WO2007024031A1 - Static bearing conveying apparatus having magnetically preloading and motional error correcting functions - Google Patents

Static bearing conveying apparatus having magnetically preloading and motional error correcting functions Download PDF

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Publication number
WO2007024031A1
WO2007024031A1 PCT/KR2005/002775 KR2005002775W WO2007024031A1 WO 2007024031 A1 WO2007024031 A1 WO 2007024031A1 KR 2005002775 W KR2005002775 W KR 2005002775W WO 2007024031 A1 WO2007024031 A1 WO 2007024031A1
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WO
WIPO (PCT)
Prior art keywords
guide
magnetic
preload
permanent magnet
motional
Prior art date
Application number
PCT/KR2005/002775
Other languages
French (fr)
Inventor
Seung-Kook Ro
Chun-Hong Park
Original Assignee
Korea Institute Of Machinery & Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Institute Of Machinery & Materials filed Critical Korea Institute Of Machinery & Materials
Priority to US11/993,469 priority Critical patent/US7942099B2/en
Priority to JP2008518008A priority patent/JP2008546965A/en
Priority to PCT/KR2005/002775 priority patent/WO2007024031A1/en
Priority to EP05781086.3A priority patent/EP1917447B1/en
Publication of WO2007024031A1 publication Critical patent/WO2007024031A1/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
    • F16C32/0674—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play by means of pre-load on the fluid bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C39/00—Relieving load on bearings
    • F16C39/06—Relieving load on bearings using magnetic means

