WO2006099102A2 - Power semiconductor package - Google Patents

Power semiconductor package Download PDF

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Publication number
WO2006099102A2
WO2006099102A2 PCT/US2006/008519 US2006008519W WO2006099102A2 WO 2006099102 A2 WO2006099102 A2 WO 2006099102A2 US 2006008519 W US2006008519 W US 2006008519W WO 2006099102 A2 WO2006099102 A2 WO 2006099102A2
Authority
WO
WIPO (PCT)
Prior art keywords
package
lead
molded housing
die
connection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2006/008519
Other languages
French (fr)
Other versions
WO2006099102A3 (en
Inventor
Christopher P. Schaffer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies Americas Corp
Original Assignee
International Rectifier Corp USA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Rectifier Corp USA filed Critical International Rectifier Corp USA
Priority to JP2008500948A priority Critical patent/JP2008533722A/en
Priority to DE112006000568T priority patent/DE112006000568T5/en
Publication of WO2006099102A2 publication Critical patent/WO2006099102A2/en
Anticipated expiration legal-status Critical
Publication of WO2006099102A3 publication Critical patent/WO2006099102A3/en
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40Leadframes
    • H10W70/481Leadframes for devices being provided for in groups H10D8/00 - H10D48/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00Interconnections in chips, wafers or substrates
    • H10W20/40Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/482Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes for individual devices provided for in groups H10D8/00 - H10D48/00, e.g. for power transistors
    • H10W20/484Interconnections having extended contours, e.g. pads having mesh shape or interconnections comprising connected parallel stripes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/70Fillings or auxiliary members in containers or in encapsulations for thermal protection or control
    • H10W40/77Auxiliary members characterised by their shape
    • H10W40/778Auxiliary members characterised by their shape in encapsulations

