WO2007003906A2 - Systeme de positionnement - Google Patents

Systeme de positionnement Download PDF

Info

Publication number
WO2007003906A2
WO2007003906A2 PCT/GB2006/002426 GB2006002426W WO2007003906A2 WO 2007003906 A2 WO2007003906 A2 WO 2007003906A2 GB 2006002426 W GB2006002426 W GB 2006002426W WO 2007003906 A2 WO2007003906 A2 WO 2007003906A2
Authority
WO
WIPO (PCT)
Prior art keywords
axis
positioning
target surface
rotating
target
Prior art date
Application number
PCT/GB2006/002426
Other languages
English (en)
Other versions
WO2007003906A3 (fr
Inventor
David Mongomery
Peter Hastings
Original Assignee
Science And Technology Facilities Council
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Science And Technology Facilities Council filed Critical Science And Technology Facilities Council
Publication of WO2007003906A2 publication Critical patent/WO2007003906A2/fr
Publication of WO2007003906A3 publication Critical patent/WO2007003906A3/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/007—Arms the end effector rotating around a fixed point
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements

Definitions

  • the present invention relates to a positioning system, such as a pick and place system.
  • a pick and place system for positioning optical elements on a plate (the focal plate) at or near the focal plane of a telescope.
  • a positioning and manipulation arrangement that has a positioning mechanism for positioning an item on a target surface; means for causing relative rotation of the positioning mechanism and the target surface about a first axis and means for causing relative rotation between the positioning mechanism and the target surface about a second axis at an acute angle relative to the first axis.
  • the target surface is spherical and the first and second axes pass through its centre of curvature.
  • the positioning mechanism is rotated about the first and second axes and the target surface held stationary.
  • Combining rotations about the two axes produces a positioning movement having a locus that is part of a spherical surface.
  • the angle between the axes can be selected to suit the target spherical surface.
  • the inclination of the second axis ensures that the movement of the positioning mechanism towards and away from the surface is orthogonal thereto.
  • the means for rotating the positioning mechanism about a first axis may comprise a rotatable ring.
  • a support may extend from the rotatable ring for carrying the means for rotating the positioning mechanism about a second axis.
  • a support may be provided for carrying the rotating means so that substantially the whole target surface is accessible to the positioning mechanism.
  • the support is provided at a position spaced from the target surface.
  • the element that is being positioned may be an optical element.
  • the optical element may be one or more of an optical fibre; a lens; a mirror; an imager; a spectrometer; an integral field unit; or an articulated arm for carrying one or all of the foregoing.
  • a positioning and manipulation arrangement that has a positioning mechanism for positioning an element on a surface, rotating means for rotating the positioning mechanism about a first and a second axis, and a support for carrying the rotating means so that substantially all of the target surface is accessible to the positioning mechanism.
  • the system By arranging the support so that there is no footprint over the sample area, the system is able to position an element or work piece anywhere on the target surface. This is ideal for positioning elements on a circular surface, for example a semiconductor wafer.
  • Figure 1 is cross-section of a pick and place arrangement
  • Figure 2 is a plan view of the arrangement of Figure 1;
  • Figure 3 is a detailed view of the geometry of part of the arrangement of Figure 1;
  • Figure 4 is a cross-section of a modified version of the pick and place arrangement of Figure 1;
  • Figure 5 is a side view of part of the arrangement of Figures 1 and 4 when being used to position an element on a convex surface
  • Figure 6 is a side view of part of the arrangement of Figures 1 and 4 when being used to position an element on a concave surface
  • Figures 1 and 2 show a positioner 10 for positioning optical elements 12 on the surface of a focal plate 14 in a telescope
  • the focal plate 14 has two opposing, convex spherical surfaces 16, each of which can be used to carry a plurality of optical elements 12, typically optical mirrors.
