WO2007092803A3 - Laser-based removal of target link structures - Google Patents
Laser-based removal of target link structures Download PDFInfo
- Publication number
- WO2007092803A3 WO2007092803A3 PCT/US2007/061592 US2007061592W WO2007092803A3 WO 2007092803 A3 WO2007092803 A3 WO 2007092803A3 US 2007061592 W US2007061592 W US 2007061592W WO 2007092803 A3 WO2007092803 A3 WO 2007092803A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- target link
- laser output
- link structure
- laser
- substrate
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0736—Shaping the laser spot into an oval shape, e.g. elliptic shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
- B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Laser Beam Processing (AREA)
- Lasers (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
Laser-based methods and systems for removing one or more target link structures 107 of a circuit fabricated on a substrate 110 includes generating a pulsed laser output at a predetermined wavelength less than an absorption edge of the substrate are provided. The laser output includes at least one pulse having a pulse duration in the range of about 10 picoseconds to less than 1 nanosecond, the pulse duration being within a thermal laser processing range. The method also includes delivering and focusing the laser output ontothe target link structure. The focused laser output has sufficient power density at a location within the target link structure to reduce the reflectivity of the target link structure and efficiently couple the focused laser output into the target link structure to remove the target link structure without damaging the substrate.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020087021624A KR101370156B1 (en) | 2006-02-03 | 2007-02-05 | Laser-based method and system for removing one or more target link structures |
JP2008553540A JP2009526383A (en) | 2006-02-03 | 2007-02-05 | Laser-based method and system for removing one or more target link structures |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US76540106P | 2006-02-03 | 2006-02-03 | |
US60/765,401 | 2006-02-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2007092803A2 WO2007092803A2 (en) | 2007-08-16 |
WO2007092803A3 true WO2007092803A3 (en) | 2008-09-18 |
Family
ID=38345903
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2007/061592 WO2007092803A2 (en) | 2006-02-03 | 2007-02-05 | Laser-based removal of target link structures |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2009526383A (en) |
KR (1) | KR101370156B1 (en) |
CN (1) | CN101410219A (en) |
TW (1) | TWI379724B (en) |
WO (1) | WO2007092803A2 (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10307862B2 (en) * | 2009-03-27 | 2019-06-04 | Electro Scientific Industries, Inc | Laser micromachining with tailored bursts of short laser pulses |
JP5552373B2 (en) | 2010-06-02 | 2014-07-16 | 浜松ホトニクス株式会社 | Laser processing method |
DE102010025966B4 (en) * | 2010-07-02 | 2012-03-08 | Schott Ag | Interposer and method for making holes in an interposer |
TWI454006B (en) * | 2011-11-18 | 2014-09-21 | Ind Tech Res Inst | Apparatus for controlling laser |
EP2789061B1 (en) * | 2013-02-27 | 2017-02-01 | WaveLight GmbH | Laser apparatus and method for laser processing a target material |
KR101483759B1 (en) * | 2013-07-19 | 2015-01-19 | 에이피시스템 주식회사 | Apparatus for processing fragile substrate using multi lasers and method thereof |
CN106330329B (en) * | 2016-08-22 | 2018-07-03 | 浙江大学 | Based on the wireless light communication devices and methods therefor for directly modulating DPSSL |
JP6781649B2 (en) * | 2017-03-13 | 2020-11-04 | 株式会社ディスコ | Laser processing equipment |
JP2018043034A (en) * | 2017-11-27 | 2018-03-22 | ノバルティス アーゲー | Laser apparatus and method for processing target material by laser |
US10352995B1 (en) | 2018-02-28 | 2019-07-16 | Nxp Usa, Inc. | System and method of multiplexing laser triggers and optically selecting multiplexed laser pulses for laser assisted device alteration testing of semiconductor device |
