WO2007126245A1 - Apparatus for thinning a substrate and thinning system having the same - Google Patents

Apparatus for thinning a substrate and thinning system having the same Download PDF

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Publication number
WO2007126245A1
WO2007126245A1 PCT/KR2007/002044 KR2007002044W WO2007126245A1 WO 2007126245 A1 WO2007126245 A1 WO 2007126245A1 KR 2007002044 W KR2007002044 W KR 2007002044W WO 2007126245 A1 WO2007126245 A1 WO 2007126245A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
thinning
unit
securing part
rear surface
Prior art date
Application number
PCT/KR2007/002044
Other languages
French (fr)
Inventor
Ki-Jeong Lee
Original Assignee
Innoroot Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Innoroot Co., Ltd. filed Critical Innoroot Co., Ltd.
Publication of WO2007126245A1 publication Critical patent/WO2007126245A1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30604—Chemical etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02008—Multistep processes
    • H01L21/0201—Specific process step
    • H01L21/02016—Backside treatment

Definitions

  • the present invention relates to an apparatus for thinning a substrate and a thinning system having the apparatus. More particularly, the present invention relates to an apparatus for thinning a substrate by etching and a thinning system having the apparatus.
  • a semiconductor device has a multilayered structure so as to increase processing ability and memory capacity.
  • a substrate such as a semiconductor wafer, needs to be thin in order to form the multilayered structure.
  • Examples of a conventional method for thinning a substrate include a mechanical polishing method.
  • the substrate when the substrate is mechanically polished, the substrate may be frequently damaged. Thus, the mechanical polishing is unpreferable.
  • a chemical mechanical polishing (CMP) method using slurry and/or a dry polishing method using plasma gas may be used for thinning a substrate.
  • the chemical mechanical polishing (CMP) method has a relatively low polishing ability so that forming a substrate having a thickness of less than about 75 m is difficult.
  • the dry polishing method using plasma gas may not thin the substrate uniformly, and the substrate may be damaged by the plasma gas. Thus, the dry polishing may be not suitable for a practical application. Disclosure of Invention Technical Problem
  • the present invention provides an apparatus capable of easily thinning a substrate such as a semiconductor wafer.
  • the present invention also provides a system for thinning a substrate, the system having the above-mentioned apparatus to sequentially perform a plurality of processes.
  • an apparatus for thinning a substrate includes a securing part and an etching bath.
  • the securing part secures a substrate having a circuit pattern formed at a front surface of the substrate and a protection tape covering the circuit pattern.
  • the securing part is capable of rotating the substrate.
  • the etching bath receives an etching solution.
  • the substrate is dipped into the etching solution to etch a whole rear surface of the substrate so that the substrate is thinned.
  • the securing part is dipped into the etching solution in the etching bath so that the substrate is etched substantially uniformly.
  • the substrate may be easily thinned.
  • a system for thinning a substrate includes a first thinning unit, a second thinning unit and a first transferring unit.
  • the first thinning unit includes a first securing part and a grinder.
  • the first securing part secures a substrate having a circuit pattern formed at a front surface of the substrate and a protection tape covering the circuit pattern.
  • the grinder grinds a whole rear surface of the substrate.
  • the second thinning unit includes a second securing part and an etching bath receiving an etching solution.
  • the second securing part secures the substrate and rotates the substrate. The substrate is dipped into the etching solution to etch the whole rear surface of the substrate so that the substrate is thinned.
  • the first transferring unit transfers the substrate from the first securing part to the second securing part so that the substrate is transferred from the first securing part to the first transferring unit such that the protections tape of the substrate is exposed, and the substrate is transferred from the first transferring unit to the second securing part such that the rear surface of the substrate is exposed.
  • the substrate is grinded using the grinder of the first thinning unit, and the second securing part is dipped into the etching solution in the etching bath so that the substrate is etched substantially uniformly.
  • the substrate may be thinned easily.
  • a substrate is rotated using a securing part in an etching solution so that the substrate may be thinned uniformly.
  • FlG. 1 is a schematic plan view illustrating a system for thinning a substrate according to an exemplary embodiment of the present invention
  • FlG. 2 is a schematic cross-sectional view illustrating a first thinning member of the system for thinning a substrate according to an exemplary embodiment of the present invention
  • FlG. 3 is a schematic cross-sectional view illustrating a second thinning unit of the system for thinning a substrate according to an exemplary embodiment of the present invention
  • FlG. 1 is a schematic plan view illustrating a system for thinning a substrate according to an exemplary embodiment of the present invention
  • FlG. 2 is a schematic cross-sectional view illustrating a first thinning member of the system for thinning a substrate according to an exemplary embodiment of the present invention
  • FlG. 3 is a schematic cross-sectional view illustrating a second thinning unit of the system for thinning a substrate according to an exemplary embodiment of the present invention
  • FIGS. 5 and 6 are schematic cross-sectional views illustrating a first transferring unit of the system for thinning a substrate according to an exemplary embodiment of the present invention
  • FlG. 7 is a schematic cross-sectional view illustrating a cleaning unit and the first transferring unit of the system for thinning a substrate according to an exemplary embodiment of the present invention
  • FlG. 8 is a schematic cross-sectional view illustrating a ring-frame unit of the system for thinning a substrate according to an exemplary embodiment of the present invention.
