WO2007037256A1

WO2007037256A1 - Light wavelength multiplexer/demultiplexer

Info

Publication number: WO2007037256A1
Application number: PCT/JP2006/319137
Authority: WO
Inventors: Tomoyuki Yamada; Yuji Moriya; Mikitaka Itoh
Original assignee: Ntt Electronics Corporation
Priority date: 2005-09-27
Filing date: 2006-09-27
Publication date: 2007-04-05
Also published as: JP2007093721A

Abstract

A change in the chip size, the center wavelength, the wavelength interval or the number of channels of an array waveguide will change the waveguide length or the like of the array waveguide. Then, an array waveguide type wavelength multiplexer/demultiplexer circuit should be produced with the width, length, thickness and inclination angle of its inclined portion changed. Changes in the width, length, thickness and inclination angle of the inclined portion result in changes in production conditions such as etching of the array waveguide type wavelength multiplexer/demultiplexer circuit. A change in etching condition poses problems such as yield of the array waveguide type wavelength multiplexer/demultiplexer circuit and an increase in production man-hours. A wavelength multiplexer/demultiplexer comprising first slab waveguide-side tapered units and second slab waveguide-side tapered unit that are formed at equal intervals, and first slab waveguide-side inclination units and second slab waveguide-side inclination units that are formed between the first slab waveguide-side tapered units and second slab waveguide-side tapered unit.

Description

Specification

Optical wavelength multiplexer / demultiplexer

Technical field

The present invention relates to an optical wavelength multiplexer / demultiplexer in which an arrayed waveguide composed of a plurality of channel waveguides having a constant optical waveguide length difference and a slab waveguide formed at both ends of the arrayed waveguide are formed in the core About. Background art

Conventionally, an optical wavelength multiplexer / demultiplexer using an arrayed waveguide is expected as a main component that is a key component of wavelength multiplexing technology required in an optical fiber communication network or the like.

[0003] An arrayed waveguide type wavelength multiplexing / demultiplexing circuit disclosed in Patent Document 1 using FIGS. 17 to 20

A conventional optical wavelength multiplexer / demultiplexer will be described by taking 90 as an example. FIG. 17 is a conceptual diagram of the arrayed waveguide type wavelength multiplexing / demultiplexing circuit 90. The arrayed waveguide type wavelength multiplexing / demultiplexing circuit 90 includes a first optical waveguide 21, a first slab waveguide 22, a channel waveguide 26, an arrayed waveguide 27, a second slab waveguide 31, and a second optical waveguide 32.

The first optical waveguide 21 is connected to the first slab waveguide 22. The first slab waveguide 22 is connected to one side of the optical waveguide 27. The other side of the arrayed waveguide 27 is connected to the second slab waveguide 31. The second slab waveguide 31 is connected to the second optical waveguide 32.

FIG. 18 is an enlarged view of a broken line part of FIG. FIG. 18 illustrates the first slab waveguide 22, the channel waveguide 26, and the inclined portion 91. The inclined portion 91 is connected to the channel waveguide 26 and the first slab waveguide 22 and to the channel waveguide 26 and the second slab waveguide 31 (shown in FIG. )

FIG. 19 is a cross-sectional view taken along the line CC ′ of FIG. FIG. 19 shows the channel waveguide 26, the substrate 33, the cladding layer 34, and the inclined portion 91. As shown in FIG. 19, the inclined portion 91 is formed between the channel waveguides 26.

FIG. 20 is a cross-sectional view taken along the line DD ′ of FIG. FIG. 20 shows the first slab waveguide 22, the substrate 33, the clad layer 34, and the inclined portion 91. As shown in FIG. The wall thickness decreases as the distance from the first slab waveguide 22 increases.

For example, the arrayed waveguide-type wavelength multiplexing / demultiplexing circuit 90 demultiplexes optical signals of different wavelengths input to the first optical waveguide 21 for each wavelength and outputs them from a predetermined second optical waveguide 32. can do. In addition, since the inclined portion 91 is formed, the arrayed waveguide type wavelength multiplexing / demultiplexing circuit 90 is connected to the array waveguide 27 and the first slab waveguide 22 and the array waveguide 27 and the second slab waveguide. Propagation loss occurring at the connection point with the waveguide 31 can be reduced.

In addition, the arrayed waveguide type wavelength multiplexing / demultiplexing circuit 90 is provided at the connection point between the array waveguide 27 and the first slab waveguide 22 and at the connection point between the array waveguide 27 and the second slab waveguide 31. By forming a part of the taper, propagation loss can be reduced (not shown in Figures 17 to 20).

Patent Document 1: Japanese Patent Application Laid-Open No. 2001-159718

Disclosure of the invention

Problems to be solved by the invention

The arrayed waveguide type wavelength multiplexing / demultiplexing circuit 90 may be manufactured by changing the chip size, the center wavelength, the wavelength interval, or the number of channels. When the design and structure such as the chip size are changed, the width and length of the channel waveguide 26, the connection angle between the array waveguide 27 and the first slab waveguide 22, and the array waveguide 27 and the second slab guide are changed. The connection angle with the waveguide 31, the shape of the curved surface connected to the arrayed waveguide 27 of the first slab waveguide 22 and the second slab waveguide 31, and the like change. Then, the arrayed waveguide type wavelength multiplexing / demultiplexing circuit 90 must be manufactured by changing the width, length, thickness, and inclination angle of the inclined portion 91. Changes in the width of the inclined portion 91 and the like lead to changes in manufacturing conditions such as etching of the arrayed waveguide type wavelength multiplexing / demultiplexing circuit 90.

[0012] In addition, when a tapered portion is formed at a connection portion between the arrayed waveguide 27 and the first slab waveguide 22 and a connection portion between the arrayed waveguide 27 and the second slab waveguide 31, the tapered portion The width of the portion connected to the first slab waveguide 22, the length of the tapered portion, and the width force of the portion connected to the channel waveguide 26 of the tapered portion vary. Changing the length of the taper portion leads to a change in manufacturing conditions such as etching of the arrayed waveguide type wavelength multiplexing / demultiplexing circuit 90. Therefore, the design change of the arrayed waveguide type wavelength multiplexing / demultiplexing circuit 90 causes a problem that the yield deteriorates when the arrayed waveguide type wavelength multiplexing / demultiplexing circuit 90 is manufactured. The present invention has been made to solve the above-described problems, and an object of the present invention is to provide an optical wavelength multiplexer / demultiplexer that has a good yield in manufacturing and reduces propagation loss.

Means for solving the problem

[0014] In order to achieve the above object, the first invention of the present application includes a first optical waveguide, a first slab waveguide, a first slab waveguide side taper portion that is equally spaced, and a first array waveguide side taper portion. An optical wavelength multiplexer / demultiplexer in which an arrayed waveguide, a second slab waveguide, and a second optical waveguide are formed.

[0015] Specifically, the first invention of the present application includes a clad layer formed on a substrate and a core having a refractive index higher than that of the clad layer surrounded by the clad layer, and an optical signal is used as the pattern of the core. A first optical waveguide propagating a signal, a first slab waveguide connected to one end of the first optical waveguide to circulate an optical signal, and the first optical waveguide of the first slab waveguide A plurality of first slab waveguide side tapered portions that propagate optical signals, each having an equal interval, the width being narrower as the distance from the first slab waveguide is reduced, The first slab waveguide side tapered portion is connected to the side opposite to the side where the first slab waveguide is located, and the width of the first slab waveguide side tapered portion is located in the first slab waveguide side tapered portion. Narrower than the side facing the first side and the first slab waveguide side The first arrayed waveguide side taper that propagates the optical signal becomes narrower as it gets farther from the par part, and has a certain optical waveguide length difference, and one end of the first arrayed waveguide side tapered part An array waveguide composed of a plurality of channel waveguides connected to the side opposite to the side on which the first slab waveguide side tapered portion is located, and the other end of the arrayed waveguide to diffract the optical signal. 2 slab waveguides, and a plurality of second optical waveguides that are connected to the side of the second slab waveguide that faces the side where the arrayed waveguides are located, and are formed with an optical wavelength combination. It is a waver.

[0016] By providing the first slab waveguide side taper portion and the first array waveguide side taper portion, the optical wavelength multiplexer / demultiplexer can be manufactured such as etching even when the structure or shape is changed. The change of conditions can be reduced. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer having a high yield in manufacturing.

[0017] In the first invention of the present application, it has a refractive index between the cladding layer and the core and is adjacent to each other. Between the first slab waveguide side taper portion, and in contact with the side of the first slab waveguide where the first slab waveguide side taper portion is located, and as the distance from the first slab waveguide increases, the thickness increases. It is preferable that the first slab waveguide side inclined portion where the thickness becomes thinner is further formed as the pattern of the core.

[0018] Since the first slab waveguide side tapered portions are equally spaced, the first slab waveguide side inclined portion can be formed in the core with a constant size. If the inclined portion on the first slab waveguide side has a constant size, the optical wavelength multiplexer / demultiplexer can reduce changes in manufacturing conditions such as etching even if the structure or shape is changed. . In addition, since the first slab waveguide side inclined portion is provided, the optical wavelength multiplexer / demultiplexer propagates at a connection point between the first slab waveguide side tapered portion and the first slab waveguide. Loss can be reduced. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer that reduces propagation loss with a high yield in manufacturing.

[0019] In order to achieve the above object, the second invention of the present application includes a second optical waveguide, a second slab waveguide, a second slab waveguide side tapered portion, and a second arrayed waveguide side tapered portion that are equally spaced. An optical wavelength multiplexer / demultiplexer in which an arrayed waveguide, a first slab waveguide, and a first optical waveguide are formed.

