WO2007024225A1 - Transducteur multi-axe - Google Patents

Transducteur multi-axe Download PDF

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Publication number
WO2007024225A1
WO2007024225A1 PCT/US2005/030337 US2005030337W WO2007024225A1 WO 2007024225 A1 WO2007024225 A1 WO 2007024225A1 US 2005030337 W US2005030337 W US 2005030337W WO 2007024225 A1 WO2007024225 A1 WO 2007024225A1
Authority
WO
WIPO (PCT)
Prior art keywords
addressing
electrodes
sections
transducer
improved multi
Prior art date
Application number
PCT/US2005/030337
Other languages
English (en)
Inventor
A. Ealey. Mark
Original Assignee
Xinetics, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xinetics, Inc. filed Critical Xinetics, Inc.
Priority to PCT/US2005/030337 priority Critical patent/WO2007024225A1/fr
Publication of WO2007024225A1 publication Critical patent/WO2007024225A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/101—Piezoelectric or electrostrictive devices with electrical and mechanical input and output, e.g. having combined actuator and sensor parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2027—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having cylindrical or annular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view

Definitions

  • This invention relates to an improved multi-axis transducer and more particularly to such an improved multi-axis transducer which may be monolithic, integrated and have three degrees of freedom.
  • each addressing electrode includes a number of electrically isolated sections which form a set with corresponding sections in other addressing electrodes and either applying a voltage across layers to cause a displacement in the actuator mode or in the sensor mode sensing the voltage across the layers representative of an applied force.
  • This invention features an improved multi-access transducer including a stack of ferroelectric layers and a plurality of common electrodes and addressing electrodes alternately disposed between the ferroelectric layers.
  • Each of the addressing electrodes includes a number of sections electrically isolated from each other and forming a set with corresponding sections of the other addressing electrodes.
  • the transducer may be an actuator and each of the addressing conductors may apply a voltage to its associated set of addressing electrode sections.
  • the transducer may be a sensor and each of the addressing conductors may sense a voltage from its associated set of addressing electrode sections.
  • the transducer may include a co-located sensor-actuator.
  • the transducer may include a seismic mass and a suspension system interconnecting the seismic mass with each of the sets of addressing electrode sections for generating voltages representing the orientation of the transducer.
  • the transducer may be cylindrical and each of the electrodes may be annular. Each of the electrodes may include at least two sections.
  • the addressing electrodes may include sensor addressing electrodes and actuator addressing electrodes.
  • the addressing conductors may include sensor-addressing conductors for connection with the sensor addressing electrodes and actuator addressing conductors for connection with the actuator addressing electrodes.
  • the d 3 3 axis of the ferroelectric layers may be generally perpendicular do the layers.
  • the d 31 axis of the ferroelectric layers may be generally parallel to the layers.
  • the sections on each addressing electrode may be alternately sensor sections and actuator sections.
  • Each of the common electrodes may include a number of recessed portions for defining a contact path for the addressing conductors with the addressing electrodes. In at least one set of sections, the sections may include a recess portion for defining a contact path for the common conductor with the common electrodes.
  • the layers and electrodes may be co-fired.
  • the ferroelectric layers may be electrostrictive, piezoelectric, piezoresistive or pyroresistive.
  • the invention also features an improved multi-access sensor including a stack of ferroelectric layers and a plurality of common electrodes and addressing electrodes alternately disposed between the ferroelectric layers.
  • Each of the addressing electrodes includes a number of sections electrically isolated from each other and forming a set with corresponding sections in the other addressing electrodes.
  • the invention also features an improved multi-axis actuator including a stack of ferroelectric layers and a plurality of common electrodes and addressing electrodes alternately disposed between the ferroelectric layers.
  • Each of the addressing electrodes includes a number of sections electrically isolated from each other and forming a set with corresponding sections in the other addressing electrodes.
  • the invention also features an improved multi-axis co-located sensor-actuator including a stack of ferroelectric layers and a plurality of common electrodes and addressing electrodes alternately disposed between the ferroelectric layers.
  • Each of the addressing electrodes includes a number of sections electrically isolated from each other and forming a set with corresponding sections in the other addressing electrodes.
  • the addressing electrodes includes sensor addressing electrodes and actuator addressing electrodes.
