WO2006040846A1 - Application apparatus having cleaning mechanism, method for cleaning application apparatus and cleaning mechanism for use in application apparatus - Google Patents

Application apparatus having cleaning mechanism, method for cleaning application apparatus and cleaning mechanism for use in application apparatus Download PDF

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Publication number
WO2006040846A1
WO2006040846A1 PCT/JP2005/002819 JP2005002819W WO2006040846A1 WO 2006040846 A1 WO2006040846 A1 WO 2006040846A1 JP 2005002819 W JP2005002819 W JP 2005002819W WO 2006040846 A1 WO2006040846 A1 WO 2006040846A1
Authority
WO
WIPO (PCT)
Prior art keywords
solvent
pipe
cleaning
die head
flow rate
Prior art date
Application number
PCT/JP2005/002819
Other languages
French (fr)
Japanese (ja)
Inventor
Mitsuhiro Onda
Junichi Kaminaga
Sosuke Akao
Original Assignee
Toppan Printing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2004297293A external-priority patent/JP4910276B2/en
Application filed by Toppan Printing Co., Ltd. filed Critical Toppan Printing Co., Ltd.
Priority to KR1020067011223A priority Critical patent/KR101200518B1/en
Priority to CN2005800015932A priority patent/CN1905951B/en
Publication of WO2006040846A1 publication Critical patent/WO2006040846A1/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1036Means for supplying a selected one of a plurality of liquids or other fluent materials, or several in selected proportions, to the applying apparatus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B05B15/55Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/10Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by other chemical means

Definitions

  • Coating device having cleaning mechanism, cleaning method for coating device, and cleaning mechanism used for coating device
  • the present invention relates to a coating apparatus having a cleaning mechanism for cleaning piping and a die-head through which a coating liquid flows, and a cleaning method for cleaning the coating apparatus. Furthermore, the present invention relates to a cleaning mechanism for supplying a cleaning solvent to the coating apparatus when cleaning the coating apparatus.
  • a die head having a slit nozzle is used.
  • the die head is connected to a storage tank in which the coating liquid is stored via a pipe.
  • a pump for feeding the coating liquid toward the die head and a filter for filtering the coating liquid are provided in the middle of the pipe.
  • piping for the coating device for example, a pipe made of resin, a pipe made of stainless steel, or a metal pipe whose inner surface is resin-coated is used.
  • Solvent shock occurs mainly due to (compatibility). Solvent shock is a phenomenon in which coating liquid trash such as condensate or gel caused by the cleaning solvent is generated.
  • Japanese Patent Application Laid-Open No. 7-132267 discloses a cleaning method capable of easily and efficiently cleaning the inside of a coating head (so-called die head) having a slit nozzle.
  • Japanese Patent Laid-Open No. 2003-10767 discloses a slit nozzle cleaning method capable of completely removing a solidifying coating liquid remaining at the tip of a slit nozzle of a die head without causing a reduction in work efficiency, and A cleaning mechanism is disclosed.
  • the pig is moved along the inner wall of the pipe by the compressed gas, and the paint is pushed out. This reduces paint loss during pipe cleaning and enables efficient cleaning in a short time with a small amount of cleaning solvent.
  • Japanese Patent Application Laid-Open No. 63-256163 discloses a method of cleaning the inner wall of a paint transfer pipe for performing flushing processing.
  • the inner wall of the pipe is first treated with a paint remover, then treated with an acid, and then flushed. After that, water replacement processing is performed. Disclosure of the invention
  • the inner wall of the pipe is first treated with a coating remover. After the inner wall of the pipe is treated with acid, the flushing process is performed and the inner wall of the pipe is washed by water replacement.
  • An object of the present invention is to suppress the occurrence of a solvent shock and to perform cleaning variations in a short time.
  • the object is to obtain a coating apparatus that can perform good cleaning with less (dispersion), a cleaning method for the coating apparatus, and a cleaning mechanism used in the coating apparatus.