  • FlG. 9 is a schematic cross-sectional view illustrating a substrate and a supporting tape combined with the substrate, the substrate being thinned by the system for thinning a substrate according to an exemplary embodiment of the present invention. Best Mode for Carrying Out the Invention
  • FlG. 1 is a schematic plan view illustrating a system for thinning a substrate according to an exemplary embodiment of the present invention.
  • a system 10 for thinning a substrate includes a first thinning unit
  • the system may further include a cleaning unit 300, a second transferring unit 500 and a ring-frame unit 600.
  • Each of the first thinning unit 100, the second thinning unit 200 and the ring- frame unit 600 may be an independent apparatus.
  • the second thinning unit 200 may be substantially the same as an apparatus for thinning a substrate, which will be explained later.
  • FlG. 2 is a schematic cross-sectional view illustrating a first thinning unit of the system for thinning a substrate according to an exemplary embodiment of the present invention.
  • the first thinning unit 100 includes a first securing part 110 and a grinder 120.
  • the first securing part 110 includes a chuck 112 on which a substrate 20 is disposed, a vacuum applying part 114 and a rotating part 116 providing the chuck 112 with a rotation force to rotate the chuck 112.
  • the substrate 20 is secured to the first securing part 110, and a rear surface of the substrate 20 is exposed.
  • the substrate 20 includes a circuit pattern formed on a front surface of the substrate 20 and a protection tape 22 covering the circuit pattern.
  • first securing part 110 may make contact with the front surface of the substrate 20.
  • the first thinning unit 100 uniformly grinds the whole rear surface of the substrate 20 secured to the first securing part 110 using the grinder 120. When the substrate is grinded, there is a possibility that the substrate may be damaged. Thus, the first thinning unit 100 may grind the substrate 20 to a predetermined extent such that the substrate 20 is not damaged.
  • FlG. 3 is a schematic cross-sectional view illustrating a second thinning unit of the system for thinning a substrate according to an exemplary embodiment of the present invention.
  • the second thinning unit 200 includes a second securing part 210 and an etching bath 220.
  • the second securing part 210 may be substantially the same as the first securing part 110 except for a size.
  • the second securing part 210 includes a chuck 212, a vacuum applying part 214 and a rotating part 216 providing the chuck 212 with a rotation force to rotate the chuck 212.
  • the substrate 20 is secured to the second securing part 210, and a rear surface of the substrate 20 is exposed.
  • the etching bath 220 receives an etching solution 222.
  • Examples of the etching solution 222 may include sulfuric acid, phosphoric acid, nitric acid, a sulfate, a phosphate, a nitrate, a fluoride, etc. These can be used alone or in a combination thereof.
  • the second thinning unit 200 dips the second securing part 210 into the etching solution 222 to etch the whole rear surface of the substrate 20 secured to the second securing part 210.
  • the substrate 20 may be easily thinned using the etching solution 222.
  • the substrate 20 dipped into the etching solution 222 may be dipped in a direction substantially parallel with a vertical direction.
  • the second thinning unit 200 rotates the substrate 20 in the etching solution 222 using the rotating part 216.
  • a rotating speed may be about 3 to about 60 rpm.
  • FlG. 4 is a schematic cross-sectional view illustrating a second thinning unit including a spray nozzle, of the system for thinning a substrate according to an exemplary embodiment of the present invention.
  • the second thinning unit 200 includes a spray nozzle 230.
  • the spray nozzle 230 sprays an etching solution to the substrate 20 when the substrate 20 is etched in the etching bath 220.
  • the spray nozzle 230 may face the rear surface of the substrate 20.
  • the spray nozzle 230 may be designed to change a disposition thereof. The disposition of the spray nozzle may have various changes and modifications that can be made by one ordinary skilled in the art. Thus, the spray nozzle 230 may hinder transferring the substrate 20 when the spray nozzle 320 is not used.
  • the spray nozzle 230 may uniformly etch the substrate 20. For example, when a central portion of the substrate 20 is etched more than a peripheral portion of the substrate 20, the spray nozzle 230 may spray more of the etching solution 222 to the peripheral portion of the substrate 20 than to the central portion of the substrate 20. In contrast, when the peripheral portion of the substrate 20 is etched more than the central portion of the substrate 20, the spray nozzle 230 may spray less of the etching solution 222 to the peripheral portion of the substrate 20 than to the central portion of the substrate 20.
  • the substrate 20 is transferred from the first thinning unit 100 to the second thinning unit 200.
  • the system 10 includes the first transferring unit 400.
  • the first transferring unit 400 transfers the substrate 20 from the first thinning unit 100 to the second thinning unit 200.