[0020] Specifically, the second invention of the present application includes a clad layer formed on a substrate and a core having a refractive index higher than that of the clad layer surrounded by the clad layer. A second slab waveguide that is connected to one end of the second optical waveguide and diffracts the optical signal, and the second optical waveguide of the second slab waveguide is connected to one end of the second optical waveguide. A plurality of second slab waveguide side taper portions that are connected to the side opposite to the positioned side, are equidistant from each other, have a width that becomes narrower as the second slab waveguide force increases, and propagate an optical signal; The second slab waveguide side tapered portion is connected to the side opposite to the side where the second slab waveguide is located, and the width of the second slab waveguide side tapered portion is the second slab waveguide side location. The second slab waveguide is narrower than the side facing the conducting side and the second slab waveguide The second arrayed waveguide side tapered part that propagates the optical signal becomes narrower as it is farther from the tapered part, and has a certain optical waveguide length difference, and one end of the second arrayed waveguide side tapered part is Multiple channels connected to the side opposite to the side where the second slab waveguide taper is located An arrayed waveguide composed of waveguides, a first slab waveguide connected to the other end of the arrayed waveguide to refract an optical signal, and a side of the first slab waveguide on which the arrayed waveguide is located; An optical wavelength multiplexer / demultiplexer formed with a first optical waveguide connected to opposite sides and propagating an optical signal.

[0021] By providing the second arrayed waveguide side tapered portion and the second slab waveguide side tapered portion, the optical wavelength multiplexer / demultiplexer can be manufactured such as etching even if the structure or shape is changed in design. The change of conditions can be reduced. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer having a high yield in manufacturing.

[0022] In the second invention of the present application, the second slab waveguide has a refractive index between the clad layer and the core, and is between the adjacent tapered portions of the second slab waveguide. A second slab waveguide side inclined portion that is in contact with the side where the second slab waveguide side tapered portion is located and becomes thinner as it gets farther from the second slab waveguide is further formed as a pattern of the core. It is preferred that

[0023] Since the second slab waveguide side tapered portions are equally spaced, the second slab waveguide side inclined portion can be formed in the core with a constant size. If the inclined portion on the second slab waveguide side has a constant size, the optical wavelength multiplexer / demultiplexer can reduce changes in manufacturing conditions such as etching even if the structure or shape is changed. . The second slab waveguide side inclined portion by providing the said optical wavelength demultiplexer is propagation occurring in connecting portion between the _second slab waveguide and the second slab waveguide side tapered portion It is possible to reduce the loss. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer that has good yield in manufacturing and reduces propagation loss.

[0024] In order to achieve the above object, the third invention of the present application includes a first optical waveguide, a first slab waveguide, a first slab waveguide side taper portion and a first array waveguide side taper portion that are equally spaced. The optical waveguide multiplexer / demultiplexer in which the arrayed waveguide, the second arrayed waveguide side tapered portion, the equally spaced second slab waveguide side tapered portion, the second slab waveguide, and the second optical waveguide are formed. is there.

[0025] Specifically, the third invention of the present application includes a clad layer formed on a substrate and a core having a refractive index higher than that of the clad layer surrounded by the clad layer. Connected to one end of the first optical waveguide that propagates The first slab waveguide to be folded is connected to the side of the first slab waveguide opposite to the side on which the first optical waveguide is located. Each of them is equidistant and the width is far from the first slab waveguide. The first slab waveguide side taper part that propagates the optical signal becomes narrower as it becomes smaller, and is connected to the side of the first slab waveguide side taper part that faces the side where the first slab waveguide is located The width of the first slab waveguide side taper portion is narrower than the side of the first slab waveguide side taper portion facing the side where the first slab waveguide side is located, and the width becomes narrower as the distance from the first slab waveguide side taper portion increases. The first arrayed waveguide-side tapered portion that propagates the optical signal and the first optical waveguide-side tapered portion that has a certain optical waveguide length difference and one end of which is the first-arrayed waveguide-side tapered portion. Multiple channels connected to the opposite side Connected to the other end of the arrayed waveguide, and the width of the arrayed waveguide becomes wider with increasing distance from the arrayed waveguide force. Connected to the side of the second arrayed waveguide side taper that faces the side on which the arrayed waveguide is located, each of which is equally spaced, and the width of the tapered side of the second arrayed waveguide A second slab waveguide side taper portion that propagates an optical signal, wider than the side opposite to the side where the array waveguide is located, and wider from the second array waveguide side taper portion; A second slab waveguide side taper portion connected to a side of the second array waveguide side facing the side where the tapered portion is located, a second slab waveguide that diffracts an optical signal, and the second slab waveguide side 2nd slab waveguide side taper That connects to the side to side and a pair direction, and a plurality of second optical waveguide for propagating an optical signal, an optical wavelength division multiplexer which is formed.

[0026] The first slab waveguide side taper portion, the first array waveguide side taper portion, the second array waveguide side taper portion, and the second slab waveguide side taper portion are provided. The wavelength multiplexer / demultiplexer can reduce changes in manufacturing conditions such as etching even if the structure and shape are changed. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer with a high yield in manufacturing.

[0027] In the third invention of the present application, the first slab waveguide has a refractive index between the cladding layer and the core, and is between the adjacent first slab waveguide side tapered portions. The first slab waveguide side taper is in contact with the side where the taper is located, and is far from the first slab waveguide The first slab waveguide side inclined portion that becomes thinner as it is thinner, and has a refractive index between the cladding layer and the core, and is between the second slab waveguide side tapered portion that contacts P, and 2 The second slab waveguide side inclined portion that is in contact with the side where the second slab waveguide side tapered portion of the slab waveguide is located and becomes thinner as the distance from the second slab waveguide increases, It is preferable that the pattern is further formed.

[0028] Since the first slab waveguide side tapered portion and the second slab waveguide side tapered portion are equally spaced, the first slab waveguide side inclined portion and the second slab waveguide side are provided on the core. The inclined portion can be formed with a certain size. If the inclined portion on the first slab waveguide side and the inclined portion on the second slab waveguide side are of a certain size, the optical wavelength multiplexer / demultiplexer can manufacture etching and the like even if the structure and shape are changed. The change of conditions can be reduced. In addition, the optical wavelength multiplexer / demultiplexer includes the first slab waveguide side tapered portion and the first slab waveguide by providing the first slab waveguide side inclined portion and the second slab waveguide side inclined portion. Propagation loss occurring at the connection point between the waveguide and the connection point between the second slab waveguide side tapered portion and the second slab waveguide can be reduced. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer that reduces propagation loss with a high yield in manufacturing.

[0029] In order to achieve the above object, the fourth invention of the present application includes a first optical waveguide, a first slab waveguide, a first slab waveguide-side equal-width portion that is equally spaced, a first array waveguide-side taper. This is an optical wavelength multiplexer / demultiplexer in which a section, an arrayed waveguide, a second slab waveguide, and a second optical waveguide are formed.

[0030] Specifically, the fourth invention of the present application includes a clad layer formed on a substrate and a core having a higher refractive index than the clad layer and surrounded by the clad layer. A first optical waveguide propagating a signal, a first slab waveguide connected to one end of the first optical waveguide to circulate an optical signal, and the first optical waveguide of the first slab waveguide A plurality of first slab waveguide side equal width parts that are equally spaced and have a uniform width and propagate an optical signal, the first slab waveguide side, etc. Connected to the side of the width portion facing the side where the first slab waveguide is located, the width is narrower than the first slab waveguide side equal width portion, and the first slab waveguide side equal width portion force is far The first arrayed waveguide side taper that propagates the optical signal becomes narrower, and the optical waveguide length is constant. It has, on the other hand An array waveguide composed of a plurality of channel waveguides connected to a side of the tapered portion on the first array waveguide side opposite to the side where the equal width portion on the first slab waveguide side is located; and the array waveguide A second slab waveguide that diffracts an optical signal, and a second slab waveguide that is connected to the side of the second slab waveguide that faces the side where the arrayed waveguide is located, and a plurality of optical signals are transmitted. The second optical waveguide is an optical wavelength multiplexer / demultiplexer.

[0031] By providing the first slab waveguide side equal width portion and the first array waveguide side taper portion, the optical wavelength multiplexer / demultiplexer can manufacture etching and the like even if the structure and shape are changed in design. The change of conditions can be reduced. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer with a good yield in manufacturing.

[0032] In the fourth invention of the present application, the first slab waveguide has a refractive index between the cladding layer and the core, and is between the adjacent equal width portions on the first slab waveguide side. The first slab waveguide side inclined portion is in contact with the side where the first slab waveguide side equal width portion is located, and the first slab waveguide side inclined portion becomes thinner as it gets farther from the first slab waveguide. Further, it is preferably formed.

[0033] Since the first slab waveguide side equal width portions are equally spaced, the first slab waveguide side inclined portion can be formed in the core with a constant size. If the inclined portion on the first slab waveguide side has a constant size, the optical wavelength multiplexer / demultiplexer can reduce changes in manufacturing conditions such as etching even if the design and structure of the structure are changed. . In addition, by providing the first slab waveguide side inclined portion, the optical wavelength multiplexer / demultiplexer propagates at a connection point between the first slab waveguide side equal width portion and the first slab waveguide. Loss can be reduced. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer that reduces propagation loss with a good yield in manufacturing.

[0034] In order to achieve the above object, the fifth invention of the present application includes a second optical waveguide, a second slab waveguide, a second slab waveguide side equal-width portion that is equally spaced, and a second array waveguide side taper. This is an optical wavelength multiplexer / demultiplexer in which a section, an arrayed waveguide, a first slab waveguide, and a first optical waveguide are formed.

[0035] Specifically, the fifth invention of the present application includes a clad layer formed on a substrate and a core having a refractive index higher than that of the clad layer surrounded by the clad layer. Connected to one end of the second optical waveguide and a plurality of second optical waveguides propagating the optical signal. A second slab waveguide that diffracts the signal, and a side of the second slab waveguide that is opposite to the side where the second optical waveguide is located. Are connected to a side of the second slab waveguide side equal width portion facing the side where the second slab waveguide side is located, and the width is the first slab waveguide side equal width portion. 2 Slab waveguide side equal width part Narrower as the second slab waveguide side equal width part force becomes narrower, and the second arrayed waveguide side taper part that propagates the optical signal and a certain optical waveguide length difference An array waveguide having a plurality of channel waveguides, one end of which is connected to a side of the second arrayed waveguide side tapered portion opposite to the side where the second slab waveguide side equal width portion is located A first slab waveguide connected to the other end of the arrayed waveguide to diffract the optical signal And a first optical waveguide that is connected to a side of the first slab waveguide that faces the side where the arrayed waveguide is located, and that propagates an optical signal.