Definitions

  • the present invention relates to a static bearing conveying apparatus having magnetically preloading and motional error correcting functions. More particularly, the present invention relates to a static bearing conveying apparatus, which comprises a table and a guide having simple construction, and which is adapted to generate preload using magnetic force and to adjust a floating gap through variation in magnetic force applied to generate the preload, thereby providing magnetically preloading and motional error correcting functions.
  • Preload for static bearings is generated by magnetic force of a permanent magnet, and the magnetic force is varied to maintain a floating gap of the static bearings by use of an electromagnetic coil. This construction is based on the fact that the rigidity of the static bearings based on the preload is inversely proportional to the floating gap.
  • the floating gap required for the static bearings can be adjusted by changing the intensity of magnetic force through change of electric current applied to the electromagnetic coil, and errors in angular motion and in linear motion horizontal to a conveying direction of a conveying system can be corrected according to structure of a correcting unit.
  • a conventional conveying system employing static bearings is shown.
  • a double-sided pad type conveying apparatus comprises a guide 20 located below a table 10 to maintain sufficient rigidity of the static bearings and having guide surfaces 21 and 22 formed on opposite sides thereof to guide the static bearings, and a pair of bearing pads 30 fixed in parallel to each other on the table 10 while facing the guide surfaces 21 and 22.
  • the present invention has been made in view of the above problems, and it is an object of the present invention to provide a static bearing conveying apparatus, which can be simplified in structure by applying a magnetic preloading device to a conveying system employing static bearings, while correcting motional error via active control of magnetic force.
  • a static bearing conveying apparatus employing static bearings and having magnetic preloading and motional error correcting functions, the apparatus comprising: a guide having a guide surface formed on one side facing a table; magnetic preload units provided between the guide and the table to generate preload; and a motional error correcting control unit comprising a controller to control the magnetic preload units, and a power amplifier to apply electric current according to a control signal from the controller.
  • Each of the magnetic preload units may comprise a permanent magnet, a core collinear with magnetic fluxes from the permanent magnet, and an electromagnetic coil wound around the core, and located between static bearing pads and the guide to generate the preload, so that a floating gap for the static bearings can be corrected by changing magnetic force generating the preload, and errors in angular motion and linear motion in a direction horizontal to a conveying direction of a conveying system can be corrected according to structure of a correcting apparatus.
  • the static bearing conveying apparatus is a one-sided pad type apparatus which has a guide surface formed only on one side of a guide, and a pad fixed to a table to face the guide surface, thereby simplifying the structure of the table and the overall guide while reducing the volumes of the table and the overall guide.
  • the guide surface requiring precise machining is formed only on one side of the guide, thereby facilitating guide surface machining as well as reducing the machining costs thereof.
  • the magnetic preload units in the apparatus apply magnetic force to the static bearings to generate preload on the static bearings through permanent magnets, and adjust a floating gap of the static bearings by adjusting the magnetic force using an electromagnetic coil, thereby reducing motional errors occurring upon conveyance on the table and remarkably enhancing precision of a conveying system.
  • FIG. 1 is a cross-sectional view illustrating the construction of a conventional double-sided pad type static bearing conveying apparatus
  • FIG. 2 is a cross-sectional view illustrating a single-sided pad type static bearing conveying apparatus having preloading and motional error correcting functions according to the present invention
  • FIG. 3 is an exemplary view illustrating a single-axis guide which can be corrected in motional error by the single side pad type static bearing conveying apparatus according to the present invention
  • Fig. 4 is a graph depicting relationship between a floating gap of static bearings and a gap between a core and a guide of the static bearing conveying apparatus having the preloading and motional error correcting functions according to the present invention.
  • Fig. 5 is a graph depicting relationship between variation in a floating position of the static bearings and electric current of an electromagnetic coil.
  • Fig. 2 is a cross-sectional view illustrating a single-sided pad type static bearing conveying apparatus having preloading and motional error correcting functions according to the present invention.
  • the static bearing apparatus comprises a guide 20 having a guide surface 21 formed on one side of the guide 20 which guides a table 10, a plurality of static bearing pads 30 fixed to the table 10 so as to face the guide face 21, and magnetic preload units 40 equipped to the table 10 to generate preload by virtue of magnetic force and to control a floating gap of the static bearings by changing the magnetic force serving to generate the preload.
  • the magnetic preload units 40 are equipped to both sides of the table 10 to generate the preload, which can act as attracting force between the table 10 and the guide 20 to equilibrate the floating gap required for the static bearings with floating force of the static bearings.