  • FIGS. 5 and 6 are schematic cross-sectional views illustrating a first transferring unit of the system for thinning a substrate according to an exemplary embodiment of the present invention.
  • the substrate 20 is transferred from the first securing part
  • the first transferring unit 400 may make contact with the rear surface of the substrate 20.
  • the first transferring unit 400 may secure the substrate 20 by applying a vacuum to the substrate 20.
  • the first transferring unit 400 may include a porous suction member making contact with the substrate 20.
  • the substrate 20 is transferred from the first transferringunit 400 to the second securing part 210 of the second thinning unit 200 so that the rear surface of the substrate 20 is exposed.
  • the system 10 uses the first transferring unit 400 so as to safely transferthe substrate
  • the substrate 20 is thinned through the grinding process and/or the etching process to have a very small thickness. Thus, thesubstrate 20 may be easily damaged when the substrate 20 is mechanically transferred.
  • the system 10 uses the first transferring unit 400 so as to safely transfer the substrate 20 and to easily proceed following processes.
  • FIG. 7 is a schematic cross-sectional view illustrating a cleaning unit and the first transferring unit of the system for thinning a substrate according to an exemplary embodiment of the present invention.
  • the cleaning unit 300 includes a cleaning bath 320 and a drying part 310.
  • a cleaning solution 322 is received inthe cleaning bath 320.
  • the cleaning solution may include deionized water.
  • the substrate 20 secured to the second securing part 210 is dipped into the cleaning solution 322 in the cleaning bath 320 so that the rear surface of the substrate 20is cleaned.
  • the drying part 310 dries the substrate 20 when the substrate 20 is lifted up after being cleaned.
  • the drying part 310 may spray a gas, for example, dry air.
  • the second securing part 210 may rotate the substrate 20.
  • the substrate 20 may be cleaned rapidly and uniformly.
  • the cleaning solution 322 may overflow or bubble.
  • the cleaning solution may be provided with ultrasonic waves.
  • the substrate 20 may be transferred in the cleaning solution 322.
  • the substrate 20 may be transferred from the second securing part 210 to the second transferring unit 500 in the cleaning bath 320.
  • the second transferring unit 500 may be disposed in the cleaning bath 320.
  • the substrate 20 is transferred to the second transferring unit 500 so that the front surface of the substrate 20 is exposed.
  • the second transferring unit 500 may have substantially the same composition as the first transferring unit 400.
  • the system 10 includes the second transferring unit 500, however, the system 10 may not include the second transferring unit 500, and the first transferring unit 400 may serve as the second transferring unit 500.
  • the substrate 20 is transferred to the second transferring unit
  • the front surface of the substrate 20 may also be cleaned.
  • the second transferring unit 500 and the substrate 20 secured to the second transferring unit 500 are lifted up and then taken out of the cleaning solution 322.
  • the drying part 310 may dry the substrate 20.
  • FIG. 8 is a schematic cross-sectional view illustrating a ring-frame unit of the system for thinning a substrate according to an exemplary embodiment of the present invention
  • FIG. 9 is a schematic cross-sectional view illustrating a substrate and a supporting tape combined with the substrate, the substrate being thinned by the system for thinning a substrate according to an exemplary embodiment of the present invention.
  • the system 10 includes the ring-frame unit 600.
  • the substrate 20 may be easily deformed and/or damaged since the substrate 20 becomes thin through the thinning process.
  • the substrate 20 may be provided with a supporting member such as a tape for a thin substrate(or a dicing tape) for easily performing following processes.
  • the ring-frame unit 600 includes a third securing part 610 to secure the substrate 20, and a ring-frame 620 having a supporting tape 622 and surrounding the substrate 20 secured to the third securing part 610.
  • the ring-frame 620 may be released from the third securing part 610.
  • the third securing part 610 may secure the substrate 20 using a vacuum.
  • the supporting tape 622 may be adhered to the rear surface of the substrate 20 to combine the ring-frame 620 with the substrate 20.
  • the substrate 20 combined with the ring-frame 620 may be prevented from being deformed.
  • the substrate 20 may be easily handled.
  • the protection tape 22 may be removed from the substrate 20 for performing the following processes.
  • the system according to an exemplary embodiment of the present invention sequentially polishes and etches a substrate.
  • the substrate may be easily and uniformly thinned.
  • the system sequentially performs a plurality of processes so that damage to the substrate may be prevented and/or reduced.
  • a protection tape 22 is adhered to a front surface of a substrate 20 having a circuit pattern formed on the front surface of the substrate 20.
  • the protection tape 22 may prevent and/or reduce damage to the circuit pattern caused through a polishing process, an etching process, etc.
  • the substrate 20 having the protection tape 22 is secured to a first securing part 110 of a first thinning unit 100 such that a rear surface of the substrate 20 is exposed.
  • a grinder 120 of the first thinning unit 100 grinds the rear surface of the substrate 20.
  • An amount of a portion of the substrate 20, which is removed though the grinding process, may be varied as desired.
  • the first thinning unit 100 may grind the substrate 20 to a predetermined extent such that the substrate 20 is not substantially damaged.
  • the substrate 20 is transferred from the first thinning unit 100 to a second thinning unit 200 by a first transferring unit 400.
  • the second thinning unit 200 may include a second securing part 210 to secure the substrate 20.
  • damage to the substrate 20 may be prevented and/or reduced since the substrate 20 is transferred by the first thinning unit 100.
  • the substrate 20 is dipped into an etching solution 222 in an etching bath 220 after the substrate 20 is transferred to the second securing part 210 of the second thinning unit 200.
  • the substrate 20 may be dipped into the etching solution 222 in a vertical direction.
  • the substrate 20 is rotated in the etching solution 222, and an etching solution is sprayed to the substrate 20 through a spray nozzle 230.
  • a whole rear surface of the substrate 20 may be uniformly etched so that the substrate 20 is thinned enough.
  • the substrate 20 secured to the second securing part 210 of the second thinning unit 200 is transferred to a cleaning unit 300.
  • the substrate 20 is dipped into a cleaning solution 322 received in a cleaning bath 320 of the cleaning unit 300.
  • the substrate 20 is dipped into the cleaning solution 322 in a vertical direction, and is rotated in the cleaning solution 322 so that a rear surface of the substrate 20 is cleaned.
  • the substrate 20 is transferred from the second securing part 210 of the second thinning unit 200 to a second transferring unit 500.
  • the substrate 20 may be transferred to the second transferring unit 500 in the cleaning solution 322.
  • the front surface of the substrate 20, to which the protection tape 22 is adhered may be cleaned.
  • the substrate 20 is lifted up, the substrate 20 is dried by a drying part 310.
  • the substrate 20 is secured to a third securing part 610 of a ring-frame unit 600 such that the rear surface of the substrate 20 is exposed.
  • a ring- frame 620 surrounds the substrate 20, and a supporting tape 622 is combined with the ring-frame 620 and the rear surface of the substrate 20.
  • the ring-frame 620 is released from the ring-frame unit 600.
  • the substrate 20 may be easily handled and prevented from being deformed.
  • the protection tape 22 may be removed from the substrate 20.
  • the thickness of the semiconductor wafer was reduced to about 7 m.
  • a substrate may be easily thinned without being damaged.
  • manufacturing costs of, for example, a semiconductor device may be reduced.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Weting (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

An apparatus for thinning a substrate includes a securing part and an etching bath. The securing part secures a substrate having a protection tape adhered to a front surface of the substrate. The securing part may rotate the substrate. The etching bath receives an etching solution. The substrate is dipped into the etching solution to etch a whole rear surface of the substrate so that the substrate is thinned. Thus, the substrate may be easily thinned without being damaged.

Description

Description
APPARATUS FOR THINNING A SUBSTRATE AND THINNING
SYSTEM HAVING THE SAME
Technical Field
[1] The present invention relates to an apparatus for thinning a substrate and a thinning system having the apparatus. More particularly, the present invention relates to an apparatus for thinning a substrate by etching and a thinning system having the apparatus. Background Art
[2] Nowadays, a semiconductor device has a multilayered structure so as to increase processing ability and memory capacity. A substrate, such as a semiconductor wafer, needs to be thin in order to form the multilayered structure.
[3] Examples of a conventional method for thinning a substrate include a mechanical polishing method. However, when the substrate is mechanically polished, the substrate may be frequently damaged. Thus, the mechanical polishing is unpreferable.
[4] Thus, a chemical mechanical polishing (CMP) method using slurry and/or a dry polishing method using plasma gas may be used for thinning a substrate. However, the chemical mechanical polishing (CMP) method has a relatively low polishing ability so that forming a substrate having a thickness of less than about 75 m is difficult. Furthermore, the dry polishing method using plasma gas may not thin the substrate uniformly, and the substrate may be damaged by the plasma gas. Thus, the dry polishing may be not suitable for a practical application. Disclosure of Invention Technical Problem
[5] The present invention provides an apparatus capable of easily thinning a substrate such as a semiconductor wafer.
[6] The present invention also provides a system for thinning a substrate, the system having the above-mentioned apparatus to sequentially perform a plurality of processes. Technical Solution
[7] In one aspect of the present invention, an apparatus for thinning a substrate includes a securing part and an etching bath. The securing part secures a substrate having a circuit pattern formed at a front surface of the substrate and a protection tape covering the circuit pattern. The securing part is capable of rotating the substrate. The etching bath receives an etching solution. The substrate is dipped into the etching solution to etch a whole rear surface of the substrate so that the substrate is thinned.
[8] The securing part is dipped into the etching solution in the etching bath so that the substrate is etched substantially uniformly. Thus, the substrate may be easily thinned.
