WO2006099102A2 - Power semiconductor package - Google Patents
Power semiconductor package Download PDFInfo
- Publication number
- WO2006099102A2 WO2006099102A2 PCT/US2006/008519 US2006008519W WO2006099102A2 WO 2006099102 A2 WO2006099102 A2 WO 2006099102A2 US 2006008519 W US2006008519 W US 2006008519W WO 2006099102 A2 WO2006099102 A2 WO 2006099102A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- package
- lead
- molded housing
- die
- connection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/40—Leadframes
- H10W70/481—Leadframes for devices being provided for in groups H10D8/00 - H10D48/00
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
- H10W20/482—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes for individual devices provided for in groups H10D8/00 - H10D48/00, e.g. for power transistors
- H10W20/484—Interconnections having extended contours, e.g. pads having mesh shape or interconnections comprising connected parallel stripes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W40/00—Arrangements for thermal protection or thermal control
- H10W40/70—Fillings or auxiliary members in containers or in encapsulations for thermal protection or control
- H10W40/77—Auxiliary members characterised by their shape
- H10W40/778—Auxiliary members characterised by their shape in encapsulations
Definitions
- the present invention relates to semiconductor packages.
- a semiconductor device such as a power supply or power regulation circuit
- the semiconductor device must be packaged.
- Packaging can consume a relatively large area on a circuit board.
- chip-scale type of packaging has been developed in order to reduce the area that is consumed by a package.
- a power electrode of the semiconductor device is readied for direct connection by a conductive adhesive to a conductive pad on a circuit board. While this concept currently contributes to the reduction of the size of a semiconductor package, it may not be a feasible concept in the future. Specifically, as the size of the die decreases with the improvement of die processing technology and materials, the physical dimensions of the electrodes of the die also decrease. The reduction in the dimension of the electrodes combined with the improvement in the current carrying density of the semiconductor devices may lead to undesirable results such as premature damage to the conductive adhesive due
- a semiconductor package includes a semiconductor die having a first plurality of power electrodes and a second plurality of power electrodes disposed on a major surface thereof, each first power electrode being spaced from and opposite to a second power electrode, a lead frame including a first lead portion and a second lead portion, the first lead portion including a plurality of spaced first fingers each electrically and mechanically connected to a respective first power electrode and a first lead pad electrically connected to said spaced first fingers and having a first external surface configured for external electrical connection, and the second lead portion including a plurality of spaced second fingers each electrically and mechanically connected to a respective second power electrode and a second lead pad electrically connected to the spaced second fingers and having a second external surface configured for external electrical connection, and molded housing encapsulating at least the semiconductor die and portions of the first lead pad and the second lead pad, wherein the first external surface and the second external surface are exposed through the molded housing.
- the fingers allow for
- a lead frame in a package according to the present invention may further include at least one more lead for connection to the control electrode of the semiconductor device, or two leads each for connection to a respective control electrode (e.g. when the device is bidirectional), or one to serve as a lead connection to a control electrode and the other to serve as a current sense lead.
- the connection surfaces of all the leads maybe coplanar for easier assembly on a substrate.
- the semiconductor device in a package according to the present invention may be a IH-nitride based power semiconductor device such as a schottky device, a HEMT, a MOSHFET, a MISHFET, or the like.
- a package according to another embodiment of the present invention includes a heat spreader thermally connected to the semiconductor device which is exposed through the molded housing.
- the exposed surface of the heat spreader is coplanar with the external surface of the molded housing through which it is exposed.
- Figure 1 illustrates a top plan view of a semiconductor die used in a package according to the first embodiment of the present invention.
- Figure 2 illustrates a top plan view of a lead frame used in a package according to the first embodiment of the present invention.
- Figure 3 illustrates a bottom plan view of a package according to the first embodiment of the present invention.
- Figure 4 illustrates a cross-sectional view along line 4-4 in Figure 3 viewed in the direction of the arrows.
- Figure 5 illustrates a cross-section view along line 5-5 in Figure 3 viewed in the direction of the arrows.