[0036] By providing the second slab waveguide side equal width portion and the second array waveguide side taper portion, the optical wavelength multiplexer / demultiplexer can manufacture etching and the like even if the structure or shape is changed. The change of conditions can be reduced. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer with a good yield in manufacturing.

[0037] In the fifth invention of the present application, the second slab waveguide has a refractive index between the cladding layer and the core, and is between the adjacent equal width portions on the second slab waveguide side. A second slab waveguide side inclined portion formed so as to be in contact with the side where the second slab waveguide side equal width portion is located and having a thickness that decreases as the distance from the second slab waveguide increases. It is preferably formed as a pattern of the core.

[0038] Since the second slab waveguide side equal width portions are equally spaced, the second slab waveguide side inclined portion can be formed in the core with a constant size. If the inclined portion on the second slab waveguide side has a constant size, the optical wavelength multiplexer / demultiplexer can reduce changes in manufacturing conditions such as etching even if the structure and shape are changed. . In addition, since the _second slab waveguide side inclined portion is provided, the optical wavelength multiplexer / demultiplexer propagates at a connection portion between the second slab waveguide side equal width portion and the second slab waveguide. Loss can be reduced. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer that reduces propagation loss with a good yield in manufacturing. [0039] In order to achieve the above object, the sixth invention of the present application includes a first optical waveguide, a first slab waveguide, a first slab waveguide side equal-width portion that is equally spaced, and a first array waveguide side taper. An optical waveguide multiplexer / demultiplexer in which a second slab waveguide and a second optical waveguide are formed. is there.

[0040] Specifically, the sixth invention of the present application includes a clad layer formed on a substrate and a core having a refractive index higher than that of the clad layer surrounded by the clad layer. A first optical waveguide propagating a signal, a first slab waveguide connected to one end of the first optical waveguide to circulate an optical signal, and the first optical waveguide of the first slab waveguide A plurality of first slab waveguide side equal width parts that are equally spaced and have a uniform width and propagate an optical signal, the first slab waveguide side, etc. Connected to the side of the width portion facing the side where the first slab waveguide is located, the width is narrower than the first slab waveguide side equal width portion, and from the first slab waveguide side equal width portion The taper section on the first array waveguide side that propagates the optical signal becomes narrower as the distance increases, and a certain optical waveguide An arrayed waveguide comprising a plurality of channel waveguides having a difference and having one end connected to a side of the first arrayed waveguide side tapered portion facing the side where the first slab waveguide side equal width portion is located Connected to the other end of the arrayed waveguide, and becomes wider as the distance from the arrayed waveguide increases, and the second arrayed waveguide side tapered portion that propagates an optical signal, and the second arrayed waveguide side The taper part is connected to the side opposite to the side where the arrayed waveguide is located, and each is equidistant, and the width of the tapered part of the second arrayed waveguide side is the side where the arrayed waveguide is located. The second slab waveguide side equal width part that is wider and uniform than the opposite side and propagates the optical signal, and the second array waveguide side taper part of the second slab waveguide side equal width part are positioned. Connected to the side opposite to the mounting side and diffracts the optical signal A slab waveguide and a plurality of second optical waveguides that are connected to a side of the second slab waveguide opposite to the side where the equal-width portion on the second slab waveguide side is located and propagate an optical signal This is an optical wavelength multiplexer / demultiplexer.

[0041] The first slab waveguide side equal width portion, the first array waveguide side taper portion, the second array waveguide side taper portion, and the second slab waveguide side equal width portion, The optical wavelength multiplexer / demultiplexer can reduce changes in manufacturing conditions such as etching even if the design and structure of the structure are changed. Therefore, an optical wavelength multiplexer / demultiplexer with good yield in manufacturing is required. You can power s offer.

[0042] In the sixth invention of the present application, the first slab waveguide has a refractive index between the cladding layer and the core, and is between the adjacent equal width portions on the first slab waveguide side. A first slab waveguide side inclined portion that is in contact with a side where the first slab waveguide side equal width portion is located and becomes thinner as it is farther from the first slab waveguide, the cladding layer, and the core Between the adjacent equal width portions of the second slab waveguide and on the side of the second slab waveguide where the equal width portion of the second slab waveguide is located. It is preferable that a second slab waveguide side inclined portion that comes into contact with the second slab waveguide and that becomes thinner as it is farther from the second slab waveguide is further formed as a pattern of the core.

[0043] Since the first slab waveguide side equal width portion and the second slab waveguide side equal width portion are equally spaced, the first slab waveguide side inclined portion and the second slab are provided on the core. The inclined portion on the waveguide side can be formed with a certain size. If the first slab waveguide side inclined portion and the second slab waveguide side inclined portion are of a certain size, the optical wavelength multiplexer / demultiplexer can be etched even if the structure or shape is changed in design. The change in manufacturing conditions can be reduced. The optical wavelength multiplexer / demultiplexer includes the first slab waveguide side equal width portion and the first slab by providing the first slab waveguide side inclined portion and the second slab waveguide side inclined portion. Propagation loss occurring at the connection point between the waveguide and the connection point between the second slab waveguide side equal width portion and the second slab waveguide can be reduced. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer that reduces propagation loss with a high yield in manufacturing.

The invention's effect

The present invention can provide an optical wavelength multiplexer / demultiplexer, optical wavelength multiplexer / demultiplexer, and optical wavelength multiplexer / demultiplexer that reduce propagation loss without increasing the yield and manufacturing man-hours.

Brief Description of Drawings

FIG. 1 is a conceptual diagram of an optical wavelength multiplexer / demultiplexer according to an embodiment of the first invention of the present application.

FIG. 2 is an enlarged view of a broken line part of FIG.

FIG. 3 is an enlarged view of a broken line portion of FIG. 1 after a first slab waveguide side inclined portion is formed.

FIG. 4 is a cross-sectional view taken along line AA ′ of FIG.

FIG. 5 is a cross-sectional view taken along the line Β_Β in FIG. FIG. 6 is a conceptual diagram of an optical wavelength multiplexer / demultiplexer according to an embodiment of the second invention of the present application.

FIG. 7 is an enlarged view of a broken line part of FIG.

FIG. 8] is an enlarged view of the broken line portion of FIG. 6 after the second slab waveguide side inclined portion is formed. 9] It is a conceptual diagram of an optical wavelength multiplexer / demultiplexer according to an embodiment of the third invention of the present application. 10] A conceptual diagram of an optical wavelength multiplexer / demultiplexer according to an embodiment of the fourth invention of the present application.

FIG. 11 is an enlarged view of a broken line part of FIG.

12] FIG. 11 is an enlarged view of the broken line portion of FIG. 10 after the first slab waveguide side inclined portion is formed. 13] It is a conceptual diagram of an optical wavelength multiplexer / demultiplexer according to one embodiment of the fifth invention of the present application. 14] It is an enlarged view of a broken line part of FIG.

15] FIG. 14 is an enlarged view of the broken line portion of FIG. 13 after the second slab waveguide side inclined portion is formed. Sono 16] It is a conceptual diagram of an optical wavelength multiplexer / demultiplexer according to one embodiment of the sixth invention of the present application. 17] It is a conceptual diagram of a conventional arrayed waveguide type wavelength multiplexing / demultiplexing circuit.

18] It is an enlarged view of a broken line part of FIG.

FIG. 19 is a sectional view taken along the line CC ′ in FIG.

FIG. 20 is a cross-sectional view taken along the line DD ′ in FIG.

Explanation of symbols

10, 11, 12, 13, 14, 15 Optical wavelength multiplexer / demultiplexer

21 First optical waveguide

22 First slab waveguide

23 Tapered section on the first slab waveguide side

24 First arrayed waveguide side taper

25 Inclined part on the first slab waveguide side

26 channel waveguide

27 Arrayed waveguide

28 Tapered section on the second arrayed waveguide

29 2nd slab waveguide side taper

30 Second slab waveguide side slope

31 Second slab waveguide 32 Second optical waveguide

33 Board

34 Clad layer

35 1st slab waveguide side equal width part

36 Equal width part on the second slab waveguide side

40 Spacing of taper on the first slab waveguide side

41 2nd slab waveguide side taper spacing

42 Distance between equal width parts on the first slab waveguide side

43 Distance between equal width parts on the second slab waveguide side

90 Arrayed-waveguide wavelength multiplexing / demultiplexing circuit

91 Slope

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, this invention is not limited to embodiment shown below.

[0048] (Embodiment 1)

The first embodiment of the present application includes a clad layer formed on a substrate and a core having a refractive index higher than that of the clad layer surrounded by the clad layer, and transmits an optical signal as a pattern of the core. A first optical waveguide, a first slab waveguide connected to one end of the first optical waveguide and diffracting an optical signal, and a side of the first slab waveguide facing the side where the first optical waveguide is located A plurality of first slab waveguide-side tapered portions that propagate optical signals, and each of them is equally spaced, the width is narrowed as the distance from the first slab waveguide increases, and the first slab waveguide The side taper portion is connected to the side facing the side where the first slab waveguide is located, and the width is from the side facing the side where the first slab waveguide is located of the first slab waveguide side taper portion. Narrow and from the tapered portion on the first slab waveguide side The first slab of the first arrayed waveguide side tapered portion that has a certain optical waveguide length difference and a first optical waveguide side tapered portion that becomes narrower and propagates an optical signal. An arrayed waveguide composed of a plurality of channel waveguides connected to the side opposite to the side where the waveguide-side tapered portion is located, and a second connected to the other end of the arrayed waveguide to diffract the optical signal An optical wavelength multiplexing / demultiplexing comprising: a slab waveguide; and a plurality of second optical waveguides that are connected to a side of the second slab waveguide opposite to the side on which the arrayed waveguide is positioned and that propagate optical signals. It is a vessel.

