WO2006103725A1

WO2006103725A1 - Micro gripper

Info

Publication number: WO2006103725A1
Application number: PCT/JP2005/005590
Authority: WO
Inventors: Tetsunori Otaguro
Original assignee: Hirata Corporation
Priority date: 2005-03-25
Filing date: 2005-03-25
Publication date: 2006-10-05
Also published as: JPWO2006103725A1; JP4717065B2

Abstract

[PROBLEMS] To provide a micro gripper further simplified in structure and capable of accurately and securely holding a micro held object according to its position. [MEANS FOR SOLVING PROBLEMS] This micro gripper (1) holding a micro work (9) comprises a fixed part (3) and working parts (4) which are formed in an integrated structure (2). The working parts (4) are disposed on both sides of the fixed part (3) and comprises a pair of holding parts (5, 5) positioned on the front side of the fixed part (3), a pair of driving parts (6, 6) positioned on the rear side of the fixed part (3), and a pair of elastically deforming parts (7, 7) connecting the pair of holding parts (5, 5) to the pair of driving parts (6, 6). One or a plurality of extensible actuators (8) are assembled between the pair of driving parts (6, 6). When the extensible actuators (8) are extended/retracted, the pair of driving parts (6, 6) are displaceably operated to elastically deform the pair of elastically deforming parts (7, 7) so as to displace the pair of holding parts (5, 5) to specified positions.

Description

Specification

Micro gripper

Technical field

The present invention relates to a micro gripper, and more particularly to a micro gripper having a simple structure and capable of accurately and reliably gripping a minute gripping object.

Background art

[0002] It is not easy to accurately and reliably grip a fine gripping object having a size on the order of several μm to several hundred μm. A gripping part is manufactured according to the size of the minute gripping object, and it is precisely set according to the position and posture of the minute gripping object, and it is gripped accurately and reliably while preparing the external environment. This is because it is not easy.

[0003] Conventionally, there is one described in Japanese Patent Laid-Open No. 6-170762, which makes it possible to grip such a fine gripping object. This consists of a frame-shaped piezoelectric ceramic body force with two arms extending diagonally outward so as to face each other from both edges of one side in the longitudinal direction of the rectangular quadrilateral, and the longitudinal direction of the piezoelectric ceramic body The two sides are formed as the first and second electrode portions, and the grip portions facing each other are formed at the free end edges of the two arm portions, respectively, and the first and second electrode portions At the same time when one is extended, the other is shortened, or by applying a voltage so that one of the two is shortened and at the same time the other is extended, both gripping parts open and close to each other and grip and release the object to be gripped. It is configured to be able to. This makes it possible to provide a micromanipulator that has a simple configuration and can handle and handle even a minute object of several zm (Patent Document 1). This product also has a function as a force microgripper called a micromanipulator.

Patent Document 1: JP-A-6-170762

[0004] However, this is stopped by a micro gripper having a degree of freedom in one axis direction, and the two arms are not originally created as a unitary structural force. The structure can still not be the simplest.

Disclosure of the invention Problems to be solved by the invention

[0005] The invention of the present application solves the above-mentioned problems of the conventional micro gripper, further simplifies the structure, and makes it possible to accurately and reliably align a fine gripping object in accordance with its position. It is an object to provide a micro gripper that can be gripped.

Means for solving the problem

[0006] According to the invention of the present application, the above-described problems are solved by the following micro gripper.

That is, in the micro gripper, a fixing portion and an operating portion of the micro gripper for gripping a fine workpiece are formed of an integral structure, and the operating portion is disposed on both sides of the fixing portion, and the fixing portion A pair of gripping portions on the front side, a pair of drive portions on both sides or the rear side of the fixed portion, and a pair of elastic deformation portions connecting the pair of gripping portions and the pair of drive portions, One or a plurality of expansion / contraction actuators are incorporated between the pair of drive units or between the pair of drive units and the fixed unit, and the expansion / contraction actuators expand and contract, thereby the pair of drive units. And the pair of elastically deforming portions are elastically deformed, so that the pair of gripping portions are displaced to desired positions! .

