WO2007070957A1 - Procede et appareil generateurs de particules - Google Patents
Procede et appareil generateurs de particules Download PDFInfo
- Publication number
- WO2007070957A1 WO2007070957A1 PCT/AU2006/001951 AU2006001951W WO2007070957A1 WO 2007070957 A1 WO2007070957 A1 WO 2007070957A1 AU 2006001951 W AU2006001951 W AU 2006001951W WO 2007070957 A1 WO2007070957 A1 WO 2007070957A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- particles
- process according
- liquid
- transducer element
- vibration
- Prior art date
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D1/00—Evaporating
- B01D1/16—Evaporating by spraying
- B01D1/18—Evaporating by spraying to obtain dry solids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2/00—Processes or devices for granulating materials, e.g. fertilisers in general; Rendering particulate materials free flowing in general, e.g. making them hydrophobic
- B01J2/02—Processes or devices for granulating materials, e.g. fertilisers in general; Rendering particulate materials free flowing in general, e.g. making them hydrophobic by dividing the liquid material into drops, e.g. by spraying, and solidifying the drops
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2/00—Processes or devices for granulating materials, e.g. fertilisers in general; Rendering particulate materials free flowing in general, e.g. making them hydrophobic
- B01J2/18—Processes or devices for granulating materials, e.g. fertilisers in general; Rendering particulate materials free flowing in general, e.g. making them hydrophobic using a vibrating apparatus
Definitions
- the present invention relates to a process and apparatus for generating particles.
- biopharmaceuticals A new generation of therapeutics known as biopharmaceuticals includes biologic drugs, proteins, polynucleotides and liposomes.
- biopharmaceuticals the efficiency of biopharmaceuticals is limited by their generally poor update in the human body.
- One approach to address the very low cell transection efficiencies of biopharmaceutical is to administer large doses. However, this can lead to unwanted side-effects such as toxicity and multidrug resistance, as well as the economic factors of higher expense per dose and the need for greater biopharmaceutical production.
- the two steps that limit biopharmaceutical uptake in the body are: (i) the cellular uptake of the biopharmaceutical, and (ii) the migration of the biopharmaceutical into the cell nucleus.
- a process for generating particles including: applying an ultrasonic signal to at least one electrode of a piezoelectric transducer element to generate vibrations in said transducer element; and applying a liquid to a surface of said transducer element, said liquid including a particle forming component and a carrier component; whereby the vibration of said transducer element generates droplets of said liquid to form substantially solid particles by evaporation of at least part of said carrier component.
- the ultrasonic signal has a frequency of at least about 1 MHz.
- said particles have a diameter of less than about 1000 nm.
- the carrier component is substantially volatile.
- the vibration of said transducer element is such that the formed particles have a substantially monodisperse size distribution.
- the transducer element may include electrodes located on opposing surfaces of a piezoelectric material to excite piston mode vibration of said material.
- said vibration is at a frequency of at least about 100 to 500 MHz.
- said vibration is at a resonance frequency of said material.
- the transducer element may include the electrodes located on one surface of said material to excite surface acoustic waves in said surface.
- the ultrasonic signal applied to the electrode may be at a frequency of at least about 8 MHz.
- the diameter of said droplets is less than about 6000 nm.
- the diameter of said particles is less than about 250 nm.
- the diameter of said particles is less than about 50 nm.
- said particle forming component of said liquid includes a polymer.
- said polymer is suitable for drug delivery to a human being.
- said particle forming component of said liquid may include a metal or ceramic.
- said liquid may include a drug.
- said liquid may include a biopharmaceutical substance.
- said particles may include a liquid encapsulated within a solid.
- the present invention also provides an apparatus for generating particles, including: a transducer element including a piezoelectric material having at least one electrode located on one or more surfaces of said material; a signal generator connected to said electrode to apply an ultrasonic signal to said electrodes, thereby generating vibrations in said material; whereby the vibration of said material generates droplets of a liquid applied to a surface of said material, the liquid including a particle forming component and a carrier component such that the droplets form substantially solid particles by evaporation of at least part of said carrier component.