[9] In another aspect of the present invention, a system for thinning a substrate includes a first thinning unit, a second thinning unit and a first transferring unit. The first thinning unit includes a first securing part and a grinder. The first securing part secures a substrate having a circuit pattern formed at a front surface of the substrate and a protection tape covering the circuit pattern. The grinder grinds a whole rear surface of the substrate. The second thinning unit includes a second securing part and an etching bath receiving an etching solution. The second securing part secures the substrate and rotates the substrate. The substrate is dipped into the etching solution to etch the whole rear surface of the substrate so that the substrate is thinned. The first transferring unit transfers the substrate from the first securing part to the second securing part so that the substrate is transferred from the first securing part to the first transferring unit such that the protections tape of the substrate is exposed, and the substrate is transferred from the first transferring unit to the second securing part such that the rear surface of the substrate is exposed.
[10] The substrate is grinded using the grinder of the first thinning unit, and the second securing part is dipped into the etching solution in the etching bath so that the substrate is etched substantially uniformly. Thus, the substrate may be thinned easily.
[H]
Advantageous Effects
[12] According to the present invention, a substrate is rotated using a securing part in an etching solution so that the substrate may be thinned uniformly.
Brief Description of the Drawings [13] The above and other features and advantages of the invention will become readily apparent by reference to the following detailed description when considered in conjunction with the accompanying drawings wherein: [14] FlG. 1 is a schematic plan view illustrating a system for thinning a substrate according to an exemplary embodiment of the present invention; [15] FlG. 2 is a schematic cross-sectional view illustrating a first thinning member of the system for thinning a substrate according to an exemplary embodiment of the present invention; [16] FlG. 3 is a schematic cross-sectional view illustrating a second thinning unit of the system for thinning a substrate according to an exemplary embodiment of the present invention; [17] FlG. 4 is a schematic cross-sectional view illustrating a second thinning unit including a spray nozzle, of the system for thinning a substrate according to an exemplary embodiment of the present invention; [18] FIGS. 5 and 6 are schematic cross-sectional views illustrating a first transferring unit of the system for thinning a substrate according to an exemplary embodiment of the present invention;
[19] FlG. 7 is a schematic cross-sectional view illustrating a cleaning unit and the first transferring unit of the system for thinning a substrate according to an exemplary embodiment of the present invention;
[20] FlG. 8 is a schematic cross-sectional view illustrating a ring-frame unit of the system for thinning a substrate according to an exemplary embodiment of the present invention; and
[21] FlG. 9 is a schematic cross-sectional view illustrating a substrate and a supporting tape combined with the substrate, the substrate being thinned by the system for thinning a substrate according to an exemplary embodiment of the present invention. Best Mode for Carrying Out the Invention
[22] It should be understood that the example embodiments of the present invention described below may be modified in many different ways without departing from the inventive principles disclosed herein, and the scope of the present invention is therefore not limited to these particular following embodiments. Rather, these embodiments are provided so that this disclosure will be through and complete, and will fully convey the concept of the invention to those skilled in the art by way of example and not of limitation.
[23] Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
[24]
[25] Exemplary Embodiment
[26] FlG. 1 is a schematic plan view illustrating a system for thinning a substrate according to an exemplary embodiment of the present invention.
[27] Referring to FlG. 1, a system 10 for thinning a substrate includes a first thinning unit
100, a second thinning unit 200 and a first transferring unit 400. The system may further include a cleaning unit 300, a second transferring unit 500 and a ring-frame unit 600. Each of the first thinning unit 100, the second thinning unit 200 and the ring- frame unit 600 may be an independent apparatus. For example, the second thinning unit 200 may be substantially the same as an apparatus for thinning a substrate, which will be explained later.
[28] FlG. 2 is a schematic cross-sectional view illustrating a first thinning unit of the system for thinning a substrate according to an exemplary embodiment of the present invention.
[29] Referring to FlG. 2, the first thinning unit 100 includes a first securing part 110 and a grinder 120. The first securing part 110 includes a chuck 112 on which a substrate 20 is disposed, a vacuum applying part 114 and a rotating part 116 providing the chuck 112 with a rotation force to rotate the chuck 112. The substrate 20 is secured to the first securing part 110, and a rear surface of the substrate 20 is exposed. The substrate 20 includes a circuit pattern formed on a front surface of the substrate 20 and a protection tape 22 covering the circuit pattern. Thus, first securing part 110 may make contact with the front surface of the substrate 20.
[30] The first thinning unit 100 uniformly grinds the whole rear surface of the substrate 20 secured to the first securing part 110 using the grinder 120. When the substrate is grinded, there is a possibility that the substrate may be damaged. Thus, the first thinning unit 100 may grind the substrate 20 to a predetermined extent such that the substrate 20 is not damaged.
[31] FlG. 3 is a schematic cross-sectional view illustrating a second thinning unit of the system for thinning a substrate according to an exemplary embodiment of the present invention.