  • Each of the magnetic preload units 40 comprises a permanent magnet 41 to generate magnetic preload, a core 43 having the permanent magnet 41 fixed thereto and collinear with magnetic fluxes from the permanent magnet 41, and an electromagnetic coil 42 wound around the core 43.
  • the permanent magnet 41 is supported by a fixing bracket 45 supported on the table 10.
  • each of the magnetic preload units 40 is adapted to control the intensity of magnetic force according to magnetic fluxes generated from the permanent magnet 41 and to a direction of electric current applied to the electromagnetic coil 42, i.e. to control a gap G between the static bearing pads 30 and the guide 20 via variation in intensity of electric current of the electromagnetic coil 42.
  • the magnetic preload unit 40 is preferably designed using variables including a material and a size of the permanent magnet 41, a cross-sectional area of the core 43, and a gap between the core 43 and the guide surface 21 so as to match a required preloading force.
  • the gap G between the static bearing pads 30 equipped to the table 10 and the guide 20 must be maintained at a distance of 10 ⁇ m, and the gap between the core 43 of the magnetic preload unit 40 and the guide 20 must be maintained at a distance of about 500 ⁇ 2,000 ⁇ m.
  • the static bearing conveying apparatus of the present invention is adapted to be linearly moved by an actuator which comprises a discrete linear motor 50, a ball-screw or a voice electromagnetic coil to cause linear motion of an object, and comprises a conveying unit, which includes a conveying actuator and a feedback sensor or includes a linear scale and a laser feedback device to control a conveying location.
  • an actuator which comprises a discrete linear motor 50, a ball-screw or a voice electromagnetic coil to cause linear motion of an object
  • a conveying unit which includes a conveying actuator and a feedback sensor or includes a linear scale and a laser feedback device to control a conveying location.
  • the magnetic preload units 40 are connected to a motional error correcting control unit 60 which comprises a controller to control the magnetic preload unit 40, and a power amplifier to apply electric current to the magnetic preload unit 40.
  • the controller comprises a digital controller (DSP board or PC), and calculates the motional error of the conveying system based on information about locations and errors of the conveying system.
  • An additional correction signal for compensating the motional error is converted into an associated electric current, which is applied to the electromagnetic coil of the magnetic preload unit 40.
  • the magnetic preload units 40 can arbitrarily correct the floating gap G ( ⁇ m) of the static bearings between the static bearing pads 30 and the guide 20, and the gap gm (mm) between the magnetic preload unit 40 and the guide 20 by changing magnetic force of the permanent magnet 41 applied to generate preload through change of electric current applied to the electromagnetic coil 42.
  • Correction and control of the floating gap G by virtue of the magnetic preload can be used as a means for correcting errors in linear motion which is horizontal to the conveying direction, and is caused by a machining error on the guide surface 21 upon linear motion of the table 10 in the conveying direction.
  • the guide surface 21 for guiding the static bearing pad 30 is formed only on one side of the guide 20, only one-side precise machining is required for forming the guide surface in comparison to the conventional apparatus requiring two-side precise machining, thereby lowering the machining costs as well as simplifying the structure of the table and allowing easy manufacturing of the apparatus.
  • FIG. 3 is an exemplary view illustrating the overall construction of a single-axis guide using the static bearing conveying apparatus having the magnetically preloading and motional error correcting functions according to the present invention, in which two magnetic preload units 40 are equipped to both sides of the guide 20, thereby enabling correction of errors in perpendicularly linear motion, in pitch motion and in rolling motion upon conveyance of the table.
  • Fig. 4 is a graph depicting relationship between the floating gap G ( ⁇ m) of the static bearings and the gap gm (mm) of the magnetic preload unit for the guide in the static bearing conveying apparatus having the preloading and motional error correcting functions according to the present invention.
  • Fig. 5 is a graph depicting relationship between variation in the floating gap G ( ⁇ m) of the static bearings and electric current A of the electromagnetic coil.
  • the floating gap G ( ⁇ m) of the static bearings is 10 ⁇ m
  • the standard electric current A of the electromagnetic coil is set to 0 A.
  • the floating gap of the static bearings is changed according to the electric current of the electromagnetic coil, and it can be appreciated from Fig. 5 that when the electric current of the electromagnetic coil has a positive value (+), the floating gap of the static bearings is decreased, and on the contrary, when the electric current of the electromagnetic coil has a negative value (-), the floating gap of the static bearings is increased.
  • the floating gap G of the static bearings can be adjusted by changing the magnetic force generating the preload through control of the electric current applied to the electromagnetic coil, which enables the guide surface to be used to correct the motional error caused by a geometrical error on the guide surface upon conveyance on the table.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Support Of The Bearing (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