- the apparatus includes a dispensing component for dispensing said liquid to said surface.
- the ultrasonic signal has a frequency of at least about 1 MHz.
- said particles have a diameter of less than about 1000 nm.
- the carrier component is substantially volatile.
- the vibration of said material is such that the formed particles have a substantially monodisperse size distribution.
- the electrodes may be on opposing surfaces of said material to excite piston mode vibration of said material.
- said vibration is at a frequency of at least about 100 to 500 MHz.
- said vibration is a resonance frequency of said material.
- the electrodes may be located on one surface of said material to excite surface acoustic waves in said surface.
- the ultrasonic signal applied to the electrode may be at a frequency of at least about 8 MHz.
- the diameter of said droplets is less than about 6000 nm.
- the diameter of said particles is less than about 250 nm.
- the diameter of said particles is less than about 50 nm.
- said particle forming component of said liquid includes a polymer.
- said polymer is suitable for drug delivery to a human being.
- said particle forming component of said liquid may include a metal or ceramic.
- said liquid may include a drug.
- said liquid may include a biopharmaceutical substance.
- Figure 1 is a schematic diagram of a preferred embodiment of an apparatus for producing nanoparticles
- Figure 2 is a flow diagram of a preferred embodiment of a process for producing nanoparticles using the apparatus
- Figures 3 and 4 are graphs of particle size distribution produced by the atomizer using vibration velocities of 1.0 and 1.4 m/s, respectively;
- Figure 5 is a schematic diagram of a piezoelectric transducer of the SAW atomizer in accordance with a second preferred embodiment of the invention
- Figure 6 is an image of a photolithographic mask used to define electrodes of a SAW atomizer in accordance with Figure 5;
- Figures 7 and 8 are images of portions of the photolithographic mask used to define pairs of interdigitated electrodes for the SAW atomizer
- Figure 9 is a graph of particle size distribution produced by the SAW atomizer.
- Figure 10 is a scanning electron microscope image of agglomerated particles of zeolite produced by the SAW atomizer, each particle having a diameter of about 100 nm.
- an apparatus for generating particles includes a piezoelectric transducer element 101 in the form of a cylindrical disc 102 of a hard piezoelectric material such as lead zirconate titanate (PZT) and having a diameter of about 20 to 30 mm and a thickness of about 1 mm.
- the apparatus also referred to herein as an atomizer, is described herein in relation to an atomization process, as shown in Figure 2, that generates substantially solid particles, via the formation of nanoscale droplets of a liquid that includes a particle forming component and a carrier component.
- step 202 500-nm thick layers of platinum (Pt) metal are deposited onto the opposing planar faces of the disc 102 to provide electrodes 104 for the atomizer.
- the PZT disc 102 is then polarized by applying a 20 kV/cm electric field to orient the electric domains within the ceramic PZT disc 102 along the thickness direction of the disc 102.
- the electrodes 104 are subsequently connected to outputs of respective polarities of a Radio Frequency (RF) signal generator 106.
- RF Radio Frequency
- the RF signal generator 106 drives the PZT transducer element 101 with a sinusoidal signal having an ultrasonic frequency of at least about 1 MHz, thereby causing the opposing planar faces of the transducer element 101 to vibrate with a relatively constant and in-phase piston-like motion across each planar face of the transducer element 101.
- the disk 102 is preferably driven in either its fundamental (being in this case 1.645 MHz) or first harmonic (5.345 MHz) thickness mode of vibration.
- a drop of a desired fluid is applied to the underside or downward directed face 108 of the transducer element 101 from a syringe 110 or other form of liquid pump, using a supply tube 112 to conduct the fluid from the syringe 110 to the transducer element 101.
- the liquid applied to the face of the transducer element 101 includes a particle forming component and a carrier component.
- the particle forming component can be any substance that can be dissolved in the carrier component and that solidifies to a substantial extent upon removal of the carrier component. Examples of suitable particle forming components include polymers, metals, and ceramics.
- the particle forming component is preferably a polymer, and more preferably a polymer suitable for drug delivery to a human being, being a physiologically acceptable polymer that biodegrades into non-harmful products such as natural metabolites or other materials that can be readily cleared from the body on an acceptable time scale.