[32] Referring to FlG. 3, the second thinning unit 200 includes a second securing part 210 and an etching bath 220. The second securing part 210 may be substantially the same as the first securing part 110 except for a size. The second securing part 210 includes a chuck 212, a vacuum applying part 214 and a rotating part 216 providing the chuck 212 with a rotation force to rotate the chuck 212. The substrate 20 is secured to the second securing part 210, and a rear surface of the substrate 20 is exposed. The etching bath 220 receives an etching solution 222. Examples of the etching solution 222 may include sulfuric acid, phosphoric acid, nitric acid, a sulfate, a phosphate, a nitrate, a fluoride, etc. These can be used alone or in a combination thereof.
[33] The second thinning unit 200 dips the second securing part 210 into the etching solution 222 to etch the whole rear surface of the substrate 20 secured to the second securing part 210. The substrate 20 may be easily thinned using the etching solution 222. For example, the substrate 20 dipped into the etching solution 222 may be dipped in a direction substantially parallel with a vertical direction. The second thinning unit 200 rotates the substrate 20 in the etching solution 222 using the rotating part 216. For example, a rotating speed may be about 3 to about 60 rpm.
[34] FlG. 4 is a schematic cross-sectional view illustrating a second thinning unit including a spray nozzle, of the system for thinning a substrate according to an exemplary embodiment of the present invention.
[35] Referring to FlG. 4, the second thinning unit 200 includes a spray nozzle 230. The spray nozzle 230 sprays an etching solution to the substrate 20 when the substrate 20 is etched in the etching bath 220. For example, the spray nozzle 230 may face the rear surface of the substrate 20. Furthermore, the spray nozzle 230 may be designed to change a disposition thereof. The disposition of the spray nozzle may have various changes and modifications that can be made by one ordinary skilled in the art. Thus, the spray nozzle 230 may hinder transferring the substrate 20 when the spray nozzle 320 is not used.
[36] The spray nozzle 230 may uniformly etch the substrate 20. For example, when a central portion of the substrate 20 is etched more than a peripheral portion of the substrate 20, the spray nozzle 230 may spray more of the etching solution 222 to the peripheral portion of the substrate 20 than to the central portion of the substrate 20. In contrast, when the peripheral portion of the substrate 20 is etched more than the central portion of the substrate 20, the spray nozzle 230 may spray less of the etching solution 222 to the peripheral portion of the substrate 20 than to the central portion of the substrate 20.
[37] The substrate 20 is transferred from the first thinning unit 100 to the second thinning unit 200. The system 10 includes the first transferring unit 400. The first transferring unit 400 transfers the substrate 20 from the first thinning unit 100 to the second thinning unit 200.
[38] FIGS. 5 and 6 are schematic cross-sectional views illustrating a first transferring unit of the system for thinning a substrate according to an exemplary embodiment of the present invention.
[39] Referring to FIGS. 5 and 6, the substrate 20 is transferred from the first securing part
110 of the first thinning unit 100 to the first transferring unit 400 so that the front surface of the substrate 20, with which the protection tape 22 is combined, is exposed. Thus, the first transferring unit 400 may make contact with the rear surface of the substrate 20. The first transferring unit 400 may secure the substrate 20 by applying a vacuum to the substrate 20. Particularly, the first transferring unit 400 may include a porous suction member making contact with the substrate 20. The substrate 20 is transferred from the first transferringunit 400 to the second securing part 210 of the second thinning unit 200 so that the rear surface of the substrate 20 is exposed.
[40] The system 10 uses the first transferring unit 400 so as to safely transferthe substrate
20. The substrate 20 is thinned through the grinding process and/or the etching process to have a very small thickness. Thus, thesubstrate 20 may be easily damaged when the substrate 20 is mechanically transferred. However, the system 10 uses the first transferring unit 400 so as to safely transfer the substrate 20 and to easily proceed following processes.
[41] FIG. 7 is a schematic cross-sectional view illustrating a cleaning unit and the first transferring unit of the system for thinning a substrate according to an exemplary embodiment of the present invention.
[42] Referring to FIG. 7, the cleaning unit 300 includes a cleaning bath 320 and a drying part 310. A cleaning solution 322 is received inthe cleaning bath 320. Examples of the cleaning solution may include deionized water. The substrate 20 secured to the second securing part 210 is dipped into the cleaning solution 322 in the cleaning bath 320 so that the rear surface of the substrate 20is cleaned. The drying part 310 dries the substrate 20 when the substrate 20 is lifted up after being cleaned. The drying part 310 may spray a gas, for example, dry air. When the substrate 20 is dipped into the cleaning solution 322, the second securing part 210 may rotate the substrate 20. Thus, the substrate 20 may be cleaned rapidly and uniformly. In order to clean the substrate 20 efficiently, the cleaning solution 322 may overflow or bubble. Furthermore, the cleaning solution may be provided with ultrasonic waves.
[43] After the substrate 20 is cleaned in the cleaning unit 300, the substrate 20 may be transferred in the cleaning solution 322. Thus, the substrate 20 may be transferred from the second securing part 210 to the second transferring unit 500 in the cleaning bath 320. For example, the second transferring unit 500 may be disposed in the cleaning bath 320. The substrate 20 is transferred to the second transferring unit 500 so that the front surface of the substrate 20 is exposed. The second transferring unit 500 may have substantially the same composition as the first transferring unit 400. In this embodiment, the system 10 includes the second transferring unit 500, however, the system 10 may not include the second transferring unit 500, and the first transferring unit 400 may serve as the second transferring unit 500.
