the application of voltage to the electrodes, the deformation or height change of the mirror can be binary controlled

 3. The spatial phase modulation element according to claim 1, wherein the spatial phase modulation element is provided.

[4] By controlling the application of voltage to the electrode, deformation or height change of the mirror can be controlled continuously.

 3. The spatial phase modulation element according to claim 1, wherein the spatial phase modulation element is provided.

[5] The amount of change due to deformation or height change of the mirror is controlled to be a phase difference λ / 4 with respect to the incident light to the mirror without voltage applied to the electrode. 5. The spatial phase modulation element according to claim 3 or claim 4.

[6] The amount of change due to deformation or height change of the mirror is set to a phase difference of 2 with respect to the incident light to the mirror where no voltage is applied to the electrode. 5. The spatial phase modulation element according to claim 3 or 4, wherein:

[7] With respect to the number N of pixel columns of the image to be displayed, the number of partition columns of the spatial phase modulation element is

 [Number 21]

3. The spatial phase modulation element according to claim 1, wherein a relational expression of M> 2N is satisfied.

 [8] With respect to the number N of pixel columns of the image to be displayed,

 [Number 22]

3. The spatial phase modulation element according to claim 1, wherein the relational expression of M≥N is satisfied.

 [9] When the width D of the phase distribution information display surface of the spatial phase modulation element, the number of pixel columns N of the image to be displayed, and the pitch between the sections constituting the spatial phase modulation element are P

[Equation 23]

3. The spatial phase modulation element according to claim 1, wherein the relational expression 2N is satisfied.

[10] When the width D of the phase distribution information display surface of the spatial phase modulation element, the number of pixel columns N of the image to be displayed, and the pitch between the sections constituting the spatial phase modulation element are P [Number 24]

3. The spatial phase modulation element according to claim 1, wherein the relational expression of N is satisfied.

 [1 1] The pitch between the sections constituting the spatial phase modulation element is 6.4 m to 3.2 m.

 3. The spatial phase modulation element according to claim 1, wherein the spatial phase modulation element is provided.

[12] entering one or more illumination lights from the light source into one or more spatial phase modulation elements;

 A spatial phase distribution information processing step of processing video data for phase modulating the illumination light and displaying it as spatial phase distribution information on the spatial phase modulation element; and using the spatial phase distribution information, the spatial phase modulation information A step of emitting diffracted light from the illumination light incident on the element, and separating the diffracted light and 0th-order diffracted light at an emission angle;

 Shielding the zero-order diffracted light using a trap;

 Projecting the diffracted light generated by the spatial phase modulation element and separated from the zero-order diffracted light onto a screen;

 including,

 A video display method characterized by the above.

 [13] The spatial phase distribution information processing step comprises:

 Superimposing random phase information on the video data; Fourier transforming the video data to which the random phase information is added to obtain spatial phase distribution information;

 A correction processing step for correcting the spatial phase distribution information based on an optical arrangement;

An SPM driver that displays the corrected spatial phase distribution information on the spatial phase modulator. The video display method according to claim 12, further comprising: a moving step.

[14] As the spatial phase modulation element, a transmission type spatial phase modulation element or a reflection type spatial phase modulation element is used.

 The video display method according to claim 12, wherein:

[15] a substrate including a switch circuit for driving each section for performing phase modulation or phase modulation;

 A plurality of elastic members respectively disposed at positions corresponding to a plurality of sections on the substrate; a plurality of electrodes disposed at positions below the respective elastic members;

 A mirror that is connected to the plurality of elastic members and deforms at a position corresponding to the electrode by applying a voltage to the electrode;

 A projection apparatus comprising: a spatial phase modulation element configured by:

[16] a substrate including a switch circuit for driving each section for performing phase modulation or phase modulation;

 A plurality of elastic members respectively disposed at positions corresponding to a plurality of sections on the substrate; a plurality of electrodes disposed at positions below the plurality of elastic members; and a voltage applied to the electrodes connected to the respective elastic members. A plurality of mirrors whose height positions change when applied

 A projection apparatus comprising: a spatial phase modulation element configured by:

[17] A condensing lens that condenses the illumination beam;

 A trap that blocks 0th-order diffracted light;

 The projection apparatus according to claim 15, further comprising:

 [18] Spatial filter,

 A collimator,

 The projection apparatus according to claim 17, further comprising:

[19] a light source; A spatial phase modulation element;

 A condensing lens that condenses the zero-order diffracted light generated by the spatial phase modulation element so as to converge;

 A trap for shielding the 0th-order diffracted light;

 A projection apparatus comprising:

 [20] With respect to the number of pixel columns N of the image to be displayed,

 [Equation 25]

Including the spatial phase modulation element satisfying a relational expression of M> 2N,

 The projection device according to claim 15 or claim 16, wherein:

[21] With respect to the number N of pixel columns of an image to be displayed, the number of partition columns of the spatial phase modulation element is

 [Equation 26]

Including the spatial phase modulation element satisfying the relational expression of M≥N,

 The projection device according to claim 15 or claim 16, wherein: When the width D of the phase distribution information display surface of the spatial phase modulation element, the number of pixel columns N of the image to be displayed, and the pitch between the sections constituting the spatial phase modulation element are P

[Equation 27] Including the spatial phase modulation element that satisfies the following relational expression:

 The projection device according to claim 15 or claim 16, wherein:

[23] When the width D of the phase distribution information display surface of the spatial phase modulation element, the number of pixel columns N of the image to be displayed, and the pitch between the sections constituting the spatial phase modulation element are P

[Equation 28]

Including the spatial phase modulation element satisfying the relational expression of N,

 The projection device according to claim 15 or claim 16, wherein:

[24] The pitch between the sections constituting the spatial phase modulation element is 6.4 m to 3.2 m.

 Including the spatial phase modulation element,

 The projection device according to claim 15 or claim 16, wherein: