WO2007102781A1 - Method for metal-free synthesis of epitaxial semiconductor nanowires on si - Google Patents

Method for metal-free synthesis of epitaxial semiconductor nanowires on si Download PDF

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Publication number
WO2007102781A1
WO2007102781A1 PCT/SE2007/050131 SE2007050131W WO2007102781A1 WO 2007102781 A1 WO2007102781 A1 WO 2007102781A1 SE 2007050131 W SE2007050131 W SE 2007050131W WO 2007102781 A1 WO2007102781 A1 WO 2007102781A1
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Prior art keywords
substrate
nanowires
growth
oxide template
residues
Prior art date
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PCT/SE2007/050131
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French (fr)
Inventor
Lars Samuelson
Thomas MÅRTENSSON
Werner Seifert
Bernhard Mandl
Anders Mikkelsen
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Qunano Ab
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Publication date
Priority claimed from SE0601142A external-priority patent/SE533341C2/en
Application filed by Qunano Ab filed Critical Qunano Ab
Priority to CN200780016774.1A priority Critical patent/CN101443265B/en
Priority to EP07716104.0A priority patent/EP1991499A4/en
Priority to JP2008558235A priority patent/JP5483887B2/en
Priority to KR1020087024591A priority patent/KR101375435B1/en
Priority to US12/224,822 priority patent/US8691011B2/en
Priority to AU2007222162A priority patent/AU2007222162B2/en
Publication of WO2007102781A1 publication Critical patent/WO2007102781A1/en

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    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/04—Pattern deposit, e.g. by using masks
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    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
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    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
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    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
    • C30B29/62—Whiskers or needles
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Definitions

  • the present invention relates to a method of growing III-V semiconductor nanowires on a silicon substrate.
  • the invention relates to a method of growing nanowires without using Au, or any other metal, as a catalyst.
  • Nanowires are also referred to as nanowhiskers, nanorods and nanocolumns etc.
  • nanowire is used for a nanostructure that include one-dimensional nanoelements, essentially in one-dimensional form, that are of nanometer dimensions in their width or diameter. Controlling the one-dimensional growth on the nanometer scale offers unique opportunities for combining materials, manipulating properties, both mechanical and electromagnetical, and to design novel devices.
  • III-V semiconductors on Si presents several difficulties such as lattice mismatch, differences in crystal structure (III-Vs have a polar zincblende or wurtzite structure whereas Si has a covalent diamond structure), a large difference in thermal expansion coefficient and the formation of so called anti-pahse domains.
  • the object of the present invention is to provide a method that overcomes the drawbacks of the prior art methods. This is achieved by the method as defined in claim 1.
  • the method according to the invention provides a nanostructured devices which comprises a nanowire epitaxially grown from a surface of a substrate.
  • the method comprises the steps of:
  • the oxide template defines a plurality of nucleation onset positions for the subsequent nanowire growth
  • the oxide template is according to one embodiment self-assembled or produced in a process wherein a self-assembled thin layer of another material is utilized in the formation of the oxide template.
  • the step of providing an oxide template comprises:
  • Au or other materials recognized as hazardous by the silicon industry can be avoided as catalyst materials in the growth of nanowires or nanostructures.
  • Si surfaces can be treated to produce epitaxially oriented compound nanowires using epitaxy growth systems.
  • Such epitaxial NW can e.g. be used for high speed electronics and photonics.
  • One advantage of the invention is that the steps of the method can be easily adapted to industrial batch processing.
  • a further advantage is that the method of growing nanowires according to the invention can be combined with modern nanolithography techniques.
  • Figure 1 is a schematic illustration of the steps according to the method of the invention
  • Figure 2 illustrates the resulting nanowires grown on a Si(IOO) substrate using the method according to the invention
  • Figure 3 illustrates the resulting nanowires grown using one embodiment of the method according to the invention
  • Figure 4 is a flowchart over one embodiment of the method of the invention using a thin organic film in forming an oxide template
  • Figure 5 is a schematic illustration of the steps according to the method of the invention using a thin organic film in forming an oxide template ;
  • Figure 6a-c Illustrates the effect of the nucleation onset period
  • Figure 7a-d illustrates InAs nanowires grown according to the method of the invention using the organic compounds: a) allyl alcohol, b) n-decane, c) acetone, d) ethanol;
  • Figure 8a-b illustrates the effect of the pre-heating according to one embodiment of the invention, (a) without pre-heating and (b) with preheating.
  • a general method is provided to produce epitaxial nanowires of III-V materials, without using Au-particles as catalyst.
  • the method is described with InAs as the primary material in the Nanowires.
  • InAs has one of the highest electron mobility within the family of III-V compounds and is therefore very interesting for electronic applications of nanowires. It has been shown that InAs nanowires can easily be contacted and gated. With inbuilt barriers (e.g. InP), the functionality of such structures in single electron transistors as described by C. Thelander et al., Appl Phys. Lett.
  • Si is for most applications the preferred choice of substrate material, due to the electronic properties and not at least, to the well established methods of using Si in large scale production.
  • the nanowires grow in the ⁇ 111 > direction with an epitaxial relation to the substrate.
  • the nanowires are directed normal to the surface, for a Si(OOl) surface the nanowires form an angle of approximately 35 degrees with the surface etc.
  • the method according to the invention is optimized, but not limited, for the use of a Si(l l l)-substrate.
  • the method according to the invention is applicable also to other substrates, for example substrates of III-V compounds could be of interest for some applications. Modifications of the method to accommodate for various substrates materials are obvious for the skilled in the art.
  • nanowire growth on the Si substrate is guided by an oxide template provided on the Si surface in a pre- treatment, prior to the growth process.
  • the oxide template guides the nanowire nucleation by increasing the probability of nucleation in certain areas of the substrate. These areas of increased probability of nucleation will be referred to as nucleation onset positions.
  • the method according to the invention is schematically illustrated in FIG.1 and comprises the basic steps of:
  • the HF etching removes native oxides 105 from the surface of the Si(I I l) substrate 100 and provides a substrate with a temporarily passivated surface 110.
  • the oxide template defining a plurality of nucleation onset positions for subsequent nanowire growth.
  • the oxide template can be provided in different ways which will be described below.
  • the oxide template can provide nucleation onset positions by the oxide forming localised patches of silicon oxide which subsequently acts as catalyst particles for the onset of nanowire growth.
  • the composition in the localised patches is preferably and typically SiO x , x ⁇ l.
  • the oxide template forms a growth inhibiting mask, the mask typically being fully oxidised, Si ⁇ 2. Nucleation onset positions are provided as less oxidised, or non-oxidised, patches in the growth inhibiting mask. In this case the subsequent growth of nanowires would occur in the patches wherein the surface of the substrate is less oxidised.
  • the oxide template is self-assembled, i.e. the structure of the oxide template is primarily formed spontaneously.
  • self-assembled oxide template should also be understood to include an oxide template wherein the self- assembled characteristics are provided in a process including that another substance, for example an organic compound, has a self-assembled structured that is at least partly transferred to the oxide template.
  • the self- assembling process may be influenced by the environment, the temperature, the material in the substrate and the substrate surface etc. This embodiment will promote a subsequent growth of nanowires at random positions on the substrate surface.
  • the oxide template may be given a structure by patterning, for example using lithographic methods. According to this embodiment the growth of nanowires will be at pre-determined positions.
  • the oxide template 115 is directly provided on the passivated substrate surface.
  • the embodiment comprises a pre-treatment of applying a thin layer of a volatile species, for example and preferable SiO x (x ⁇ l), on the substrate prior to the growth procedure.
  • the thin layer of a volatile species forms the oxide template 115 either as a catalyst layer or as a growth inhibiting mask.
  • the structure of the oxide template may be formed directly at the application of the thin layer, or alternatively, through a subsequent treatment of the thin layer, for example by highering the temperature.
  • the basic steps of the method according to the invention is modified according to:
  • c 5 during the growth phase provide conditions as regard to time, pressure and temperature, ensuring that the nucleation of nanowires is guided by the oxide template 115.
  • the oxide template may undergo changes during the growth phase, for example evaporate partly, or restructure due to the increased temperature.
  • the method of the embodiment may be further refined by ensuring that the nucleation of nanowires take place prior to any significant re-structuring of the oxide template 115.
  • Step c 7 then comprises:
  • c': l providing a first condition wherein the source for the nanowire growth is turned on at a substrate temperature lower than a pre-determined temperature associated to the oxide template.
  • the pre-determined temperature is chosen so that no significant re-structuring of the oxide template occurs in the time-frame of the step.
  • the pre-determined temperature is typically lower than an optimized nanowire growth temperature, but high enough to facilitate an onset of the nucleation of nanowires.
  • c':2 providing a second condition wherein the temperature of the substrate is optimised for promoting the growth of the nanowires.
  • the second temperature is typically higher than the first temperature. Due to that the nucleation have started in the previous step, changes to the oxide template will have low impact on the growth of the nanowires.
  • An implementation example according to the embodiments utilizing a direct deposition of the oxide template may comprise the following process: For wire-growth a low pressure metal organic vapor phase epitaxy (LP- MOVPE) was used at a pressure of 10 kPa, with trimethylindium (TMI), arsine (AsH ⁇ ), and phosphine (PH3) as precursor materials, transported in a flow of 6000 ml/min of H2 as carrier gas. For the precursors typical molar fractions of 2*10- 6 for TMI and 2* 10- 4 for AsH 3 were used. For TMI, also higher molar fractions were tested, but had no significant effect on the growth rate.
  • LP- MOVPE low pressure metal organic vapor phase epitaxy
  • TMI trimethylindium
  • AsH ⁇ arsine
  • PH3 phosphine
  • the molar fraction for PH3 was varied in the range (3.5 -15) XlO 3 .
  • substrates epitaxy-ready III/V wafers and Si wafers were used.
  • the native oxide was removed by an HF dip, corresponding to step a).
  • a thin SiO x layer was sublimated onto the surface, corresponding to step b 5 ).
  • the substrates were then heated to the growth temperature between 520 0 C and 680 0 C in a H2 atmosphere. As soon as the growth temperature was reached, the precursors were switched on simultaneously. The growth was stopped by switching off the TMI source, and the samples were cooled under ASH3 flow, or for InAsP deposition, under additional PH3 flow. Resulting nanowires grown on Si(IOO) are shown in FIG. 2.
  • the use of an oxide template is combined with a patterning method, for example a lithographic method, to produce a defined pattern, for example an array or matrix of nanowires.
  • the pattern can be prepared by conventional lithographic methods, for example electron beam lithography.
  • the pattern was prepared by spinning PMMA onto the InP(I I l)B substrates, and writing a regular array of dots using electron beam lithography. Si substrates are treated the same way. After developing the positive resist to open up apertures down to the substrate, the SiO x layer was deposited, and the remaining resist was removed in a lift-off process.
  • the sources had to be activated already during the heating-up period at 510 - 520 0 C. Activating the sources later, i.e., at higher growth temperatures, leads to a loss of the pattern. This has most probably to do with the thermal stability of SiO x , which evaporates markedly at temperatures above 500 0 C. Scanning tunneling microscopy investigations at temperatures of around 500 0 C have shown that a 1.3 nm thick SiO x layer evaporates in time scales comparable to our growth times of several minutes.
  • the oxide template 115 is provided by a controlled oxidation process.
  • a thin organic film is applied to the passivated surface, for example allyl alcohol (2-propen-l-ol).
  • organic materials such as acetone and n-decane can be used.
  • the thin organic film should, at least at some part of the pre-treatment, be semi-permeable to substances that could affect the surface of the Si substrate. Suitable thin film thickness will be dependent on the organic compound used, on the time scale of the pre-treatment and the conditions wherein the pre-treatment is performed, as regards to for example humidity. Typical thin film thicknesses is in the range 10-200 A.
  • a subsequent part of the pre-treatment according to the embodiment of invention allows for forming of nucleation onset positions by localised alterations in the substrate surface or localised formations, or residues, on the substrate surface.
  • the method of producing epitaxial nanowires on a Si substrate comprises the following main steps:
  • a Hydrogen termination of the substrate surface, for example by etching in hydrofluoric acid, HF.
  • the HF etching removes oxides 505 from the surface of the Si(I I l) substrate 500 and provides a substrate with a temporarily passivated surface 510.
  • a HF etching procedure is utilised that produces a Si surface exhibiting at least some roughness.
  • Procedures for controlling the roughness of the passivated surface of an Si(I I l) substrate depend on the pH of the HF-solution, and are well known in the art, see for example "Ideal Hydrogen Termination of the Si-(IIl) Surface" by Higashi, G. S. et al, Applied Physics Letters 56, 656-658 (1990).
  • roughness in this context is on an atomic scale, the roughness achieved with the referred process is in the order of 0.3 nm. It should also be noted that the term roughness also refers to a less stable, less ideal, hydrogen termination of the substrate surface, which makes it more prone to oxidation.
  • the thin film may be applied by, for example, spin coating, vaporisation, and dipping.
  • the thin film typically leaves a plurality of residues 514 on the substrate surface, either by a self- assembling process or by a patterning process.
  • b":2) Providing a nucleation onset period. During this period a plurality of separated nucleation onset positions 516 are formed on the surface of the substrate. The density of the nucleation onset positions as well as the size of the individual nucleation onset positions are dependent on a combination of the thin organic film characteristics and the conditions during the nucleation onset period. An oxidation of the substrate surface 510 occurs during the nucleation onset period. The oxidation is guided by the thin organic film, or residues thereof. The procedure results in an oxide template 515 defining a plurality of nucleation onset positions 516, there the structure of the oxide template has a correlation to the structure of the thin organic film, or the organic residues of the film.
  • the organic thin film, applied in step b": l forms localised residues 514 on the substrate surface 510.
  • the residues may form directly after the application of the thin organic film, or during the nucleation onset period due to changes of the film such as cracking or uneven evaporation.
  • steps b":2 substances present in the environment may penetrate weakenings in the film, or has direct access to the surface in areas not covered by the localised residues.
  • an oxidising environment for example humid air
  • localised oxidation will occur in areas wherein the thin film is thin enough, or absent.
  • the substrate and the thin organic film is exposed to an oxidising environment.
  • An oxidising environment can be provided in many ways - a simple approach is to use the humidity in air, whereby the expected reactions would be:
  • SiO 2 will cover the substrate surface, except in areas covered by organic residues 514, and forms the oxide template 515.
  • the areas covered with organic residue 514 is either un-oxidised or has a lower oxidation state, for example SiO, and will form the nucleation onset positions.
  • the density of nanowires grown in subsequent steps has been found to be strongly dependent on the exposure time to ambient air between applying the organic thin film onto the substrate, and loading it into the reactor cell, wherein the growth step c" is performed. According to one embodiment of the invention this effect is used to control the nanowire density by performing controlled oxidations.
  • step a) providing a relatively rough Si(I I l) surface may be advantageous.
  • a further optional substep, to be taken before the nanowire growth, according to the embodiment comprises:
  • the thin film is arranged to leave residues during the pre-heating.
  • the residues can be of various constitutions, depending on the organic thin film.
  • the thin organic film can initiate the formation of carbides, SiC, on the substrate surface. Alternatively the residues alter the surface, which gives a localized increased probability of nucleation.
  • the forming of areas of increased permeability, for example due to an uneven evaporation, or cracking, of the thin organic film is utilised to form essentially randomly distributed residues, which in turn provides the nucleation onset positions.
  • the process is preferably performed in the same chamber as growth phase take place.
  • the thin organic film is used to passivate parts of the Si surface and nucleation onset positions will be provided in the openings of the film.
  • the process could be compared to providing a mask of an organic compound and lithographically, for example, form holes in the mask.
  • the properties of the thin organic film in combination with providing a suitable environment "holes" are formed spontaneously as a result of the cracking or uneven evaporation of the organic thin film.
  • the process of lithographically providing holes could be avoided.
  • a thin organic film comprising oxidation substance or oxidation substance present on the surface is utilised in the forming of nucleation onset positions.
  • growth step c,c', and c methods are known in the art.
  • LP-MOVPE metal organic vapor phase epitaxy
  • Other possible techniques include, but is not limited to MOVPE, Molecular Beam Epitaxy (MBE) and Chemical Beam Epitaxy (CBE). Details in a form of a non-limiting example will be given below.
  • the nanowiskers have been exemplified with InAs.
  • other semiconductors in particular III-V semiconductors such as InP and GaP could advantageously be grown with the method according to the invention.
  • Required modifications, for examples in the LP-MOVPE process, are obvious to the skilled persons.
  • suitable for use for the thin organic film 515 a large plurality of other organic compounds can be used. The selection dependent on the method of applying the film available, for example by spin coating, and preferred timescales and conditions of the nucleation onset period. Suitable organic compounds include, but is not limited to, allyl alcohol, n-decane, and acetone.
  • Si(I I l) substrates were used. The wafer was diced and the samples cleaned in an ultrasonic bath. To remove organic residues the samples were subjected to an UV+ozone clean. The samples were then etched for 30s in 4% aqueous hydrofluoric acid and removed without rinsing.
  • n-decane was used as the organic substance in the same manner. However, after spinning the sample was kept in a humid atmosphere for approx. 10 min period before transfer to an inert atmosphere.
  • a low-pressure, 100 mbar, MOVPE system was used with TMI and arsine as precursor gases.
  • a constant hydrogen carrier gas flow of 6 1/min was used.
  • a 10 min anneal at 625 0 C was performed to improve the quality of the growth.
  • the temperature was then ramped down to a typical growth temperature of 550 0 C. Growth was initiated when the two precursors were simultaneously introduced in the growth cell.
  • typical molar fractions of 2x10 6 for TMI and 2* 10- 4 for AsHe were used. After a growth time of typically a few minutes the growth was halted by switching the TMI off. Cooling to room temperature was done under a protecting arsine flow.
  • FIG 6a-b Illustrates the effect of the nucleation onset period.
  • n-decane was spun and the sample directly transported to the growth apparatus.
  • the sample was spun with n-decane and stored in humid air for approx. 10 min.
  • the viewing angle is 45 degrees with respect to the substrate normal.
  • the time of exposure of the coated substrate to an oxidising environment can be used to control the nanowire density, this is further illustrated in FIG 6c, wherein the nanowire density is a function of exposure time.
  • the conditions were stable around 22-24 0 C and 85-90 % relative humidity. Whereas the 6 h sample still shows nearly ideal NW growth, the 1O h sample exhibits an increased amount of non-epitaxial wires and competing island growth. Further oxidation (>14 h under the above conditions) results in zero density, i.e. no growth.
  • FIG 7a-d illustrates InAs nanowires grown according to the method of the invention using the organic compounds: a) allyl alcohol, b) n-decane, c) acetone, d) ethanol.
  • the viewing angle is 45 degrees with respect to the substrate normal. It should be noted that in the figures the nanowires appearing to having an angle to the substrate is an effect of the imaging process. In reality the nanowires are epitaxial and vertically standing on the surface of the substrate.
  • FIG 8a-b the effect of the optional pre-heating or annealing is illustrated.
  • no pre-heating was performed prior to the growth phase.
  • the substrate illustrated in (b) were annealed at 625 0 C for 10 minutes.
  • the annealed substrate shows an increased growth quality.
  • allyl-alcohol compared to n- decane is consistent with the fact that allyl-alcohol is hygroscopic, attracting moisture which should increase the oxidation rate, whereas n-decane is hydrophobic.
  • the above procedure including a thin organic layer in the formation of the oxide template can be combined with modern nanolithography techniques such as micro-contact printing wherein a mask of organic material is transferred from a stamp to the substrate. Also techniques using scanning tunnelling microscopy such as dip-pen lithography can be used to give the organic thin film a pre-determined pattern, and hence the oxide template a corresponding pre-determined pattern.
  • the basic steps of the method according to the invention can readily be implemented in an industrial production system.
  • One approach is to perform all the steps of the method in the same chamber, or at least in the same system, in order to avoid uncontrolled exposure to air, humidity etc..
  • the steps of the method could in this case be modified according to:
  • i Introducing one or a plurality of substrate in a vacuum chamber.
  • ii Hydrogen termination by the use of atomic hydrogen, for example heating the substrate(s) and exposure to hydrogen plasma.
  • the voltage and the plasma composition can be used to determine surface roughness.
  • v Growth of nanowires, utilizing the same vacuum chamber, or after transfer to a growth chamber in the same system.
  • This modified process is well suited to combined with various patterning techniques.

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Abstract

The present invention relates to epitaxial growth of nanowires on a substrate. In particular the invention relates to growth of nanowires on an Si-substrate without using Au as a catalyst. In the method according to the invention an oxide template is provided on a passivated surface of the substrate. The oxide template defines a plurality of nucleation onset positions for subsequent nanowire growth. According to one embodiment a thin organic film is used to form the oxide template.

Description

METHOD FOR METAL-FREE SYNTHESIS OF EPITAXIAL SEMICONDUCTOR NANOWIRES ON Si
Field of the Invention
The present invention relates to a method of growing III-V semiconductor nanowires on a silicon substrate. In particular the invention relates to a method of growing nanowires without using Au, or any other metal, as a catalyst.
Background of the Invention
Over recent years the interest in semiconductor nanowires (NWs) has intensified. Nanowires are also referred to as nanowhiskers, nanorods and nanocolumns etc. For the purpose of this application the term nanowire is used for a nanostructure that include one-dimensional nanoelements, essentially in one-dimensional form, that are of nanometer dimensions in their width or diameter. Controlling the one-dimensional growth on the nanometer scale offers unique opportunities for combining materials, manipulating properties, both mechanical and electromagnetical, and to design novel devices.
For a large-scale impact of NW technology, a high level of compatibility with existing silicon processing will be essential. Advanced III-V heterostructure and high mobility NW components would then be available as an "add-on" technology for high speed electronics and photonics. However, as of today, the vast majority of reports on NW growth utilize the vapor-liquid solid (VLS) mechanism, see e.g. R. S. Wagner, In Whisker Technology, Levitt, A. P., Ed. Wiley: New York, 1970, and most commonly Au as catalyst material. It is well known that Au impurities in Si create deep levels acting as recombination centers degrading the electronic properties of the Si material. Thus, for compound nanowire technology to be compatible with silicon technology and processing, alternatives to Au need to be found. Epitaxial growth of III-V semiconductors on Si presents several difficulties such as lattice mismatch, differences in crystal structure (III-Vs have a polar zincblende or wurtzite structure whereas Si has a covalent diamond structure), a large difference in thermal expansion coefficient and the formation of so called anti-pahse domains. Much work has been done on planar growth of III-V materials on Si using different approaches attempting to grow device quality structures, see e.g. S. F. Fang et al., Gallium- Arsenide and Other Compound Semiconductors on Silicon. Journal of Applied Physics 68, R31-R58.(1990) for a review.
It is recognized that a III-V semiconductor NW grown out from an Si substrate would probably overcome several of the above mentioned problems, due to the small cross-section of the conjunction between the NW and the Si substrate. However, the known procedures for manufacturing NWs do, as described above, include Au-particles for catalyzing the growth process.
Summary of the Invention
Obviously the prior art methods of producing nanowires or nanostructures of III-V semiconductors needs significant improvements in order to be compatible with the established silicon based production methods used by the semiconductor industry. In particular the need for gold as a growth promoting catalyst should preferably be eliminated.
The object of the present invention is to provide a method that overcomes the drawbacks of the prior art methods. This is achieved by the method as defined in claim 1.
The method according to the invention provides a nanostructured devices which comprises a nanowire epitaxially grown from a surface of a substrate.
The method comprises the steps of:
- hydrogen termination of the surface of the substrate to provide a substrate with a temporarily passivated surface.
-providing an oxide template on the passivated surface of the substrate. The oxide template defines a plurality of nucleation onset positions for the subsequent nanowire growth;
-growing nanowires in the nucleation onset positions defined by the oxide template on the substrate surface.
The oxide template is according to one embodiment self-assembled or produced in a process wherein a self-assembled thin layer of another material is utilized in the formation of the oxide template.
According to one embodiment of the invention the step of providing an oxide template comprises a pre-treatment prior to the growth phase comprising the steps of:
-applying a thin organic film on the substrate surface; and
-providing a nucleation onset period, wherein the conditions as regards to time and environment are controlled so that a partial oxidation occurs on the substrate surface. The oxidation process is guided at least partly by the applied thin organic film or residues of the film giving a correlation between the structure of the oxide template and the thin organic film or the residues of the film. According to another embodiment the step of providing an oxide template comprises:
-applying a thin layer of a volatile species to the substrate, the thin layer of a volatile species forming an oxide template; and
-providing, during the growth phase, conditions as regard to time, pressure and temperature ensuring that the nucleation of nanowires is guided by the oxide template.
Thanks to the method according to the invention Au or other materials recognized as hazardous by the silicon industry can be avoided as catalyst materials in the growth of nanowires or nanostructures. Si surfaces can be treated to produce epitaxially oriented compound nanowires using epitaxy growth systems. Such epitaxial NW can e.g. be used for high speed electronics and photonics.
Thanks to the invention it is possible to grow nanowires of III/V semiconductor materials without the use of metallic catalyst particles. This is of high importance in the aim of combining the nanostructure technology with the established silicon based production methods used by the semiconductor industry.
One advantage of the invention is that the steps of the method can be easily adapted to industrial batch processing.
A further advantage is that the method of growing nanowires according to the invention can be combined with modern nanolithography techniques.
Embodiments of the invention are defined in the dependent claims. Other objects, advantages and novel features of the invention will become apparent from the following detailed description of the invention when considered in conjunction with the accompanying drawings and claims.