An optical wavelength multiplexer / demultiplexer 10 according to the first embodiment of the present application will be described with reference to FIGS. 1 and 2. FIG. 1 is a conceptual diagram of the optical wavelength multiplexer / demultiplexer 10. The optical wavelength multiplexer / demultiplexer 10 includes a first optical waveguide 21, a first slab waveguide 22, a channel waveguide 26, an arrayed waveguide 27, a second slab waveguide 31, and a second optical waveguide 32.

FIG. 2 is an enlarged view of a broken line part of FIG. Figure 2 shows the spacing 40 between the first slab waveguide 22, the first slab waveguide side taper portion 23, the first array waveguide side taper portion 24, the channel waveguide 26, and the first slab waveguide side taper portion. It is shown in the figure.

[0051] Manufacturing of the optical wavelength multiplexer / demultiplexer 10 will be described. The optical wavelength multiplexer / demultiplexer 10 may be formed on a substrate (not shown in FIGS. 1 and 2). For example, the substrate material can be silicon (Si) or quartz glass (Si02). The cladding layer may be formed by laminating quartz glass on the above-described substrate. The core may be formed by laminating quartz glass mixed with impurities that increase the refractive index on the above-described cladding layer. For example, as a method of laminating a clad layer and a core, a flame accumulation method (FHD method), a CVD method (chemical vapor deposition method), or a sputtering method can be given.

[0052] The clad layer may be formed by laminating quartz glass mixed with an impurity that lowers the refractive index on the above-described substrate. The core may be formed by laminating quartz glass on the cladding layer described above.

[0053] For example, the first optical waveguide 21, the first slab waveguide 22, the first slab waveguide side tapered portion 23, and the first array waveguide are formed as a pattern on the core described above using photolithography and etching. The side taper portion 24, the channel waveguide 26, the second slab waveguide 31, and the second optical waveguide 32 may be formed.

As shown in FIG. 1, the first optical waveguide 21 may be formed. The number of first optical waveguides 21 is not limited to two.

The first slab waveguide 22 may be formed so as to be connected to one end of the first optical waveguide 21. [0056] As shown in FIG. 2, the first slab waveguide-side tapered portion 23 has a first optical waveguide of the first slab waveguide 22 so that the distance 40 between the first slab waveguide-side taper portions is equal. It may be formed so as to be connected to the side opposite to the side where 21 is located. Further, the width of the first slab waveguide side taper portion 23 becomes narrower as the distance from the first slab waveguide 22 increases.

[0057] The first arrayed waveguide side tapered portion 24 may be formed so as to be connected to the side of the first slab waveguide side tapered portion 23 that faces the side where the first slab waveguide 22 is located. The width of the first arrayed waveguide side tapered portion 24 is narrower than the side of the first slab waveguide side tapered portion 23 that faces the side where the first slab waveguide 22 is located, and the first slab waveguide side It becomes narrower as it gets farther from the taper part 23.

[0058] The plurality of channel waveguides 26 are formed so that one end thereof is connected to the side of the first arrayed waveguide side tapered portion 24 opposite to the side where the first slab waveguide side tapered portion 23 is located. May be. Each of the channel waveguides 26 has a certain optical waveguide length difference. The arrayed waveguide 27 is composed of a plurality of channel waveguides 26.

The second slab waveguide 31 may be formed so as to be connected to the other end of the arrayed waveguide 27.

[0060] The second optical waveguide 32 may be formed so as to be connected to the side of the second slab waveguide 31 that faces the side where the arrayed waveguide 27 is located.

[0061] In the core described above, the first optical waveguide 21, the first slab waveguide 22, the first slab waveguide side taper portion 23, the first array waveguide side taper portion 24, the channel waveguide 26, the second slab After the waveguide 31 and the second optical waveguide 32 are formed as a pattern, the clad layer may be laminated again.

[0062] After the clad layer is again laminated, the substrate described above may be heated at 1000 ° C or more. If the refractive index of the clad layer laminated on the upper surface of the substrate described above and the clad layer laminated again are the same, a single clad layer is formed after heating.

[0063] The point that the optical wavelength multiplexer / demultiplexer 10 does not increase the yield and the number of manufacturing steps will be described. When the chip size, the center wavelength, the wavelength interval, or the number of channels are changed, the optical wavelength multiplexer / demultiplexer 10 has the length of the first slab waveguide side tapered portion 23 and the first slab waveguide side tapered portion 23. 1 slab waveguide 22 width, first slab waveguide side taper 2 The width of the portion connected to the channel waveguide 26 of 3 and the width of the channel waveguide 26 are not changed. The influence of the change in the chip size and the like of the optical wavelength multiplexer / demultiplexer 10 is absorbed by changing the width and length of the first arrayed waveguide side tapered portion 24. Even if the chip size or the like of the optical wavelength multiplexer / demultiplexer 10 is changed, it is only necessary to change the width and length of the first arrayed waveguide side tapered portion 24, and the first slab waveguide side tapered portion 23 and the channel guide are changed. Manufacturing conditions such as etching of the waveguide 26 need not be changed. Therefore, the optical wavelength multiplexer / demultiplexer 10 can reduce the change in manufacturing conditions such as etching even if the structure and shape are changed. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer that does not increase yield and manufacturing man-hours.

[0064] In the first embodiment of the present application, the first slab waveguide has a refractive index between the cladding layer and the core and is between the adjacent tapered portions of the first slab waveguide. A first slab waveguide side inclined portion that is in contact with the side on which the first slab waveguide side taper portion is located and becomes thinner as it gets farther from the first slab waveguide is further formed as a pattern of the core It is preferred that

The optical wavelength multiplexer / demultiplexer 10 in which the first slab waveguide side inclined portion 25 is formed will be described with reference to FIGS. 3 to 5. FIG. 3 is an enlarged view of the broken line portion of FIG. 1 after the first slab waveguide side inclined portion 25 is formed. FIG. 3 shows a first slab waveguide 22, a first slab waveguide side taper portion 23, a first array waveguide side taper portion 24, a first slab waveguide side inclined portion 25, and a channel waveguide 26. It is shown in the figure.

FIG. 4 is a cross-sectional view taken along the line Α_Α ′ in FIG. FIG. 4 shows the first slab waveguide 22, the first slab waveguide side inclined portion 25, the substrate 33, and the cladding layer. FIG. 5 is a cross-sectional view taken along the line BB ′ of FIG. FIG. 5 shows the first slab waveguide side tapered portion 23, the first slab waveguide side inclined portion 25, the substrate 33, and the cladding layer 34.

The formation of the first slab waveguide side inclined portion 25 of the optical wavelength multiplexer / demultiplexer 10 will be described. When the first slab waveguide side tapered portion 23 and the like are formed as the core pattern described above, the first slab waveguide side inclined portion 25 may be formed. For example, the first slab waveguide side inclined portion 25 may be formed by reactive ion etching. Adjust the photoresist exposure conditions, the type of gas used for reactive ion etching, the gas pressure, etc. The slab waveguide side inclined portion 25 can be formed. The formation of the slope of the first slab waveguide side slope 25 is also related to the progress of the reactive ion etching, and it is difficult to determine the manufacturing conditions because it requires time. Therefore, it is better not to change the manufacturing conditions of the first slab waveguide side inclined portion 25 as much as possible.

[0068] When the optical waveguide length difference of the channel waveguide 26 increases, the width of the first slab waveguide side inclined portion 25 on the side facing the side connected to the first slab waveguide 22 may be increased. ,. When the optical waveguide length difference of the channel waveguide 26 is reduced, the width of the first slab waveguide side inclined portion 25 on the side facing the side connected to the first slab waveguide 22 may be reduced. ,. Therefore, the first slab waveguide side tapered portion 23 may be formed so as to ensure the width of the first slab waveguide side inclined portion 25 on the side facing the side connected to the first slab waveguide 22. . Since the first slab waveguide side tapered portion 23 is equally spaced, the first slab waveguide side inclined portion 25 can be formed with a constant size, so the optical wavelength multiplexer / demultiplexer 10 is designed with a structure and shape. Even if it is changed, changes in manufacturing conditions such as etching can be reduced.

As shown in FIGS. 3 and 5, the first slab waveguide side inclined portion 25 is located between the adjacent first slab waveguide side tapered portions 23, and the first slab waveguide 22 has a first slab waveguide 22 as shown in FIG. The waveguide side taper part 23 may be formed so as to be in contact with the side where the part 23 is located. As shown in FIG. 4, the first slab waveguide side inclined portion 25 becomes thinner as the distance from the first slab waveguide 22 increases.

The point that the first slab waveguide side inclined portion 25 reduces the propagation loss will be described. Optical signals having different wavelengths are input to the first optical waveguide 21. The optical signal output from the first optical waveguide 21 is diffracted by the first slab waveguide 22 and input to the channel waveguide 26 via the first slab waveguide side tapered portion 23. Since each channel waveguide 26 has a constant optical waveguide length difference, the phase of the optical signal output from the channel waveguide 26 is shifted by a certain amount. Optical signals whose phases are shifted by a certain amount interfere with each other when diffracted by the second slab waveguide 31. As a result of the interference, the optical signal is demultiplexed for each wavelength and output to a predetermined second optical waveguide 32.

[0071] The electromagnetic field distribution between the first slab waveguide 22 and the first slab waveguide side tapered portion 23 is different at the connection point between the first slab waveguide 22 and the first slab waveguide side tapered portion 23. ing. Part of the optical signal output from the first optical waveguide 21 to the first slab waveguide 22 In some cases, the light waveguide side taper portion 23 is incident on an unconnected portion.