  • the focal plate 14 and the positioner 10 are carried on a support 18 that extends round the periphery of the plate 14, with the spherical surface 16 facing the positioner 10 occupying a target area.
  • optical elements can be positioned on the other prior to use.
  • the focal plate 14 is rotatable about a tumble axis 20, so that the active plate can be changed as and when desired.
  • the positioner 10 has a first ring 22 that defines an outer periphery. This is positioned so that it is concentric with the target, spherical surface. Mounted on this is a rotatable inner ring 24 that is driven by a motor under control of a suitable encoder 26. The inner ring 24 is rotatable about the periphery of the target surface and an axis that extends through the centre of the focal plane of the target surface. This axis will be referred to as the theta axis 28. Extending from the inner ring 24 and towards its centre is an arm 30 that carries a housing 34 for a gripper support 32.
  • the gripper housing 34 encloses an internal bearing 36 and rotatable shaft 38, the shaft 38 being positioned along and rotatable about an axis 40 that is at an acute angle a to the theta axis 28. This will be referred to as the phi axis 40.
  • the phi axis 40 is selected so that it passes through the centre of curvature 42 of the target spherical surface 16 of the focal plate 14. This means that both the theta axis 28 and phi axis 40 pass through the centre of curvature 42.
  • Figure 3 shows the relationship between the theta axis 28, the phi axis 40 and the centre of curvature in more detail.
  • a second arm 44 that is perpendicular to the phi axis 40 and carries a gripper 46.
  • This is has a gripper mechanism (not shown) that is operable to grip an element that is to be moved/positioned and be linearly driven into contact with the target surface using a lift and lower drive mechanism (not shown).
  • Mechanisms for gripping elements are known in the art and so will not be described in detail.
  • the radius of rotation of the gripper 46 is the distance L from the theta axis 28 to the phi axis 40.
  • rotation of the inner ring 24 causes rotation of the phi axis 40 and so the gripper assembly 46 about the theta axis 28.
  • Rotation about the phi axis 40 enables the gripper 46 to swing from the middle of the focal plate 14 to just beyond its edge.
  • the gripper mechanism 46 is able to position an element at any point on the target spherical surface.
  • the axis of the gripper 46 must be coincident with the theta axis 28 at some point in the travel of the second arm 44.
  • the positioner 10 in which the invention is embodied allows a gripper mechanism 46 to be positioned using primarily rotational movements. This allows elements 12 to be accurately positioned and balanced easily. In a telescope this is advantageous as it minimises the changes in gravitational deflection of the unit as the telescope tracks across the sky.
  • the positioner 10 can also be designed to be relatively compact radially, which makes its inclusion into another instrument easier. Furthermore, because the gripper assembly 46 is carried on a support that extends over, does not impinge on the target surface 16 substantially all the target surface is accessible for positioning elements thereon.
  • the positioning mechanism may be rotatably mounted on an axially positioned rotation means 48 that may depend from a simple U-shaped frame 50 mounted on the ring 22, as shown in Figure 4.
  • the gripper has an axis that is at some point coincident with the theta axis, this is not essential. It does however allow the positioner to be relatively compact.
  • the gripper drive mechanism may be operable to rotate the gripper arm 46 about its axis.
  • the invention is described with reference to a system in which the target surface is held stationary and the gripper is moved, it will be appreciated that in some applications it may be more convenient for the target surface to be moved. Accordingly the above description of the specific embodiment is made by way of example only and not for the purposes of limitation. It will be clear to the skilled person that minor modifications may be made without significant changes to the operation described.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Astronomy & Astrophysics (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Machine Tool Units (AREA)