- the liquid can also include chemical and/or biological markers to harness cellular transport mechanisms and thereby increase transfection efficiencies into cells.
- the liquid may also control the release of an encapsulated drug by selective degradation of the polymer matrix upon injection, ingestion or inhalation.
- the liquid drop 112 on the lower face 108 of the transducer element 102 is atomized, whereby tiny droplets or particles of the liquid are emitted from the surface of the drop 112.
- the droplets are generated by acoustic radiation transmitted from the PZT element into the liquid applied to the transducer face 108, as described in Robert J. Lang, Ultrasonic atomization of liquids, Journal of the Acoustical Society of America Vol. 34, No. 1 , 1962 (“Lang").
- the droplets are believed to be generated by surface capillary waves at low power excitation of the PZT element, and by surface instabilities about the crests of these waves at higher power excitation.
- the atomized droplets or particles 116 fall a distance 118 (being in this case about 8 cm) under gravity to a capture medium 120 contained in a vessel 122 located under the transducer element 101 at step 208, allowing for evaporation of the carrier component of the liquid within the atomized droplets to form substantially solid or hollow, fluid-containing particles.
- the particles can be monodisperse with diameters on a nanometer-scale.
- the capture medium contains chemicals to prevent agglomeration of the formed nanoparticles.
- the capture medium consists of deionized (Dl) water and a hardening agent such as sodium dodecyl sulfate (SDS) at 1 mM, which facilitates the precipitation of the particles 116 in the capture medium 120.
- the nanoparticle-containing capture medium and hardening agent is then centrifuged at approximately 2500 rpm for 10 minutes in a swinging bucket rotor to remove any large agglomerates that may have formed, due predominantly to accumulation of the hydrophobic polymer at the air-liquid interface. Measurement of the particle size distribution both before and after centrifugation indicates that the distribution and yield of the nanoparticles was unaffected by the centrifuge.
- a polymeric solution was prepared by dissolving polycaprolactone (PCL), with a molecular weight of 65 000 Dalton in acetone (99.5% purity) to create a feedstock solution of 0.5% PCL weight per volume (w/v).
- PCL polycaprolactone
- the feedstock solution pumped onto the face 108 of the transducer element 102 forms a 10-mm diameter droplet with a wetting angle of approximately 30 degrees, maintained through controlled pumping rate of the feedstock solution.
- the acetone carrier component evaporates very rapidly upon atomization to produce solid particles of the polymer.
- the resulting particle sizes were measured using a Zetasizer instrument from the UK company Malvern Instruments with Dispersion Technology Software version 4.10b1.
- the Z-average particle size of each sample is defined as the diameter of the sphere that diffuses at the same speed as the particle being measured.
- the Malvern system determines Z-average particle size by measuring the Brownian motion of the particles in a sample using dynamic light scattering. The vibration velocity of the surface was monitored using a laser Doppler vibrometer during operation.
- Figure 3 is a log-linear graph of the particle size frequency distribution under the conditions which resulted in the smallest Z- average particle size observed, 181 nm, with a standard deviation ( ⁇ ) of 6.5 nm.
- Figure 3 is essentially a monodisperse, symmetrical (on a log-linear scale) frequency distribution 302.
- a small amount of larger agglomerations 304 which were not removed by the centrifuge are visible in the graph at diameters of approximately 500 to 700 nm.
- Figure 4 is a graph of the bimodal particle size frequency distribution that was obtained when the vibration velocity was increased to 1.4 m/s.
- the reduced efficiency of the atomisation process may be caused by overheating of the liquid, causing it to boil away, or by the ejection of far larger droplets from the surface of the drop 114 than at the lower vibration velocity of 1.0 m/s.
- the efficiency of the atomisation process is also reduced if the concentration of SDS in the capture solution hardening agent is increased to 100 mM. It is believed that the hydrophobic nature of the polymer prevents the creation of a stable emulsification in water, and hence a surfactant is added to assist in stabilizing the nanoparticle/hardening agent solution.
