WO2007001848A2 - High refractive index fluids with low absorption for immersion lithography - Google Patents

High refractive index fluids with low absorption for immersion lithography Download PDF

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Publication number
WO2007001848A2
WO2007001848A2 PCT/US2006/023081 US2006023081W WO2007001848A2 WO 2007001848 A2 WO2007001848 A2 WO 2007001848A2 US 2006023081 W US2006023081 W US 2006023081W WO 2007001848 A2 WO2007001848 A2 WO 2007001848A2
Authority
WO
WIPO (PCT)
Prior art keywords
immersion lithography
fluid
selected wavelength
refractive index
comprises
Prior art date
Application number
PCT/US2006/023081
Other languages
French (fr)
Other versions
WO2007001848A3 (en
Inventor
William A. Wojtczak
Dean Dewulf
Roger Moulton
Original Assignee
Sachem, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US69374805P priority Critical
Priority to US60/693,748 priority
Priority to US73591205P priority
Priority to US60/735,912 priority
Application filed by Sachem, Inc. filed Critical Sachem, Inc.
Publication of WO2007001848A2 publication Critical patent/WO2007001848A2/en
Publication of WO2007001848A3 publication Critical patent/WO2007001848A3/en

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