  • the addressing conductor includes sensor addressing conductors for connection with the sensor addressing electrodes and actuator addressing conductors for connection with the actuator addressing electrodes for independently, selectively, sensing a voltage across the layers representative of a force applied to the sensor-actuator and applying a voltage across the layers to generate a displacement by the sensor-actuator.
  • Fig. 1 is diagrammatic three-dimensional view of a multi-axis transducer according to this invention
  • Fig. 2 is a diagrammatic side elevation sectional view along line 2-2 of Fig. 1;
  • Fig. 3 is an enlarged, exploded diagrammatic view of a portion of the transducer of Fig. 1 including several layers;
  • Fig. 4 is an enlarged schematic view of a layer with a pattern of common electrodes disposed therein;
  • Fig. 5 is an enlarged schematic view of a layer with a pattern of addressing electrodes disposed thereon;
  • Fig. 6 is a schematic side view of a transducer similar to that of Fig. 1 implementing a co-located sensor-actuator according to this invention with the sensor and actuator portions configured longitudinally along the stack;
  • Fig. 7 is a schematic top view of a transducer similar to that of Fig. 1 implementing a co-located sensor-actuator according to this invention with the sensor and actuator portions configured circumferencially alternately around the stack;
  • Fig. 8 is a schematic diagram of a transducer similar to that of Fig. 1 illustrating the d 33 axis conformation;
  • Fig 9 is a schematic diagram of a transducer similar to that of Fig. 1 illustrating the d 31 axis conformation
  • Figs. 10 and 11 are schematic plan views of addressing and common electrodes, respectively, having square shapes according to this invention.
  • Figs. 12 and 13 are views of octagonal and triangular shaped electrodes
  • Fig. 14 is a schematic, three dimensional view of a transducer with a seismic mass according to this invention for measuring angular acceleration and as an angle sensor or accelerometer;
  • Figs. 15-18 are schematic diagrams of alternative constructions of this invention.
  • FIG. 1 a multi-axis transducer 10 according to this invention
  • Transducer 10 is formed of a plurality of layers typically numbering in the tens or hundreds. The layers are separated by electrodes, alternately common electrodes and addressing electrodes. Layers 20 are made of a ferroelectric electrodisplacive material, such as electrostrictive, piezoresistive, piezoelectric, or pryoresistive materials e.g. lead magnesium nitrate, lead zirconate titanate. Disposed between alternate layers are addressing electrodes 22 with the common electrodes 24 being interstitially alternately disposed These combinations of layers and electrodes form capacitors which may be viewed as mechanically in series and electrically in parallel.
  • the layers 20 may be very thin, for example, 4 mils as compared to the prior art longitudinal walls which are 40 to 100 mils thick, those prior art devices required a 100Ov to 250Ov voltage supplies where as this structure using 4 mils layers would require only approximately 100 volts. Further when this transducer is operated as an actuator it will have greater displacement because it has a greater number of layers and displacement is a function of the number of layers squared times the electric field.
  • Co-firing is a well known fabrication process not a part of this invention which involves removing carbon from the green body during binder burnout and densities the ceramic during sintering with the result being a monolithic multilayer stack.
  • Ceramic Processing and Sintering M.N. Rahamen, Principles of Ceramic Processing, James S. Reed.
  • Each addressing electrode 22 includes two or more sections.
  • the addressing electrodes 22 include three sections 28, 30 and 32 but fewer two or more 6, 10, 50, 100, 500 or any number may be used limited only by the manufacturing tolerances and the resolution desired.
  • Transducer 10 is typically cylindrical in form and circularly symmetrical about centerline C/L and may have a central hole 26 to improve its performance.
  • Each section 28, 30, 32 in each addressing electrode 22 forms a set with a corresponding sections in the other addressing electrodes. That is to say, all of the sections 28 in all of the addressing electrodes 22 which are connected by addressing conductor 12 form a set as do all the sections 30 interconnected by addressing conductor 18 and all of the sections 32 interconnected by addressing
  • conductor 16 These sets are referred to as 34, 36, and 38, respectively.
  • transducer 10 When transducer 10 is operated as a actuator an electric field is created in layers 20 by applying a voltage across the pairs of addressing and common electrodes through addressing conductors 12, 14 and 16 and common conductor 18. If all of the applied voltages are equal, a displacement is generated in the Z axis longitudinally, if unequal voltages are applied then the sets 34, 36, 38 of sections 28, 30, and 32 will undergo different displacements and there will be a tilting, imposing a motion in the X and Y axes as well.
  • Each of sections 28, 30 and 32 on each of addressing electrodes 22 are electrically isolated from each other, such as by insulating portions 40, 42 and 44.