Brief Description of the Drawings
Preferred embodiments of the invention will now be described with reference to the accompanying drawings, wherein:
Figure 1 is a schematic illustration of the steps according to the method of the invention; Figure 2 illustrates the resulting nanowires grown on a Si(IOO) substrate using the method according to the invention;
Figure 3 illustrates the resulting nanowires grown using one embodiment of the method according to the invention;
Figure 4 is a flowchart over one embodiment of the method of the invention using a thin organic film in forming an oxide template;
Figure 5 is a schematic illustration of the steps according to the method of the invention using a thin organic film in forming an oxide template ;
Figure 6a-c Illustrates the effect of the nucleation onset period, In (a) n- decane was spun and the sample directly transported to the growth apparatus, in (b) the sample spun with n-decane and stored in humid air for approx. 10 min and the graph of (c) illustrate the density of nanowires as a function of the exposure time to humid air;
Figure 7a-d illustrates InAs nanowires grown according to the method of the invention using the organic compounds: a) allyl alcohol, b) n-decane, c) acetone, d) ethanol;
Figure 8a-b illustrates the effect of the pre-heating according to one embodiment of the invention, (a) without pre-heating and (b) with preheating.
Detailed description
According to the present invention a general method is provided to produce epitaxial nanowires of III-V materials, without using Au-particles as catalyst. The method is described with InAs as the primary material in the Nanowires. However, also other semiconductor compounds, especially III-V compounds can be used in the same manner. InAs has one of the highest electron mobility within the family of III-V compounds and is therefore very interesting for electronic applications of nanowires. It has been shown that InAs nanowires can easily be contacted and gated. With inbuilt barriers (e.g. InP), the functionality of such structures in single electron transistors as described by C. Thelander et al., Appl Phys. Lett. 2003, 83, (10), 2052, and functional devices such as resonant tunneling devices has been demonstrated. Moreover, InAs has a high potential to be used complementary in combination with Si for high speed electronics applications. For this purpose, however, nanowires grown Au-assisted impose severe restrictions due to the introduction of deep-level defects into Si.
Si is for most applications the preferred choice of substrate material, due to the electronic properties and not at least, to the well established methods of using Si in large scale production. Under the conditions used the nanowires grow in the < 111 > direction with an epitaxial relation to the substrate. For a Si(I I l) surface the nanowires are directed normal to the surface, for a Si(OOl) surface the nanowires form an angle of approximately 35 degrees with the surface etc. Since for most applications, nanowires normal to the surface is preferred, the method according to the invention is optimized, but not limited, for the use of a Si(l l l)-substrate. However, the method according to the invention, is applicable also to other substrates, for example substrates of III-V compounds could be of interest for some applications. Modifications of the method to accommodate for various substrates materials are obvious for the skilled in the art.
According to the method of the present invention nanowire growth on the Si substrate is guided by an oxide template provided on the Si surface in a pre- treatment, prior to the growth process. The oxide template guides the nanowire nucleation by increasing the probability of nucleation in certain areas of the substrate. These areas of increased probability of nucleation will be referred to as nucleation onset positions. The method according to the invention, is schematically illustrated in FIG.1 and comprises the basic steps of:
a): Hydrogen termination of the surface of the substrate 100, for example by etching in hydrofluoric acid, HF. The HF etching removes native oxides 105 from the surface of the Si(I I l) substrate 100 and provides a substrate with a temporarily passivated surface 110.
b): Providing an oxide template 115 on the passivated surface 110 of the substrate 100. The oxide template defining a plurality of nucleation onset positions for subsequent nanowire growth. The oxide template can be provided in different ways which will be described below.
c): Growth of nanowires, wherein epitaxially grown, vertically standing nanowires 125 are formed on the substrate surface on at least a part of the nucleation onset positions.
The oxide template can provide nucleation onset positions by the oxide forming localised patches of silicon oxide which subsequently acts as catalyst particles for the onset of nanowire growth. The composition in the localised patches is preferably and typically SiOx, x~l. Alternatively the oxide template forms a growth inhibiting mask, the mask typically being fully oxidised, Siθ2. Nucleation onset positions are provided as less oxidised, or non-oxidised, patches in the growth inhibiting mask. In this case the subsequent growth of nanowires would occur in the patches wherein the surface of the substrate is less oxidised. According to one embodiment the oxide template is self-assembled, i.e. the structure of the oxide template is primarily formed spontaneously. The term self-assembled oxide template should also be understood to include an oxide template wherein the self- assembled characteristics are provided in a process including that another substance, for example an organic compound, has a self-assembled structured that is at least partly transferred to the oxide template. The self- assembling process may be influenced by the environment, the temperature, the material in the substrate and the substrate surface etc. This embodiment will promote a subsequent growth of nanowires at random positions on the substrate surface. As an alternative, representing a another embodiment of the invention, the oxide template may be given a structure by patterning, for example using lithographic methods. According to this embodiment the growth of nanowires will be at pre-determined positions.
According to one embodiment of the invention the oxide template 115 is directly provided on the passivated substrate surface. The embodiment comprises a pre-treatment of applying a thin layer of a volatile species, for example and preferable SiOx (x~l), on the substrate prior to the growth procedure. The thin layer of a volatile species forms the oxide template 115 either as a catalyst layer or as a growth inhibiting mask. The structure of the oxide template may be formed directly at the application of the thin layer, or alternatively, through a subsequent treatment of the thin layer, for example by highering the temperature. The basic steps of the method according to the invention is modified according to:
b5) in a pre-treatment phase applying a thin layer of a volatile species to the substrate, the thin layer of a volatile species forming an oxide template 115.
c5) during the growth phase provide conditions as regard to time, pressure and temperature, ensuring that the nucleation of nanowires is guided by the oxide template 115.
The oxide template may undergo changes during the growth phase, for example evaporate partly, or restructure due to the increased temperature. The method of the embodiment may be further refined by ensuring that the nucleation of nanowires take place prior to any significant re-structuring of the oxide template 115. Step c7) then comprises:
c': l) providing a first condition wherein the source for the nanowire growth is turned on at a substrate temperature lower than a pre-determined temperature associated to the oxide template. The pre-determined temperature is chosen so that no significant re-structuring of the oxide template occurs in the time-frame of the step. The pre-determined temperature is typically lower than an optimized nanowire growth temperature, but high enough to facilitate an onset of the nucleation of nanowires.
c':2) providing a second condition wherein the temperature of the substrate is optimised for promoting the growth of the nanowires. The second temperature is typically higher than the first temperature. Due to that the nucleation have started in the previous step, changes to the oxide template will have low impact on the growth of the nanowires.
