WO2007144330A1 - Solid-state actuator drive apparatus - Google Patents

Solid-state actuator drive apparatus Download PDF

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Publication number
WO2007144330A1
WO2007144330A1 PCT/EP2007/055730 EP2007055730W WO2007144330A1 WO 2007144330 A1 WO2007144330 A1 WO 2007144330A1 EP 2007055730 W EP2007055730 W EP 2007055730W WO 2007144330 A1 WO2007144330 A1 WO 2007144330A1
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WO
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Patent type
Prior art keywords
solid
drive
state
drive body
shaft
Prior art date
Application number
PCT/EP2007/055730
Other languages
German (de)
French (fr)
Inventor
Joachim Heinzl
Helmar Liess
Bernhard Gottlieb
Andreas Kappel
Tim Schwebel
Carsten Wallenhauer
Original Assignee
Siemens Aktiengesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date

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Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/105Cycloid or wobble motors; Harmonic traction motors

Abstract

The invention relates to a solid-state actuator drive apparatus comprising a drive body (3; 3°; 3*; 3°*), comprising a circular drive body opening (5) in the drive body, comprising a shaft (4) at least leading into the drive body opening, wherein a shaft diameter of the shaft (4) is smaller than an opening diameter of the drive body opening (5), and wherein the shaft (4) bears against a wall of the drive body opening (5) in a frictionally locking and/or positively locking manner during operation, and comprising at least two solid-state actuators (1, 2) which can be driven for expansion and/or for contraction along their longitudinal axis (1), wherein the at least two solid-state actuators are coupled or fixed to the drive body, to drive the latter relative to a housing (6), such that the shaft (4) can be caused to rotate by means of a displacement movement of the drive body, wherein the longitudinal axis (1) of at least one of the at least two solid-state actuators (1, 2) is oriented at an angle (α) of between 44° and 135° with respect to a radial direction (r) of the drive body opening (5) at the drive body (3; 3°; 3*, 3°*).

Description

description

Solid-state drive device

The invention relates to a solid-state actuator drive device ¬ with the preamble features of claim loan. 1

EP 1098429 Bl discloses a solid-state actuator drive device in the manner of a rotary drive, in which a ring-shaped ¬ driving body 3 by means of electromechanical solid state actuators 1, 2 is actuated, as is Darge ¬ represents in Fig. 5. A shaft 4 performs Antriebskörperöff ¬ voltage 5, the shaft 4 bears frictionally against a wall of the circular drive body opening. 5 The Festkörpe ¬ raktoren 1, 2 move the drive body 3 in an orbital motion, which causes a rotation of the shaft. 4

For the solid-state actuators 1, 2 in particular, provides a use of mass-produced in bulk for injection and, therefore, inexpensively available piezoelectric multilayer actuators multiplicity of. In the illustrated embodiment, the two solid-state actuators 1, 2 as a linear drive elements with their ends remote from the drive body 3 En- de to a housing 6 from support. At the opposite end, the solid-state actuators 1, 2 are connected mechanically rigidly with their end faces with the mechanically rigid manufactured drive body. 3 Therefore, the linear driving members act upon electrical activation by the mediation of the drive body 3 immediate bar on which included the drive body 3 shaft 4. The shaft 4 is axially supported for rotation about its axis of symmetry which is perpendicular to the plane of the drawing, but in any direction in space displaceable in the housing. 6 With appropriate electrical control of the solid-state actuators 1, 2 of arrival is excited driving body 3 by the solid-state actuators 1, 2 to a circular sliding movement around the shaft 4, wherein the surface of the drive body opening rolls 5 and circular hole on the cylindrical outer surface of the shaft 4 and thereby producing a rotation of the shaft. 4 An engaging on the shaft 4 load torque is transmitted via the almost linear contact zone of the shaft 4 on the ring as acting tangentially to the shaft longitudinal force and through the intermediary of mechanically rigid drive body 3 via the solid-state actuators 1, 2 on the ring facing away from the end of the solid-state actuators 1, 2 from only indicated outlined housing 6 was added. In high-torque rotary drives therefore have considerable torques of the solid-state actuators 1, be conveyed to the housing 6. 2 Specifically, PMA (Piezoelectric multilayer actuator / Rather piezoelectric multilayer actuators) are composed of brittle ceramic materials and, therefore, only very limited to convey able torques, ie bending forces between the drive element 3 and the Gehäu- se. 6