[0007] The micro gripper is configured as described above, and the micro gripper includes an integrated structure having a fixed portion and an operating portion, and a single piece incorporated in a predetermined portion of the integrated structure. However, it is configured only with a plurality of expansion / contraction actuators, and the parts excluding the expansion / contraction actuators form an integral structure, so the number of parts is reduced and the structure becomes extremely simple. Since the amount of expansion and contraction of the expansion / contraction actuator can also be directly related to the amount of elastic deformation of the elastic deformation part in the integrated structure, it is possible to set the precise position of each of the pair of gripping parts, and fine gripping The object can be gripped accurately and reliably according to its position.

[0008] According to a preferred embodiment, the micro gripper is disposed on both sides of the operating portion force fixing portion of the micro gripper, the pair of gripping portions on the front side of the fixing portion, and the pair of drives on the rear side of the fixing portion. And a pair of elastic deformation portions that connect the pair of gripping portions and the pair of drive portions, each of the pair of drive portions being composed of a single drive rod, Driving space At least one telescopic actuator is incorporated into the telescopic actuator, and when the telescopic actuator expands and contracts, the pair of single drive rods are displaced, thereby elastically deforming the pair of elastically deforming portions. Thus, the pair of gripping portions are displaced to a desired position.

[0009] With this configuration, the micro gripper is arranged in one axial direction of each of the pair of gripping portions (the pair of gripping portions approach and separate from each other in the plane where the pair of gripping portions are originally X This direction is the same as the expansion / contraction direction of the expansion / contraction actuator in the present invention.) This makes it possible to set a precise position, and accurately and reliably align a fine gripping object in accordance with the position. It can be gripped.

[0010] According to another preferred embodiment, the micro gripper is disposed on both sides of the operating portion force fixing portion of the micro gripper, and a pair of gripping portions on the front side of the fixing portion and a pair of gripping portions on the rear side of the fixing portion. A drive unit, and a pair of elastic deformation units that connect the pair of gripping units and the pair of drive units, and the pair of drive units each have a bifurcated drive rod that branches into a bifurcated shape. At least two expansion / contraction actuators are assembled in a crossing manner between the pair of bifurcated drive rods, and the expansion / contraction actuator expands / contracts to form the pair of bifurcated drive rods. As a result, the pair of elastically deforming portions are elastically deformed, and the pair of gripping portions are displaced to a desired position.

[0011] With this configuration, the micro gripper has two biaxial directions of each of the pair of gripping portions (the pair of gripping portions approach and separate from each other in the plane in which the pair of gripping portions are originally X In the direction of the axis and in the plane orthogonal to the surface, precise positioning in the Z-axis direction orthogonal to the X-axis direction (in other words, the X-Z plane) is possible, and a fine gripping object Can be gripped accurately and reliably according to the position.

[0012] According to still another preferred embodiment, the micro gripper is disposed on both sides of the operating portion force fixing portion of the micro gripper, the pair of gripping portions on the front side of the fixing portion, and the pair of gripping portions on both sides of the fixing portion. A drive unit, and a pair of elastic deformation units that connect the pair of gripping units and the pair of drive units, each of the pair of drive units having a bifurcated drive rod that branches into a bifurcated shape. A pair of bifurcated drive rods and the fixed portion, and at least one between each branch drive rod and the fixed portion of the pair of bifurcated drive rods. Stretchable Yue And a total of at least four expansion / contraction actuators are incorporated, and the expansion / contraction actuators expand / contract, whereby the pair of bifurcated drive rods are displaced, thereby the pair of elastic deformation portions. Is elastically deformed, and the pair of gripping portions are displaced to desired positions.

[0013] With this configuration, the micro gripper is arranged in the biaxial direction of each of the pair of gripping portions (the pair of gripping portions approach and separate from each other in the plane where the pair of gripping portions are originally X In the axial direction and in the plane orthogonal to the plane, precise positioning in the Z-axis direction orthogonal to the X-axis direction (in other words, in the X-Z plane) can be performed independently of each other. A fine gripping object can be gripped more accurately, reliably and easily according to its position. Moreover, a small and lightweight thing can be used as an expansion / contraction actuator.