[0072] If the first slab waveguide side inclined portion 25 is not formed, the optical signal incident on the location where the first slab waveguide side tapered portion 23 is not connected is propagated by the optical wavelength multiplexer / demultiplexer 10. It is a loss. However, since the first slab waveguide side inclined portion 25 is formed, the optical signal incident on the portion where the first slab waveguide side tapered portion 23 is not connected is passed through the first slab waveguide side inclined portion 25. The first slab waveguide side taper portion 23, the first array waveguide side taper portion 24, or the channel waveguide 26 may be returned via. Therefore, the propagation loss of the optical wavelength multiplexer / demultiplexer 10 is reduced. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer that reduces propagation loss with a good yield in manufacturing.

[0073] (Embodiment 2)

The second embodiment of the present application includes a cladding layer formed on a substrate and a core having a higher refractive index than the cladding layer surrounded by the cladding layer, and transmits an optical signal as the pattern of the core. A plurality of second optical waveguides; a second slab waveguide connected to one end of the second optical waveguide to refract an optical signal; and a side of the second slab waveguide where the second optical waveguide is located A plurality of second slab waveguide side taper portions for propagating optical signals, each of which is equidistant, narrower as the distance from the second slab waveguide increases, 2 connected to the side of the tapered portion of the slab waveguide facing the side where the second slab waveguide is located, and the width of the tapered portion of the second slab waveguide is the side of the tapered portion of the second slab waveguide Narrower than the opposite side and the second slab waveguide side taper The second arrayed-waveguide-side tapered part that propagates an optical signal and has a certain optical waveguide length difference, and one end of the second-arrayed-waveguide-side tapered part becomes smaller. (2) An array waveguide composed of a plurality of channel waveguides connected to the side opposite to the side where the slab waveguide side taper portion is located, and a first that diffracts an optical signal connected to the other end of the arrayed waveguide. An optical wavelength multiplexer in which a slab waveguide and a first optical waveguide that propagates an optical signal are connected to a side of the first slab waveguide that faces the side where the arrayed waveguide is located. is there.

The optical wavelength multiplexer / demultiplexer 11 according to this embodiment will be described with reference to FIGS. 6 and 7. FIG. 6 is a conceptual diagram of the optical wavelength multiplexer / demultiplexer 11. The optical wavelength multiplexer / demultiplexer 11 includes the first optical waveguide 21 and the first Slab waveguide 22, channel waveguide 26, array waveguide 27, second slab waveguide 31 and second

2 Optical waveguide 32 is provided.

FIG. 7 is an enlarged view of a broken line part of FIG. FIG. 7 shows the distance 41 between the channel waveguide 26, the second arrayed waveguide side tapered portion 28, the second slab waveguide side tapered portion 29, the second slab waveguide 31 and the second slab waveguide side tapered portion. It is shown in the figure.

The optical wavelength multiplexer / demultiplexer 11 can be manufactured in the same manner as the optical wavelength multiplexer / demultiplexer 10 in FIG.

Specifically, the optical wavelength multiplexer / demultiplexer 11 can be manufactured by changing the pattern formed on the core described above. In the following, changes in the pattern formed on the core will be described.

[0077] As shown in FIG. 7, the second slab waveguide side tapered portion 29 has a second optical waveguide of the second slab waveguide 31 so that the distance 41 between the second slab waveguide side taper portions is equal. It may be formed so as to be connected to the side opposite to the side where 32 is located. Further, the width of the second slab waveguide side taper portion 29 becomes narrower as the distance from the second slab waveguide 31 increases.

The second arrayed waveguide side tapered portion 28 may be formed so as to be connected to the side of the second slab waveguide side tapered portion 29 that faces the side where the second slab waveguide 31 is located. The width of the second arrayed waveguide side tapered portion 28 is narrower than the side of the second slab waveguide side tapered portion 29 that faces the side where the second slab waveguide 31 is located, and the second slab waveguide side It becomes narrower as it gets farther from the taper section 29.

[0079] One end of the plurality of channel waveguides 26 is connected to the side of the second arrayed waveguide side tapered portion 28 opposite to the side where the second slab waveguide side tapered portion 29 is located, and the other end is connected. The first slab waveguide 22 may be formed so as to be connected to the side opposite to the side where the first optical waveguide 21 is located.

The point that the optical wavelength multiplexer / demultiplexer 11 does not increase the yield and the number of manufacturing steps will be described. Similar to the optical wavelength demultiplexer 10 in FIG. 1, the optical wavelength demultiplexer 11 absorbs the influence of the change in the chip size and the like only by the second arrayed waveguide side tapered portion 28, and the manufacturing conditions such as etching are Changes can be reduced. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer with a high yield in manufacturing.

[0081] In the second embodiment of the present application, the second embodiment has a refractive index between the cladding layer and the core, The second slab waveguide side taper portion is in contact with the second slab waveguide side taper portion, is in contact with the side where the second slab waveguide side taper portion is located, and becomes farther away from the second slab waveguide. It is preferable that a second slab waveguide side inclined portion with a reduced thickness is further formed as the pattern of the core.

The optical wavelength multiplexer / demultiplexer 11 in which the second slab waveguide side inclined portion 30 is formed will be described with reference to FIG. FIG. 8 is an enlarged view of the broken line portion of FIG. 6 after the second slab waveguide side inclined portion 30 is formed. FIG. 8 shows a channel waveguide 26, a second arrayed waveguide side tapered portion 28, a second slab waveguide side tapered portion 29, a second slab waveguide side inclined portion 30, and a second slab waveguide 31. ing.

[0083] Similar to the first slab waveguide side inclined portion 25 of FIG. 3, the second slab waveguide side inclined portion 30 of FIG. 8 can be formed. The second slab waveguide side inclined portion 30 is located between the adjacent second slab waveguide side tapered portions 29 and touches the side where the second slab waveguide side tapered portion 29 of the second slab waveguide 31 is located. It may be formed as follows. The second slab waveguide side inclined portion 30 becomes thinner as the distance from the second slab waveguide 31 increases.

Similar to the optical wavelength demultiplexer 10 of FIG. 3, the second slab waveguide side tapered portions 29 are equally spaced, so that the optical wavelength multiplexer / demultiplexer 11 is inclined to the second slab waveguide side. The portion 30 can be formed with a constant size between the second slab waveguide side taper portion 29. Therefore, the optical wavelength multiplexer / demultiplexer 11 can reduce the change in manufacturing conditions such as etching even if the structure or shape is changed.

The point where the second slab waveguide side inclined portion 30 reduces the propagation loss will be described. Similarly to the first slab waveguide side inclined portion 25 of FIG. 3, the second slab waveguide side inclined portion 30 can reduce the propagation loss. An optical signal having a specific wavelength is input to the same second optical waveguide 32. The optical signal output from the second optical waveguide 32 is bent by the second slab waveguide 31 and input to the channel waveguide 26 via the second slab waveguide side tapered portion 29. Since each channel waveguide 26 has a constant optical waveguide length difference, the phase of the optical signal output from the channel waveguide 26 is shifted by a certain amount. Optical signals whose phases are shifted by a certain amount interfere with each other when diffracted by the first slab waveguide 22. As a result of the interference, the optical signals are combined at different wavelengths and output to a specific first optical waveguide 21. It is.

[0086] Due to the difference in electromagnetic field distribution as described above, the second slab waveguide side tapered portion 29 is connected to a part of the optical signal incident from the second optical waveguide 32 to the second slab waveguide 31. Being incident, it may be incident on the part that is not. However, the optical signal incident on the portion where the second slab waveguide side taper portion 29 is not connected passes through the second slab waveguide side inclined portion 30 to the second array waveguide side taper portion 28, the second The taper may return to the slab waveguide side taper 29 or the channel waveguide 26. Therefore, the propagation loss of the optical wavelength multiplexer / demultiplexer 11 is reduced. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer that reduces propagation loss with a high yield in manufacturing.

(Embodiment 3)

The third embodiment of the present application includes a cladding layer formed on a substrate and a core having a higher refractive index than the cladding layer surrounded by the cladding layer, and transmits an optical signal as the pattern of the core. A first optical waveguide, a first slab waveguide connected to one end of the first optical waveguide and diffracting an optical signal, and a side of the first slab waveguide facing the side where the first optical waveguide is located A plurality of first slab waveguide-side tapered portions that propagate optical signals, and are narrower as the distance from the first slab waveguide increases. The side taper portion is connected to the side facing the side where the first slab waveguide is located, and the width is from the side facing the side where the first slab waveguide is located of the first slab waveguide side taper portion. Narrow and from the tapered portion on the first slab waveguide side The first slab of the first arrayed waveguide side tapered portion that has a certain optical waveguide length difference and a first optical waveguide side tapered portion that becomes narrower and propagates an optical signal. An arrayed waveguide composed of a plurality of channel waveguides connected to the side opposite to the side where the waveguide side taper portion is located, and connected to the other end of the arrayed waveguide, and the width of the arrayed waveguide increases as the distance increases. The second arrayed waveguide-side tapered portion that propagates the optical signal is connected to the side of the second arrayed-waveguide-side tapered portion that faces the side where the arrayed waveguide is located. The width of the tapered portion of the second arrayed waveguide side is wider than the side facing the side where the arrayed waveguide is located, and the width becomes wider as the distance from the tapered portion of the second arrayed waveguide side becomes larger. 2nd slurry propagating signal Waveguide taper A second slab waveguide that diffracts an optical signal, and a second slab waveguide that diffracts an optical signal; and a second slab waveguide that is connected to a side of the second slab waveguide side tapered portion that faces the side where the second arrayed waveguide side tapered portion is located. An optical wavelength multiplexer / demultiplexer in which a plurality of second optical waveguides that propagate optical signals are connected to a side of the slab waveguide that faces the side where the second slab waveguide side taper portion is located. .

An optical wavelength multiplexer / demultiplexer 12 according to the third embodiment of the present application will be described with reference to FIG.