Disclosed herein is a staric bearing conveying apparatus having magnetically preloading and motional error correcting functions. The apparatus comprises a guide (20) having a guide surface (21) formed on one side of the guide facing a table (10), magnetic preload units (40) provided between the guide (20) and the table (10) to generate preload, and a motional error correcting control unit (60) comprising a controller to control the magnetic preload units (40) and a power amplifier to apply electric current according to a control signal from the controller. Each of the magnetic preload units comprises a permanent magnet (41), a core (43) collinear with magnetic fluxes from the permanent magnet (41), an electromagnetic coil (42) wound around the core (43), and a fixing bracket (40) having the permanent magnet (41) supported by the table (10). The apparatus is simplified in structure of the table (10) and the overall guide (20), and reduces motional errors of the guide (20) by correcting errors of a floating gap (G) of the static bearings.

Description

Description
STATIC BEARING CONVEYING APPARATUS HAVING MAGNETICALLY PRELOADING AND MOTIONAL ERROR
CORRECTING FUNCTIONS
Technical Field
[1] The present invention relates to a static bearing conveying apparatus having magnetically preloading and motional error correcting functions. More particularly, the present invention relates to a static bearing conveying apparatus, which comprises a table and a guide having simple construction, and which is adapted to generate preload using magnetic force and to adjust a floating gap through variation in magnetic force applied to generate the preload, thereby providing magnetically preloading and motional error correcting functions.
Background Art
[2] Preload for static bearings is generated by magnetic force of a permanent magnet, and the magnetic force is varied to maintain a floating gap of the static bearings by use of an electromagnetic coil. This construction is based on the fact that the rigidity of the static bearings based on the preload is inversely proportional to the floating gap.
[3] Specifically, the floating gap required for the static bearings can be adjusted by changing the intensity of magnetic force through change of electric current applied to the electromagnetic coil, and errors in angular motion and in linear motion horizontal to a conveying direction of a conveying system can be corrected according to structure of a correcting unit.
[4] In Fig. 1, a conventional conveying system employing static bearings is shown. As an example of the conventional conveying system, a double-sided pad type conveying apparatus comprises a guide 20 located below a table 10 to maintain sufficient rigidity of the static bearings and having guide surfaces 21 and 22 formed on opposite sides thereof to guide the static bearings, and a pair of bearing pads 30 fixed in parallel to each other on the table 10 while facing the guide surfaces 21 and 22.
[5] Thus, machining errors on the guide surfaces 21 and 22 requiring precise machining directly affect motional errors in conveyance, which causes motional precision of the table to be lowered.
[6] In addition, since the guide surfaces 21 and 22 must be identically formed on both sides of the guide, machining costs are increased, and since the conventional conveying system requires the pair of pads 3a and 3b, manufacturing costs thereof are also increased. Disclosure of Invention Technical Problem
[7] Therefore, the present invention has been made in view of the above problems, and it is an object of the present invention to provide a static bearing conveying apparatus, which can be simplified in structure by applying a magnetic preloading device to a conveying system employing static bearings, while correcting motional error via active control of magnetic force.
Technical Solution
[8] In accordance with an aspect of the present invention, the above and other objects can be accomplished by the provision of a static bearing conveying apparatus employing static bearings and having magnetic preloading and motional error correcting functions, the apparatus comprising: a guide having a guide surface formed on one side facing a table; magnetic preload units provided between the guide and the table to generate preload; and a motional error correcting control unit comprising a controller to control the magnetic preload units, and a power amplifier to apply electric current according to a control signal from the controller.
[9] Each of the magnetic preload units may comprise a permanent magnet, a core collinear with magnetic fluxes from the permanent magnet, and an electromagnetic coil wound around the core, and located between static bearing pads and the guide to generate the preload, so that a floating gap for the static bearings can be corrected by changing magnetic force generating the preload, and errors in angular motion and linear motion in a direction horizontal to a conveying direction of a conveying system can be corrected according to structure of a correcting apparatus.
Advantageous Effects
[10] As apparent from the above description, according to the present invention, the static bearing conveying apparatus is a one-sided pad type apparatus which has a guide surface formed only on one side of a guide, and a pad fixed to a table to face the guide surface, thereby simplifying the structure of the table and the overall guide while reducing the volumes of the table and the overall guide. In addition, the guide surface requiring precise machining is formed only on one side of the guide, thereby facilitating guide surface machining as well as reducing the machining costs thereof. Moreover, the magnetic preload units in the apparatus apply magnetic force to the static bearings to generate preload on the static bearings through permanent magnets, and adjust a floating gap of the static bearings by adjusting the magnetic force using an electromagnetic coil, thereby reducing motional errors occurring upon conveyance on the table and remarkably enhancing precision of a conveying system.
Description of Drawings
[11] The above and other objects, features and other advantages of the present invention will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings, in which:
[12] Fig. 1 is a cross-sectional view illustrating the construction of a conventional double-sided pad type static bearing conveying apparatus;
[13] Fig. 2 is a cross-sectional view illustrating a single-sided pad type static bearing conveying apparatus having preloading and motional error correcting functions according to the present invention;
[14] Fig. 3 is an exemplary view illustrating a single-axis guide which can be corrected in motional error by the single side pad type static bearing conveying apparatus according to the present invention;
[15] Fig. 4 is a graph depicting relationship between a floating gap of static bearings and a gap between a core and a guide of the static bearing conveying apparatus having the preloading and motional error correcting functions according to the present invention; and
[16] Fig. 5 is a graph depicting relationship between variation in a floating position of the static bearings and electric current of an electromagnetic coil.
Best Mode
[17] Embodiments of the present invention will be described with reference to the drawings as follows.