- the critical micelle concentration (CMC) of SDS in water is approximately 2.5 g/l or 8.7 mM. It was observed that, at concentrations below and above the CMC of SDS in water, e.g. 1 mM and 10 mM, no sedimentation of the nanoparticles occurred. At much higher SDS concentrations, e.g. 100 mM or 11.5 CMC, the particles tended to form larger aggregates that varied greatly in size, as indicated by the larger Z- average particle diameter and larger standard deviation in column 3 of Table 1.
- nanoparticles of fluid are generated by surface acoustic waves on the surface of a piezoelectric transducer, as described in M. Kurosawa, A. Futami, and T. Higuchi, Characteristics of Liquids Atomization Using Surface Acoustic Wave, Proc. of Transducer 97, Chicago, USA (“Kurosawa”), rather than by piston movement of the entire transducer, as described above.
- the transducer element 501 includes four interdigitated finger electrode pairs 502,
- the substrate 506 is cut from a 128 Y-X rotated
- LiNbO 3 crystal wafer sourced from Roditi UK, Ltd.
- Electrodes 502 and 503 are connected to respective polarity outputs of the signal generator 106, with the other pair of electrodes 504, 505 being left disconnected, short-circuited, or also connected to the signal generator 106 in the same manner as the first pair pf electrodes 502, 503 to obtain different forms of wave vibration along the crystal surface.
- the electrodes are defined by photolithography using the quartz mask shown in Figure 6. The mask defines four sets of electrode pairs and thus can be used to produce four surface acoustic wave (SAW) atomizers.
- SAW surface acoustic wave
- the upper three rows of electrode pairs are identical and define a simple interdigitated electrode pair configuration as shown in Figure 5.
- Each electrode is formed by depositing a 5-nm thick adhesion layer of titanium followed by a 250-nm-thick layer of aluminium.
- the black boxes 604 around the periphery of the mask are used to align cutting lines; the corner boxes 606 demarcate the sides of the top and bottom atomizers and ends of all four atomizers.
- the smaller boxes 604 along the left and right sides demarcated the dividing lines between the atomizers.
- Wires (not shown) are attached to the upper and lower bars 608 of each pair of interdigitated finger electrodes to conduct the ultrasonic driving signals to each of the electrode fingers.
- the Rayleigh waves are essentially isolated to the region where the fingers overlap, and propagate in both directions from each electrode pair. Reflection of the Rayleigh wave generated from the electrodes off the left and right edges is reduced by coating the edges of the LiNbOs crystal with silicone rubber. The left electrode pair and right electrode pair are used together to form
- Rayleigh surface acoustic waves
- SAW surface acoustic waves
- These waves are formed by the inverse piezoelectric effect among the fingers of each electrode pair, where a differential charge between fingers causes distortion of the surface at a speed which matches the speed of sound of the Rayleigh wave divided by the distance between the IDT fingers.
- the speed of sound of Rayleigh wave along the y-axis of 128 Y-X LiNbO 3 material is 5112 m/s
- four times the 110-micron inter-finger width is 440 microns, giving a frequency of 11.6 MHz.
- the RF signal generator 106 drives the lithium niobate element 506 with a sinusoidal signal having an ultrasonic frequency of at least about 1 MHz, thereby causing the planar faces of the transducer element 506 to vibrate with a relatively constant sinusoidal motion between and within electrodes 502 to 505, perpendicular to the planar face and along a direction between the electrodes 502, 503 and electrodes 504, 505.
- the piezoelectric substrate 506 is preferably driven in its fundamental (being in this case 8.611 MHz) surface acoustic wave (Rayleigh) mode of vibration.
- Figure 7 shows a more detailed schematic of one of the left-hand upper pads 602 from Figure 6.
- the interlaced fingers are evenly spaced, with 110- micron wide fingers and 110-micron wide gaps between the fingers.
- Excitation of the electrodes with a signal of ultrasonic frequencies generates surface acoustic waves that travel along the surface of the lithium niobate substrate 506.
- a liquid droplet is applied to the excited surface of the substrate 506 in an arrangement identical to that shown in Figure 1 , thereby generating nanoparticles of fluid as described above for the first embodiment.