FIG. 9 is a conceptual diagram of the optical wavelength multiplexer / demultiplexer 12. The optical wavelength multiplexer / demultiplexer 12 includes a first optical waveguide 21, a first slab waveguide 22, a channel waveguide 26, an arrayed waveguide 27, a second slab waveguide 31, and a second optical waveguide 32.

The optical wavelength multiplexer / demultiplexer 12 can be manufactured in the same manner as the optical wavelength multiplexer / demultiplexer 10 in FIG.

Specifically, the optical wavelength multiplexer / demultiplexer 12 can be manufactured by changing the pattern formed on the core described above. In the following, changes in the pattern formed on the core will be described.

Similar to the optical wavelength multiplexer / demultiplexer 10 of FIG. 1, the first optical waveguide 21, the first slab waveguide 22, the first slab waveguide side tapered portion 23, and the first arrayed waveguide side tapered portion 24 are provided. An array waveguide 27 composed of a plurality of channel waveguides 26 is formed.

Similar to the optical wavelength multiplexer / demultiplexer 11 in FIG. 6, the second arrayed waveguide side tapered portion 28, the second slab waveguide side tapered portion 29, the second slab waveguide 31 and the second optical waveguide 32 are It ’s formed.

The point that the optical wavelength multiplexer / demultiplexer 12 reduces the yield and the number of manufacturing steps will be described.

The optical wavelength multiplexer / demultiplexer 12 can demultiplex an optical signal input to the first optical waveguide 21 for each wavelength and output the demultiplexed optical signal to the second optical waveguide 32. The optical wavelength multiplexer / demultiplexer 12 can multiplex the optical signals input to the second optical waveguide 32 with different wavelengths and output them from the first optical waveguide 21.

Like the optical wavelength multiplexer / demultiplexer 10 in FIG. 1 and the optical wavelength multiplexer / demultiplexer 11 in FIG. 6, the optical wavelength multiplexer / demultiplexer 12 can reduce the yield and the number of manufacturing steps. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer having a good yield in manufacturing.

[0094] In the third embodiment of the present application, the refractive index between the cladding layer and the core is The first slab waveguide side taper portion is in contact with the first slab waveguide side taper portion, is in contact with the side where the first slab waveguide side taper portion is located, and becomes farther away from the first slab waveguide. The second slab waveguide side tapered portion having a refractive index between the first slab waveguide side inclined portion where the thickness is reduced and the clad layer and the core, and the second slab waveguide side tapered portion contacting P, The second slab waveguide side inclined portion that is in contact with the side where the second slab waveguide side taper portion of the slab waveguide is located and the thickness of the second slab waveguide side decreases as the distance from the second slab waveguide force increases. It is preferable that it is further formed as.

Similar to the optical wavelength multiplexer / demultiplexer 10 in FIG. 3 and the optical wavelength multiplexer / demultiplexer 11 in FIG. 8, the optical wavelength multiplexer / demultiplexer 12 includes the first slab waveguide side inclined portion 25 and the second slab. A force S can be formed to form the waveguide-side inclined portion 30.

Similar to the optical wavelength multiplexer / demultiplexer 10 in FIG. 3, the optical wavelength multiplexer / demultiplexer 12 is generated at the connection point between the first slab waveguide side taper portion 23 and the first slab waveguide 22. Propagation loss can be reduced. Similarly to the optical wavelength multiplexer / demultiplexer 11 shown in FIG. 8, the optical wavelength multiplexer / demultiplexer 12 is used to propagate the second slab waveguide side taper portion 29 and the second slab waveguide 31 at the connection point. Loss can be reduced. The optical wavelength multiplexer / demultiplexer 10 in FIG. 3 and the optical wavelength multiplexer / demultiplexer 11 in FIG. 8 are obtained by arranging the first slab waveguide side tapered portion 23 and the second slab waveguide side tapered portion 29 at equal intervals. Similarly, the optical wavelength multiplexer / demultiplexer 12 can reduce changes in manufacturing conditions such as etching even if the structure and shape are changed. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer that reduces propagation loss with a good yield during manufacture.

[Embodiment 4]

The fourth embodiment of the present application includes a clad layer formed on a substrate and a core having a refractive index higher than that of the clad layer surrounded by the clad layer, and transmits an optical signal as a pattern of the core. A first optical waveguide, a first slab waveguide connected to one end of the first optical waveguide and diffracting an optical signal, and a side of the first slab waveguide facing the side where the first optical waveguide is located A plurality of first slab waveguide side equal width portions that are equally spaced and have uniform widths and propagate optical signals, and the first slab waveguide side equal width portions Connected to the side opposite to the side where the slab waveguide is located, the width is narrower than the first slab waveguide side equal width part, and the first slab waveguide side equal width part force becomes narrower as the distance increases. Signal The first arrayed-waveguide-side taper portion to be carried and a certain optical waveguide length difference, one end of which is the side where the first-slab-waveguide-side equal-width portion of the first arrayed-waveguide-side tapered portion is located An arrayed waveguide composed of a plurality of channel waveguides connected to the side opposite to the second waveguide, a second slab waveguide connected to the other end of the arrayed waveguide and diffracting an optical signal, and a second slab waveguide An optical wavelength multiplexer / demultiplexer formed with a plurality of second optical waveguides that are connected to a side opposite to the side where the arrayed waveguide is located and that propagate optical signals.

An optical wavelength multiplexer / demultiplexer 13 according to the fourth embodiment of the present application will be described with reference to FIGS. 10 and 11. FIG. 10 is a conceptual diagram of the optical wavelength multiplexer / demultiplexer 13. The optical wavelength multiplexer / demultiplexer 13 includes a first optical waveguide 21, a first slab waveguide 22, a channel waveguide 26, an arrayed waveguide 27, a second slab waveguide 31, and a second optical waveguide 32.

FIG. 11 is an enlarged view of a broken line part of FIG. Figure 11 shows the spacing between the first slab waveguide 22, the first arrayed waveguide side taper 24, the channel waveguide 26, the first slab waveguide side equal width part 35, and the first slab waveguide side tapered part. 42 is shown.

[0100] The optical wavelength multiplexer / demultiplexer 13 can be manufactured in the same manner as the optical wavelength multiplexer / demultiplexer 10 of FIG.

Specifically, the optical wavelength multiplexer / demultiplexer 13 can be manufactured by changing the pattern formed on the core described above. In the following, changes in the pattern formed on the core will be described.

[0101] As shown in FIG. 11, the first slab waveguide-side equal width portion 35 has a first optical waveguide of the first slab waveguide 22 so that the interval 42 between the first slab waveguide-side tapered portions is equal. It may be formed so as to be connected to the side opposite to the side where 21 is located. Further, the first slab waveguide side equal width portion 35 may be formed to have a uniform width.

The second arrayed waveguide side tapered portion 28 may be formed on the side of the first slab waveguide side equal width portion 35 that faces the side where the first slab waveguide 22 is located.

[0103] The point that the optical wavelength multiplexer / demultiplexer 13 does not increase the yield and the number of manufacturing steps will be described. Similar to the optical wavelength demultiplexer 10 in FIG. 1, the optical wavelength demultiplexer 13 absorbs the influence of the change in the chip size and the like only by the second arrayed waveguide side tapered portion 28, and the manufacturing conditions such as etching are Changes can be reduced. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer with a high yield in manufacturing. [0104] In the fourth embodiment of the present application, the first slab waveguide has a refractive index between the cladding layer and the core and is between the adjacent equal width portions on the first slab waveguide side. The first slab waveguide side inclined portion is in contact with the side where the first slab waveguide side equal width portion is located, and the first slab waveguide side inclined portion becomes thinner as it gets farther from the first slab waveguide. It is preferable to further form as follows.

[0105] The optical wavelength multiplexer / demultiplexer 13 in which the first slab waveguide side inclined portion 25 is formed will be described with reference to FIG. FIG. 12 is an enlarged view of the broken line portion of FIG. 10 after the first slab waveguide side inclined portion 25 is formed. FIG. 12 shows the first slab waveguide 22, the first array waveguide side taper section 24, the first slab waveguide side inclined section 25, the channel waveguide 26, and the first slab waveguide side equal width section 35. Has been.

Similar to the first slab waveguide side inclined portion 25 of FIG. 3, the first slab waveguide side inclined portion 25 of FIG. 12 can be formed. The first slab waveguide side inclined portion 25 is located between the adjacent first slab waveguide side equal width portions 35 and on the side of the first slab waveguide 22 where the first slab waveguide side equal width portion 35 is located. You may form so that it may contact | connect. The first slab waveguide side inclined portion 25 becomes thinner as the distance from the second slab waveguide 31 increases.

[0107] Similar to the optical wavelength demultiplexer 10 of Fig. 1, the first slab waveguide side equal-width portions 35 are equally spaced, so that the optical wavelength multiplexer / demultiplexer 13 is inclined to the first slab waveguide side. The portion 25 can be formed with a constant size between the first slab waveguide side equal width portions 35. Therefore, the optical wavelength multiplexer / demultiplexer 13 can reduce changes in manufacturing conditions such as etching, even if the structure or shape is changed. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer that reduces propagation loss with a good yield in manufacturing.

[Embodiment 5]

The fifth embodiment of the present application includes a cladding layer formed on a substrate and a core having a higher refractive index than the cladding layer surrounded by the cladding layer, and transmits an optical signal as the pattern of the core. A plurality of second optical waveguides; a second slab waveguide connected to one end of the second optical waveguide to refract an optical signal; and a side of the second slab waveguide where the second optical waveguide is located A plurality of second slab waveguide side equal width portions that are equally spaced and uniform in width and propagate optical signals, and the second slab waveguide side equal width portions. The second of Connected to the side opposite to the side where the lab waveguide is located, the width is narrower than the equal width portion on the second slab waveguide side and the equal width portion force on the second slab waveguide side becomes narrower, and the optical signal becomes narrower. The second arrayed waveguide side taper portion that propagates through the second slab waveguide side taper portion has a certain optical waveguide length difference, and one end is located at the second slab waveguide side taper portion of the second arrayed waveguide side taper portion. An array waveguide composed of a plurality of channel waveguides connected to the side opposite to the side, a first slab waveguide connected to the other end of the array waveguide and diffracting an optical signal, and the first slab waveguide An optical wavelength multiplexer / demultiplexer having a first optical waveguide connected to a side opposite to the side where the arrayed waveguide is positioned and transmitting an optical signal.