[18] Fig. 2 is a cross-sectional view illustrating a single-sided pad type static bearing conveying apparatus having preloading and motional error correcting functions according to the present invention. According to the present invention, the static bearing apparatus comprises a guide 20 having a guide surface 21 formed on one side of the guide 20 which guides a table 10, a plurality of static bearing pads 30 fixed to the table 10 so as to face the guide face 21, and magnetic preload units 40 equipped to the table 10 to generate preload by virtue of magnetic force and to control a floating gap of the static bearings by changing the magnetic force serving to generate the preload.
[19] The magnetic preload units 40 are equipped to both sides of the table 10 to generate the preload, which can act as attracting force between the table 10 and the guide 20 to equilibrate the floating gap required for the static bearings with floating force of the static bearings.
[20] Each of the magnetic preload units 40 comprises a permanent magnet 41 to generate magnetic preload, a core 43 having the permanent magnet 41 fixed thereto and collinear with magnetic fluxes from the permanent magnet 41, and an electromagnetic coil 42 wound around the core 43. The permanent magnet 41 is supported by a fixing bracket 45 supported on the table 10.
[21] In addition, each of the magnetic preload units 40 is adapted to control the intensity of magnetic force according to magnetic fluxes generated from the permanent magnet 41 and to a direction of electric current applied to the electromagnetic coil 42, i.e. to control a gap G between the static bearing pads 30 and the guide 20 via variation in intensity of electric current of the electromagnetic coil 42.
[22] The magnetic preload unit 40 is preferably designed using variables including a material and a size of the permanent magnet 41, a cross-sectional area of the core 43, and a gap between the core 43 and the guide surface 21 so as to match a required preloading force.
[23] The gap G between the static bearing pads 30 equipped to the table 10 and the guide 20 must be maintained at a distance of 10 μm, and the gap between the core 43 of the magnetic preload unit 40 and the guide 20 must be maintained at a distance of about 500 ~ 2,000 μm.
[24] The static bearing conveying apparatus of the present invention is adapted to be linearly moved by an actuator which comprises a discrete linear motor 50, a ball-screw or a voice electromagnetic coil to cause linear motion of an object, and comprises a conveying unit, which includes a conveying actuator and a feedback sensor or includes a linear scale and a laser feedback device to control a conveying location.
[25] The magnetic preload units 40 are connected to a motional error correcting control unit 60 which comprises a controller to control the magnetic preload unit 40, and a power amplifier to apply electric current to the magnetic preload unit 40. The controller comprises a digital controller (DSP board or PC), and calculates the motional error of the conveying system based on information about locations and errors of the conveying system.
[26] An additional correction signal for compensating the motional error is converted into an associated electric current, which is applied to the electromagnetic coil of the magnetic preload unit 40.
[27] With the construction as described above, the magnetic preload units 40 can arbitrarily correct the floating gap G (μm) of the static bearings between the static bearing pads 30 and the guide 20, and the gap gm (mm) between the magnetic preload unit 40 and the guide 20 by changing magnetic force of the permanent magnet 41 applied to generate preload through change of electric current applied to the electromagnetic coil 42.
[28] Correction and control of the floating gap G by virtue of the magnetic preload can be used as a means for correcting errors in linear motion which is horizontal to the conveying direction, and is caused by a machining error on the guide surface 21 upon linear motion of the table 10 in the conveying direction.
[29] According to the present invention, since the guide surface 21 for guiding the static bearing pad 30 is formed only on one side of the guide 20, only one-side precise machining is required for forming the guide surface in comparison to the conventional apparatus requiring two-side precise machining, thereby lowering the machining costs as well as simplifying the structure of the table and allowing easy manufacturing of the apparatus.
[30] In addition, when changing the magnetic force applied to generate the preload through control of the electric current applied to the electromagnetic coil, the floating gap of the static bearings can also be conveniently adjusted.
[31] Fig. 3 is an exemplary view illustrating the overall construction of a single-axis guide using the static bearing conveying apparatus having the magnetically preloading and motional error correcting functions according to the present invention, in which two magnetic preload units 40 are equipped to both sides of the guide 20, thereby enabling correction of errors in perpendicularly linear motion, in pitch motion and in rolling motion upon conveyance of the table.
[32] Fig. 4 is a graph depicting relationship between the floating gap G (μm) of the static bearings and the gap gm (mm) of the magnetic preload unit for the guide in the static bearing conveying apparatus having the preloading and motional error correcting functions according to the present invention. Fig. 5 is a graph depicting relationship between variation in the floating gap G (μm) of the static bearings and electric current A of the electromagnetic coil. In Fig. 5, for example, when the floating gap G (μm) of the static bearings is 10 μm, the standard electric current A of the electromagnetic coil is set to 0 A. The floating gap of the static bearings is changed according to the electric current of the electromagnetic coil, and it can be appreciated from Fig. 5 that when the electric current of the electromagnetic coil has a positive value (+), the floating gap of the static bearings is decreased, and on the contrary, when the electric current of the electromagnetic coil has a negative value (-), the floating gap of the static bearings is increased.
[33] As such, according to the present invention, since the number of guide surfaces requiring the precise machining is reduced to a half of the conventional apparatus due to simplification in structure of the table and the guide, there is an advantage of allowing easy manufacturing and thus reducing the manufacturing costs.
[34] Moreover, the floating gap G of the static bearings can be adjusted by changing the magnetic force generating the preload through control of the electric current applied to the electromagnetic coil, which enables the guide surface to be used to correct the motional error caused by a geometrical error on the guide surface upon conveyance on the table.
[35] In addition, according to the present invention, since the magnetic preload unit 40 employs the permanent magnet 41, an additional energy source is not required to generate magnetic force for a designed preload. [36] Although the preferred embodiments of the present invention have been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims.