  • a coating apparatus includes:
  • a die head provided in the pipe
  • It has a plurality of solvent tanks for storing different types of solvents, and the solvent stored in the solvent tank is changed from a solvent having higher compatibility with the coating liquid to a solvent having a higher cleaning property than the solvent (that is, the solvent And a washing mechanism for washing the inside of the pipe and the inside of the die head by switching to a low compatibility with the coating liquid in order and supplying the pipe to the pipe. Yes.
  • a cleaning method is a cleaning method for cleaning a coating apparatus including a pipe through which a coating liquid flows and a die head provided in the pipe.
  • Solvents of different types are stored in a plurality of solvent tanks connected to the pipe, and the solvent stored in the solvent tank is washed from a solvent having a high compatibility with the coating solution to a higher cleaning property than the solvent.
  • the inside of the pipe and the inside of the die head are washed by sequentially switching to a solvent and a solvent (that is, a solvent having a low compatibility with the coating liquid and supplying the solvent to the pipe).
  • a cleaning mechanism is a cleaning mechanism used in a coating apparatus having a pipe through which a coating liquid flows and a die head provided in the pipe, and are different from each other.
  • the solvent stored in the solvent tank is changed from a solvent having a high compatibility with the coating solution to a solvent having a higher cleaning property than that of the solvent and a solvent (that is, a solvent having a low compatibility with the coating solution). And a solvent supply pipe that is sequentially switched to be supplied to the pipe.
  • the cleaning operation is performed while switching to a solvent having a high compatibility with the coating solution and a solvent having a high cleaning property (that is, a solvent having a low compatibility with the coating solution). Therefore, the occurrence of solvent shock can be suppressed, and good cleaning with little variation in cleaning can be performed in a short time with a small amount of solvent.
  • the cleaning mechanism includes a drying unit that dries the inside of the pipe cleaned with the solvent and the inside of the die head. According to this configuration, the cleaned portion is dried, so that a new coating solution used after cleaning cannot be mixed with the cleaning solvent. Therefore, it is possible to more reliably suppress the occurrence of solvent shock.
  • a flow meter for measuring the flow rate of the solvent flowing in the cleaning mechanism and a flow rate control valve for controlling the flow rate of the solvent flowing in the cleaning mechanism based on the measurement result are further provided. It is preferable to provide. According to this configuration, the pipe and the die head can be cleaned well with a small amount of solvent.
  • the solvent tank is preferably provided on a load cell for measuring the weight of the solvent stored in the solvent tank.
  • the flow rate of the solvent can be monitored using the load cell. Therefore, the piping and the die head can be efficiently cleaned using a small amount of solvent.
  • the coating solution refers to a solution composed of an organic solvent and a pigment.
  • the pigment particles are dispersed in an organic solvent. “High compatibility with the coating solution” means that the pigment is mixed with the coating solution without disturbing the dispersion state of the pigment in the coating solution. “High detergency” means that the effect of removing the pigment adhering to the wall surface, whose dissolving power is strong enough to break the dispersion state of the pigment in the coating solution, is high.
  • FIG. 1 is a diagram illustrating a coating apparatus having a cleaning mechanism according to an embodiment of the present invention during cleaning.
  • FIG. 2 is a schematic view showing the time of application of the coating apparatus having the cleaning mechanism shown in FIG.
  • FIG. 3 is a front view of the die head incorporated in the coating apparatus having the cleaning mechanism shown in FIG.
  • FIG. 4 is a cross-sectional view of the die head taken along line F4-F4 in FIG.
  • FIG. 5 is a schematic view showing a coating apparatus having the cleaning mechanism shown in FIG. 1 during cleaning.
  • 1 to 5 disclose a coating system 1 according to an embodiment of the present invention.
  • This coating system 1 is suitable for coating materials that require high-precision and high-precision coating, such as color filters, liquid crystal materials, thermal recording materials, and transdermal absorption preparations.
  • the coating system 1 includes a coating device 2 and a cleaning mechanism 3.
  • the cleaning mechanism 3 includes a cleaning unit 4 and a drying unit 5.