Definitions

  • the present invention relates to semiconductor packages.
  • a semiconductor device such as a power supply or power regulation circuit
  • the semiconductor device must be packaged.
  • Packaging can consume a relatively large area on a circuit board.
  • chip-scale type of packaging has been developed in order to reduce the area that is consumed by a package.
  • a power electrode of the semiconductor device is readied for direct connection by a conductive adhesive to a conductive pad on a circuit board. While this concept currently contributes to the reduction of the size of a semiconductor package, it may not be a feasible concept in the future. Specifically, as the size of the die decreases with the improvement of die processing technology and materials, the physical dimensions of the electrodes of the die also decrease. The reduction in the dimension of the electrodes combined with the improvement in the current carrying density of the semiconductor devices may lead to undesirable results such as premature damage to the conductive adhesive due
  • a semiconductor package includes a semiconductor die having a first plurality of power electrodes and a second plurality of power electrodes disposed on a major surface thereof, each first power electrode being spaced from and opposite to a second power electrode, a lead frame including a first lead portion and a second lead portion, the first lead portion including a plurality of spaced first fingers each electrically and mechanically connected to a respective first power electrode and a first lead pad electrically connected to said spaced first fingers and having a first external surface configured for external electrical connection, and the second lead portion including a plurality of spaced second fingers each electrically and mechanically connected to a respective second power electrode and a second lead pad electrically connected to the spaced second fingers and having a second external surface configured for external electrical connection, and molded housing encapsulating at least the semiconductor die and portions of the first lead pad and the second lead pad, wherein the first external surface and the second external surface are exposed through the molded housing.
  • the fingers allow for
  • a lead frame in a package according to the present invention may further include at least one more lead for connection to the control electrode of the semiconductor device, or two leads each for connection to a respective control electrode (e.g. when the device is bidirectional), or one to serve as a lead connection to a control electrode and the other to serve as a current sense lead.
  • the connection surfaces of all the leads maybe coplanar for easier assembly on a substrate.
  • the semiconductor device in a package according to the present invention may be a IH-nitride based power semiconductor device such as a schottky device, a HEMT, a MOSHFET, a MISHFET, or the like.
  • a package according to another embodiment of the present invention includes a heat spreader thermally connected to the semiconductor device which is exposed through the molded housing.
  • the exposed surface of the heat spreader is coplanar with the external surface of the molded housing through which it is exposed.
  • Figure 1 illustrates a top plan view of a semiconductor die used in a package according to the first embodiment of the present invention.
  • Figure 2 illustrates a top plan view of a lead frame used in a package according to the first embodiment of the present invention.
  • Figure 3 illustrates a bottom plan view of a package according to the first embodiment of the present invention.
  • Figure 4 illustrates a cross-sectional view along line 4-4 in Figure 3 viewed in the direction of the arrows.
  • Figure 5 illustrates a cross-section view along line 5-5 in Figure 3 viewed in the direction of the arrows.
  • Figure 6 illustrates a perspective view of a lead frame and die (in an unassembled state) used in a package according to the second embodiment of the present invention.
  • Figure 7 illustrates a perspective view of a lead frame and die (in an assembled state) used in a package according to the second embodiment of the present invention.
  • Figure 8 illustrates a perspective view of a bottom portion of a package according to the second embodiment of the present invention.
  • Figure 9 illustrates the assembly of Figure 7 with an optional heat spreader.
  • Figure 10 illustrates a top perspective view of a package according to an alternative embodiment of the present invention.