US10782343B2 (en) | 2018-04-17 | 2020-09-22 | Nxp Usa, Inc. | Digital tests with radiation induced upsets |
US20200316722A1 (en) * | 2019-04-02 | 2020-10-08 | Asm Technology Singapore Pte Ltd | Optimised laser cutting |
RU2736126C1 (en) * | 2020-02-10 | 2020-11-11 | Федеральное государственное бюджетное учреждение науки Институт машиноведения им. А.А. Благонравова Российской академии наук (ИМАШ РАН) | Method of three-stage laser facing |
KR102363962B1 (en) * | 2020-04-21 | 2022-02-17 | 국방과학연구소 | System, method, computer-readable storage medium and computer program for photon-based target detection |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4914663A (en) * | 1988-04-22 | 1990-04-03 | The Board Of Trustees Of Leland Stanford, Jr. University | Generation of short high peak power pulses from an injection mode-locked Q-switched laser oscillator |
US5745284A (en) * | 1996-02-23 | 1998-04-28 | President And Fellows Of Harvard College | Solid-state laser source of tunable narrow-bandwidth ultraviolet radiation |
US20020162973A1 (en) * | 2001-03-29 | 2002-11-07 | Cordingley James J. | Methods and systems for processing a device, methods and systems for modeling same and the device |
US20040243112A1 (en) * | 2003-06-02 | 2004-12-02 | Mark Bendett | Apparatus and method for ophthalmologic surgical procedures using a femtosecond fiber laser |
US20050041702A1 (en) * | 1997-03-21 | 2005-02-24 | Imra America, Inc. | High energy optical fiber amplifier for picosecond-nanosecond pulses for advanced material processing applications |
US20050215985A1 (en) * | 2003-08-11 | 2005-09-29 | Michael Mielke | Method of generating an ultra-short pulse using a high-frequency ring oscillator |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040134894A1 (en) | 1999-12-28 | 2004-07-15 | Bo Gu | Laser-based system for memory link processing with picosecond lasers |
US20020016758A1 (en) | 2000-06-28 | 2002-02-07 | Grigsby Calvin B. | Method and apparatus for offering, pricing, and selling securities over a network |
-
2007
- 2007-02-02 TW TW096103896A patent/TWI379724B/en not_active IP Right Cessation
- 2007-02-05 JP JP2008553540A patent/JP2009526383A/en active Pending
- 2007-02-05 KR KR1020087021624A patent/KR101370156B1/en not_active IP Right Cessation
- 2007-02-05 CN CNA2007800112965A patent/CN101410219A/en active Pending
- 2007-02-05 WO PCT/US2007/061592 patent/WO2007092803A2/en active Application Filing
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4914663A (en) * | 1988-04-22 | 1990-04-03 | The Board Of Trustees Of Leland Stanford, Jr. University | Generation of short high peak power pulses from an injection mode-locked Q-switched laser oscillator |
US5745284A (en) * | 1996-02-23 | 1998-04-28 | President And Fellows Of Harvard College | Solid-state laser source of tunable narrow-bandwidth ultraviolet radiation |
US20050041702A1 (en) * | 1997-03-21 | 2005-02-24 | Imra America, Inc. | High energy optical fiber amplifier for picosecond-nanosecond pulses for advanced material processing applications |
US20020162973A1 (en) * | 2001-03-29 | 2002-11-07 | Cordingley James J. | Methods and systems for processing a device, methods and systems for modeling same and the device |
US20020167581A1 (en) * | 2001-03-29 | 2002-11-14 | Cordingley James J. | Methods and systems for thermal-based laser processing a multi-material device |
US20040243112A1 (en) * | 2003-06-02 | 2004-12-02 | Mark Bendett | Apparatus and method for ophthalmologic surgical procedures using a femtosecond fiber laser |
US20050215985A1 (en) * | 2003-08-11 | 2005-09-29 | Michael Mielke | Method of generating an ultra-short pulse using a high-frequency ring oscillator |
Also Published As
Publication number | Publication date |
---|---|
TW200735992A (en) | 2007-10-01 |
KR101370156B1 (en) | 2014-03-06 |
JP2009526383A (en) | 2009-07-16 |
WO2007092803A2 (en) | 2007-08-16 |
CN101410219A (en) | 2009-04-15 |
KR20090061607A (en) | 2009-06-16 |
TWI379724B (en) | 2012-12-21 |
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