Damaging bending stresses on the solid-state actuators can be reduced by increasing the solid-state actuators are moved in the radially outward direction and thus the distance to the shaft axis is enlarged, wherein the compound of the ring facing the end of the solid-state actuators with the drive body by mechanically rigid connecting pieces sicherge ¬ represents is. The torque load is calculated in terms of amount as a tangential force x lever arm. Would therefore have to halving the bending stress of the solid-state actuators tion their distance to the shaft axis are approximately doubled. A demand for a compact design can not be fulfilled in this way. Another approach to reduce the bending stresses is> 2 uniformly arranged in the circumferential direction in the solid-state actuators using n. The bending stress of each solid-state actuator decreases in proportion to l / n at a constant ge ¬ haltenem load torque on the shaft. Egg ¬ ne significant reduction of bending stress is reached in this way only by many linear actuators, making this solution virtually eliminated for cost reasons.

In one embodiment, which is outlined with reference to FIG. 6, damaging bending stresses are on the Festkörperakto- ren 1, 2 is reduced. In this embodiment, each two associated solid-state actuators 1, 2 engage with mutually parallel longitudinal axes 1 instead of only one solid-state actuator 1, 2 on each side of Antriebskör- pers 3 at. The associated solid-state actuators 1, 2 are moved laterally from a radial direction r outwardly apart. In this arrangement, a total of four solid-state actuators 1, 2 are connected as drive elements frontally with the driving body 3, this arrangement has the same symmetry properties, such as the arrangement of FIG. 5. The transverse distance d between the pairs and symmetrically arranged solid-state actuators 1, 2, transmitted from the shaft 4 to the actuator body 3 load ¬ torque mainly by innocuous PMA pairs is as longitudinal forces in the PMA of the drive member 3 to the housing 6 transmitted, whereby the bending stress can be reduced and hence higher torques are achievable. Load changes on the shaft 4 cause proportional thereto longitudinal force changes in the PMA, which with- means of the direct piezoelectric effect, charges are generated that can be detected in an electronic circuit and utilized as torque information.

The object of the invention is to propose a Festkörperak- gate drive apparatus which requires less installation space and in which lower bending stress acting on the solid-state actuators. The solid-state actuators should preferably be designed as a solid-state linear actuators for use as linear actuators in PMA construction.

This object is achieved by a solid-state actuator drive ¬ device having the features of claim. 1 Advantageous embodiments are subject matter of dependent claims.

Is preferred accordingly, a solid-state actuator drive ¬ device with a drive body, with a circular drive body opening in the actuator body, with an at least leading into the drive body opening shaft, wherein a shaft diameter of the shaft is smaller than an opening diameter of the drive body opening, and wherein the shaft in operation frictionally and / or positively to a WAN, the drive body opening fertil rests, and having at least two solid-state actuators that can be controlled, this drive element in particular relative to the expansion and / or contraction along its longitudinal axis, wherein the at least two solid-state actuators are coupled or fastened to the drive body to driving a casing, so that by a displacement movement of the drive body, the shaft in rotation can be displaced, and wherein the longitudinal axis of at least one of the at least two solid-state actuators at an angle between 45 ° and 1 is oriented 35 ° to a radial direction of the opening at the drive Antriebskörper- body.

In particular, a solid-state actuator drive ¬ apparatus in which the longitudinal axis of the solid-state actuator in a plane being ¬ arranged perpendicular to the shaft axis and / or perpendicular to the drive body opening axis of the drive body opening is preferred. In principle, any reactions in the large ¬ SEN angular range of 45 ° to 135 ° are advantageous to implement. However, angular ranges with egg ¬ nem angle of approximately 90 ° to the radial direction of the Antriebskör- perÖffnung are thus particularly preferred. Where this angle range is given, of course, the active components of the forces and the direction of play are to be understood the orientations of the longitudinal axis, which have in the plane perpendicular to Antriebskörper- and / or shaft axis. Regardless of theoretical additional power components and can exist orientations at an angle to the plane.

In particular, a solid-state actuator drive device ¬, wherein at least one of the solid-state actuators is disposed outside an orbiting in a radial direction to Antriebskörperöff ¬ voltage outer wall of the drive body is preferred. This allows a flat in the axial direction Bauwei ¬ se. In particular, preferably a solid-state actuator drive ¬ device, disposed adjacent at least one of the solid-state actuators to a side wall of the drive body with the side wall pierced in one of the shaft or one parallel thereto drive body opening axis E- bene is clamped. This enables a radial Rich ¬ tung particularly space-saving design.