- Figure 8 is an enlarged image of the lower left-hand electrode pair 610 of the mask shown in Figure 6. It will be apparent from Figure 6 that the lower set of electrodes 610, 612 are different from the other electrodes 602 on the mask. While the upper three sets of electrodes 602 are of a relatively simple and symmetrical design, and are all identical to each other, the two lower electrodes 610, 612 are more complex and are asymmetrical. Additionally, these two electrodes 610, 612 are not identical to each other but rather are mirror images of each other. This arrangement cancels out the left-ward propagation of the generated wave in the left electrode pair 610; and correspondingly, the right-ward propagation of the generated wave in the right electrode pair 612.
- the electrode pairs are therefore unidirectional, generating SAW radiation in only one direction.
- An additional feature of these electrodes 610, 612 is the ability to efficiently excite harmonic overtones of the fundamental resonance frequency of the electrode pattern which lies at approximately 10 MHz, permitting the use of higher- frequency resonances to atomize fluids placed between the two electrode pairs 610, 612.
- the transducer element 501 was driven at 8.611 MHz and used to atomise a fluid drop of polycaprolactone (PCL) dissolved at 5% w/v in acetone. As shown in Figure 9, this generates monodisperse particles with a range of diameters narrowly distributed around an average diameter of around 63 nm +/-8.188 nm; 96% of the particles were within this narrow range.
- the transducer element 501 was again driven at 8.611 MHz at a minimum input power of 2W required for atomising the working fluid. The experiment used a weaker concentration of polycaprolactone (PCL) dissolved at 1% weight per weight (w/w) in acetone.
- the working fluid was supplied to the transducer element 501 using a syringe pump at a flow rate of 24 mol/hr. It was observed that the atomisation of the working fluid was difficult to achieve when the PCL concentration was higher than 1% w/w. Rapid evaporation of acetone prior to atomisation left a film of polymer which covered the surface of the transducer and consequently damped the capillary waves from where the microdroplets are understood to be generated.
- the size and shape of the produced nanoparticles were determined using a number of different techniques consisting of Dynamic Light Scattering (DLM), Atomic Force Microscopy (AFM) and Transmission Electron Microscopy (TEM).
- Figure 10 is a scanning electron micrograph of zeolite particles generated by the SAW atomizer.
- the agglomerated zeolite particles each have a diameter of about 100 nm.
- the nanoparticles were generated by atomizing a rather caustic (pH 13) solution of zeolite in 25% ethanol, 50% acetone, and 25% NaOH.
- the ceramic zeolite dissolves in the caustic solution, but solidifies rapidly on atomization via evaporation of the acetone and ethanol carrier components.
- the particles are collected on a solid surface and heated at 250 0 C for 15 minutes to remove any residual solvent.
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Special Spraying Apparatus (AREA)
Abstract
L’invention concerne un procédé et un appareil générateurs de particules. Le procédé comprend les étapes consistant à : appliquer un signal ultrasonore à au moins une électrode (104, 502, 503, 504, 505) d’un élément transducteur piézoélectrique (101, 501) de manière à générer des vibrations dans ledit élément transducteur ; et appliquer un liquide sur une surface (108) dudit élément transducteur, ledit liquide contenant un composant formant des particules et un composant support. Le procédé est caractérisé en ce que les vibrations dudit élément transducteur produisent des gouttelettes de liquide en formant des particules sensiblement solides par évaporation d’une partie au moins dudit composant support.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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AU2005907181 | 2005-12-21 | ||
AU2005907181A AU2005907181A0 (en) | 2005-12-21 | Process and Apparatus for Generating Particles |
