WO2007031317A3 - Verfahren zum aufbringen einer porösen glasschicht - Google Patents

Verfahren zum aufbringen einer porösen glasschicht Download PDF

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Publication number
WO2007031317A3
WO2007031317A3 PCT/EP2006/008968 EP2006008968W WO2007031317A3 WO 2007031317 A3 WO2007031317 A3 WO 2007031317A3 EP 2006008968 W EP2006008968 W EP 2006008968W WO 2007031317 A3 WO2007031317 A3 WO 2007031317A3
Authority
WO
WIPO (PCT)
Prior art keywords
glass layer
porous glass
applying
pvd
porosity
Prior art date
Application number
PCT/EP2006/008968
Other languages
English (en)
French (fr)
Other versions
WO2007031317A2 (de
Inventor
Clemens Ottermann
Joern Pommerehne
Original Assignee
Schott Ag
Clemens Ottermann
Joern Pommerehne
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott Ag, Clemens Ottermann, Joern Pommerehne filed Critical Schott Ag
Priority to CN2006800414015A priority Critical patent/CN101305111B/zh
Priority to EP06792064A priority patent/EP1924720A2/de
Priority to US12/067,021 priority patent/US20090011217A1/en
Publication of WO2007031317A2 publication Critical patent/WO2007031317A2/de
Publication of WO2007031317A3 publication Critical patent/WO2007031317A3/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249961—With gradual property change within a component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249978—Voids specified as micro
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249982—With component specified as adhesive or bonding agent

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

Die Erfindung betrifft ein Verfahren zum Aufbringen einer porösen Glasschicht. Es wird vorgeschlagen, eine poröse Glasschicht mittels eines PVD-Verfahrens aufzubringen. Porositätsgrad und mittlere Porengröße können über die Prozessparameter wie Druck und Abscheiderate sowie durch gezieltes Zusetzen von Fremdstoffen variiert werden.
PCT/EP2006/008968 2005-09-16 2006-09-14 Verfahren zum aufbringen einer porösen glasschicht WO2007031317A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN2006800414015A CN101305111B (zh) 2005-09-16 2006-09-14 用于施设多孔的玻璃层的方法
EP06792064A EP1924720A2 (de) 2005-09-16 2006-09-14 Verfahren zum aufbringen einer porösen glasschicht
US12/067,021 US20090011217A1 (en) 2005-09-16 2006-09-14 Method for applying a porous glass layer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005044522.5 2005-09-16
DE200510044522 DE102005044522B4 (de) 2005-09-16 2005-09-16 Verfahren zum Aufbringen einer porösen Glasschicht, sowie Verbundmaterial und dessen Verwendung

Publications (2)

Publication Number Publication Date
WO2007031317A2 WO2007031317A2 (de) 2007-03-22
WO2007031317A3 true WO2007031317A3 (de) 2007-05-18

Family

ID=37451214

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2006/008968 WO2007031317A2 (de) 2005-09-16 2006-09-14 Verfahren zum aufbringen einer porösen glasschicht

Country Status (5)

Country Link
US (1) US20090011217A1 (de)
EP (1) EP1924720A2 (de)
CN (1) CN101305111B (de)
DE (1) DE102005044522B4 (de)
WO (1) WO2007031317A2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007058926B4 (de) 2007-12-05 2010-04-29 Schott Ag Solarglas und Verfahren zur Herstellung eines Solarglases sowie dessen Verwendung
DE102007058927B4 (de) 2007-12-05 2010-04-29 Schott Ag Substrat mit einer Sol-Gel-Schicht und Verfahren zur Herstellung eines Verbundmaterials sowie dessen Verwendung
DE102008046579A1 (de) * 2008-09-10 2010-03-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung einer optischen Wellenleiterschicht
DE102009034532A1 (de) * 2009-07-23 2011-02-03 Msg Lithoglas Ag Verfahren zum Herstellen einer strukturierten Beschichtung auf einem Substrat, beschichtetes Substrat sowie Halbzeug mit einem beschichteten Substrat
WO2011153369A2 (en) * 2010-06-02 2011-12-08 University Of Washington Through Its Center For Commercialization Porous glass articles formed using cold work process
EP3287109B1 (de) * 2011-06-10 2023-11-29 The Procter & Gamble Company Saugfähige struktur für saugfähige artikel
JP2013127602A (ja) * 2011-11-18 2013-06-27 Canon Inc 光学部材、撮像装置、光学部材の製造方法及び撮像装置の製造方法
DE102012100288B4 (de) 2012-01-13 2016-03-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung eines Kunststoffsubstrats mit einer porösen Schicht
CN104380432A (zh) * 2012-03-30 2015-02-25 Msg里松格莱斯股份公司 半导体器件和用于制造类玻璃层的方法
JP6080386B2 (ja) * 2012-05-23 2017-02-15 キヤノン株式会社 光学部材、撮像装置及び光学部材の製造方法
FR2992778A1 (fr) * 2012-06-29 2014-01-03 Commissariat Energie Atomique Batterie de type lithium-ion avec une cathode a porosite variable et procede correspondant
US10017849B2 (en) * 2012-11-29 2018-07-10 Corning Incorporated High rate deposition systems and processes for forming hermetic barrier layers
DE102016101013A1 (de) * 2016-01-21 2017-07-27 Von Ardenne Gmbh Verfahren, Beschichtungsvorrichtung und Prozessieranordnung
US10995624B2 (en) * 2016-08-01 2021-05-04 General Electric Company Article for high temperature service