Abstract

L'invention concerne un système de positionnement possédant un dispositif conçu pour positionner un élément sur une surface sphérique cible, un dispositif de rotation du dispositif de positionnement et/ou de la surface cible autour d'un premier axe, et un dispositif de rotation du dispositif de positionnement et/ou de la surface cible autour d'un second axe, ledit second axe se trouvant à un angle aigu par rapport au premier axe. Lesdits premier et second axes traversent le centre de la courbe de la surface sphérique cible.
PCT/GB2006/002426 2005-06-30 2006-06-30 Systeme de positionnement WO2007003906A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0513339A GB0513339D0 (en) 2005-06-30 2005-06-30 A pick and place system
GB0513339.2 2005-06-30

Publications (2)

Publication Number Publication Date
WO2007003906A2 true WO2007003906A2 (fr) 2007-01-11
WO2007003906A3 WO2007003906A3 (fr) 2007-04-05

Family

ID=34856390

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2006/002426 WO2007003906A2 (fr) 2005-06-30 2006-06-30 Systeme de positionnement

Country Status (2)

Country Link
GB (1) GB0513339D0 (fr)
WO (1) WO2007003906A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010112400A1 (fr) 2009-03-30 2010-10-07 Politecnico Di Milano Photodetecteur et procede pour la detection d'un rayonnement optique

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4657472A (en) * 1983-08-03 1987-04-14 Kuka Schweissanlagen+Roboter Gmbh Manipulator head assembly
US20030173340A1 (en) * 2001-09-28 2003-09-18 Tomonari Mukae Three-dimensional laser beam machine

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4657472A (en) * 1983-08-03 1987-04-14 Kuka Schweissanlagen+Roboter Gmbh Manipulator head assembly
US20030173340A1 (en) * 2001-09-28 2003-09-18 Tomonari Mukae Three-dimensional laser beam machine

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
LUM M J H ET AL: "Kinematic optimization of a spherical mechanism for a minimally invasive surgical robot" ROBOTICS AND AUTOMATION, 2004. PROCEEDINGS. ICRA '04. 2004 IEEE INTERNATIONAL CONFERENCE ON NEW ORLEANS, LA, USA APRIL 26-MAY 1, 2004, PISCATAWAY, NJ, USA,IEEE, US, vol. 1, 26 April 2004 (2004-04-26), pages 829-834, XP010768377 ISBN: 0-7803-8232-3 *
ZEMITI N ET AL: "A new robot for force control in minimally invasive surgery" INTELLIGENT ROBOTS AND SYSTEMS, 2004. (IROS 2004). PROCEEDINGS. 2004 IEEE/RSJ INTERNATIONAL CONFERENCE ON SENDAI, JAPAN 28 SEPT.-2 OCT., 2004, PISCATAWAY, NJ, USA,IEEE, vol. 4, 28 September 2004 (2004-09-28), pages 3643-3648, XP010766255 ISBN: 0-7803-8463-6 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010112400A1 (fr) 2009-03-30 2010-10-07 Politecnico Di Milano Photodetecteur et procede pour la detection d'un rayonnement optique

Also Published As

Publication number Publication date
GB0513339D0 (en) 2005-08-03
WO2007003906A3 (fr) 2007-04-05

Similar Documents

Publication Publication Date Title
US5746565A (en) Robotic wafer handler
US5966991A (en) Two degree-of-freedom spherical orienting device
US5064340A (en) Precision arm mechanism
US8544911B2 (en) Holding device
US7645112B2 (en) Transport apparatus, control method for the same, and vacuum processing system
US7572093B2 (en) Transport apparatus, control method for the same, and vacuum processing system
KR101584177B1 (ko) 구면 연마장치
US5406088A (en) Scan and tilt apparatus for an ion implanter
KR20210002766A (ko) 이격된 상부 암들 및 인터리빙된 리스트들을 포함하는 듀얼 로봇, 및 이를 포함하는 시스템들 및 방법들
JP5339874B2 (ja) ロボット装置及びその制御方法
US11192239B2 (en) Substrate processing apparatus
CA2410333A1 (fr) Robot chargeur d'instruments de laboratoire
WO1999002312A1 (fr) Robot ayant de multiples degres de liberte dans un environnement isole
CA2235759C (fr) Dispositif d'orientation spherique a deux degres de liberte
US7814811B2 (en) Articulated robot
US7400392B2 (en) Apparatus for handling of a disklike member, especially for handling of a wafer
EP1396046B1 (fr) Procede d'orientation d'une tourelle hexapode
WO2007003906A2 (fr) Systeme de positionnement
JP3742303B2 (ja) レンズアンテナ装置
US20070173393A1 (en) SCARA-type robotic system
US20130213171A1 (en) Substrate transfer apparatus
JP2005131729A (ja) 薄板材把持装置
US9373534B2 (en) Rotary positioning apparatus with dome carrier, automatic pick-and-place system, and operating method thereof
EP2731757B1 (fr) Table motorisee pour le positionnement micrometrique
US10351265B1 (en) Rotating gimbal system

Legal Events

Date Code Title Description
NENP Non-entry into the national phase in:

Ref country code: DE

WWW Wipo information: withdrawn in national office

Country of ref document: DE

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 06764879

Country of ref document: EP

Kind code of ref document: A2

122 Ep: pct application non-entry in european phase

Ref document number: 06764879

Country of ref document: EP

Kind code of ref document: A2