WO2007070566A3 - Optical fiber-delivered reference beam for interferometric imaging - Google Patents
Optical fiber-delivered reference beam for interferometric imaging Download PDFInfo
- Publication number
- WO2007070566A3 WO2007070566A3 PCT/US2006/047521 US2006047521W WO2007070566A3 WO 2007070566 A3 WO2007070566 A3 WO 2007070566A3 US 2006047521 W US2006047521 W US 2006047521W WO 2007070566 A3 WO2007070566 A3 WO 2007070566A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- optical fiber
- illumination source
- reference beam
- interferometric imaging
- illumination
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
Abstract
The present invention includes an interferometric imaging system including a paraboloid mirror defining an axis and an illumination source adapted to radiate light from an illumination point of an illumination optical fiber at an off-axis portion of the paraboloid mirror. The present invention also includes a reference illumination source adapted to illuminate the surface of an image receiver through a reference optical fiber with a reference beam having a selectable, variable, or predetermined phase with respect to the illumination source. The from the reference illumination source and light from the optical system cooperate to form a phase image of object on the image receiver.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/299,548 | 2005-12-12 | ||
US11/301,320 US7440114B2 (en) | 2005-12-12 | 2005-12-12 | Off-axis paraboloid interferometric mirror with off focus illumination |
US11/299,548 US20070133008A1 (en) | 2005-12-12 | 2005-12-12 | Optical fiber delivered reference beam for interferometric imaging |
US11/301,320 | 2005-12-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2007070566A2 WO2007070566A2 (en) | 2007-06-21 |
WO2007070566A3 true WO2007070566A3 (en) | 2009-01-08 |
Family
ID=38163493
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2006/047520 WO2007070565A2 (en) | 2005-12-12 | 2006-12-12 | Off-axis paraboloid interferometer with off-axis illumination |
PCT/US2006/047521 WO2007070566A2 (en) | 2005-12-12 | 2006-12-12 | Optical fiber-delivered reference beam for interferometric imaging |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2006/047520 WO2007070565A2 (en) | 2005-12-12 | 2006-12-12 | Off-axis paraboloid interferometer with off-axis illumination |
Country Status (1)
Country | Link |
---|---|
WO (2) | WO2007070565A2 (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5548403A (en) * | 1994-11-28 | 1996-08-20 | The Regents Of The University Of California | Phase shifting diffraction interferometer |
US20040046956A1 (en) * | 1999-04-21 | 2004-03-11 | Chromagen, Inc. | Novel scanning spectrophotometer for high throughput fluorescence detection |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4653855A (en) * | 1984-10-09 | 1987-03-31 | Quantum Diagnostics Ltd. | Apparatus and process for object analysis by perturbation of interference fringes |
US4814774A (en) * | 1986-09-05 | 1989-03-21 | Herczfeld Peter R | Optically controlled phased array system and method |
US5071251A (en) * | 1989-06-12 | 1991-12-10 | California Institute Of Technology | Wavelength independent interferometer |
US6507405B1 (en) * | 1999-05-17 | 2003-01-14 | Ultratech Stepper, Inc. | Fiber-optic interferometer employing low-coherence-length light for precisely measuring absolute distance and tilt |
US6327038B1 (en) * | 1999-09-21 | 2001-12-04 | Ut-Battelle, Llc | Linear and angular retroreflecting interferometric alignment target |
US6806965B2 (en) * | 2001-05-22 | 2004-10-19 | Zygo Corporation | Wavefront and intensity analyzer for collimated beams |
US6882428B2 (en) * | 2001-08-28 | 2005-04-19 | Agilent Technologies, Inc. | Optical analyzer and method for reducing relative intensity noise in interferometric optical measurements using a continuously tunable laser |
JP2004271381A (en) * | 2003-03-10 | 2004-09-30 | Fuji Photo Optical Co Ltd | Speckle interferometry unit |
US7538890B2 (en) * | 2004-06-07 | 2009-05-26 | Fujinon Corporation | Wavefront-measuring interferometer apparatus, and light beam measurement apparatus and method thereof |
-
2006
- 2006-12-12 WO PCT/US2006/047520 patent/WO2007070565A2/en active Application Filing
- 2006-12-12 WO PCT/US2006/047521 patent/WO2007070566A2/en active Application Filing
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5548403A (en) * | 1994-11-28 | 1996-08-20 | The Regents Of The University Of California | Phase shifting diffraction interferometer |
US20040046956A1 (en) * | 1999-04-21 | 2004-03-11 | Chromagen, Inc. | Novel scanning spectrophotometer for high throughput fluorescence detection |
Also Published As
Publication number | Publication date |
---|---|
WO2007070565A2 (en) | 2007-06-21 |
WO2007070565A3 (en) | 2009-09-24 |
WO2007070566A2 (en) | 2007-06-21 |
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