[44] As mentioned above, the substrate 20 is transferred to the second transferring unit
500 in the cleaning solution 322 after the rear surface of the substrate 20 is cleaned in the cleaning solution 322 of the cleaning unit 300. Thus, the front surface of the substrate 20 may also be cleaned. The second transferring unit 500 and the substrate 20 secured to the second transferring unit 500 are lifted up and then taken out of the cleaning solution 322. When the substrate 20 is lifted up, the drying part 310 may dry the substrate 20.
[45] FIG. 8 is a schematic cross-sectional view illustrating a ring-frame unit of the system for thinning a substrate according to an exemplary embodiment of the present invention, and FIG. 9 is a schematic cross-sectional view illustrating a substrate and a supporting tape combined with the substrate, the substrate being thinned by the system for thinning a substrate according to an exemplary embodiment of the present invention.
[46] Referring to FIGS. 8 and 9, the system 10 includes the ring-frame unit 600. The substrate 20 may be easily deformed and/or damaged since the substrate 20 becomes thin through the thinning process. Thus, the substrate 20 may be provided with a supporting member such as a tape for a thin substrate(or a dicing tape) for easily performing following processes. The ring-frame unit 600 includes a third securing part 610 to secure the substrate 20, and a ring-frame 620 having a supporting tape 622 and surrounding the substrate 20 secured to the third securing part 610. The ring-frame 620 may be released from the third securing part 610. The third securing part 610 may secure the substrate 20 using a vacuum.
[47] The rear surface of the substrate 20 secured to the third securing part 610 is exposed.
Thus, the supporting tape 622 may be adhered to the rear surface of the substrate 20 to combine the ring-frame 620 with the substrate 20. The substrate 20 combined with the ring-frame 620 may be prevented from being deformed. Thus, the substrate 20 may be easily handled. Furthermore, the protection tape 22 may be removed from the substrate 20 for performing the following processes.
[48] The system according to an exemplary embodiment of the present invention sequentially polishes and etches a substrate. Thus, the substrate may be easily and uniformly thinned. Furthermore, the system sequentially performs a plurality of processes so that damage to the substrate may be prevented and/or reduced.
[49] Hereinafter, a method of thinning a substrate using the system according to an exemplary embodiment of the present invention will be explained more fully.
[50] Referring to FIGS. 1 and 2, a protection tape 22 is adhered to a front surface of a substrate 20 having a circuit pattern formed on the front surface of the substrate 20. The protection tape 22 may prevent and/or reduce damage to the circuit pattern caused through a polishing process, an etching process, etc.
[51] The substrate 20 having the protection tape 22 is secured to a first securing part 110 of a first thinning unit 100 such that a rear surface of the substrate 20 is exposed. A grinder 120 of the first thinning unit 100 grinds the rear surface of the substrate 20. An amount of a portion of the substrate 20, which is removed though the grinding process, may be varied as desired. For example, the first thinning unit 100 may grind the substrate 20 to a predetermined extent such that the substrate 20 is not substantially damaged.
[52] The substrate 20 is transferred from the first thinning unit 100 to a second thinning unit 200 by a first transferring unit 400. For example, the second thinning unit 200 may include a second securing part 210 to secure the substrate 20. Thus, damage to the substrate 20 may be prevented and/or reduced since the substrate 20 is transferred by the first thinning unit 100.
[53] Referring to FIGS. 3 and 4, the substrate 20 is dipped into an etching solution 222 in an etching bath 220 after the substrate 20 is transferred to the second securing part 210 of the second thinning unit 200. The substrate 20 may be dipped into the etching solution 222 in a vertical direction. The substrate 20 is rotated in the etching solution 222, and an etching solution is sprayed to the substrate 20 through a spray nozzle 230. Thus, a whole rear surface of the substrate 20 may be uniformly etched so that the substrate 20 is thinned enough.
[54] Referring to FlG. 7, the substrate 20 secured to the second securing part 210 of the second thinning unit 200 is transferred to a cleaning unit 300. The substrate 20 is dipped into a cleaning solution 322 received in a cleaning bath 320 of the cleaning unit 300. The substrate 20 is dipped into the cleaning solution 322 in a vertical direction, and is rotated in the cleaning solution 322 so that a rear surface of the substrate 20 is cleaned.
[55] After the substrate 20 is cleaned by the cleaning unit 300, the substrate 20 is transferred from the second securing part 210 of the second thinning unit 200 to a second transferring unit 500. For example, the substrate 20 may be transferred to the second transferring unit 500 in the cleaning solution 322. Thus, the front surface of the substrate 20, to which the protection tape 22 is adhered, may be cleaned. When the substrate 20 is lifted up, the substrate 20 is dried by a drying part 310.