An optical wavelength multiplexer / demultiplexer 14 according to the fifth embodiment of the present application will be described using FIG. 13 and FIG. FIG. 13 is a conceptual diagram of the optical wavelength multiplexer / demultiplexer 14. The optical wavelength multiplexer / demultiplexer 14

1 includes an optical waveguide 21, a first slab waveguide 22, a channel waveguide 26, an arrayed waveguide 27, a second slab waveguide 31, and a second optical waveguide 32.

FIG. 14 is an enlarged view of a broken line part of FIG. 14 shows the channel waveguide 26, the second arrayed waveguide side tapered portion 28, the second slab waveguide 31, the second slab waveguide side equal width portion 36, and the second slab waveguide side equal width portion. A distance 43 is shown.

The optical wavelength multiplexer / demultiplexer 14 can be manufactured in the same manner as the optical wavelength multiplexer / demultiplexer 11 in FIG.

Specifically, the optical wavelength multiplexer / demultiplexer 14 can be manufactured by changing the pattern formed on the core described above. In the following, changes in the pattern formed on the core will be described.

As shown in FIG. 14, the second slab waveguide-side equal-width portion 36 has a second optical waveguide of the second slab waveguide 31 so that the distance 43 between the second slab waveguide-side tapered portions is equal. It may be formed so as to be connected to the side opposite to the side where 32 is located. Further, the second slab waveguide side equal width portion 36 may be formed to have a uniform width.

[0113] The second arrayed waveguide side tapered portion 28 may be formed on the side of the second slab waveguide side equal width portion 36 that faces the side where the second slab waveguide 31 is located.

[0114] The point that the optical wavelength multiplexer / demultiplexer 14 does not increase the yield and the number of manufacturing steps will be described. Similar to the optical wavelength demultiplexer 11 in FIG. 6, the optical wavelength demultiplexer 14 absorbs the effect of changes in the chip size and the like only by the second arrayed waveguide side tapered portion 28, and manufacturing conditions such as etching Can be reduced. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer with a high yield in manufacturing.

[0115] In the fifth embodiment of the present application, the second slab waveguide has a refractive index between the cladding layer and the core, and is between the adjacent equal width portions on the second slab waveguide side. A second slab waveguide side inclined portion formed so as to be in contact with a side where the second slab waveguide side equal width portion of the second slab waveguide side is located, and the thickness of the second slab waveguide side becomes thinner as the distance from the second slab waveguide force increases. It is preferable to further form as a pattern.

With reference to FIG. 15, the optical wavelength multiplexer / demultiplexer 14 in which the second slab waveguide side inclined portion 30 is formed will be described. FIG. 15 is an enlarged view of the broken line portion of FIG. 13 after the second slab waveguide side inclined portion 30 is formed. FIG. 15 shows a channel waveguide 26, a second arrayed waveguide side tapered portion 28, a second slab waveguide side inclined portion 30, a second slab waveguide 31 and a second slab waveguide side equal width portion 36. Yes.

Similar to the second slab waveguide side inclined portion 30 of FIG. 8, the second slab waveguide side inclined portion 30 of FIG. 15 can be formed. The second slab waveguide side inclined portion 30 is located between the adjacent second slab waveguide side equal width portions 36, and on the side of the second slab waveguide 31 where the second slab waveguide side equal width portion 36 is located. You may form so that it may contact | connect. The second slab waveguide side inclined portion 30 becomes thinner as the distance from the second slab waveguide 31 increases.

[0118] Similar to the optical wavelength demultiplexer 11 in FIG. 8, the second slab waveguide side inclined portions 30 are equally spaced, so that the optical wavelength multiplexer / demultiplexer 14 is provided with the second slab waveguide side inclined portions. 30 can be formed between the second slab waveguide side equal width portion 36 with a constant size. Therefore, the optical wavelength multiplexer / demultiplexer 14 can reduce changes in manufacturing conditions such as etching even when the design or structure of the structure is changed. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer that reduces propagation loss with a good yield in manufacturing.

[Embodiment 6]

The sixth embodiment of the present application includes a clad layer formed on a substrate and a core having a refractive index higher than that of the clad layer surrounded by the clad layer, and transmits an optical signal as the pattern of the core. A first optical waveguide, a first slab waveguide that is connected to one end of the first optical waveguide and diffracts an optical signal, and faces the side of the first slab waveguide where the first optical waveguide is located A plurality of first slab waveguide side equal-width portions that are equally spaced and have uniform widths and that propagate optical signals, and the first slab waveguide-side equal width portions. 1 Connected to the side opposite to the side where the slab waveguide is located, the width is narrower than the first slab waveguide side equal width part and the first slab waveguide side equal width part force becomes narrower, 1st array waveguide side taper part which transmits an optical signal, and a certain optical waveguide length difference, and one end is the 1st slab waveguide side equal width part of the 1st array waveguide side taper part An arrayed waveguide composed of a plurality of channel waveguides connected to the side opposite to the side where the optical waveguide is positioned, and the other end of the arrayed waveguide, and the width becomes wider as the distance from the arrayed waveguide increases. A second arrayed-waveguide-side taper that propagates through the second-arrayed waveguide Taper Connected to the side opposite to the side on which a part of the arrayed waveguide is located, and each is equidistant, and the width is opposite to the side on which the arrayed waveguide is located in the second arrayed waveguide side tapered portion The second slab waveguide side equal width part that is wider and uniform than the side and propagates the optical signal, and the side where the second array waveguide side taper part of the second slab waveguide side equal width part is located A second slab waveguide that diffracts an optical signal, and a side that faces the side of the second slab waveguide where the second slab waveguide side equal width portion is located, An optical wavelength multiplexer / demultiplexer in which a plurality of second optical waveguides that propagate optical signals are formed.

[0120] An optical wavelength multiplexer / demultiplexer 15 according to the sixth embodiment of the present application will be described with reference to FIG. FIG. 16 is a conceptual diagram of the optical wavelength multiplexer / demultiplexer 15. The optical wavelength multiplexer / demultiplexer 15 includes a first optical waveguide 21, a first slab waveguide 22, a channel waveguide 26, an arrayed waveguide 27, a second slab waveguide 31, and a second optical waveguide 32.

The optical wavelength multiplexer / demultiplexer 15 can be manufactured in the same manner as the optical wavelength multiplexer / demultiplexer 13 in FIG.

Specifically, the optical wavelength multiplexer / demultiplexer 15 can be manufactured by changing the pattern formed on the core described above. In the following, changes in the pattern formed on the core will be described.

Similar to the optical wavelength multiplexer / demultiplexer 13 in FIG. 10, the first optical waveguide 21, the first slab waveguide 22, the first slab waveguide side equal width portion 35, and the first array waveguide side taper portion 24. And an arrayed waveguide 27 comprising a plurality of channel waveguides 26 may be formed.

Similar to the optical wavelength multiplexer / demultiplexer 14 in FIG. 14, the second arrayed waveguide side tapered portion 28, the second slurry The waveguide-side equal width portion 36, the second slab waveguide 31 and the second optical waveguide 32 may be formed.

The point that the optical wavelength multiplexer / demultiplexer 15 reduces the yield and the number of manufacturing steps will be described.

The optical wavelength multiplexer / demultiplexer 15 can demultiplex an optical signal input to the first optical waveguide 21 for each wavelength and output the demultiplexed optical signal to the second optical waveguide 32. The optical wavelength multiplexer / demultiplexer 15 can multiplex the optical signals input to the second optical waveguide 32 with different wavelengths and output them from the first optical waveguide 21.

Similar to the optical wavelength multiplexer / demultiplexer 13 in FIG. 10 and the optical wavelength multiplexer / demultiplexer 14 in FIG. 13, the optical wavelength multiplexer / demultiplexer 15 can reduce the yield and the number of manufacturing steps. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer with a good yield in manufacturing.

[0126] In the sixth embodiment of the present application, the first slab waveguide has a refractive index between the cladding layer and the core and is between the adjacent equal width portions on the first slab waveguide side. The first slab waveguide side inclined portion which is in contact with the side where the first slab waveguide side equal width portion is located and becomes thinner as it gets farther from the first slab waveguide, the cladding layer and the clad layer A side having a bending ratio with the core, between the adjacent equal width portions of the second slab waveguide, and on the side where the equal width portion of the second slab waveguide is located. It is preferable that a second slab waveguide-side inclined portion that is in contact with the second slab waveguide and whose thickness becomes thinner as the force of the second slab waveguide is further formed is further formed as a pattern of the core.

Similar to the optical wavelength multiplexer / demultiplexer 13 in FIG. 12, the optical wavelength multiplexer / demultiplexer 15 is generated at the connection point between the first slab waveguide side equal width portion 35 and the first slab waveguide 22. Propagation loss can be reduced. Similarly to the optical wavelength multiplexer / demultiplexer 14 in FIG. 15, the optical wavelength multiplexer / demultiplexer 15 is generated at the connection point between the second slab waveguide side equal width portion 36 and the second slab waveguide 31. Propagation loss can be reduced. Since the first slab waveguide side equal width portion 35 and the second slab waveguide side equal width portion 36 are each equidistant, the optical wavelength multiplexing / demultiplexing device 13 in FIG. 12 and the optical wavelength multiplexing / demultiplexing in FIG. Similar to the waver 14, the optical wavelength multiplexer / demultiplexer 15 can reduce changes in manufacturing conditions such as etching even if the structure or shape is changed. Therefore, it is possible to provide an optical wavelength multiplexer / demultiplexer that reduces propagation loss due to yield.