  • each of common electrodes 24, Fig. 2 is recessed from the edge 52 of the stack of layers 20 so that it cannot electrically connect to addressing conductor 16 which is electrically interconnected to each of the addressing electrodes 22, such as at terminals 54. Similar recessing is done of the addressing electrodes to avoid contact with all but the common conductor.
  • Addressing electrode 22a includes three sections 28a, 30a and 32a electrically separated by insulators 40a, 42a, and 44a. A portion of section of 30a is recessed as at 60, in fact only one recess is needed where there is typically only one common conductor, but for ease of manufacturing and assembly recesses are often provided in each of the sections as shown in phantom at 62 and 64.
  • Common electrode 24a includes three recesses 66, 68, and 70 to be sure that there is no contact with addressing conductors 12, 14, and 16, respectively.
  • the next layer 20c includes an addressing electrode 22c having three sections, 28c, 30c, and 32c with insulators 40c, 42c, and 44c and recesses 60c, 62c, and 64c.
  • the transducer of this invention may be easily fabricated by fabricating a number of ferroelectric layers 100, Fig. 4, on which have been developed common electrodes 102 and fabricating a number of ferroelectric layers 104 on which have been developed a number of addressing electrodes 106, Fig. 5 Hundreds of these layers 100 and 104 are then stacked alternately and in registration following which the individual stacks of addressing and common electrodes are cut from the substrate and co-fired to form a number of transducers according to this invention.
  • the transducer may function as a co-located combination sensor and actuator.
  • a co-located sensor actuator 110 Fig. 6 is constructed in the same way as the transducer shown in Figs. 1, 2 and 3, except that one group of addressing electrodes is designated the sensor group 112, and the other group of addressing electrodes is designated as the actuator group 114.
  • each of the addressing electrodes has an alternating pattern of actuator and
  • sensing sections which form three sets of sensing sections interstitially disposed with respect to three sets of actuator sections.
  • transducers 110 and 130 in Figs. 6 and 7 the result is a co-located integrated and monolithic, co-fired, transducer which can operate both as a sensor and as an actuator to provide both displacement and force sensing.
  • the device in Fig. 6 could have every other capacitor plate act as an actuator and the interstitial ones act as a sensor, instead of having two distinct groups as shown.
  • the transducer is shaped as an elongated cylinder, as shown in Fig. 8, where the length L is much greater than the diameter D, the better performance is along the longitudinal access or the d 33 axis.
  • the transducer of this invention works just as well when d 31 is the preferred axis, if the aspect ratio is reversed so that the diameter D, Fig. 9, is much greater than the length L.
  • the geometry of the transducer has been depicted as a cylinder, this is not a necessary limitation of the invention, for example, it might be a rectangle and have a rectangular addressing electrode 150, Fig.
  • Rectangular addressing electrode 150 might have recesses 170 , 172, 174, 176 any one or more of which would accommodate avoidance of a common conductor.
  • Fig. 11 shows a common electrode 180 which might have recesses 182, 184, 186, 188 for accommodating avoidance of each of the four addressing conductors which interconnect with sections 152, 154, 156, and 158, Fig. 10.
  • a common electrode 180 which might have recesses 182, 184, 186, 188 for accommodating avoidance of each of the four addressing conductors which interconnect with sections 152, 154, 156, and 158, Fig. 10.
  • transducer 200 may also be made to operate as an angle sensor or even an accelerometer.
  • transducer 200 may perform as before with a seismic mass 202 suspended for example as triaxial cantilever structure 204 in center hole 26'. Then any movement off plumb will cause the sets of sections 34', 36', 38' to experience different forces. The differences in forces are representative of the angle orientation of the device which can be duly decoded in ways well known not a part of this invention. Further the voltage output signals which represent the forced distribution on transducer 200 can be interpreted as to their rate of change as well so that transducer 200 can perform as an accelerometer as well.
  • transducer 1Od may be made to produce piston displacement 220 along the z-axis or a tilt 222 along the X, Y, and Z-axis by a proper pattern of voltages on addressing conductors 12d, 14d, and 16d and common conductor 18d, provided by power supply 224, for example, under the control of a micro-processor 226.
  • the force 228 exerting on transducer 1Oe, Fig. 16 may be detected as to its magnitude and direction by sensing the voltages on addressing conductors 12e, 14e,
  • transducer 200a employing seismic mass 250 and suspension system 252 may provide voltage outputs on addressing conductors 12g, 14g, and 16g and common conductor 18g, representative of the magnitude and direction of the force applied to it as sensed by sensing circuit 254 to calculate both the angle and the rate of change of the angle or acceleration using a microprocessor 256 or similar device.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