- Figure 6 illustrates a perspective view of a lead frame and die (in an unassembled state) used in a package according to the second embodiment of the present invention.
- Figure 7 illustrates a perspective view of a lead frame and die (in an assembled state) used in a package according to the second embodiment of the present invention.
- Figure 8 illustrates a perspective view of a bottom portion of a package according to the second embodiment of the present invention.
- Figure 9 illustrates the assembly of Figure 7 with an optional heat spreader.
- Figure 10 illustrates a top perspective view of a package according to an alternative embodiment of the present invention.
- Figures 1 IA-I ID illustrate an additional embodiment of the present invention.
- Figures 12A-12D illustrate a further embodiment of the present invention.
- Figures 13A-13D illustrate a further embodiment of the present invention.
- a power semiconductor device 10 in a package according to the present invention includes a plurality of elongated first power electrodes 12, and a plurality of elongated second power electrodes 14. As shown, each first power electrode is spaced from but opposite to a second power electrode. Thus, first power electrodes 12 and second power electrodes 14 are alternately arranged.
- a package according to the present invention further includes a lead frame having at least first lead portion 16 and second lead portion 18.
- First lead portion 16 includes a plurality of spaced first fingers 20 extending from a first lead pad 22, and second lead portion 18 includes a plurality of spaced second fingers 24 extending from second lead pad 26.
- each first finger 20 is electrically and mechanically connected to a first power electrode 12 by a conductive adhesive such as solder or a conductive epoxy
- each second finger 24 is electrically and mechanically connected to a second power electrode 14 by a conductive adhesive such as solder or conductive epoxy.
- the assembly of the semiconductor die 10 and lead frame portions 16, 18 is then overmolded with mold compound.
- first lead pad 22 includes first external surface 28 and second lead pad 26 includes second external surface 30.
- Each external surface is exposed through molded housing 32 and is configured for external connection by preferably a conductive adhesive (e.g. solder or conductive epoxy) or the like to a corresponding conductive pad on, for example, a circuit board.
- first and second external connection surfaces 28, 30 are coplanar.
- the surface of the conductive adhesive e.g. solder or conductive epoxy
- heat spreader 34 is coplanar with the external surface of molded housing 32 through which heat spreader 34 is exposed.
- Semiconductor die 10 in a package according to the first embodiment may be a schottky device, such as a heterojunction variety Hi-nitride schottky device based on the InAlGan system, for example, a GaN-based device.
- a package according to the present invention is not limited to a schottky device, however.
- semiconductor die 36 may include more electrodes in addition to first and second power electrodes 12, 14.
- semiconductor die 36 may include two more electrodes 38, 40.
- electrodes 38, 40 may each be a control electrode.
- Such a device may be, for example, a bidirectional device, m another embodiment, electrode 38 maybe a control electrode and electrode 40 may be a current sense electrode.
- the lead frame may further include a lead 42 that is electrically connected to electrode 36 and another lead 44 that is electrically connected to electrode 40.
- Die 36 in a package according to the second embodiment may be a HEMT, a MOSHFET, MISHFET or the like, and may be preferably a m-nitride heterojunction device based on the InAlGan system, for example, a GaN-based device.
- a heat spreader 34 can be thermally mounted onto die 36 and in thermal communication therewith prior to housing the same in mold compound, hi this example, preferably, heat spreader 34 will be exposed through the molded housing.
- heat spreader 34 can be omitted in which case mold compound will cover the back of die 36 as illustrated by Figure
- heat spreader 34 may be made from copper or a copper alloy, while first lead frame portion 16 and second lead frame portion 18 may be made from copper or a copper alloy, and finished with a solderable exterior surface such as nickel.
- Figures 1 IA-13D illustrate three additional embodiments of a package according to the present invention.
- Figures 1 IA-I ID illustrate a package for a bidirectional device having two gate electrodes 38,40, in which gate pads 42 and 44 are disposed on opposite corners of the package adjacent opposite sides.