Industrial applicability The optical wavelength multiplexer / demultiplexer of the present invention can be used in an optical fiber communication network as an optical component such as an optical multiplexer / demultiplexer or an optical switch.

Claims

The scope of the claims

[1] A clad layer formed on a substrate and a core having a refractive index higher than that of the clad layer surrounded by the clad layer.

A first optical waveguide for propagating an optical signal;

A first slab waveguide connected to one end of the first optical waveguide and diffracting an optical signal, and connected to a side of the first slab waveguide opposite to the side where the first optical waveguide is located. A plurality of tapered portions on the first slab waveguide side that are equally spaced, narrow in width as they become farther from the first slab waveguide, and propagate optical signals;

A side of the first slab waveguide side taper portion that is connected to a side facing the side where the first slab waveguide is located, and a width of the first slab waveguide side taper portion is a side where the first slab waveguide is located. And the first arrayed waveguide side tapered part that propagates the optical signal, and has a certain optical waveguide length difference, and is narrower as it is farther from the first slab waveguide side tapered part. An arrayed waveguide comprising a plurality of channel waveguides, one end of which is connected to the side opposite to the side where the first slab waveguide side tapered portion is located of the first arrayed waveguide side tapered portion;

A second slab waveguide that diffracts an optical signal connected to the other end of the arrayed waveguide, and a side that faces the side of the second slab waveguide where the arrayed waveguide is located; An optical wavelength multiplexer / demultiplexer formed with a plurality of second optical waveguides to propagate.

[2] The first slab waveguide side taper of the first slab waveguide, which has a refractive index between the cladding layer and the core and is between the first slab waveguide side taper portion in contact with P The first slab waveguide side inclined portion, which is in contact with the side where the portion is located and becomes thinner as it is farther from the first slab waveguide, is further formed as a pattern of the core. The optical wavelength multiplexer / demultiplexer according to 1.

[3] A clad layer formed on a substrate and a core having a refractive index higher than that of the clad layer surrounded by the clad layer.

A plurality of second optical waveguides for propagating optical signals;

A second slab waveguide connected to one end of the second optical waveguide and diffracting an optical signal; a second slab waveguide connected to the side of the second slab waveguide opposite to the side where the second optical waveguide is located; A plurality of second slab waveguide side taper portions that are equally spaced, narrow in width as they become farther from the second slab waveguide, and propagate optical signals;

The second slab waveguide side tapered portion is connected to the side facing the side where the second slab waveguide is located, and the width of the second slab waveguide side tapered portion is the side where the second slab waveguide is located. And the second arrayed waveguide side tapered part that propagates the optical signal, and has a certain optical waveguide length difference, and is narrower as it is farther from the second slab waveguide side tapered part. An arrayed waveguide comprising a plurality of channel waveguides, one end of which is connected to the side opposite to the side where the second slab waveguide side tapered portion is located, of the second arrayed waveguide side tapered portion;

A first slab waveguide that diffracts an optical signal connected to the other end of the arrayed waveguide, and a side that faces the side of the first slab waveguide where the arrayed waveguide is located; An optical wavelength multiplexer / demultiplexer formed with a first optical waveguide that propagates.

[4] The second slab waveguide side taper of the second slab waveguide, which has a refractive index between the cladding layer and the core, is between the adjacent second slab waveguide side taper portions. The second slab waveguide side inclined portion, which is in contact with the side where the portion is located and becomes thinner as it gets farther from the second slab waveguide, is further formed as a pattern of the core. 4. An optical wavelength multiplexer / demultiplexer according to 3.

[5] A clad layer formed on a substrate and a core having a refractive index higher than that of the clad layer surrounded by the clad layer.

A first optical waveguide for propagating an optical signal;

A side of the first slab waveguide side taper portion that is connected to a side facing the side where the first slab waveguide is located, and a width of the first slab waveguide side taper portion is a side where the first slab waveguide is located. A first arrayed waveguide-side tapered portion that is narrower than the side facing the first slab waveguide and becomes narrower as it is farther from the first slab waveguide-side tapered portion, and propagates an optical signal; A plurality of channel guides having a certain optical waveguide length difference and having one end connected to the side opposite to the side where the first slab waveguide side taper portion is located, of the first array waveguide side taper portion. An array of waveguides, and

A second arrayed waveguide-side tapered portion that is connected to the other end of the arrayed waveguide and becomes wider as the distance from the arrayed waveguide increases, and propagates an optical signal;

The second arrayed waveguide side tapered portion is connected to the side opposite to the side where the arrayed waveguide is located, and each of the arrayed waveguides of the second arrayed waveguide side tapered portion is equidistant from each other. A second slab waveguide side taper portion that is wider than a side opposite to the positioned side and becomes wider as it is farther from the tapered portion on the second array waveguide side, and propagates an optical signal;

A second slab waveguide connected to a side of the second slab waveguide side tapered portion opposite to a side where the second arrayed waveguide side tapered portion is located, and diffracts an optical signal;

An optical wavelength multiplexing / demultiplexing comprising: a plurality of second optical waveguides that are connected to a side of the second slab waveguide that faces the side where the tapered portion on the second slab waveguide side is located and that propagate optical signals. vessel.

[6] The first slab waveguide side taper of the first slab waveguide, which has a refractive index between the cladding layer and the core, is between the adjacent first slab waveguide side taper portions. The first slab waveguide side inclined portion that is in contact with the side where the portion is located and becomes thinner as it is farther from the first slab waveguide, and has a refractive index between the cladding layer and the core, and is adjacent Between the second slab waveguide side taper portion, contacting the side of the second slab waveguide where the second slab waveguide side taper portion is located, and being further away from the second slab waveguide. 6. The optical wavelength multiplexer / demultiplexer according to claim 5, wherein a second slab waveguide side inclined portion having a reduced thickness is further formed as a pattern of the core.

[7] A clad layer formed on a substrate and a core having a higher refractive index than that of the clad layer surrounded by the clad layer.

A first optical waveguide for propagating an optical signal;

A first slab waveguide connected to one end of the first optical waveguide and diffracting an optical signal, and connected to a side of the first slab waveguide opposite to the side where the first optical waveguide is located. A plurality of equal width portions on the side of the first slab waveguide, each of which is equally spaced and uniform in width and propagates an optical signal;

The first slab waveguide side equal width portion is connected to the side facing the side where the first slab waveguide is located, and the width is narrower than the first slab waveguide side equal width portion, and the first slab waveguide side A first array waveguide-side taper portion that becomes narrower as it gets farther from the waveguide-side equal-width portion and propagates an optical signal;

A plurality of channel guides having a certain optical waveguide length difference and having one end connected to a side opposite to the side where the first slab waveguide side equal width part is located of the first arrayed waveguide side tapered part. An array of waveguides, and

[8] The first slab waveguide side of the first slab waveguide, which has a refractive index between the cladding layer and the core, is between the adjacent equal width portions of the first slab waveguide side A first slab waveguide-side inclined portion that is in contact with the side where the equal-width portion is located and becomes thinner as it is farther from the first slab waveguide, is further formed as a pattern of the core The optical wavelength multiplexer / demultiplexer according to claim 7.

[9] A clad layer formed on a substrate and a core having a higher refractive index than the clad layer, surrounded by the clad layer,

A plurality of second optical waveguides for propagating optical signals;

A second slab waveguide connected to one end of the second optical waveguide and diffracting an optical signal; a second slab waveguide connected to the side of the second slab waveguide opposite to the side where the second optical waveguide is located; A plurality of equal width portions on the second slab waveguide side that are equally spaced, have a uniform width, and propagate optical signals;

The second slab waveguide side equal width portion is connected to a side facing the side where the second slab waveguide is located, and the width is narrower than the second slab waveguide side equal width portion, and the second slab waveguide side A second arrayed-waveguide-side taper that becomes narrower as it gets farther from the waveguide-side equal-width part and propagates an optical signal; A plurality of channel guides having a certain optical waveguide length difference and having one end connected to the side opposite to the side where the second slab waveguide side equal width part is located of the second arrayed waveguide side tapered part. An array of waveguides, and

[10] The second slab waveguide side of the second slab waveguide, which has a refractive index between the cladding layer and the core and is between the equal width portions of the second slab waveguide side in contact with P A second slab waveguide side inclined portion that is formed so as to be in contact with the side where the equal width portion is located and becomes thinner as the distance from the second slab waveguide is further formed as a pattern of the core. The optical wavelength multiplexer / demultiplexer according to claim 9.

[11] A clad layer formed on a substrate and a core having a refractive index higher than that of the clad layer surrounded by the clad layer.

A first optical waveguide for propagating an optical signal;

The second arrayed waveguide side tapered portion faces the side where the arrayed waveguide is located The second arrayed waveguide side taper portion is wider and uniform than the side facing the side where the arrayed waveguide is located, and propagates an optical signal. A second slab waveguide side equi-width portion;

A second slab waveguide that diffracts an optical signal, connected to a side of the second slab waveguide side equal width portion that faces the side where the second arrayed waveguide side tapered portion is located;

A plurality of second optical waveguides that are connected to a side of the second slab waveguide that faces the side where the equal-width portion on the second slab waveguide side is located and a plurality of second optical waveguides that propagate optical signals are formed. Wave has a refractive index between the cladding layer and the core, is between the adjacent equal width portions of the first slab waveguide side, and is equal to the first slab waveguide side equal width of the first slab waveguide The first slab waveguide-side inclined portion that is in contact with the side where the portion is located and becomes thinner as it is farther from the first slab waveguide, and has a refractive index between the cladding layer and the core, and is adjacent Said first

2 between the slab waveguide-side equal width portions, in contact with the side of the second slab waveguide where the second slab waveguide-side equal width portion is located, and as the distance from the second slab waveguide increases, the wall thickness increases. 12. The optical wavelength multiplexer / demultiplexer according to claim 11, wherein a thinned second slab waveguide side inclined portion is further formed as a pattern of the core.