An implementation example according to the embodiments utilizing a direct deposition of the oxide template may comprise the following process: For wire-growth a low pressure metal organic vapor phase epitaxy (LP- MOVPE) was used at a pressure of 10 kPa, with trimethylindium (TMI), arsine (AsHβ), and phosphine (PH3) as precursor materials, transported in a flow of 6000 ml/min of H2 as carrier gas. For the precursors typical molar fractions of 2*10-6 for TMI and 2* 10-4 for AsH3 were used. For TMI, also higher molar fractions were tested, but had no significant effect on the growth rate. The molar fraction for PH3 was varied in the range (3.5 -15) XlO 3. As substrates epitaxy-ready III/V wafers and Si wafers were used. In case of Si substrates, the native oxide was removed by an HF dip, corresponding to step a). Before loading the substrates into the growth chamber, a thin SiOx layer was sublimated onto the surface, corresponding to step b5). The substrates were then heated to the growth temperature between 520 0C and 680 0C in a H2 atmosphere. As soon as the growth temperature was reached, the precursors were switched on simultaneously. The growth was stopped by switching off the TMI source, and the samples were cooled under ASH3 flow, or for InAsP deposition, under additional PH3 flow. Resulting nanowires grown on Si(IOO) are shown in FIG. 2.
According to another embodiment of the invention the use of an oxide template is combined with a patterning method, for example a lithographic method, to produce a defined pattern, for example an array or matrix of nanowires. The pattern can be prepared by conventional lithographic methods, for example electron beam lithography. In an implementation example of the second embodiment the pattern was prepared by spinning PMMA onto the InP(I I l)B substrates, and writing a regular array of dots using electron beam lithography. Si substrates are treated the same way. After developing the positive resist to open up apertures down to the substrate, the SiOx layer was deposited, and the remaining resist was removed in a lift-off process. To grow wires on such patterned SiOx films, the sources had to be activated already during the heating-up period at 510 - 520 0C. Activating the sources later, i.e., at higher growth temperatures, leads to a loss of the pattern. This has most probably to do with the thermal stability of SiOx, which evaporates markedly at temperatures above 500 0C. Scanning tunneling microscopy investigations at temperatures of around 500 0C have shown that a 1.3 nm thick SiOx layer evaporates in time scales comparable to our growth times of several minutes. It should be noted that in our case the wires were not grown out of openings in the SiOx-layer, but at the site where, after e-beam lithography and lift-off, islands of SiOx remain, the SiOx islands act as "catalysts" similar to Au particles in case of patterned growth in the InP(Au)/InP(l l l)B system as described in T. Martensson, et al. "Fabrication of individually seeded nanowire arrays by vapour-liquid-solid growth." Nanotechnology 14, 1255-1258.(2003). The result is shown in FIG. 3.
In one embodiment of the invention the oxide template 115 is provided by a controlled oxidation process. During the pre-treatment of the passivated Si substrate applying a thin organic film is applied to the passivated surface, for example allyl alcohol (2-propen-l-ol). Alternatively other organic materials such as acetone and n-decane can be used. The thin organic film should, at least at some part of the pre-treatment, be semi-permeable to substances that could affect the surface of the Si substrate. Suitable thin film thickness will be dependent on the organic compound used, on the time scale of the pre-treatment and the conditions wherein the pre-treatment is performed, as regards to for example humidity. Typical thin film thicknesses is in the range 10-200 A. A subsequent part of the pre-treatment according to the embodiment of invention allows for forming of nucleation onset positions by localised alterations in the substrate surface or localised formations, or residues, on the substrate surface.
The method of producing epitaxial nanowires on a Si substrate, according to the embodiment, illustrated in the flowchart of FIG 4 and in the schematic illustration of FIG 5, comprises the following main steps:
a"): Hydrogen termination of the substrate surface, for example by etching in hydrofluoric acid, HF. The HF etching removes oxides 505 from the surface of the Si(I I l) substrate 500 and provides a substrate with a temporarily passivated surface 510. Preferably a HF etching procedure is utilised that produces a Si surface exhibiting at least some roughness. Procedures for controlling the roughness of the passivated surface of an Si(I I l) substrate depend on the pH of the HF-solution, and are well known in the art, see for example "Ideal Hydrogen Termination of the Si-(IIl) Surface" by Higashi, G. S. et al, Applied Physics Letters 56, 656-658 (1990). It should be noted that roughness in this context is on an atomic scale, the roughness achieved with the referred process is in the order of 0.3 nm. It should also be noted that the term roughness also refers to a less stable, less ideal, hydrogen termination of the substrate surface, which makes it more prone to oxidation.
b": l) Applying a thin semi-permeable film of an organic compound on the substrate surface. The thin film may be applied by, for example, spin coating, vaporisation, and dipping. The thin film typically leaves a plurality of residues 514 on the substrate surface, either by a self- assembling process or by a patterning process.
b":2) Providing a nucleation onset period. During this period a plurality of separated nucleation onset positions 516 are formed on the surface of the substrate. The density of the nucleation onset positions as well as the size of the individual nucleation onset positions are dependent on a combination of the thin organic film characteristics and the conditions during the nucleation onset period. An oxidation of the substrate surface 510 occurs during the nucleation onset period. The oxidation is guided by the thin organic film, or residues thereof. The procedure results in an oxide template 515 defining a plurality of nucleation onset positions 516, there the structure of the oxide template has a correlation to the structure of the thin organic film, or the organic residues of the film.
c"): Growth of nanowires, wherein epitaxially grown, vertically standing nanowires (125) are formed on the substrate surface on at least a part of the nucleation onset positions.
According to one embodiment of the invention the organic thin film, applied in step b": l, forms localised residues 514 on the substrate surface 510. The residues may form directly after the application of the thin organic film, or during the nucleation onset period due to changes of the film such as cracking or uneven evaporation. During the nucleation onset period, step b":2, substances present in the environment may penetrate weakenings in the film, or has direct access to the surface in areas not covered by the localised residues. In an oxidising environment, for example humid air, localised oxidation will occur in areas wherein the thin film is thin enough, or absent. According to the embodiment the substrate and the thin organic film is exposed to an oxidising environment. An oxidising environment can be provided in many ways - a simple approach is to use the humidity in air, whereby the expected reactions would be:
(i) Si + H2O → SiO + H2
(ii) SiO + H2O → SiO2 + H2
If terminated after a proper time period, see below, SiO2 will cover the substrate surface, except in areas covered by organic residues 514, and forms the oxide template 515. The areas covered with organic residue 514 is either un-oxidised or has a lower oxidation state, for example SiO, and will form the nucleation onset positions. The density of nanowires grown in subsequent steps has been found to be strongly dependent on the exposure time to ambient air between applying the organic thin film onto the substrate, and loading it into the reactor cell, wherein the growth step c" is performed. According to one embodiment of the invention this effect is used to control the nanowire density by performing controlled oxidations.