- Figure 1 ID illustrates the bottom view of the package after it has been molded over with mold compound.
- Figures 12A-12D illustrate an additional embodiment which includes only one gate pad 42. Note that in this example pad 22 is smaller than pad 26.
- Figure 12D illustrates the bottom plan view after over-molding with mold compound.
- FIGs 13A-13D illustrate an additional embodiment which also includes only one gate pad 42. Note that in this example pad 26 is smaller than pad
- Figure 13D illustrates the bottom plan view after over-molding with mold compound.
Landscapes
- Lead Frames For Integrated Circuits (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Abstract
Description
Claims
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008500948A JP2008533722A (en) | 2005-03-10 | 2006-03-09 | Power semiconductor package |
| DE112006000568T DE112006000568T5 (en) | 2005-03-10 | 2006-03-09 | Power semiconductor device |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US66039905P | 2005-03-10 | 2005-03-10 | |
| US60/660,399 | 2005-03-10 | ||
| US11/370,716 | 2006-03-08 | ||
| US11/370,716 US20060202320A1 (en) | 2005-03-10 | 2006-03-08 | Power semiconductor package |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO2006099102A2 true WO2006099102A2 (en) | 2006-09-21 |
| WO2006099102A3 WO2006099102A3 (en) | 2007-11-22 |
Family
ID=36969961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US2006/008519 Ceased WO2006099102A2 (en) | 2005-03-10 | 2006-03-09 | Power semiconductor package |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20060202320A1 (en) |
| JP (1) | JP2008533722A (en) |
| KR (1) | KR100903429B1 (en) |
| DE (1) | DE112006000568T5 (en) |
| TW (1) | TW200701414A (en) |
| WO (1) | WO2006099102A2 (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8399912B2 (en) | 2010-02-16 | 2013-03-19 | International Rectifier Corporation | III-nitride power device with solderable front metal |
| US9093433B2 (en) * | 2010-11-18 | 2015-07-28 | Microchip Technology Incorporated | Using bump bonding to distribute current flow on a semiconductor power device |
| US9324819B1 (en) | 2014-11-26 | 2016-04-26 | Delta Electronics, Inc. | Semiconductor device |
| US9881862B1 (en) * | 2016-09-20 | 2018-01-30 | Infineon Technologies Austria Ag | Top side cooling for GaN power device |
| JP6827776B2 (en) | 2016-11-15 | 2021-02-10 | ローム株式会社 | Semiconductor device |
| US11302609B2 (en) * | 2020-08-31 | 2022-04-12 | Nxp Usa, Inc. | Radio frequency power dies having flip-chip architectures and power amplifier modules containing the same |
| US12136623B2 (en) * | 2020-11-11 | 2024-11-05 | Infineon Technologies Austria Ag | Multi-device semiconductor chip with electrical access to devices at either side |
| KR102896851B1 (en) * | 2020-11-12 | 2025-12-04 | 삼성전자주식회사 | Semiconductor device package and method of fabricating the same |
| DE102022205702A1 (en) | 2022-06-03 | 2023-12-14 | Zf Friedrichshafen Ag | POWER ELEMENT INTEGRATION MODULE |
| JP7844303B2 (en) | 2022-09-22 | 2026-04-13 | 株式会社東芝 | Semiconductor equipment |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3320351A (en) * | 1965-01-29 | 1967-05-16 | Mannes N Glickman | Miniature circuit housing |
| JPH04252036A (en) * | 1991-01-10 | 1992-09-08 | Fujitsu Ltd | Semiconductor device |
| JP2665169B2 (en) * | 1994-10-24 | 1997-10-22 | ローム株式会社 | Semiconductor device and manufacturing method thereof |