  • Figures 1 IA-I ID illustrate an additional embodiment of the present invention.
  • Figures 12A-12D illustrate a further embodiment of the present invention.
  • Figures 13A-13D illustrate a further embodiment of the present invention.
  • a power semiconductor device 10 in a package according to the present invention includes a plurality of elongated first power electrodes 12, and a plurality of elongated second power electrodes 14. As shown, each first power electrode is spaced from but opposite to a second power electrode. Thus, first power electrodes 12 and second power electrodes 14 are alternately arranged.
  • a package according to the present invention further includes a lead frame having at least first lead portion 16 and second lead portion 18.
  • First lead portion 16 includes a plurality of spaced first fingers 20 extending from a first lead pad 22, and second lead portion 18 includes a plurality of spaced second fingers 24 extending from second lead pad 26.
  • each first finger 20 is electrically and mechanically connected to a first power electrode 12 by a conductive adhesive such as solder or a conductive epoxy
  • each second finger 24 is electrically and mechanically connected to a second power electrode 14 by a conductive adhesive such as solder or conductive epoxy.
  • the assembly of the semiconductor die 10 and lead frame portions 16, 18 is then overmolded with mold compound.
  • first lead pad 22 includes first external surface 28 and second lead pad 26 includes second external surface 30.
  • Each external surface is exposed through molded housing 32 and is configured for external connection by preferably a conductive adhesive (e.g. solder or conductive epoxy) or the like to a corresponding conductive pad on, for example, a circuit board.
  • first and second external connection surfaces 28, 30 are coplanar.
  • the surface of the conductive adhesive e.g. solder or conductive epoxy
  • heat spreader 34 is coplanar with the external surface of molded housing 32 through which heat spreader 34 is exposed.
  • Semiconductor die 10 in a package according to the first embodiment may be a schottky device, such as a heterojunction variety Hi-nitride schottky device based on the InAlGan system, for example, a GaN-based device.
  • a package according to the present invention is not limited to a schottky device, however.
  • semiconductor die 36 may include more electrodes in addition to first and second power electrodes 12, 14.
  • semiconductor die 36 may include two more electrodes 38, 40.
  • electrodes 38, 40 may each be a control electrode.
  • Such a device may be, for example, a bidirectional device, m another embodiment, electrode 38 maybe a control electrode and electrode 40 may be a current sense electrode.
  • the lead frame may further include a lead 42 that is electrically connected to electrode 36 and another lead 44 that is electrically connected to electrode 40.
  • Die 36 in a package according to the second embodiment may be a HEMT, a MOSHFET, MISHFET or the like, and may be preferably a m-nitride heterojunction device based on the InAlGan system, for example, a GaN-based device.
  • a heat spreader 34 can be thermally mounted onto die 36 and in thermal communication therewith prior to housing the same in mold compound, hi this example, preferably, heat spreader 34 will be exposed through the molded housing.
  • heat spreader 34 can be omitted in which case mold compound will cover the back of die 36 as illustrated by Figure
  • heat spreader 34 may be made from copper or a copper alloy, while first lead frame portion 16 and second lead frame portion 18 may be made from copper or a copper alloy, and finished with a solderable exterior surface such as nickel.
  • Figures 1 IA-13D illustrate three additional embodiments of a package according to the present invention.
  • Figures 1 IA-I ID illustrate a package for a bidirectional device having two gate electrodes 38,40, in which gate pads 42 and 44 are disposed on opposite corners of the package adjacent opposite sides.
  • Figure 1 ID illustrates the bottom view of the package after it has been molded over with mold compound.
  • Figures 12A-12D illustrate an additional embodiment which includes only one gate pad 42. Note that in this example pad 22 is smaller than pad 26.
  • Figure 12D illustrates the bottom plan view after over-molding with mold compound.
  • FIGs 13A-13D illustrate an additional embodiment which also includes only one gate pad 42. Note that in this example pad 26 is smaller than pad
  • Figure 13D illustrates the bottom plan view after over-molding with mold compound.

