WO2007149530A3 - Slit valve door - Google Patents

Slit valve door Download PDF

Info

Publication number
WO2007149530A3
WO2007149530A3 PCT/US2007/014469 US2007014469W WO2007149530A3 WO 2007149530 A3 WO2007149530 A3 WO 2007149530A3 US 2007014469 W US2007014469 W US 2007014469W WO 2007149530 A3 WO2007149530 A3 WO 2007149530A3
Authority
WO
WIPO (PCT)
Prior art keywords
door
slit valve
interior surface
valve door
redirect
Prior art date
Application number
PCT/US2007/014469
Other languages
French (fr)
Other versions
WO2007149530A2 (en
Inventor
Carmin Quartapella
Timothy Edwards
Original Assignee
Greene Tweed Inc
Carmin Quartapella
Timothy Edwards
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Greene Tweed Inc, Carmin Quartapella, Timothy Edwards filed Critical Greene Tweed Inc
Publication of WO2007149530A2 publication Critical patent/WO2007149530A2/en
Publication of WO2007149530A3 publication Critical patent/WO2007149530A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0263—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor using particular material or covering means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

A slit valve is provided which includes a door that has an interior surface configured to disrupt or redirect the direct flow of harmful chemicals, such as plasma, from directly flowing towards the seals of the slit valve and thus increasing the seal's life cycle by providing an interior surface that extends at least partially inwardly into the door and which can be configured to have a contour or texture on an interior surface of the door. Slit valve doors having target materials on an interior surface of the door are also provided so as to attract and/or render harsh chemicals less reactive, neutral, diverted or absorbed prior to contacting a sealing member within the door.
PCT/US2007/014469 2006-06-21 2007-06-21 Slit valve door WO2007149530A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US81553706P 2006-06-21 2006-06-21
US60/815,537 2006-06-21

Publications (2)

Publication Number Publication Date
WO2007149530A2 WO2007149530A2 (en) 2007-12-27
WO2007149530A3 true WO2007149530A3 (en) 2008-07-24

Family

ID=38834126

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/014469 WO2007149530A2 (en) 2006-06-21 2007-06-21 Slit valve door

Country Status (1)

Country Link
WO (1) WO2007149530A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008046048A2 (en) * 2006-10-12 2008-04-17 Parker-Hannifin Corporation Slit valve door assembly

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3088705A (en) * 1960-07-01 1963-05-07 Blakeborough & Sons Ltd J Wedge type valves for fluids
US4141478A (en) * 1976-05-08 1979-02-27 Stopinc Aktiengesellschaft Slide plate assembly
EP1028278A2 (en) * 1999-02-09 2000-08-16 Applied Materials, Inc. Valve seal

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3088705A (en) * 1960-07-01 1963-05-07 Blakeborough & Sons Ltd J Wedge type valves for fluids
US4141478A (en) * 1976-05-08 1979-02-27 Stopinc Aktiengesellschaft Slide plate assembly
EP1028278A2 (en) * 1999-02-09 2000-08-16 Applied Materials, Inc. Valve seal

Also Published As

Publication number Publication date
WO2007149530A2 (en) 2007-12-27

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