A rougher substrate surface will accentuate the formation of localised residues or localised weakenings in the organic film. Therefore, in this embodiment, a process in step a"), providing a relatively rough Si(I I l) surface may be advantageous.
A further optional substep, to be taken before the nanowire growth, according to the embodiment comprises:
b":3) Vaporization/ baking of organic residues. The procedure will depend on the organic material chosen. For allyl alcohol a short heat treatment at 625 0C is sufficient to remove practically all organic residues.
According to a further embodiment of the invention the thin film is arranged to leave residues during the pre-heating. The residues acting as catalyst particles in the subsequent growth of nanowires. The residues can be of various constitutions, depending on the organic thin film. The thin organic film can initiate the formation of carbides, SiC, on the substrate surface. Alternatively the residues alter the surface, which gives a localized increased probability of nucleation. Also in this embodiment the forming of areas of increased permeability, for example due to an uneven evaporation, or cracking, of the thin organic film is utilised to form essentially randomly distributed residues, which in turn provides the nucleation onset positions. The process is preferably performed in the same chamber as growth phase take place.
According to another embodiment the thin organic film is used to passivate parts of the Si surface and nucleation onset positions will be provided in the openings of the film. The process could be compared to providing a mask of an organic compound and lithographically, for example, form holes in the mask. However, in the process according to this embodiment of the present invention, the properties of the thin organic film in combination with providing a suitable environment, "holes" are formed spontaneously as a result of the cracking or uneven evaporation of the organic thin film. Thus, the process of lithographically providing holes could be avoided.
According to yet another embodiment a thin organic film comprising oxidation substance or oxidation substance present on the surface is utilised in the forming of nucleation onset positions.
For the epitaxial growing of III-V semiconductor nanowires, growth step c,c', and c", methods are known in the art. For the growth process low pressure metal organic vapor phase epitaxy (LP-MOVPE) is suitable. Other possible techniques include, but is not limited to MOVPE, Molecular Beam Epitaxy (MBE) and Chemical Beam Epitaxy (CBE). Details in a form of a non-limiting example will be given below.
The nanowiskers have been exemplified with InAs. Also other semiconductors, in particular III-V semiconductors such as InP and GaP could advantageously be grown with the method according to the invention. Required modifications, for examples in the LP-MOVPE process, are obvious to the skilled persons. In addition to the above mentioned organic compounds, suitable for use for the thin organic film 515, a large plurality of other organic compounds can be used. The selection dependent on the method of applying the film available, for example by spin coating, and preferred timescales and conditions of the nucleation onset period. Suitable organic compounds include, but is not limited to, allyl alcohol, n-decane, and acetone.
Examples of preparations according to the method of the invention: Si(I I l) substrates were used. The wafer was diced and the samples cleaned in an ultrasonic bath. To remove organic residues the samples were subjected to an UV+ozone clean. The samples were then etched for 30s in 4% aqueous hydrofluoric acid and removed without rinsing.
Allyl alcohol (2-propen-l-ol) from Sigma- Aldrich (purity 99+%) was spun coated at ~ 6000 rpm for 30 s resulting in a -20 A thick layer as measured by ellipsometer. The samples were then transferred to an inert atmosphere without further delay.
In an alternative process, n-decane was used as the organic substance in the same manner. However, after spinning the sample was kept in a humid atmosphere for approx. 10 min period before transfer to an inert atmosphere.
A low-pressure, 100 mbar, MOVPE system was used with TMI and arsine as precursor gases. A constant hydrogen carrier gas flow of 6 1/min was used. A 10 min anneal at 625 0C was performed to improve the quality of the growth. The temperature was then ramped down to a typical growth temperature of 550 0C. Growth was initiated when the two precursors were simultaneously introduced in the growth cell. For the precursors typical molar fractions of 2x106 for TMI and 2* 10-4 for AsHe were used. After a growth time of typically a few minutes the growth was halted by switching the TMI off. Cooling to room temperature was done under a protecting arsine flow.
FIG 6a-b Illustrates the effect of the nucleation onset period. In (a) n-decane was spun and the sample directly transported to the growth apparatus. In (b) the sample was spun with n-decane and stored in humid air for approx. 10 min. The viewing angle is 45 degrees with respect to the substrate normal. As described above the time of exposure of the coated substrate to an oxidising environment can be used to control the nanowire density, this is further illustrated in FIG 6c, wherein the nanowire density is a function of exposure time. The conditions were stable around 22-24 0C and 85-90 % relative humidity. Whereas the 6 h sample still shows nearly ideal NW growth, the 1O h sample exhibits an increased amount of non-epitaxial wires and competing island growth. Further oxidation (>14 h under the above conditions) results in zero density, i.e. no growth.
FIG 7a-d illustrates InAs nanowires grown according to the method of the invention using the organic compounds: a) allyl alcohol, b) n-decane, c) acetone, d) ethanol. The viewing angle is 45 degrees with respect to the substrate normal. It should be noted that in the figures the nanowires appearing to having an angle to the substrate is an effect of the imaging process. In reality the nanowires are epitaxial and vertically standing on the surface of the substrate.
In FIG 8a-b the effect of the optional pre-heating or annealing is illustrated. In (a) no pre-heating was performed prior to the growth phase. The substrate illustrated in (b) were annealed at 625 0C for 10 minutes. The annealed substrate shows an increased growth quality.
The results indicated above supports the view of an inhomogeneously oxidized Si surface, where the oxidation of the H-terminated surface has been locally inhibited by organic coverage to form less oxidized patches surrounded by a growth-inhibiting mask of Siθ2. The organic residues are expected to be fully evaporated at the high temperature (625 0C) used in the annealing step before growth, leaving just the oxide template. Such a template much resembles the partially masked substrates used in selective area epitaxy. The decrease of nanowire density after long oxidation times can be understood: eventually the whole surface will be completely covered with a growth-inhibiting mask of Siθ2. It is noted that the air exposure necessary to reach a certain nanowire density depends strongly on the organic compound used. The shorter time required for allyl-alcohol compared to n- decane is consistent with the fact that allyl-alcohol is hygroscopic, attracting moisture which should increase the oxidation rate, whereas n-decane is hydrophobic.