Landscapes

  • Lead Frames For Integrated Circuits (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Abstract

A semiconductor package that includes a semiconductor device and a lead frame having a first lead frame portion and a second lead frame portion, each lead frame portion including a plurality of fingers and a lead pad, each finger being electrically connected to a respective electrode of the semiconductor device.

Description

POWER SEMICONDUCTOR PACKAGE
RELATED APPLICATION
[0001] This application is based on and claims benefit of United States
Provisional Application No. 60/660,399, filed on March 10, 2005, entitled
PACKAGING STRUCTURE FOR GALLIUM NITRIDE DEVICES, to which a claim of priority is hereby made and the disclosure of which is incorporated by reference.
BACKGROUND OF THE INVENTION
[0002] The present invention relates to semiconductor packages. [0003] It is well known that to incorporate a semiconductor device within a circuit, such a power supply or power regulation circuit, the semiconductor device must be packaged. Packaging, however, can consume a relatively large area on a circuit board. Thus, chip-scale type of packaging has been developed in order to reduce the area that is consumed by a package.
[0004] In one variety of chip-scale package, a power electrode of the semiconductor device is readied for direct connection by a conductive adhesive to a conductive pad on a circuit board. While this concept currently contributes to the reduction of the size of a semiconductor package, it may not be a feasible concept in the future. Specifically, as the size of the die decreases with the improvement of die processing technology and materials, the physical dimensions of the electrodes of the die also decrease. The reduction in the dimension of the electrodes combined with the improvement in the current carrying density of the semiconductor devices may lead to undesirable results such as premature damage to the conductive adhesive due
00756249.1 to the enlarged current density passing through the connection point, high resistance due to the reduced connection cross-section, and difficulty in assembling the die through direct connection of the electrodes to a conductive pad on a circuit board due again to the reduced size of the electrode.
[0005] It is, therefore, desirable to have a packaging solution for small die that can overcome the potential problems arising from the reduction in the size of the electrodes.
SUMMARY OF THE INVENTION
[0006] A semiconductor package according to the present invention includes a semiconductor die having a first plurality of power electrodes and a second plurality of power electrodes disposed on a major surface thereof, each first power electrode being spaced from and opposite to a second power electrode, a lead frame including a first lead portion and a second lead portion, the first lead portion including a plurality of spaced first fingers each electrically and mechanically connected to a respective first power electrode and a first lead pad electrically connected to said spaced first fingers and having a first external surface configured for external electrical connection, and the second lead portion including a plurality of spaced second fingers each electrically and mechanically connected to a respective second power electrode and a second lead pad electrically connected to the spaced second fingers and having a second external surface configured for external electrical connection, and molded housing encapsulating at least the semiconductor die and portions of the first lead pad and the second lead pad, wherein the first external surface and the second external surface are exposed through the molded housing. [0007] According to an aspect of the present invention, the fingers allow for connection to the electrodes of the power semiconductor device while the external connection surface of each lead pad, for example, allows for an enlarged area for
0Q756249.1 external connection to a respective conductive pad of a circuit board. The enlarged connection area allows for easier assembly of the package while reducing the current density through the connection between the package and the conductive pad. [0008] A lead frame in a package according to the present invention may further include at least one more lead for connection to the control electrode of the semiconductor device, or two leads each for connection to a respective control electrode (e.g. when the device is bidirectional), or one to serve as a lead connection to a control electrode and the other to serve as a current sense lead. In the preferred embodiment of the present invention, the connection surfaces of all the leads maybe coplanar for easier assembly on a substrate.
[0009] The semiconductor device in a package according to the present invention may be a IH-nitride based power semiconductor device such as a schottky device, a HEMT, a MOSHFET, a MISHFET, or the like.
[0010] A package according to another embodiment of the present invention includes a heat spreader thermally connected to the semiconductor device which is exposed through the molded housing. Preferably, the exposed surface of the heat spreader is coplanar with the external surface of the molded housing through which it is exposed.
[0011] Other features and advantages of the present invention will become apparent from the following description of the invention which refers to the accompanying drawings.
BRIEF DESCRIPTION OF THE FIGURES
[0012] Figure 1 illustrates a top plan view of a semiconductor die used in a package according to the first embodiment of the present invention.
[0013] Figure 2 illustrates a top plan view of a lead frame used in a package according to the first embodiment of the present invention.
007S6249.1 [0014] Figure 3 illustrates a bottom plan view of a package according to the first embodiment of the present invention.
[0015] Figure 4 illustrates a cross-sectional view along line 4-4 in Figure 3 viewed in the direction of the arrows.
[0016] Figure 5 illustrates a cross-section view along line 5-5 in Figure 3 viewed in the direction of the arrows.
[0017] Figure 6 illustrates a perspective view of a lead frame and die (in an unassembled state) used in a package according to the second embodiment of the present invention.
[0018] Figure 7 illustrates a perspective view of a lead frame and die (in an assembled state) used in a package according to the second embodiment of the present invention.
[0019] Figure 8 illustrates a perspective view of a bottom portion of a package according to the second embodiment of the present invention.