Claims

Claims
[1] A static bearing conveying apparatus employing static bearings and having magnetic preloading and motional error correcting functions, the apparatus comprising: a guide having a guide surface formed on one side of the guide facing a table; magnetic preload units provided between the guide and the table to generate preload; and a motional error correcting control unit comprising a controller to control the magnetic preload units, and a power amplifier to apply electric current according to a control signal from the controller .
[2] The apparatus according to claim 1, wherein each of the magnetic preload units comprises a permanent magnet, a core collinear with magnetic fluxes from the permanent magnet, an electromagnetic coil wound around the core, and a fixing bracket having the permanent magnet supported by the table.
PCT/KR2005/002775 2005-08-23 2005-08-23 Static bearing conveying apparatus having magnetically preloading and motional error correcting functions WO2007024031A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US11/993,469 US7942099B2 (en) 2005-08-23 2005-08-23 Static bearing conveying apparatus having magnetically preloading and motional error correcting functions
JP2008518008A JP2008546965A (en) 2005-08-23 2005-08-23 Constant pressure bearing transfer device with magnetic preload and motion error correction function
PCT/KR2005/002775 WO2007024031A1 (en) 2005-08-23 2005-08-23 Static bearing conveying apparatus having magnetically preloading and motional error correcting functions
EP05781086.3A EP1917447B1 (en) 2005-08-23 2005-08-23 Static bearing apparatus having magnetically preloading and motional error correcting functions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR2005/002775 WO2007024031A1 (en) 2005-08-23 2005-08-23 Static bearing conveying apparatus having magnetically preloading and motional error correcting functions

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Publication Number Publication Date
WO2007024031A1 true WO2007024031A1 (en) 2007-03-01

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EP (1) EP1917447B1 (en)
JP (1) JP2008546965A (en)
WO (1) WO2007024031A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2065683A2 (en) 2007-11-30 2009-06-03 Etel S.A. Linear bearing with integrated linear motor
WO2014016018A1 (en) * 2012-07-26 2014-01-30 Etel S.A. Apparatus for testing wafers

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7942099B2 (en) * 2005-08-23 2011-05-17 Korea Institute Of Machinery & Materials Static bearing conveying apparatus having magnetically preloading and motional error correcting functions
KR101318211B1 (en) * 2011-05-31 2013-10-15 한국기계연구원 Active compensated stage having 5-dof motion error compensation and motion error compensating method thereof
DE102012200220A1 (en) * 2011-06-20 2012-12-20 Semilev Gmbh Method for calibrating an active magnetic bearing robot
GB201701952D0 (en) * 2017-02-06 2017-03-22 Libertine Fpe Ltd Actuator
US10393707B2 (en) * 2017-05-03 2019-08-27 Hiwin Technologies Corp. Method for estimating a variation in preload applied to linear guideway