It is preferred here when the at least one of the Festkörpe ¬ raktoren on the side wall being ¬ arranged laterally of the drive body and at least one further solid-state actuator at the opposite side to the side of the drive body is arranged.

When the two solid-state actuators adjacent to each other is preferably additionally or alternatively, are arranged on the same side wall on the drive body.

In particular, a solid-state actuator drive device ¬, wherein the second solid-state actuator is arranged to the adjacent the solid side wall opposite side wall adjacent is preferred.

In particular, a solid-state actuator drive ¬ device to at least one of the two solid-state actuators a substantially parallel longitudinal axis extending with this second solid-state actuator is arranged at a distance in, wherein the respective parallel arranged solid-state actuators are arranged on opposite sides from view of the drive body opening is preferably ,

In particular, a solid-state actuator drive device ¬, wherein at least one of the solid-state actuators is coupled or in the direction of its longitudinal axis for force and / or movement transmission to a projecting from the actuator body portion attached is preferred. In particular, a solid-state actuator drive ¬ apparatus in which a longitudinal axis of at least one of the solid-state actuators in a plane parallel to a wall of the drive body opening is preferred.

Such a solution to minimize the bending stress on the PMA advantageously enables the development of particularly TORQUE ¬ ment strong rotation drive means of PMA. An advantageous realizable arrangement of the solid-state actuators in the form of solid state linear actuators with a line of action parallel to the drive body outer surfaces and a large transverse distance from the shaft axis enables the realization of high torque festkörperaktorischer rotary drives and improves the ability of the torque detection. Furthermore, the drive obtained by the different possible arrangements of particular below and above the drive body a compact radial design or a compact axial design.

Higher torques are achievable by the tangential arrangement of the designed as a solid-state actuators drive elements. On the drive elements act by attacking rotary ¬ moments no or hardly any bending loads. The drive elements are advantageously loaded only with the train or at a pressure acting torque. This is a simplified and even directional torque evaluation allows. Depending on the length of the solid-state actuators so that the shaft can be made larger and thus a ¬ An operating with a very high torque at low speed reali be ¬ Siert. A radially more compact design of the drive is thus made possible. The arrangement of the solid-state actuators above and below the drive member results in a smaller radial dimension. By various arrangements, the axial and radial dimensions of the drive can be changed depending on the application.

The preferred embodiments further develop the principle of the enlarged transverse distance between the line of action of the linear actuators or solid-state actuators by a shaft axis of the shaft to reduce the bending stress of the solid-state actuators. By laterally arranged in the circumferential direction, or solid-state actuators, the transverse distance between the line of action of the individual solid-state actuator to the shaft axis and to the drive body opening axis of the drive body is ximiert by mass. The line of action of the solid-state actuators in this case runs parallel to the adjacent drive body outer surfaces.

Thus, in contrast to the known arrangements WE sentlich higher torques are transmitted. By an additionally possible enlargement of the shaft diameter to a smaller building gauge ¬ reason for not more radially projecting from the actuator body solid-state actuators, an actuator with a very high torque is produced at the same time nied- engined speed.

By increasing the transverse distance between the line of action to the shaft axis also are occurring harmful bending stresses in the solid-state actuators strongly in favor of harmless for the solid-state actuators tension / compression

Charges reduced. This has advantages in terms of their life and in the use of direct Piezoef- fekts the piezoceramic. This effect makes it possible to connect back to the occurring loads of the ceramic during operation. A signal by a pure

Train / pressure stress in the piezoceramic arises may in this case be much more easily and accurately evaluated. In addition, the effective direction of the load torque can be determined who ¬.

In addition to solid-state actuators in PMA design, embodiments with other types of solid-state actuators can be used, for example, magnetostrictive, electrostrictive or electro ¬ magnetically acting solid-state actuators.

An embodiment is explained below with reference to the drawing. In the drawings: Figure 1 shows components of a first preferred solid-state drive device in sectional view.

Fig. 2 components of an alternative embodiment, in section,

Fig. 3 components of a further alternative embodiment in perspective view;

Fig. 4 components of a still further alternative embodiment,

Fig. 5 components of an embodiment according to the prior art, and

Fig. 6 components of a further embodiment according to the prior art.