[0020] Figure 9 illustrates the assembly of Figure 7 with an optional heat spreader.
[0021] Figure 10 illustrates a top perspective view of a package according to an alternative embodiment of the present invention.
[0022] Figures 1 IA-I ID illustrate an additional embodiment of the present invention.
[0023] Figures 12A-12D illustrate a further embodiment of the present invention.
[0024] Figures 13A-13D illustrate a further embodiment of the present invention.
DETAILED DESCRIPTION OF EMBODIMENTS
00756249.1 [0025] Referring to Figure 1, a power semiconductor device 10 in a package according to the present invention includes a plurality of elongated first power electrodes 12, and a plurality of elongated second power electrodes 14. As shown, each first power electrode is spaced from but opposite to a second power electrode. Thus, first power electrodes 12 and second power electrodes 14 are alternately arranged.
[0026] Referring next to Figure 2, a package according to the present invention further includes a lead frame having at least first lead portion 16 and second lead portion 18. First lead portion 16 includes a plurality of spaced first fingers 20 extending from a first lead pad 22, and second lead portion 18 includes a plurality of spaced second fingers 24 extending from second lead pad 26. [0027] According to an aspect of the present invention, each first finger 20 is electrically and mechanically connected to a first power electrode 12 by a conductive adhesive such as solder or a conductive epoxy, and each second finger 24 is electrically and mechanically connected to a second power electrode 14 by a conductive adhesive such as solder or conductive epoxy. The assembly of the semiconductor die 10 and lead frame portions 16, 18 is then overmolded with mold compound. The mold compound encapsulates die 10 and at least portions of the lead frame, thus serving as the molded housing of the package. Note that preferably fingers 12, 14 are recessed allowing mold compound to encapsulate the same. [0028] Referring next to Figures 3, 4 and 5, according to another aspect of the present invention, first lead pad 22 includes first external surface 28 and second lead pad 26 includes second external surface 30. Each external surface is exposed through molded housing 32 and is configured for external connection by preferably a conductive adhesive (e.g. solder or conductive epoxy) or the like to a corresponding conductive pad on, for example, a circuit board. Preferably, first and second external connection surfaces 28, 30 are coplanar. Furthermore, preferably, the surface of the
00756249.1 die opposite power electrodes 12, 14 is electrically inactive and may be thermally connected either through direct connection or through an intermediate thermal body to heat spreader 34. Note that, preferably, the exterior surface of heat spreader 34 is coplanar with the external surface of molded housing 32 through which heat spreader 34 is exposed.
[0029] Semiconductor die 10 in a package according to the first embodiment may be a schottky device, such as a heterojunction variety Hi-nitride schottky device based on the InAlGan system, for example, a GaN-based device. A package according to the present invention is not limited to a schottky device, however. [0030] Referring for example to Figure 6, in a second embodiment of the present invention, semiconductor die 36 may include more electrodes in addition to first and second power electrodes 12, 14. For example, semiconductor die 36 may include two more electrodes 38, 40. In one embodiment, electrodes 38, 40 may each be a control electrode. Such a device may be, for example, a bidirectional device, m another embodiment, electrode 38 maybe a control electrode and electrode 40 may be a current sense electrode. In either case, the lead frame may further include a lead 42 that is electrically connected to electrode 36 and another lead 44 that is electrically connected to electrode 40. Once die 36 is assembled onto the lead frame (see Figure 7), the assembly is overmolded with mold compound. Thus, as seen in Figure 8, connection surfaces 28, 30 of lead pads 22, 24 are exposed as well as connection surfaces 46, 48 of leads 42, 44. Note that preferably all connection surfaces 46, 48 are coplanar.
[0031] Die 36 in a package according to the second embodiment may be a HEMT, a MOSHFET, MISHFET or the like, and may be preferably a m-nitride heterojunction device based on the InAlGan system, for example, a GaN-based device.
00756249.1 [0032] Referring to Figure 9, optionally a heat spreader 34 can be thermally mounted onto die 36 and in thermal communication therewith prior to housing the same in mold compound, hi this example, preferably, heat spreader 34 will be exposed through the molded housing. Alternatively, heat spreader 34 can be omitted in which case mold compound will cover the back of die 36 as illustrated by Figure
10.
[0033] hi the preferred embodiment, heat spreader 34 may be made from copper or a copper alloy, while first lead frame portion 16 and second lead frame portion 18 may be made from copper or a copper alloy, and finished with a solderable exterior surface such as nickel.
[0034] Figures 1 IA-13D illustrate three additional embodiments of a package according to the present invention. Figures 1 IA-I ID illustrate a package for a bidirectional device having two gate electrodes 38,40, in which gate pads 42 and 44 are disposed on opposite corners of the package adjacent opposite sides. Figure 1 ID illustrates the bottom view of the package after it has been molded over with mold compound.
[0035] Figures 12A-12D illustrate an additional embodiment which includes only one gate pad 42. Note that in this example pad 22 is smaller than pad 26.
Figure 12D illustrates the bottom plan view after over-molding with mold compound.
[0036] Figures 13A-13D illustrate an additional embodiment which also includes only one gate pad 42. Note that in this example pad 26 is smaller than pad
22. Figure 13D illustrates the bottom plan view after over-molding with mold compound.
[0037] Note that for illustration purposes the semiconductor device has been render transparent in Figures HC, 12C,13C.
00756249.1 [0038] Although the present invention has been described in relation to particular embodiments thereof, many other variations and modifications and other uses will become apparent to those skilled in the art. It is preferred, therefore, that the present invention be limited not by the specific disclosure herein, but only by the appended claims.
0075δ249.1