The above procedure including a thin organic layer in the formation of the oxide template can be combined with modern nanolithography techniques such as micro-contact printing wherein a mask of organic material is transferred from a stamp to the substrate. Also techniques using scanning tunnelling microscopy such as dip-pen lithography can be used to give the organic thin film a pre-determined pattern, and hence the oxide template a corresponding pre-determined pattern.
The basic steps of the method according to the invention can readily be implemented in an industrial production system. One approach is to perform all the steps of the method in the same chamber, or at least in the same system, in order to avoid uncontrolled exposure to air, humidity etc.. The steps of the method could in this case be modified according to:
i: Introducing one or a plurality of substrate in a vacuum chamber.
ii: Hydrogen termination by the use of atomic hydrogen, for example heating the substrate(s) and exposure to hydrogen plasma. The voltage and the plasma composition can be used to determine surface roughness.
ii: Evaporation or spraying of a thin organic film on the substrate(s).
iv: Exposure to oxidizing substance. Temperature could preferably be controlled for a better defined process.
v: Growth of nanowires, utilizing the same vacuum chamber, or after transfer to a growth chamber in the same system.
This modified process is well suited to combined with various patterning techniques.
While the invention has been described in connection with what is presently considered to be the most practical and preferred embodiments, it is to be understood that the invention is not to be limited to the disclosed embodiments, on the contrary, is intended to cover various modifications and equivalent arrangements within the appended claims.

Claims

1. A method of producing nanostructured devices comprising a nanowire epitaxially grown from a surface of a substrate, the method characterized by the steps of:
-(a) hydrogen termination of the surface of the substrate (100) to provide a substrate with a temporarily passivated surface (110); -(b) providing an oxide template (115) on the passivated surface (110) of the substrate (105), the oxide template defining a plurality of nucleation onset positions for the subsequent nanowire growth; and
-(c) growing nanowires in the nucleation onset positions defined by the oxide template on the substrate surface (110).
2. The method according to claim 1, wherein the structure of the oxide template (115) is self-assembled.
3. The method according to claim 1 or 2, wherein the oxide template forms a growth inhibiting mask of primarily Siθ2 with holes, or weakenings in the mask forming the nucleation onset positions.
4. The method according to claim 3, wherein in the growing step, nanowires nucleate and grow in the holes or weakenings of the growth inhibiting mask.
5. The method according to any of claims 1-4, wherein the step of providing an oxide template (515) comprises a pre-treatment prior to the growth phase comprising the steps of:
-applying (b": l), a thin organic film on the substrate surface; and -providing (b":2) a nucleation onset period, wherein the conditions as regards to time and environment are controlled so that a partial oxidation occurs on the substrate surface (510), the oxidation guided at least partly by the applied thin organic film or residues of the film giving a correlation between the structure of the oxide template (515) and the thin organic film or the residues of the film.
6. The method according to claim 5, wherein the thin organic film forms a plurality of localized areas with increased permeability.
7. The method according to claim 5, wherein in the thin organic film is formed a plurality of cracks.
8. The method according to claim 6 or 7, wherein a localized oxidation on the surface of the substrate occur at the areas with increased permeability or at the cracks.
9. The method according to any of claims FeI! Hittar inte referenskalla. to 9, wherein the nucleation onset period comprises exposing the substrate to humidity.
10. The method according to any of claims FeI! Hittar inte referenskalla. to 9, wherein the nucleation onset period comprises exposing the substrate to oxidizing substances.
11. The method according to claim 5, wherein the thin organic film forms localised residues (514) on the substrate surface (510), and the oxidation process is controlled to give a essentially full oxidation of the substrate surface, except in areas covered by organic residues (514) which become less or non-oxidised, thereby, in a subsequent growth step, nanowires will nucleate and growth in positions on the substrate previously covered by the organic residues.
12. The method according to claim 11, wherein the oxidation will result in a layer of Siθ2 covering the substrate surface, except in areas covered by organic residues 514
13. The method according to claim 5, wherein the formation of nucleation onset positions comprises a forming of SiOx clusters on the substrate surface, the SiOx clusters to act as catalyst particles in a subsequent growing of nanowires.
14. The method according to claim 5, wherein the formation of nucleation onset positions comprises forming residues of the thin organic film on the substrate surface, the residues to act as catalyst particles in a subsequent growing of nanowires.
15. The method according to claim 5, wherein the formation of nucleation onset positions comprises forming residues of the thin organic film on the substrate surface, the residues locally altering the substrate surface and the localized alterations acting as nucleation onset positions in a subsequent growing of nanowires.
16. The method according to claim 5, wherein the applied thin organic film act as a mask in a subsequent growing of nanowires and nanowires are located in holes in the mask, the holes spontaneously formed during the nucleation onset period.
17. The method according to any of claims 1-4, wherein the step of providing an oxide template (515) comprises:
-(b5) applying a thin layer of a volatile species to the substrate, the thin layer of a volatile species forming an oxide template 115; and -(C5) providing, during a growth phase, conditions as regard to time, pressure and temperature ensuring that the nucleation of nanowires is guided by the oxide template (115).
18. The method according to claim 17, wherein the thin layer of a volatile species comprises of a non-metallic oxide.
19. The method according to claim 17, wherein the thin layer of a volatile species comprises of a non-metallic nitride.
20. The method according to claim 17, wherein the thin layer of a volatile species comprises of a non-metallic phosphide.
21. The method according to any of claim 17 to 20, wherein the catalyst layer comprises one of, or a combination of silicon oxide, silicon nitride or silicon phosphide.
22. The method according to claim 21, wherein the catalyst layer comprises of SiOx (x~l).
23. The method according to any of claim 17 to 21, further comprising patterning the catalyst layer with a lithographic method.
24. The method according to claim 23, wherein in the growth phase first conditions are provided, as regards to temperature, time and pressure, such that the growth of the nanowires are initiated before the catalyst layer is fully evaporated.
25. The method according to claim 24, wherein, a source for the nanowire growth is turned on at a substrate temperature lower than the evaporation temperature of the catalyst layer.
26. The method according to claim 25, wherein, the catalyst layer is made of SiOx (x~l), and the nanowires are grown by low pressure metal organic vapor phase epitaxy (LP-MOVPE), and the sources are activated already during a substrate heating-up period at 510 - 520 0C.
27. The method according to any of claim 17 to 21, further comprising providing second conditions wherein the temperature of the substrate is optimised for promoting the growth of the nanowires, and the second temperature is higher than the first temperature used during the first conditions.
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