WO2008046048A3 - Slit valve door assembly - Google Patents

Slit valve door assembly Download PDF

Info

Publication number
WO2008046048A3
WO2008046048A3 PCT/US2007/081243 US2007081243W WO2008046048A3 WO 2008046048 A3 WO2008046048 A3 WO 2008046048A3 US 2007081243 W US2007081243 W US 2007081243W WO 2008046048 A3 WO2008046048 A3 WO 2008046048A3
Authority
WO
WIPO (PCT)
Prior art keywords
slit valve
door assembly
valve door
door
recess
Prior art date
Application number
PCT/US2007/081243
Other languages
French (fr)
Other versions
WO2008046048A2 (en
Inventor
Julian F Kamibayashiyama
Michael P Cardinal
Original Assignee
Parker Hannifin Corp
Julian F Kamibayashiyama
Michael P Cardinal
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Parker Hannifin Corp, Julian F Kamibayashiyama, Michael P Cardinal filed Critical Parker Hannifin Corp
Publication of WO2008046048A2 publication Critical patent/WO2008046048A2/en
Publication of WO2008046048A3 publication Critical patent/WO2008046048A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0263—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor using particular material or covering means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Sliding Valves (AREA)

Abstract

A slit valve door assembly comprises a door (64) having a recess (68) in a front face (70) and an annular seal (72) peripherally bounding the recess, and an insert (66) disposed in the recess and having a front face processed separately from the door. The door and insert may be manufactured separate from one another whereby they may be subjected to processes that otherwise may be detrimental to the other part.
PCT/US2007/081243 2006-10-12 2007-10-12 Slit valve door assembly WO2008046048A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US82925806P 2006-10-12 2006-10-12
US60/829,258 2006-10-12

Publications (2)

Publication Number Publication Date
WO2008046048A2 WO2008046048A2 (en) 2008-04-17
WO2008046048A3 true WO2008046048A3 (en) 2008-06-26

Family

ID=39145024

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/081243 WO2008046048A2 (en) 2006-10-12 2007-10-12 Slit valve door assembly

Country Status (1)

Country Link
WO (1) WO2008046048A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5592727B2 (en) * 2010-08-05 2014-09-17 日本バルカー工業株式会社 Seal plate and seal material used therefor
WO2016156001A1 (en) * 2015-03-27 2016-10-06 Vat Holding Ag Valve, in particular vacuum valve
WO2024083493A1 (en) * 2022-10-18 2024-04-25 Asml Netherlands B.V. A slit valve assembly for use in a vacuum chamber, for example in a vacuum chamber of a substrate processing system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1179835A2 (en) * 1995-03-31 2002-02-13 Applied Materials, Inc. Improved slit valve door and method of assembling
WO2003064900A1 (en) * 2002-01-31 2003-08-07 Dupont Dow Elastomers L.L.C. Gate valve seal assembly
WO2007149530A2 (en) * 2006-06-21 2007-12-27 Greene, Tweed Of Delaware, Inc. Slit valve door

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1179835A2 (en) * 1995-03-31 2002-02-13 Applied Materials, Inc. Improved slit valve door and method of assembling
WO2003064900A1 (en) * 2002-01-31 2003-08-07 Dupont Dow Elastomers L.L.C. Gate valve seal assembly
WO2007149530A2 (en) * 2006-06-21 2007-12-27 Greene, Tweed Of Delaware, Inc. Slit valve door

Also Published As

Publication number Publication date
WO2008046048A2 (en) 2008-04-17

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