WO2008048312A3 - System for and method of investigating the exact same point on a sample substrate with multiple wavelengths - Google Patents

System for and method of investigating the exact same point on a sample substrate with multiple wavelengths Download PDF

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Publication number
WO2008048312A3
WO2008048312A3 PCT/US2006/047654 US2006047654W WO2008048312A3 WO 2008048312 A3 WO2008048312 A3 WO 2008048312A3 US 2006047654 W US2006047654 W US 2006047654W WO 2008048312 A3 WO2008048312 A3 WO 2008048312A3
Authority
WO
WIPO (PCT)
Prior art keywords
investigating
exact same
same point
multiple wavelengths
sample substrate
Prior art date
Application number
PCT/US2006/047654
Other languages
French (fr)
Other versions
WO2008048312A2 (en
Inventor
Martin M Liphardt
Blaine D Johs
Craig M Herzinger
Ping He
Christopher A Goeden
John A Wollam
James D Welch
Original Assignee
J A Woollam Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/447,247 external-priority patent/US7522279B1/en
Application filed by J A Woollam Co Inc filed Critical J A Woollam Co Inc
Publication of WO2008048312A2 publication Critical patent/WO2008048312A2/en
Publication of WO2008048312A3 publication Critical patent/WO2008048312A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/213—Spectrometric ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

Disclosed are system for and method of analyzing asample at substantially the exact same small spot point on a sample with a plurality of wavelengths.
PCT/US2006/047654 2006-06-05 2006-12-14 System for and method of investigating the exact same point on a sample substrate with multiple wavelengths WO2008048312A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/447,247 2006-06-05
US11/447,247 US7522279B1 (en) 2000-05-30 2006-06-05 System for and method of investigating the exact same point on a sample substrate with multiple wavelengths

Publications (2)

Publication Number Publication Date
WO2008048312A2 WO2008048312A2 (en) 2008-04-24
WO2008048312A3 true WO2008048312A3 (en) 2008-10-30

Family

ID=39314547

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/047654 WO2008048312A2 (en) 2006-06-05 2006-12-14 System for and method of investigating the exact same point on a sample substrate with multiple wavelengths

Country Status (1)

Country Link
WO (1) WO2008048312A2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5936734A (en) * 1997-12-23 1999-08-10 J.A. Woollam Co. Inc. Analysis of partially polarized electromagnetic radiation in ellipsometer and polarimeter systems
US6804004B1 (en) * 1998-03-03 2004-10-12 J. A. Woollam Co., Inc Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetry
US6859278B1 (en) * 2001-01-16 2005-02-22 J.A. Woollam Co. Inc. Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems
US6982792B1 (en) * 2000-03-21 2006-01-03 J.A. Woollam Co. Inc Spectrophotometer, ellipsometer, polarimeter and the like systems

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5936734A (en) * 1997-12-23 1999-08-10 J.A. Woollam Co. Inc. Analysis of partially polarized electromagnetic radiation in ellipsometer and polarimeter systems
US6804004B1 (en) * 1998-03-03 2004-10-12 J. A. Woollam Co., Inc Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetry
US6982792B1 (en) * 2000-03-21 2006-01-03 J.A. Woollam Co. Inc Spectrophotometer, ellipsometer, polarimeter and the like systems
US6859278B1 (en) * 2001-01-16 2005-02-22 J.A. Woollam Co. Inc. Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems

Also Published As

Publication number Publication date
WO2008048312A2 (en) 2008-04-24

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