WO2007070566A3 - Optical fiber-delivered reference beam for interferometric imaging - Google Patents

Optical fiber-delivered reference beam for interferometric imaging Download PDF

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Publication number
WO2007070566A3
WO2007070566A3 PCT/US2006/047521 US2006047521W WO2007070566A3 WO 2007070566 A3 WO2007070566 A3 WO 2007070566A3 US 2006047521 W US2006047521 W US 2006047521W WO 2007070566 A3 WO2007070566 A3 WO 2007070566A3
Authority
WO
WIPO (PCT)
Prior art keywords
optical fiber
illumination source
reference beam
interferometric imaging
illumination
Prior art date
Application number
PCT/US2006/047521
Other languages
French (fr)
Other versions
WO2007070566A2 (en
Inventor
Alex Klooster
Carl Aleksoff
Original Assignee
Coherix Inc
Alex Klooster
Carl Aleksoff
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/301,320 external-priority patent/US7440114B2/en
Priority claimed from US11/299,548 external-priority patent/US20070133008A1/en
Application filed by Coherix Inc, Alex Klooster, Carl Aleksoff filed Critical Coherix Inc
Publication of WO2007070566A2 publication Critical patent/WO2007070566A2/en
Publication of WO2007070566A3 publication Critical patent/WO2007070566A3/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02001Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007Two or more frequencies or sources used for interferometric measurement

Abstract

The present invention includes an interferometric imaging system including a paraboloid mirror defining an axis and an illumination source adapted to radiate light from an illumination point of an illumination optical fiber at an off-axis portion of the paraboloid mirror. The present invention also includes a reference illumination source adapted to illuminate the surface of an image receiver through a reference optical fiber with a reference beam having a selectable, variable, or predetermined phase with respect to the illumination source. The from the reference illumination source and light from the optical system cooperate to form a phase image of object on the image receiver.
PCT/US2006/047521 2005-12-12 2006-12-12 Optical fiber-delivered reference beam for interferometric imaging WO2007070566A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US11/299,548 2005-12-12
US11/301,320 US7440114B2 (en) 2005-12-12 2005-12-12 Off-axis paraboloid interferometric mirror with off focus illumination
US11/299,548 US20070133008A1 (en) 2005-12-12 2005-12-12 Optical fiber delivered reference beam for interferometric imaging
US11/301,320 2005-12-12

Publications (2)

Publication Number Publication Date
WO2007070566A2 WO2007070566A2 (en) 2007-06-21
WO2007070566A3 true WO2007070566A3 (en) 2009-01-08

Family

ID=38163493

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/US2006/047520 WO2007070565A2 (en) 2005-12-12 2006-12-12 Off-axis paraboloid interferometer with off-axis illumination
PCT/US2006/047521 WO2007070566A2 (en) 2005-12-12 2006-12-12 Optical fiber-delivered reference beam for interferometric imaging

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/US2006/047520 WO2007070565A2 (en) 2005-12-12 2006-12-12 Off-axis paraboloid interferometer with off-axis illumination

Country Status (1)

Country Link
WO (2) WO2007070565A2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5548403A (en) * 1994-11-28 1996-08-20 The Regents Of The University Of California Phase shifting diffraction interferometer
US20040046956A1 (en) * 1999-04-21 2004-03-11 Chromagen, Inc. Novel scanning spectrophotometer for high throughput fluorescence detection

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4653855A (en) * 1984-10-09 1987-03-31 Quantum Diagnostics Ltd. Apparatus and process for object analysis by perturbation of interference fringes
US4814774A (en) * 1986-09-05 1989-03-21 Herczfeld Peter R Optically controlled phased array system and method
US5071251A (en) * 1989-06-12 1991-12-10 California Institute Of Technology Wavelength independent interferometer
US6507405B1 (en) * 1999-05-17 2003-01-14 Ultratech Stepper, Inc. Fiber-optic interferometer employing low-coherence-length light for precisely measuring absolute distance and tilt
US6327038B1 (en) * 1999-09-21 2001-12-04 Ut-Battelle, Llc Linear and angular retroreflecting interferometric alignment target
US6806965B2 (en) * 2001-05-22 2004-10-19 Zygo Corporation Wavefront and intensity analyzer for collimated beams
US6882428B2 (en) * 2001-08-28 2005-04-19 Agilent Technologies, Inc. Optical analyzer and method for reducing relative intensity noise in interferometric optical measurements using a continuously tunable laser
JP2004271381A (en) * 2003-03-10 2004-09-30 Fuji Photo Optical Co Ltd Speckle interferometry unit
US7538890B2 (en) * 2004-06-07 2009-05-26 Fujinon Corporation Wavefront-measuring interferometer apparatus, and light beam measurement apparatus and method thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5548403A (en) * 1994-11-28 1996-08-20 The Regents Of The University Of California Phase shifting diffraction interferometer
US20040046956A1 (en) * 1999-04-21 2004-03-11 Chromagen, Inc. Novel scanning spectrophotometer for high throughput fluorescence detection

Also Published As

Publication number Publication date
WO2007070565A2 (en) 2007-06-21
WO2007070565A3 (en) 2009-09-24
WO2007070566A2 (en) 2007-06-21

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