WO2008021144A3 - Mems comb drive actuators and method of manufacture - Google Patents

Mems comb drive actuators and method of manufacture Download PDF

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Publication number
WO2008021144A3
WO2008021144A3 PCT/US2007/017649 US2007017649W WO2008021144A3 WO 2008021144 A3 WO2008021144 A3 WO 2008021144A3 US 2007017649 W US2007017649 W US 2007017649W WO 2008021144 A3 WO2008021144 A3 WO 2008021144A3
Authority
WO
WIPO (PCT)
Prior art keywords
channels
fingers
actuator
movable
support layer
Prior art date
Application number
PCT/US2007/017649
Other languages
French (fr)
Other versions
WO2008021144A2 (en
Inventor
Gary J O'brien
Original Assignee
Univ Arizona
Gary J O'brien
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Arizona, Gary J O'brien filed Critical Univ Arizona
Publication of WO2008021144A2 publication Critical patent/WO2008021144A2/en
Publication of WO2008021144A3 publication Critical patent/WO2008021144A3/en

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H03H9/02275—Comb electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02338—Suspension means
    • H03H9/02362—Folded-flexure

Abstract

A micro electromechanical actuator 130 as described herein comprises a support layer 101 and at least one movable comb 110 moun resiliently on the support layer. Each movable comb 110 has a plurality of substantially parallel movable fingers. These parallel fing pass through channels 104 that are fixed with respect to the support layer. An AC and/or DC electrical potential difference can be applied between the channels 104 and the movable fingers 110. Electrostatic forces resulting from this potential difference are capab of moving the fixed fingers through a range of motion. Over at least a portion of this range of motion, some of the movable fingers extend beyond the fixed channels. In designing such a MEMS actuator, the lengths of the fingers and/or channels can be selected by taking into consideration the degreeto which different fingers extend beyond the channels in different portions of the range of motio This allows tailoring the driving force on the actuator as a function not only of the driving voltage, but also as a function of the displacement of the actuator.
PCT/US2007/017649 2006-08-08 2007-08-08 Mems comb drive actuators and method of manufacture WO2008021144A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US83625806P 2006-08-08 2006-08-08
US60/836,258 2006-08-08

Publications (2)

Publication Number Publication Date
WO2008021144A2 WO2008021144A2 (en) 2008-02-21
WO2008021144A3 true WO2008021144A3 (en) 2008-10-16

Family

ID=39082585

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/017649 WO2008021144A2 (en) 2006-08-08 2007-08-08 Mems comb drive actuators and method of manufacture

Country Status (1)

Country Link
WO (1) WO2008021144A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108226235A (en) * 2016-12-21 2018-06-29 中国矿业大学 A kind of capacitive MEMS gas sensor

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI360516B (en) 2008-05-09 2012-03-21 Pixart Imaging Inc In-plane sensor and method for making same
CN101590995B (en) * 2008-05-27 2012-09-05 原相科技股份有限公司 Same plane sensor
CN102616728B (en) * 2008-10-29 2015-07-01 原相科技股份有限公司 Micro-electromechanical system element, out-of-plane sensor and manufacture method of micro-electromechanical system element
US20120146452A1 (en) * 2010-12-10 2012-06-14 Miradia, Inc. Microelectromechanical system device and semi-manufacture and manufacturing method thereof
TWI621582B (en) * 2015-08-14 2018-04-21 先進微系統科技股份有限公司 Comb-shaped actuator
DE102017217009B3 (en) 2017-09-26 2018-07-19 Robert Bosch Gmbh MEMS device and corresponding operating method
US11287441B2 (en) 2019-11-07 2022-03-29 Honeywell International Inc. Resonator including one or more mechanical beams with added mass
DE102020210119A1 (en) 2020-08-11 2022-02-17 Robert Bosch Gesellschaft mit beschränkter Haftung Drive structure, micromechanical system, method for producing a micromechanical system, method for operating a micromechanical system
US20220252636A1 (en) * 2021-02-05 2022-08-11 Kionix, Inc. Accelerometer apparatuses and systems

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5491604A (en) * 1992-12-11 1996-02-13 The Regents Of The University Of California Q-controlled microresonators and tunable electronic filters using such resonators
US5537083A (en) * 1992-12-11 1996-07-16 Regents Of The University Of California Microelectromechanical signal processors
US5780948A (en) * 1995-10-28 1998-07-14 Samsung Electronics Co., Ltd. Vibratory structure, method for controlling natural frequency thereof and sensor and actuator adopting the vibratory structure
US6307298B1 (en) * 2000-03-20 2001-10-23 Motorola, Inc. Actuator and method of manufacture

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5491604A (en) * 1992-12-11 1996-02-13 The Regents Of The University Of California Q-controlled microresonators and tunable electronic filters using such resonators
US5537083A (en) * 1992-12-11 1996-07-16 Regents Of The University Of California Microelectromechanical signal processors
US5780948A (en) * 1995-10-28 1998-07-14 Samsung Electronics Co., Ltd. Vibratory structure, method for controlling natural frequency thereof and sensor and actuator adopting the vibratory structure
US6307298B1 (en) * 2000-03-20 2001-10-23 Motorola, Inc. Actuator and method of manufacture

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108226235A (en) * 2016-12-21 2018-06-29 中国矿业大学 A kind of capacitive MEMS gas sensor
CN108226235B (en) * 2016-12-21 2020-12-15 中国矿业大学 Capacitive MEMS gas sensor

Also Published As

Publication number Publication date
WO2008021144A2 (en) 2008-02-21

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