As apparent from the sectional illustration according to Fig. 1, in a first preferred embodiment of the principle of the enlarged transverse distance between the line of action of a solid-state actuator 1, 2 to a shaft axis z4 or to a drive body opening axis z on a rotary drive with two designed as linear actuators solid-state actuators 1, 2 is applied.

The central component is a driving body 3, through which a drive body opening 5 executes. a driving body 3 having a rectangular or quadratic cross-sectional view perpendicular to the drive body opening axis z, which leads as the central axis by the drive body opening 5 is particularly preferred. In the drive body opening 5 a shaft 4 leads into at least. Preferably, the shaft 4 leads completely through the drive body opening 5, so as to drive the body 3 can be supported in the direction of its shaft axis z4 both sides. The shaft axis z4 is parallel to the drive body opening axis z ge ¬ into a loading ¬ operating position, that is laterally offset from this. The offset is DER art chosen such that the shaft 4 rests with its outer periphery ¬ form-fit and / or frictionally on an inside wall of the drive body opening.

, Y to enable the solid-state actuators 1, 2, which serve to drive the body 3 relative to a housing 6 in a plane x perpendicular to the drive body opening axis z in a translatori ¬ specific movement, so that thereby the shaft 4 z4 in rotation about the shaft axis is added, disposed laterally outside the actual driving body 3 in the first embodiment. A respective longitudinal axis 1 of the solid-state actuators 1, 2, along which extend the solid-state actuators 1, 2 or contract thereby is arranged preferably parallel to the course of an adjacent drive-body outer wall. 7

In the direction of the longitudinal axis 1 of the solid-state actuators 1, 2 is coupled to a first end-side portion 9 in a protruding from the actuator body 3, Section 9 or loading cements are a force or movement of the front end portion 9 of the solid-state actuator 1, 2, on the to transmit drive ¬ body 3 projecting portion. 8 Such movement is transmitted through the drive protruding from the body 3 portion 8 to the drive body. 3 In the region of the end face portion 9 are opposite end of the solid-state actuators 1, 2 is connected to the housing 6, being outlined in the drawings merely schematically wall sections of such housing. 6 Characterized in that the at ¬ the solid-state actuators 1, 2 are arranged at an angle of 90 ° vorzugswei- se relative to each other on the drive element 3, it can be displaced in translational motion.

Compared with well-known embodiments, the longitudinal extending axis 1 of the solid-state actuators 1, 2 is thus not in a radial direction r from the perspective of the drive body opening axis z or vertically at an angle of less than 45 ° to the radial direction r, but ideally, that is at an angle α of 90 ° to the radial direction r of the Antriebskörper- opening axis z and possibly also at an angle between 45 ° and 135 ° to the radial direction r of the drive body opening axis z.

Compared to such an embodiment, various modifications are possible. For example, the drive body 3 need not necessarily have a square or square-shaped cross section. In principle, other shapes, examples of play annular arrays of the driving body mög ¬ Lich. In such a case, the projecting portions from the driving body would, if appropriate, in particular tangentially projecting correspondingly far in the lateral direction from an annular outer peripheral surface of the drive body. However, is of preferred an embodiment in which such protruding from the actuator body 3 portions 8 are formed as by ei ¬ ner drive body outer wall 7 is substantially perpendicular from ¬ standing short walls. In any case, ¬ the embodiments especially preferred in which the longitudinal axis 1 of the solid-state actuators 1, run 2 parallel to the circular surface of the drive body opening 5, so that the transverse distance between the line of action of the Festkörpe ¬ raktors 1, 2 to the shaft axis z4 or to Antriebskörperöff- voltage axis z is advantageously maximized.

With the reference to FIG. 1 outlined and more simply constructed embodiment 2, the solid-state actuator drive ¬ device in the circumferential direction and parallel to the drive body opening inner surfaces of the drive body opening 5 oriented lines of action of the solid-state actuators 1, only two such solid-state actuators 1, 2. By the known compared to embodiments larger lever arm, the drive having an L-shaped arrangement 5 can produce a larger torque of FIG.. In particular, in rotary drives with comparable in relation to the length of the solid-state actuators 1, 2 or a larger shaft diameter is relative to arrange- ments according to FIG. 5 or FIG. 6 compact, that is space-saving because it has smaller radial dimensions of such a solid-state actuator drive device.

Referring to Figs. 2 to 4 further particularly preferred embodiment are shown. is like reference numerals refer to thereby structurally and / or functionally the same components as with reference to FIG. 1 will be described. With an index ver ¬ provided reference numerals refer to in relation to the discussion of FIG. 1, various configurations.