[0014] According to still another preferred embodiment, the micro gripper is disposed on both sides of the operating portion force fixing portion of the micro gripper, and a pair of gripping portions on the front side of the fixing portion and a pair of gripping portions on both sides of the fixing portion. A drive unit, and a pair of elastic deformation units that connect the pair of gripping units and the pair of drive units. The fixed unit is an elongated plate-shaped fixed arm unit, and stands upright from the rear end of the fixed arm unit. Each of the pair of drive portions is composed of a single drive rod, and the pair of drive portions is disposed between the pair of single drive rods and the fixed portion. At least between each of the single drive rods and the T-shaped leg ends of the fixed base portion and between each of the pair of single drive rods and the respective T-shaped arm ends of the fixed base portion. 1 telescopic actuator is built in each, and a total of at least 4 telescopic actuators are installed. When the telescopic actuator expands and contracts, the pair of single drive rods is displaced, and thereby the pair of elastically deforming portions are elastically deformed, and the pair of gripping portions are displaced to desired positions. Have been to.

[0015] With this configuration, the micro gripper allows the expansion and contraction of the expansion and contraction actuator to remain in the two axial directions of each of the pair of gripping portions (in the plane in which the pair of gripping portions originally exist, Since it can be taken out as a positional displacement in the X-axis direction approaching and separating and the Z-axis direction orthogonal to the X-axis direction in a plane orthogonal to the surface, each of the pair of gripping portions is the same. A more precise position setting in the axial direction (in other words, in the X-Z plane) becomes possible independently of each other, and a fine gripping object can be aligned with that position. Therefore, it can be gripped more accurately, reliably and easily. In addition, a small and light extension actuator can be used.

[0016] According to still another preferred embodiment, the expansion / contraction actuator force of the micro gripper is also composed of a piezoelectric element force.

With this configuration, the micro gripper can directly relate the amount of electricity input to the piezoelectric element to the amount of elastic deformation of the elastically deforming portion in the integral structure, and the amount of electricity input to the piezoelectric element. By precisely controlling the amount of elastic deformation of the elastically deforming portion in the integrated structure, it is possible to precisely control the positional displacement of each of the pair of gripping portions. Since it is relatively simple, it is easy to precisely position each of the pair of gripping portions, and a fine gripping object can be gripped accurately, reliably, and easily according to the position.

[0018] According to still another preferred embodiment, the force of the pair of gripping portions of the micro gripper is provided with an extendable gripping extension portion at the front end in the protruding direction.

[0019] With this configuration, the micro gripper has the remaining one axial direction of each of the pair of gripping portions (the pair of gripping portions are in the plane in which the pair of gripping portions originally exist, so that the pair of gripping portions approach and separate from each other). The position displacement in the Y-axis direction perpendicular to the X-axis direction) is possible, so the precision in each of the pair of gripping parts in the three-axis directions (X, Y, Ζ axis direction, in other words, in the three-dimensional space) This makes it possible to set a precise position, and it is possible to accurately, reliably and easily grip a fine gripping object according to the position.

The invention's effect

[0020] As described above, according to the micro gripper of the invention of the present application, an integrated structure having the fixed portion and the operating portion, and one or a plurality of extendable and retractable members incorporated in a predetermined portion of the integrated structure. Since it is configured only with the actuator and the parts excluding the telescopic actuator are an integral structure, the number of parts is reduced and the structure becomes extremely simple. Since the expansion / contraction amount of the expansion / contraction actuator can also be directly related to the elastic deformation amount of the elastic deformation portion in the integrated structure, it is possible to set the precise position of each of the pair of gripping portions, and the fine gripping target An object can be gripped accurately and reliably according to its position. [0021] Further, when the expansion / contraction actuator is assumed to have a piezo piezoelectric element force, the electric quantity input to the piezo piezoelectric element is directly related to the elastic deformation amount of the elastic deformation portion in the integrated structure. By precisely controlling the amount of electricity input to the piezo piezoelectric element, the amount of elastic deformation of the elastic deformation part in the integrated structure, and the positional displacement of each of the pair of gripping parts can be precisely controlled. Since the control is relatively simple, the precise position setting of each of the pair of gripping parts is facilitated, and a fine gripping object is adjusted to the position. It can be gripped accurately, reliably and easily.

In addition, various effects as described above can be achieved.

Brief Description of Drawings

FIG. 1 is a perspective view of a micro gripper according to an embodiment (Embodiment 1) of the present invention.