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5660611A (en) * 1992-03-17 1997-08-26 Sumitomo Electric Industries, Ltd. Method for producing glass thin film
US20020031917A1 (en) * 2000-09-11 2002-03-14 Takashi Nire Method for forming porous film, insulating film for semiconductor element, and method for forming such insulating film
WO2004065295A1 (en) * 2003-01-17 2004-08-05 Ciba Specialty Chemicals Holding Inc. A process for the production of porous inorganic materials or a matrix material containing nanoparticles

Family Cites Families (10)

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DE1696110B1 (de) * 1968-01-23 1971-07-01 Jenaer Glaswerk Schott & Gen Verfahren zur herstellung von glasigen schichten auf substat materialien durch vakuumaufdampfen mittels elektronenstrahlen
US4001049A (en) * 1975-06-11 1977-01-04 International Business Machines Corporation Method for improving dielectric breakdown strength of insulating-glassy-material layer of a device including ion implantation therein
DE3305854C1 (de) * 1983-02-19 1984-09-06 Schott Glaswerke, 6500 Mainz Verfahren zur Herstellung von poroesem Sinterglas mit grossem offenem Porenvolumen
US5070046A (en) * 1989-10-19 1991-12-03 E. I. Du Pont De Nemours And Company Dielectric compositions
DE4427921C2 (de) * 1994-08-06 2002-09-26 Forschungszentrum Juelich Gmbh Chemische Sensoren, insbesondere Biosensoren, auf Siliciumbasis
JPH08117575A (ja) * 1994-10-18 1996-05-14 Agency Of Ind Science & Technol 超微細な細孔を有する多孔質ガラス膜、その製造方法および高選択性ガス分離膜
CA2322714A1 (en) * 1999-10-25 2001-04-25 Ainissa G. Ramirez Article comprising improved noble metal-based alloys and method for making the same
DE10222964B4 (de) * 2002-04-15 2004-07-08 Schott Glas Verfahren zur Gehäusebildung bei elektronischen Bauteilen sowie so hermetisch verkapselte elektronische Bauteile
JP2005105244A (ja) * 2003-01-24 2005-04-21 National Institute Of Advanced Industrial & Technology 半導体超微粒子及び蛍光体
TWI238675B (en) * 2004-01-19 2005-08-21 Hitachi Displays Ltd Organic light-emitting display and its manufacture method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5660611A (en) * 1992-03-17 1997-08-26 Sumitomo Electric Industries, Ltd. Method for producing glass thin film
US20020031917A1 (en) * 2000-09-11 2002-03-14 Takashi Nire Method for forming porous film, insulating film for semiconductor element, and method for forming such insulating film
WO2004065295A1 (en) * 2003-01-17 2004-08-05 Ciba Specialty Chemicals Holding Inc. A process for the production of porous inorganic materials or a matrix material containing nanoparticles

Also Published As

Publication number Publication date
DE102005044522B4 (de) 2010-02-11
EP1924720A2 (de) 2008-05-28
CN101305111B (zh) 2012-08-29
CN101305111A (zh) 2008-11-12
DE102005044522A1 (de) 2007-03-22
WO2007031317A2 (de) 2007-03-22
US20090011217A1 (en) 2009-01-08

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