Fig. 2 shows a second embodiment of a solid-state actuator drive device having a drive body 3 °, are arranged on the four solid-state actuators 1, 2. In the preferred embodiment shown, there are two solid-state actuators 1, 1 and 2, respectively, disposed with their longitudinal axes 2 1 parallel to each other. The respective parallel-aligned solid-state actuators 1, 1, and 2, 2 are thereby arranged adjacent to the opposite outer walls of the drive body 3 °.

Preferably, the parallel solid-state actuators 1, 1, and 2, 2 are respectively arranged in the same direction parallel to each other, so that a first end-side portion 9 ei ¬ nes each of the parallel solid-state actuators 1, 1, and 2, 2 in the same direction of the longitudinal axes 1 has.

Accordingly, further protruding from ¬ sections 8 ßenwand on driving body 3 ° in extension of the outlined with reference to FIG. 1 projecting portions 8 at the respective opposite Au 7 are arranged. At the back, ie attached to the drive body projecting from at ¬ 3 ° Section 8 end-face portion 9 of the solid-state actuators 1, 2 which in turn are attached to a respective element of the housing. 6

In principle, an anti-parallel arrangement of the arranged with mutually parallel longitudinal axes solid-state actuators may be provided. Fig. 3 shows a third, and still more space-saving arrangement in the radial direction of a Festkörperaktor- drive device. However, this requires a larger space in the axial direction of the drive body opening axis z. In this embodiment, the solid-state actuators 1, 2 is not adjacent to a radially surrounding the drive body opening 5 Außenwandungsabschnitt * 7 are arranged, but in an axially parallel direction of the drive body opening axis z disposed laterally of the drive body 3 *. In other Wor ¬ th, the solid-state actuators 1, 2 in parallel and adjacent to a side wall 10 of the driving body 3 arranged * which in a plane x, y for Antriebskörperöff- z voltage axis clamped and voltage axis by the Antriebskörperöff- is vertically penetrated z.

In the illustrated embodiment, again, two with their longitudinal axes parallel to each other 1 ¬ teach te solid-state actuators 1, 1, and 2, 2 arranged at reasonable drive twill 3 *. When the drive body protruding portion 8 * is now a continuous wall in the axially parallel direction of the drive body opening axis z, in the illustrated embodiment, instead of individual narrow sections. In order to enable such a space-saving design, the first group of the parallel solid-state actuators 1, 1 adjacent to a first in-plane x, y plane spanned side wall 10 of the drive body 3 * is arranged, while the second group of solid-state actuators 2, 2 to the in direction of the drive body opening axis for the opposite side wall is disposed adjacent.

Fig. 4 shows a fourth embodiment in which four solid-state actuators 1, 2 is also about the z axial direction of the drive body opening axis spaced sides tenwänden 10 of the drive body 3 ° are arranged adjacent to *. In this embodiment, two arranged with mutually perpendicular longitudinal axes 1 Festkörpe ¬ raktoren 1, 2 disposed on the one side, while the two further arranged also having mutually perpendicular longitudinal axes 1 solid-state actuators 1 arranged 2 on the opposite side of the drive body 3 ° * are. On each side of the drive body 3 ° * each, a drive pair of solid-state actuators 1, 2 is arranged in this embodiment. Each of the solid-state actuators 1, 2 is a projecting from the actuator body portion assigned to 8 ° *, which from the driving body 3 ° * projecting portions 8 ° * is preferably dimensioned just small and laterally from the side wall 10 of the drive body 3 ° * abste ¬ hen , Besides this embodiment, various other embodiments are possible in which, for example, all four solid-state actuators 1, 1, 2, 2 on only one side of the drive body 3 ° are arranged *.