Publications (1)
Publication Number | Publication Date |
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WO2007070957A1 true WO2007070957A1 (fr) | 2007-06-28 |
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Application Number | Title | Priority Date | Filing Date |
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PCT/AU2006/001951 WO2007070957A1 (fr) | 2005-12-21 | 2006-12-20 | Procede et appareil generateurs de particules |
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WO (1) | WO2007070957A1 (fr) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1930071A1 (fr) * | 2006-12-06 | 2008-06-11 | ECKA Granulate GmbH & Ko. KG | Procédé destiné à la fabrication de particules de matériau coulant et installation d'atomisation destinée à celui-ci |
ITPD20090249A1 (it) * | 2009-09-02 | 2011-03-03 | Fond Carlo E Dirce Callerio O Nlus | Metodo e apparato per la preparazione di micro-particelle di polisaccaridi |
WO2016118704A1 (fr) * | 2015-01-21 | 2016-07-28 | Melior Innovations, Inc. | Procédés de fabrication de particules de céramique dérivées de polymère |
US9481781B2 (en) | 2013-05-02 | 2016-11-01 | Melior Innovations, Inc. | Black ceramic additives, pigments, and formulations |
FR3043576A1 (fr) * | 2015-11-18 | 2017-05-19 | Areco Finances Et Tech - Arfitec | Dispositif miniaturise de pulverisation a transducteur piezoelectrique |
US9657409B2 (en) | 2013-05-02 | 2017-05-23 | Melior Innovations, Inc. | High purity SiOC and SiC, methods compositions and applications |
US9828542B2 (en) | 2013-03-15 | 2017-11-28 | Melior Innovations, Inc. | Methods of hydraulically fracturing and recovering hydrocarbons |
CN110961031A (zh) * | 2019-11-29 | 2020-04-07 | 淮阴工学院 | 一种非接触式微/纳颗粒操控方法 |
US10836682B2 (en) | 2017-07-22 | 2020-11-17 | Melior Innovations, Inc. | Methods and apparatus for conducting heat exchanger based reactions |
US11311686B2 (en) | 2014-11-11 | 2022-04-26 | The University Court Of The University Of Glasgow | Surface acoustic wave device for the nebulisation of therapeutic liquids |
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---|---|---|---|---|
EP1930071A1 (fr) * | 2006-12-06 | 2008-06-11 | ECKA Granulate GmbH & Ko. KG | Procédé destiné à la fabrication de particules de matériau coulant et installation d'atomisation destinée à celui-ci |
ITPD20090249A1 (it) * | 2009-09-02 | 2011-03-03 | Fond Carlo E Dirce Callerio O Nlus | Metodo e apparato per la preparazione di micro-particelle di polisaccaridi |
WO2011026896A1 (fr) * | 2009-09-02 | 2011-03-10 | Fondazione Carlo E Dirce Callerio Onlus | Procédé et appareil de préparation de microparticules de polysaccharides |
US8545739B2 (en) | 2009-09-02 | 2013-10-01 | Moreno Cocchietto | Method and apparatus for preparing micro-particles of polysaccharides |
US9828542B2 (en) | 2013-03-15 | 2017-11-28 | Melior Innovations, Inc. | Methods of hydraulically fracturing and recovering hydrocarbons |
US9481781B2 (en) | 2013-05-02 | 2016-11-01 | Melior Innovations, Inc. | Black ceramic additives, pigments, and formulations |
US9657409B2 (en) | 2013-05-02 | 2017-05-23 | Melior Innovations, Inc. | High purity SiOC and SiC, methods compositions and applications |
US11311686B2 (en) | 2014-11-11 | 2022-04-26 | The University Court Of The University Of Glasgow | Surface acoustic wave device for the nebulisation of therapeutic liquids |
US11771846B2 (en) | 2014-11-11 | 2023-10-03 | The University Court Of The University Of Glasgow | Nebulisation of liquids |
WO2016118704A1 (fr) * | 2015-01-21 | 2016-07-28 | Melior Innovations, Inc. | Procédés de fabrication de particules de céramique dérivées de polymère |
FR3043576A1 (fr) * | 2015-11-18 | 2017-05-19 | Areco Finances Et Tech - Arfitec | Dispositif miniaturise de pulverisation a transducteur piezoelectrique |
US10836682B2 (en) | 2017-07-22 | 2020-11-17 | Melior Innovations, Inc. | Methods and apparatus for conducting heat exchanger based reactions |
CN110961031A (zh) * | 2019-11-29 | 2020-04-07 | 淮阴工学院 | 一种非接触式微/纳颗粒操控方法 |
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