Cette invention concerne un transducteur multi-axe perfectionné comprenant une pile de couches ferroélectriques (20) et une pluralité d’électrodes communes (24) et d’électrodes d’adressage (22) disposées en alternance entre les couches ferroélectriques, chaque électrode d’adressage comportant un nombre de zones isolées électriquement les unes des autres et formant un ensemble de zones correspondantes dans d’autres électrodes d’adressage (22). Un conducteur commun (18) est relié électriquement aux électrodes communes (24) et un nombre de conducteurs d’adressage (12, 14, 16) sont tous reliés électriquement à un ensemble différent de zones des électrodes d’adressage (22).
PCT/US2005/030337 2005-08-26 2005-08-26 Transducteur multi-axe WO2007024225A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/US2005/030337 WO2007024225A1 (fr) 2005-08-26 2005-08-26 Transducteur multi-axe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2005/030337 WO2007024225A1 (fr) 2005-08-26 2005-08-26 Transducteur multi-axe

Publications (1)

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WO2007024225A1 true WO2007024225A1 (fr) 2007-03-01

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013188989A1 (fr) * 2012-06-20 2013-12-27 Kistler Holding Ag Élément de mesure, corps de mesure et ensemble de mesure servant à mesurer une force et utilisation d'un corps de mesure de ce type
AT523511A1 (de) * 2020-01-29 2021-08-15 Piezocryst Advanced Sensorics Strukturiertes, piezoelektrisches Sensorelement

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4885498A (en) * 1985-06-19 1989-12-05 Ngk Spark Plug Co., Ltd. Stacked type piezoelectric actuator
US6720711B2 (en) * 1998-09-18 2004-04-13 Seiko Instruments Inc. Piezoelectric actuator, ultrasonic motor equipped with piezoelectric actuator, and electronic apparatus equipped with piezoelectric actuator
US6834419B2 (en) * 2000-04-27 2004-12-28 Endress + Hauser Gmbh + Co. Method of producing sensor element

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4885498A (en) * 1985-06-19 1989-12-05 Ngk Spark Plug Co., Ltd. Stacked type piezoelectric actuator
US6720711B2 (en) * 1998-09-18 2004-04-13 Seiko Instruments Inc. Piezoelectric actuator, ultrasonic motor equipped with piezoelectric actuator, and electronic apparatus equipped with piezoelectric actuator
US6834419B2 (en) * 2000-04-27 2004-12-28 Endress + Hauser Gmbh + Co. Method of producing sensor element

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013188989A1 (fr) * 2012-06-20 2013-12-27 Kistler Holding Ag Élément de mesure, corps de mesure et ensemble de mesure servant à mesurer une force et utilisation d'un corps de mesure de ce type
CH706635A1 (de) * 2012-06-20 2013-12-31 Kistler Holding Ag Messelement, Messkörper und Messanordnung zum Messen einer Kraft und Verwendung eines solchen Messkörpers.
CN104395720A (zh) * 2012-06-20 2015-03-04 基斯特勒控股公司 测量力的测量元件、测量体和测量装置以及这种测量体的应用
US9347839B2 (en) 2012-06-20 2016-05-24 Kistler Holding Ag Measuring element, measuring body and measuring arrangement for measuring a force, and use of such a measuring body
AT523511A1 (de) * 2020-01-29 2021-08-15 Piezocryst Advanced Sensorics Strukturiertes, piezoelektrisches Sensorelement
AT523511B1 (de) * 2020-01-29 2021-10-15 Piezocryst Advanced Sensorics Strukturiertes, piezoelektrisches Sensorelement

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