Claims

WHAT IS CLAIMED IS:
1. A semiconductor package comprising: a semiconductor die having a first plurality of power electrodes and a second plurality of power electrodes disposed on a major surface thereof, each first power electrode being spaced from and opposite to a second power electrode; a lead frame including a first lead portion and a second lead portion, said first lead portion including a plurality of spaced first fingers each electrically and mechanically connected to a respective first power electrode and a first lead pad electrically connected to said spaced first fingers and having a first external surface configured for external electrical connection, and said second lead portion including a plurality of spaced second fingers each electrically and mechanically connected to a respective second power electrode and a second lead pad electrically connected to said spaced second fingers and having a second external surface configured for external electrical connection; and molded housing encapsulating at least said semiconductor die and portions of said first lead pad and said second lead pad, wherein said first external surface and said second external surface are exposed through said molded housing.
2. The package of claim 1, wherein said first external surface and said second external surface are coplanar.
3. The package of claim 1, wherein said semiconductor die is a Hi-nitride based power semiconductor device.
4. The package of claim 3, wherein said die is a schottky device.
5. The package of claim 3, wherein said die is a HEMT.
00750249.1
6. The package of claim 3, wherein said die is a MOSHFET.
7. The package of claim 3, wherein said die is a MISHFET.
8. The package of claim 1, wherein said semiconductor die further includes a control electrode electrically connected to a control lead having a connection surface exposed through said molded housing.
9. The package of claim 8, wherein said connection surface of said control lead is coplanar with said first and said second external surfaces.
10. The package of claim 1, wherein said semiconductor die further includes a first control electrode electrically connected to a first control lead having a connection surface exposed through said molded housing and a second control electrode electrically connected to a second control lead having a connection surface exposed through said molded housing.
11. The package of claim 10, wherein said connection surfaces of said control leads are coplanar with said first and said second external surfaces.
12. The package of claim 1, wherein said semiconductor die further includes a control electrode electrically connected to a control lead having a connection surface exposed through said molded housing and a current sense electrode electrically connected to a current sense lead having a connection surface exposed through said molded housing.
00756249.1 lS. The package of claim 12, wherein said connection surfaces of said control lead and said current sense lead are coplanar with said first and said second external surfaces.
14. The package of claim 1, further comprising a heat spreader thermally connected to said semiconductor die and exposed through said molded housing.
15. The package of claim 14, wherein an exposed surface of said heat spreader is coplanar with an external surface of said molded housing.
00756249.1
PCT/US2006/008519 2005-03-10 2006-03-09 Power semiconductor package Ceased WO2006099102A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008500948A JP2008533722A (en) 2005-03-10 2006-03-09 Power semiconductor package
DE112006000568T DE112006000568T5 (en) 2005-03-10 2006-03-09 Power semiconductor device

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US66039905P 2005-03-10 2005-03-10
US60/660,399 2005-03-10
US11/370,716 2006-03-08
US11/370,716 US20060202320A1 (en) 2005-03-10 2006-03-08 Power semiconductor package

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WO2006099102A2 true WO2006099102A2 (en) 2006-09-21
WO2006099102A3 WO2006099102A3 (en) 2007-11-22

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US (1) US20060202320A1 (en)
JP (1) JP2008533722A (en)
KR (1) KR100903429B1 (en)
DE (1) DE112006000568T5 (en)
TW (1) TW200701414A (en)
WO (1) WO2006099102A2 (en)

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JP2008533722A (en) 2008-08-21
WO2006099102A3 (en) 2007-11-22
KR100903429B1 (en) 2009-06-18
DE112006000568T5 (en) 2008-01-24
TW200701414A (en) 2007-01-01
US20060202320A1 (en) 2006-09-14
KR20070100849A (en) 2007-10-11

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