FIG. 2 is a perspective view of a micro gripper according to another embodiment (Example 2) of the present invention.

FIG. 3 is a perspective view of a micro gripper according to still another embodiment (Example 3) of the present invention.

FIG. 4 is a perspective view of a micro gripper of still another embodiment (Example 4) of the present invention. Explanation of symbols

[0023] 1, 11, 21, 31... Microguzzino, 2, 12, 22, 32 body structure, 3, 13, 23, 33

... Fixed part, 33a ... Fixed arm part, 33b ... Fixed base part, 4, 14, 24, 34 ... Operating part, 5, 15, 25, 35 ... Holder part, 6, 16, 26, 36 · · Drive unit (single drive rod) or bifurcated drive unit, 16a, 16b, 26a, 26b… Branch drive rod, 7, 17, 27, 37… Elastic deformation portion, 8, 18a, 1 8b, 28a , 28b, 38a, 38b ... telescopic actuator 9, 19, 29, 39 ····················································································

BEST MODE FOR CARRYING OUT THE INVENTION

[0024] The fixing part and the operating part of the micro gripper for gripping a fine workpiece are made of an integral structure. The operating parts are arranged on both sides of the fixed part, a pair of holding parts on the front side of the fixed part, a pair of drive parts on both sides or the rear side of the fixed part, and the pair of gripping parts and the pair of drive parts. And a pair of elastically deforming portions that connect the two. One or a plurality of extendable actuators are incorporated between the pair of drive units or between the pair of drive units and the fixed unit, and the pair of drive units are displaced by the extension and contraction of the extendable actuators. Thus, the pair of elastically deforming portions are elastically deformed, and the pair of gripping portions are displaced to desired positions.

[0025] In this case, the operating part is provided with a pair of drive parts on both sides of the fixed part, and the fixed part stands upright from an elongated plate-like fixed arm part and a rear end of the fixed arm part. Each of the pair of drive parts is composed of a single drive rod, and the pair of single drive rods and the fixed part are disposed between the pair of single drive rods and the fixed part. At least between each of the pair of single drive rods and the T-shaped leg ends of the fixed base portion and between each of the pair of single drive rods and each of the T-shaped arm ends of the fixed base portion. Each of the telescopic actuators is incorporated, and a total of at least four telescopic actuators are incorporated. The telescopic actuators expand and contract, so that a pair of single drive rods are displaced. Elastically deforms, and the pair of gripping parts move to the desired positions. It is preferable to do so. In addition, it is preferable that the expansion / contraction actuator also has a piezoelectric element force.

Example 1

Next, an embodiment (Embodiment 1) of the present invention will be described.

FIG. 1 is a perspective view of the micro gripper of the first embodiment. In the following description, the direction in which the pair of gripping portions of the micro gripper is located is the front, the opposite direction is the rear, the direction along the front-rear direction is defined as the Y-axis direction, and is orthogonal to the Y-axis direction. In addition, the direction along the plane where the pair of gripping portions is initially defined is defined as the X-axis direction, and the direction orthogonal to the XY plane is defined as the Z-axis direction. The X-axis direction is along the direction in which the pair of gripping portions approach and separate from each other in a plane where the pair of gripping portions is initially present.

[0027] The micro gripper 1 of the first embodiment is a micro gripper having a degree of freedom in one axial direction. As shown in FIG. 1, the fixed portion 3 and the operating portion 4 are planarly viewed. It is said to consist of an integral structure 2 with an H-shape. The material of the monolithic structure 2 can be any of metal, resin, semiconductor, and the like, and the processing method can be a deviation method such as cutting ij, electric discharge machining, fabrication, lithographic etching, etc. You can rely on.

[0028] The fixed portion 3 corresponds to the substantially central connecting side portion of the H-shape of the integrated structure 2, and the operating portion 4 corresponds to the substantially both sides of the H-shape of the integrated structure 2, respectively. Grits not shown It is fixed to the wall of the housing with a fixing means such as a screw or an adhesive.

[0029] The actuating part 4 is arranged on both sides of the fixed part 3, and a pair of gripping parts 5, 5 and a rear side of the fixed part 3 (on the lower left side in FIG. 1) In FIG. 1, a pair of drive parts 6 and 6 and a pair of elastic deformation parts 7 and 7 for connecting the pair of gripping parts 5 and 5 and the pair of drive parts 6 and 6 are provided. Yes. The pair of elastic deformation portions 7 and 7 are also connected to the fixing portion 3.