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3272568A (en) 1962-03-28 1966-09-13 Philips Corp Guiding devices
DE2446851A1 (en) * 1974-10-01 1976-04-08 Messerschmitt Boelkow Blohm Magnet guided rail hover vehicle - has magnetic current of carrier or guide magnets introduced as special quantitative dimension
US4413863A (en) 1980-08-07 1983-11-08 Centre D'etudes Et De Recherches De La Machine-Outil (C.E.R.M.O.) Hydrostatic support device
US5067415A (en) 1984-10-23 1991-11-26 Kabushiki Kaisha Toshiba Transporting system of floated carrier type with zero power control at varying load weights
US5360470A (en) * 1992-07-06 1994-11-01 Fujitsu Limited Magnetic levitating transporting apparatus with a movable magnetic unit
US5732636A (en) * 1996-06-05 1998-03-31 National Science Council Magnetic levitation system

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2134425B2 (en) * 1971-07-09 1973-09-27 Krauss-Maffei Ag, 8000 Muenchen Electromagnetic support and guidance system
GB1371143A (en) * 1972-01-24 1974-10-23 Tracked Hovercraft Ltd Ground transportation systems and tracks and vehicles therefor
US3937148A (en) * 1973-01-02 1976-02-10 Cambridge Thermionic Corporation Virtually zero power linear magnetic bearing
JPS6018918A (en) * 1983-07-13 1985-01-31 Canon Inc High accuracy positioning of fluid bearing guide type stage
JPH0571536A (en) * 1991-09-11 1993-03-23 Canon Inc Static pressure bearing device
JP3209844B2 (en) * 1993-11-22 2001-09-17 富士通株式会社 Magnetic levitation transfer device
JPH0678413A (en) * 1992-07-06 1994-03-18 Fujitsu Ltd Magnetic levitation carriage equipment
US5641054A (en) * 1992-07-07 1997-06-24 Ebara Corporation Magnetic levitation conveyor apparatus
US6267876B1 (en) * 1998-07-31 2001-07-31 Trinity Flywheel Power Control of magnetic bearing-supported rotors
DE102004004020A1 (en) * 2004-01-20 2005-08-11 Index-Werke Gmbh & Co. Kg Hahn & Tessky machine tool
WO2006067974A1 (en) * 2004-12-20 2006-06-29 Kyushu Institute Of Technology Non-contact convey device by superconducting magnetic levitation
US7942099B2 (en) * 2005-08-23 2011-05-17 Korea Institute Of Machinery & Materials Static bearing conveying apparatus having magnetically preloading and motional error correcting functions

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3272568A (en) 1962-03-28 1966-09-13 Philips Corp Guiding devices
DE2446851A1 (en) * 1974-10-01 1976-04-08 Messerschmitt Boelkow Blohm Magnet guided rail hover vehicle - has magnetic current of carrier or guide magnets introduced as special quantitative dimension
US4413863A (en) 1980-08-07 1983-11-08 Centre D'etudes Et De Recherches De La Machine-Outil (C.E.R.M.O.) Hydrostatic support device
US5067415A (en) 1984-10-23 1991-11-26 Kabushiki Kaisha Toshiba Transporting system of floated carrier type with zero power control at varying load weights
US5360470A (en) * 1992-07-06 1994-11-01 Fujitsu Limited Magnetic levitating transporting apparatus with a movable magnetic unit
US5732636A (en) * 1996-06-05 1998-03-31 National Science Council Magnetic levitation system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2065683A2 (en) 2007-11-30 2009-06-03 Etel S.A. Linear bearing with integrated linear motor
DE102007057833A1 (en) 2007-11-30 2009-06-04 Etel S.A. Linear guide with integrated linear motor
US7915768B2 (en) 2007-11-30 2011-03-29 Etel S.A. Linear guide with an integrated linear motor
WO2014016018A1 (en) * 2012-07-26 2014-01-30 Etel S.A. Apparatus for testing wafers
US9267987B2 (en) 2012-07-26 2016-02-23 Etel S.A. Apparatus for testing wafers

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US7942099B2 (en) 2011-05-17
EP1917447A4 (en) 2011-11-23
EP1917447A1 (en) 2008-05-07
JP2008546965A (en) 2008-12-25
US20100071583A1 (en) 2010-03-25

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