| KR0184076B1 (en) * | 1995-11-28 | 1999-03-20 | 김광호 | Three-dimensional stacked package |
| JP3540471B2 (en) * | 1995-11-30 | 2004-07-07 | 三菱電機株式会社 | Semiconductor module |
| US5866939A (en) * | 1996-01-21 | 1999-02-02 | Anam Semiconductor Inc. | Lead end grid array semiconductor package |
| JP3779789B2 (en) * | 1997-01-31 | 2006-05-31 | 株式会社ルネサステクノロジ | Semiconductor device and manufacturing method thereof |
| US6462404B1 (en) * | 1997-02-28 | 2002-10-08 | Micron Technology, Inc. | Multilevel leadframe for a packaged integrated circuit |
| US6462413B1 (en) * | 1999-07-22 | 2002-10-08 | Polese Company, Inc. | LDMOS transistor heatsink package assembly and manufacturing method |
| JP2001127281A (en) * | 1999-10-26 | 2001-05-11 | Murata Mfg Co Ltd | Semiconductor device |
| JP2002040095A (en) * | 2000-07-26 | 2002-02-06 | Nec Corp | Semiconductor device and mounting method thereof |
| JP2002280509A (en) * | 2001-03-15 | 2002-09-27 | Rohm Co Ltd | Semiconductor device manufacturing method and semiconductor device |
| US6942661B2 (en) | 2000-08-30 | 2005-09-13 | Boston Scientific Scimed, Inc. | Fluid cooled apparatus for supporting diagnostic and therapeutic elements in contact with tissue |
| TW480686B (en) * | 2001-04-03 | 2002-03-21 | Siliconware Precision Industries Co Ltd | Intersecting stacked type dual die package structure and manufacturing process |
| TW523887B (en) * | 2001-11-15 | 2003-03-11 | Siliconware Precision Industries Co Ltd | Semiconductor packaged device and its manufacturing method |
| JP2003258179A (en) * | 2002-02-28 | 2003-09-12 | Sanyo Electric Co Ltd | Semiconductor device and method of manufacturing the same |
| JP3973938B2 (en) * | 2002-03-20 | 2007-09-12 | 日本碍子株式会社 | Schottky device |
| JP2004039657A (en) * | 2002-06-28 | 2004-02-05 | Renesas Technology Corp | Semiconductor device |
| JP4111767B2 (en) * | 2002-07-26 | 2008-07-02 | 株式会社ルネサステクノロジ | Manufacturing method of semiconductor device and electrical property inspection method of small element |
| US6700206B2 (en) * | 2002-08-02 | 2004-03-02 | Micron Technology, Inc. | Stacked semiconductor package and method producing same |
| JP4718751B2 (en) * | 2002-12-04 | 2011-07-06 | 三菱電機株式会社 | Semiconductor device |
| JP4241106B2 (en) * | 2003-03-12 | 2009-03-18 | シャープ株式会社 | Semiconductor device and manufacturing method thereof |
| WO2006031886A2 (en) * | 2004-09-13 | 2006-03-23 | International Rectifier Corporation | Power semiconductor package |
| US7288803B2 (en) * | 2004-10-01 | 2007-10-30 | International Rectifier Corporation | III-nitride power semiconductor device with a current sense electrode |
-
2006
- 2006-03-08 US US11/370,716 patent/US20060202320A1/en not_active Abandoned
- 2006-03-09 TW TW095107926A patent/TW200701414A/en unknown
- 2006-03-09 JP JP2008500948A patent/JP2008533722A/en active Pending
- 2006-03-09 DE DE112006000568T patent/DE112006000568T5/en not_active Ceased
- 2006-03-09 KR KR1020077020618A patent/KR100903429B1/en not_active Expired - Fee Related
- 2006-03-09 WO PCT/US2006/008519 patent/WO2006099102A2/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008533722A (en) | 2008-08-21 |
| WO2006099102A3 (en) | 2007-11-22 |
| KR100903429B1 (en) | 2009-06-18 |
| DE112006000568T5 (en) | 2008-01-24 |
| TW200701414A (en) | 2007-01-01 |
| US20060202320A1 (en) | 2006-09-14 |
| KR20070100849A (en) | 2007-10-11 |
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