[0030] Each of the pair of drive units 6 and 6 has a single driving force, and one telescopic actuator 8 is incorporated between the pair of single driving rods 6 and 6. Yes. The number of expansion / contraction actuators 8 to be incorporated is not limited to one, and may be plural depending on the output.

[0031] The expansion / contraction actuator 8 has a piezo piezoelectric element force, and an expansion / contraction actuator such as a stack actuator in which piezoelectric elements and electrodes are alternately stacked in multiple stages is used. ing. This is incorporated between a pair of single drive rods 6 and 6 with its stacking direction (stretching direction) along the X-axis direction.

[0032] A voltage is applied to the expansion / contraction actuator 8 from a DC power supply (not shown), and a control current is applied. Then, the expansion / contraction actuator 8 expands and contracts due to the piezoelectric effect, and the pair of single drive rods 6 and 6 are displaced along the expansion / contraction direction, whereby the pair of elastic deformation portions 7 and 7 are elastically deformed. Then, the pair of gripping parts 5 and 5 are displaced to a desired position in the X-axis direction so as to approach or separate from each other. In this way, the pair of gripping parts 5 and 5 are positioned with extremely fine accuracy on the order of a nanometer force of several hundreds of micrometers to damage a gripping object (workpiece) 9 of a predetermined size. Grasp accurately and securely without giving. In this case, the elastic deformation of the pair of elastic deformation portions 7 and 7 is based on a torsional moment Mz around the axis in the same direction as the Z axis acting on a predetermined point of the portion as shown in the figure.

[0033] A grip extension (not shown) projects from the front ends of the pair of grips 5 and 5 as needed. This gripping extension can be provided with a function capable of expanding and contracting by incorporating a piezoelectric element or the like in the middle of its length direction. By doing so, the micro gripper 1 also has a positional displacement in the Y-axis direction of the pair of gripping parts 5 and 5. It becomes possible. The length of the grip extension is an appropriate length according to the size of the gripping object 9 and the position in the Y-axis direction.

[0034] Since the micro gripper 1 of the first embodiment is configured as described above, the following effects can be achieved.

The micro gripper 1 is composed of an integral structure 2 having a fixed portion 3 and an actuating portion 4, and one or more built-in parts between a pair of single drive rods 6 and 6 forming part of the actuating portion 4. Only the expansion and contraction actuator 8 is configured, and since the portion excluding the expansion and contraction actuator 8 constitutes an integral structure 2, the number of parts is reduced and the structure becomes extremely simple. In addition, since the expansion / contraction amount of the expansion / contraction actuator 8 can be directly related to the elastic deformation amount of the pair of elastic deformation portions 7, 7, the precise position setting of the pair of gripping portions 5, 5 in the X-axis direction is possible. Thus, it is possible to accurately and reliably grip the fine gripping object 9 according to the position.

[0035] Further, since the expansion / contraction actuator 8 is also configured to have a piezoelectric element force, it is possible to directly relate the amount of electricity input to the piezoelectric element to the elastic deformation amount of the pair of elastic deformation portions 7 and 7. By precisely controlling the amount of electricity input to the piezo piezoelectric element, the amount of elastic deformation of the elastically deforming portions 7 and 7 can be checked. The position displacement can be controlled precisely, and the amount of electricity is relatively easy to control. Therefore, precise positioning of each of the pair of gripping parts 5 and 5 is facilitated, and a fine gripping target The object 9 can be gripped accurately, reliably and easily according to its position.

[0036] In addition, when the pair of gripping parts 5 and 5 are each provided with a stretchable gripping extension part having a predetermined length at the front end in the protruding direction, the micro gripper 1 has a pair of gripping parts 5 and 5 Positional displacement in the Y-axis direction of each of 5 is also possible, and a precise position in the 3-axis direction (X, Y, Ζ-axis direction, in other words, in a three-dimensional space) of each of the pair of gripping parts 5 and 5 This makes it possible to grip a minute object 9 accurately, reliably and easily according to its position.