Claims

claims
1. solid-state drive device
- a drive body (3; 3 °; 3 *; * 3 °), - a circular drive body opening (5) in the drive body,
- leading one in the drive body opening (5) shaft (4), wherein a shaft diameter of the shaft (4) is smaller than an opening diameter of the drive body opening (5) and wherein the shaft (4) in operation, frictionally and / or form ¬ manner on a abuts the wall of the drive body opening (5), and
- at least two solid-state actuators (1, 2) which are controlled for expansion and / or contraction along its longitudinal axis, wherein the at least two solid-state actuators on
Are coupled or attached to the drive body (5), the on ¬ drive body (5) so as to drive that by a displacement movement of the drive body, the shaft (4) is set into rotation, characterized in that
- the longitudinal axis (1) at least one of the at least two solid-state actuators (1, 2) at an angle (α) between 44 ° and 135 ° to a radial direction (r) of the drive body opening (5) on the drive bodies (3; 3 °; 3 is *, 3 * °) directed excluded.
2. solid-state actuator drive device according to claim 1, wherein the longitudinal axis (1) of the solid-state actuator (1, 2) in a plane (x, y) perpendicular to the shaft axis (Z4) and / or perpendicular to the drive body opening axis (z) of the drive body ¬ opening is arranged.
3 solid-state actuator drive device according to claim 1 or 2, wherein at least one of the solid-state actuators (1, 2) au- ßenseitig a in the radial direction (r) to the drive body opening (5) encircling outer wall (7) of the drive body (3) is arranged.
4. solid-state actuator drive device according to any preceding claim, wherein at least one of the solid-state actuators
(1, 2) to a side wall (10) of the drive body (3 *, 3 ° *) is disposed adjacent to said side wall in one of a drive body opening axis (z) pierced plane (x, y) is clamped.
5. solid-state actuator drive device according to claim 4, wherein at least one of the solid-state actuators (1) to the side wall (10) laterally of the drive body (3 *, 3 ° *) arranged adjacent and at least one further solid-state actuator (1, 2) is disposed; (3 * 3 * °) the sides of the drive body at the side opposite thereto.
6. solid-state actuator drive device according to claim 4 or
5, in which the two solid-state actuators (1, 2) to each other adjacent to the same side wall (10) on the drive bodies (3 ° *) are arranged.
7. solid-state actuator drive device according to claim 4 or 5, wherein the second solid-state actuator (2) to the the solid body (1) adjacent side wall (10) opposite side wall is disposed adjacent.
8. solid-state actuator drive device according to any preceding claim, extending a with parallel longitudinal axis (1) in the to at least one of the two solid-state actuators (1, 2) second solid-state actuator (1 or 2) is arranged spaced apart, wherein said parallel arranged solid-state actuators ( 1, 1 and 2, respectively, 2) are arranged on opposite sides of the drive body opening (5).
10 solid-state actuator drive device according to any preceding claim, wherein at least one of the solid-state actuators (1, 2) in the direction of its longitudinal axis (1) for force and / or movement transmission to a (by the drive body 3; 3 °; 3 *, 3 ° 8 * 8 * °) coupled or be ¬ solidifies; *) protruding section (8th
11 solid-state actuator drive device according to any preceding claim, wherein a longitudinal axis (1) at least one of the solid-state actuators (1, 2) is arranged parallel to a wall of the drive body opening (5) in one plane.
PCT/EP2007/055730 2006-06-13 2007-06-12 Solid-state actuator drive apparatus WO2007144330A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE102006027406.7 2006-06-13
DE200610027406 DE102006027406A1 (en) 2006-06-13 2006-06-13 Solid-state drive device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP20070765364 EP2027614A1 (en) 2006-06-13 2007-06-12 Solid-state actuator drive apparatus

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007023200B4 (en) * 2007-05-18 2011-07-28 Continental Automotive GmbH, 30165 Electromechanical motor, especially a piezoelectric micro-step drive

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03273871A (en) 1990-03-22 1991-12-05 Nec Corp Piezoelectric motor
US5079471A (en) 1990-06-04 1992-01-07 Martin Marietta Corporation High torque harmonic traction motor
EP1098429A2 (en) * 1999-11-03 2001-05-09 Siemens Aktiengesellschaft Electromechanical motor
WO2002043162A1 (en) * 2000-11-23 2002-05-30 Khaled Karrai Inertial rotation device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62152376A (en) * 1985-12-23 1987-07-07 Dainippon Screen Mfg Co Ltd Piezoelectric motor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03273871A (en) 1990-03-22 1991-12-05 Nec Corp Piezoelectric motor
US5079471A (en) 1990-06-04 1992-01-07 Martin Marietta Corporation High torque harmonic traction motor
EP1098429A2 (en) * 1999-11-03 2001-05-09 Siemens Aktiengesellschaft Electromechanical motor
WO2002043162A1 (en) * 2000-11-23 2002-05-30 Khaled Karrai Inertial rotation device

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EP2027614A1 (en) 2009-02-25 application
DE102006027406A1 (en) 2007-12-27 application

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