[56] Referring to FIGS. 8 and 9, the substrate 20 is secured to a third securing part 610 of a ring-frame unit 600 such that the rear surface of the substrate 20 is exposed. A ring- frame 620 surrounds the substrate 20, and a supporting tape 622 is combined with the ring-frame 620 and the rear surface of the substrate 20. The ring-frame 620 is released from the ring-frame unit 600. Thus, the substrate 20 may be easily handled and prevented from being deformed. After combining with the ring-frame 620 and the supporting tape 622, the protection tape 22 may be removed from the substrate 20.
[57] When a semiconductor wafer having a thickness of about 200 m was thinned using the system according to an example embodiment of the present invention, the thickness of the semiconductor wafer was reduced to about 7 m.
[58]
Industrial Applicability
[59] According to the present invention, a substrate may be easily thinned without being damaged. Thus, manufacturing costs of, for example, a semiconductor device may be reduced.
[60]

Claims

Claims
[1] An apparatus for thinning a substrate, the apparatus comprising: a securing part to secure a substrate having a circuit pattern formed at a front surface of the substrate and a protection tape covering the circuit pattern, the securing part capable of rotating the substrate; and an etching bath receiving an etching solution so that the substrate is dipped into the etching solution to etch a whole rear surface of the substrate, thereby thinning the substrate.
[2] The apparatus of claim 1, wherein the securing part comprises a chuck, on which the substrate is disposed, a vacuum applying part to apply a vacuum to the chuck and a rotating part providing the chuck with a rotation force to rotate the substrate.
[3] The apparatus of claim 1, wherein the etching solution comprises at least one selected from the group consisting of sulfuric acid, phosphoric acid, nitric acid, a sulfate, a phosphate, a nitrate and a fluoride.
[4] The apparatus of claim 1, further comprising a spray nozzle to spray an etching solution toward a rear surface of the substrate in the etching bath.
[5] A system for thinning a substrate, the system comprising: a first thinning unit including a first securing part to secure a substrate having a circuit pattern formed at a front surface of the substrate and a protection tape covering the circuit pattern, and a grinder to grind a whole rear surface of the substrate, thereby thinning the substrate; a second thinning unit including a second securing part to secure the substrate and to rotate the substrate and an etching bath receiving an etching solution so that the substrate is dipped into the etching solution to etch the whole rear surface of the substrate, thereby thinning the substrate; and a first transferring unit to transfer the substrate from the first securing part to the second securing part so that the substrate is transferred from the first securing part to the first transferring unit such that the protections tape of the substrate is exposed, and the substrate is transferred from the first transferring unit to the second securing part such that the rear surface of the substrate is exposed.
[6] The system of claim 5, wherein each of the first and second securing parts comprises a chuck, on which the substrate is disposed, a vacuum applying part to apply a vacuum to the chuck and a rotating part providing the chuck with a rotation force to rotate the substrate, and the first transferring unit secures the substrate using a vacuum.
[7] The system of claim 5, wherein the etching solution comprises at least one selected from the group consisting of sulfuric acid, phosphoric acid, nitric acid, a sulfate, a phosphate, a nitrate and a fluoride, and the second thinning unit further includes a spray nozzle to spray an etching solution toward a rear surface of the substrate in the etching bath.
[8] The system of claim 5, further comprising: a cleaning unit including a cleaning bath and a drying unit, the cleaning bath receiving a cleaning solution for dipping the substrate and for cleaning the substrate, the drying unit drying the substrate that has been lifted out of the cleaning solution; and a second transferring unit for transferring the substrate from the second securing part, the second transferring unit being disposed in the cleaning bath.
[9] The system of claim 8, wherein the cleaning solution includes deionized water, and the drying part provides the substrate with dry air to dry the substrate.
[10] The system of claim 8, further comprising a ring-frame unit including a third securing part to secure the substrate, the ring-frame unit combining the substrate with a ring-frame having a supporting tape so that the ring-frame surrounds the substrate and the supporting tape is adhered to the rear surface of the substrate.
PCT/KR2007/002044 2006-04-27 2007-04-26 Apparatus for thinning a substrate and thinning system having the same WO2007126245A1 (en)

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CN102054666B (en) * 2009-10-29 2012-11-28 华映视讯（吴江）有限公司 Manufacturing method of semiconductor components

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KR100943756B1 (en) * 2007-10-15 2010-02-23 우진선행기술 주식회사 Device for slimming of plate
CN114649245B (en) * 2022-05-19 2022-09-09 西安奕斯伟材料科技有限公司 Device for bearing and cleaning silicon wafer

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JPS6293946A (en) * 1985-10-21 1987-04-30 Sony Corp Etching device
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WO2009003978A1 (en) 2007-06-29 2009-01-08 International Business Machines Corporation Directory hologram forming an anchor location of a pattern of stored holograms
CN102054666B (en) * 2009-10-29 2012-11-28 华映视讯（吴江）有限公司 Manufacturing method of semiconductor components

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