Example 2

[0037] Next, another embodiment (embodiment 2) of the present invention will be described.

FIG. 2 is a perspective view of the micro gripper of the second embodiment. Corresponding portions are denoted by reference numerals obtained by adding 10 to the reference numerals assigned to the micro gripper of the first embodiment.

[0038] Compared with the micro gripper 1 of the first embodiment, the micro gripper 11 of the second embodiment is a micro gripper having a degree of freedom in two axial directions, the configuration of a pair of drive units, and the incorporation. The number of extendable actuators to be turned and how they are assembled are different.

That is, as shown in FIG. 2, the micro gripper 11 according to the second embodiment includes branch drive rods 16a and 16b each of which has a pair of drive units 16 and 16 branching into two forks. It is composed of a crotch-shaped drive unit 16, and two expansion / contraction actuators 18 a and 18 b are assembled in a crossing manner between the pair of two-fork drive units 16 and 16, and these expansion and contraction actuators 18 a and 18 b are expanded and contracted. As a result, the branch drive rods 16a and 16b of each of the pair of bifurcated drive parts 16 and 16 are displaced, whereby the pair of elastic deformation parts 17 and 17 are elastically deformed, and the pair of grips. The parts 15 and 15 are adapted to be displaced to desired positions. The telescopic actuators 18a and 18b are of the same size. The number of telescopic actuators to be incorporated is not limited to two, and may be further increased.

In the second embodiment, the extension vectors of the extension actuators 18a and 18b, that is, the displacement vectors of the pair of branch drive rods 16a and 16b of each of the pair of bifurcated drive units 16 and 16 are expressed as It can be broken down into an axial component and a Z-axis component. Each of the pair of elastically deforming portions 17 and 17 has a torsional moment about an axis parallel to the Z-axis direction by the resultant force of the X-axis direction component and the resultant force of the Z-axis direction component obtained in this manner. Mz, elastically deformed in response to the torsional moment Mx around the axis parallel to the X-axis direction, and each of the pair of gripping parts 15, 15 is displaced in the X-axis direction and the Z-axis direction in two axial directions. It enables precise positioning within these X-Z planes. In this way, the pair of gripping portions 15 and 15 can grip the minute gripping object 19 accurately and reliably according to the position. In addition, the second embodiment can achieve the same effects as the first embodiment.

[0041] In the second embodiment, each of the pair of elastically deforming portions 17 and 17 has a torsional moment My around the axis parallel to the Y-axis direction due to the different expansion and contraction vectors of the expansion and contraction actuators 18a and 18b. However, there is a possibility that each of the pair of gripping portions 15 and 15 is rotated and displaced minutely around the same axis by being elastically deformed, but the gripping of the gripping object 19 is not affected. Example 3

Next, still another embodiment (Example 3) of the present invention will be described.

FIG. 3 is a perspective view of the micro gripper according to the third embodiment. Parts corresponding to the micro gripper according to the second embodiment are denoted by reference numerals obtained by adding 10 to the reference numerals appended to the micro gripper according to the second embodiment. Yes.

[0043] The micro gripper 21 of the third embodiment is different from the micro gripper 11 of the second embodiment in terms of the configuration of the fixed portion, the number of telescopic actuators to be incorporated, and how they are incorporated. .

That is, in the micro gripper 21 of the third embodiment, as shown in FIG. 3, the fixing portion 23 is extended rearward to form an elongated plate-like fixing portion, and a pair of bifurcated shapes. Drive part 26, 26 force It is arranged on both sides of the fixed part 23. As a result, one telescopic actuator is incorporated between each branch drive rod 26a, 26b of each of the pair of bifurcated drive units 26, 26 and the fixed unit 23, for a total of four telescopic actuators 28a, 28b. 28a, 28b force is incorporated, and the expansion and contraction actuators expand and contract, so that the branch drive rods 26a and 26b are displaced. As a result, the pair of elastic deformation portions 27 and 27 are elastically deformed, The grip portions 25, 25 are displaced to a desired position. The telescopic actuators 28a and 28b are of different sizes. The number of telescopic actuators to be incorporated is not limited to four, and may be further increased.

[0045] Also in the third embodiment, the extension vectors of the extension actuators 28a and 28b, that is, the displacement vectors of the pair of branch drive rods 26a and 26b of the pair of bifurcated drive units 26 and 26 are represented by X It can be decomposed into an axial component and a Z-axis component, and by these vector components, the torsional moments Mz and X-axis of each of the pair of elastically deformable portions 27 and 27 around the axis parallel to the Z-axis direction can be obtained. Is elastically deformed in response to a torsional moment Mx around an axis parallel to the X-Z direction, and each of the pair of gripping portions 25, 25 is displaced in the X-axis direction and the Z-axis direction in two directions. It will be clear that precise positioning in the plane is possible. In this case, the position of each of the pair of gripping portions 25 and 25 is controlled by independently controlling the set of one extension telescopic actuators 28a and 28b and the other set of extendable actuators 28a and 28b. It is also possible to make the settings independently of each other. In this way, the pair of gripping portions 25 25, the fine object 29 can be grasped more accurately, reliably and easily in accordance with its position.

[0046] In the third embodiment, since the fixing portion 23 is formed in an elongated plate shape and extends rearward, the fixing of the micro gripper 21 becomes more stable. In addition, a compact and lightweight telescopic actuator can be used. In addition, Example 3 can achieve the same effects as Example 2.

Example 4

Next, still another embodiment (Embodiment 4) of the present invention will be described.

FIG. 4 is a perspective view of the micro gripper according to the fourth embodiment. Parts corresponding to the micro grippers according to the first and third embodiments are denoted by the reference numerals attached to the micro grippers according to these embodiments.

A sign with 0 or 10 added.

[0048] The force of the micro gripper 31 of the fourth embodiment is also a micro gripper having a degree of freedom in two axial directions. Compared with the micro gripper 11 of the first to third embodiments described above, the configuration of the fixed portion The difference is in the point and the way in which the four extendable actuators are incorporated.

That is, in the micro gripper 31 of the fourth embodiment, as shown in FIG. 4, the fixing portion 33 is extended rearward to form an elongated plate-like fixing arm portion 33a and the fixing arm portion 33a. The rear end force is also composed of a T-shaped fixed base portion 33b that stands upright, and is disposed on both sides of the pair of drive portions 36, 36 force the fixed portion 33. Note that each of the pair of drive portions 36 and 36 is configured by a single drive rod 36 as in the first embodiment. The pair of gripping portions 35 and 35 are respectively provided with gripping extension portions 100 and 100 at the front ends in the protruding direction.

[0050] As a result, each of the pair of single drive rods 36, 36 and the T-shaped leg end of the fixed base portion 33b and each of the pair of single drive rods 36, 36 and the fixed base portion 33b One telescopic actuator 38a, 38b is incorporated between each of the T-shaped arm ends, and a total of four decompression actuators 38a, 38b, 38a, 38b are incorporated. The pair of single drive rods 36 and 36 are displaced by the expansion and contraction of the pair, whereby the pair of elastic deformation portions 37 and 37 are elastically deformed, and the pair of gripping portions 35 and 35 are in desired positions. Turn into It is designed to operate. The telescopic actuators 38a and 38b are of different sizes, but can be designed so that the same one can be used. The number of telescopic attachments to be incorporated is not limited to four, and may be further increased.

[0051] In the fourth embodiment, each of the expansion / contraction actuators 38a, 38b, 38a, 38b has only an X-axis direction component or a Z-axis direction component. Each of the elastically deforming portions 37 and 37 is elastically deformed by receiving a torsional moment Mz about the axis parallel to the Z-axis direction and a torsional moment Mx about the axis parallel to the X-axis direction, and a pair of gripping portions 35, It will be more apparent that each of 35 can be displaced in the X and Z directions to allow precise positioning in these X-Z planes.

[0052] In this way, the expansion and contraction of these expansion and contraction actuators can be taken out as they are as the positional displacement of each of the pair of gripping portions 35 and 35 in the X-axis direction and the Z-axis direction. More precise positioning within each X-Z plane of 35 is possible independently of each other, and the pair of gripping parts 35 and 35 makes it possible to more accurately adjust the fine gripping object 39 according to its position. It can be gripped reliably and easily.

[0053] In the fourth embodiment, since the fixed portion 33 is composed of the fixed arm portion 33a and the fixed base portion 33b, the micro gripper 31 can be fixed more securely than in the third embodiment. Stabilize. In addition, a small and light extension actuator can be used. In addition, the fourth embodiment can achieve the same effects as the third embodiment.

[0054] The invention of the present application is not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the invention.

For example, as the expansion / contraction actuator, in addition to the piezoelectric element, various expansion / contraction actuators such as an electrostatic actuator or an electromagnetic actuator can be used.

Claims

The scope of the claims

[1] The fixed part and the working part of the micro gripper that grips a fine workpiece consist of an integral structure.

The actuating part is disposed on both sides of the fixed part, a pair of gripping parts on the front side of the fixed part, a pair of drive parts on both sides or the rear side of the fixed part, and the pair of gripping parts and the pair. A pair of elastically deforming portions that connect the driving portion of

Between the pair of drive parts or between the pair of drive parts and the fixed part, one or more extendable actuators are incorporated,

As the telescopic actuator expands and contracts, the pair of drive parts are displaced, and as a result, the pair of elastically deformable parts are elastically deformed, and the pair of gripping parts are displaced to desired positions. Being

A micro gripper characterized by that.

[2] The operating part is disposed on both sides of the fixed part, a pair of gripping parts on the front side of the fixed part, a pair of drive parts on the rear side of the fixed part, and the pair of gripping parts; A pair of elastic deformation parts connecting the pair of drive parts,

Each of the pair of drive units is composed of a single drive rod,

Between the pair of single drive rods, at least one telescopic actuator is incorporated,

When the telescopic actuator expands and contracts, the pair of single drive rods are displaced, thereby the pair of elastically deforming portions elastically deform, and the pair of gripping portions are displaced to the desired positions. Being to work! RU

The micro gripper according to claim 1, wherein:

[3] The operating portion is disposed on both sides of the fixed portion, a pair of gripping portions on the front side of the fixed portion, a pair of drive portions on the rear side of the fixed portion, and the pair of gripping portions, A pair of elastic deformation parts connecting the pair of drive parts,

Each of the pair of drive units includes a bifurcated drive rod having a branch drive rod that branches into a bifurcated shape.

Between the pair of bifurcated drive rods, at least two extendable actuators intersect each other. Incorporated,

When the telescopic actuator expands and contracts, the pair of bifurcated drive rods are displaced, whereby the pair of elastically deforming portions are elastically deformed, and the pair of gripping portions are displaced to the desired positions. Being to work! RU

The micro gripper according to claim 1, wherein:

[4] The operating portion is disposed on both sides of the fixed portion, a pair of gripping portions on the front side of the fixed portion, a pair of drive portions on both sides of the fixed portion, and the pair of gripping portions and the pair of gripping portions. A pair of elastically deforming parts that connect the driving part of

Between the pair of bifurcated drive rods and the fixed portion, at least one extendable actuator is assembled between each branch drive rod of the pair of bifurcated drive rods and the fixed portion. A total of at least four telescopic actuators,

The micro gripper according to claim 1, wherein:

[5] The operating portion is disposed on both sides of the fixed portion, a pair of gripping portions on the front side of the fixed portion, a pair of drive portions on both sides of the fixed portion, and the pair of gripping portions and the pair of gripping portions. A pair of elastically deforming parts that connect the driving part of

The fixing portion includes an elongated plate-like fixing arm portion and a T-shaped fixing base portion standing upright from the rear end of the fixing arm portion,

Each of the pair of drive units is composed of a single drive rod,

Between the pair of single drive rods and the fixed portion, between each of the pair of single drive rods and the T-shaped leg ends of the fixed base portion, and the pair of single drive At least one telescopic actuator is incorporated between each of the heels and each T-shaped arm end of the fixed base portion, and a total of at least four telescopic actuators are incorporated. The pair of single drive rods are displaced. Thus, the pair of elastic deformation portions are elastically deformed, and the pair of gripping portions are displaced to desired positions! RU

The micro gripper according to claim 1, wherein:

[6] The micro gripper according to any one of [1] or [5], wherein the expansion / contraction actuator also has a piezoelectric element force.

[7] The microgrid according to any one of claims 1 and 6, wherein each of the pair of gripping portions includes a gripping extension portion that can be expanded and contracted at a front end in the projecting direction.