  • the coating apparatus 2 has a storage tank 6, a filter-one supply pump 8, a die head 9, a tray 10, a waste liquid tank 11, and first to third pipes 12-14.
  • the pipe 14 may be omitted. In that case, a die head is connected to the end of the pipe 13.
  • the storage tank 6 stores a coating liquid used for coating.
  • the storage tank 6 is connected to the suction port of the supply pump 8 via the first pipe 12.
  • the fino letter 7 is provided in the middle of the first pipe 12.
  • the discharge port of the supply pump 8 is connected to the die head 9 via the second pipe 13.
  • the die head 9 has a manifold 9 a continuous with the second pipe 13 and a slit nozzle 9 b that opens downward from the manifold 9 a. Yes.
  • the slit width a of slit Nozure 9b is smaller than the diameter of the manifold 9a.
  • the tray 10 is disposed below the die head 9 so as to receive the coating liquid falling from the die head 9.
  • the die head 9 and the tray 10 are connected to the waste liquid tank 11 via the third pipe 14.
  • first to third pipes 12, 13, and 14 for example, resin pipes, stainless steel pipes, or metal pipes whose inner surfaces are coated with resin can be used.
  • the coating liquid stored in the storage tank 6 is driven from the storage tank 6 through the first pipe 12 and the second pipe 13 by driving the supply pump 8. Supplied to 9.
  • the coating liquid passes through the filter 7 while flowing through the first pipe 12.
  • foreign matters such as dust mixed in the coating liquid are removed by the filter 7.
  • the coating liquid supplied to the die head 9 flows in a curtain shape from the slit nozzle 9b.
  • the excess coating liquid supplied to the die head 9 and the coating liquid not supplied to the coating flowing out from the die head 9 are returned to the waste liquid tank 11 through the third pipe 14.
  • the coating apparatus 2 is connected to the cleaning mechanism 3 via the cleaning pipe 20.
  • the downstream end of the cleaning pipe 20 is connected to the second pipe 13 via the switching valve 21.
  • the switching valve 21 is positioned between the die head 9 and the supply pump 8.
  • the position of the switching valve 21 is limited between the die head 9 and the supply pump 8.
  • a switching valve 21 may be provided either at a position Pl between the supply pump 8 and the filter 7 or at a position P2 between the filter 7 and the storage tank 6.
  • the cleaning unit 4 of the cleaning mechanism 3 has a plurality of, for example, four solvent tanks 22a, 22b, 22c, and 22d. Of course, the number of solvent tanks is not limited to four.
  • the solvent tanks 22a, 22b, 22c and 22df are connected in parallel to the upstream portion of the solvent supply pipe 24 through three-way cock type switching valves 23a, 23b, 23c and 23d, respectively.
  • the solvent tanks 22a, 22b, 22c, and 22d contain first to fourth solvents of different types. Specifically, the first to fourth solvents become more compatible with the coating solution as they move from the solvent tank 22d located on the most upstream side to the solvent supply pipe 24 to the solvent tank 22a located on the downstream side. It's getting higher. In other words, the first to fourth solvents have higher detergency as they move from the solvent tank 22a located on the most downstream side to the solvent supply pipe 24 to the solvent tank 22d located on the upstream side. Therefore, the first solvent stored in the first solvent tank 22a has the highest compatibility with the coating solution, and the fourth solvent stored in the fourth solvent tank 22d has the highest detergency.
  • the switching / norebs 23a, 23b, 23c, 23di are provided at positions corresponding to the upper portions of the melting lj tanks 22a, 22b, 22c, 22d, respectively.
  • the switching valves 23a, 23b, 23c, and 23d By opening and closing the switching valves 23a, 23b, 23c, and 23d, the first to fourth solvents can be selected and supplied to the solvent supply pipe 24. That is, the first to fourth solvents to be supplied to the solvent supply pipe 24 can be sequentially switched from those having high compatibility with the coating solution to those having high cleaning properties.
  • the switching valves 23a, 23b, 23c, and 23d may be automatically operated by an operation signal from the outside, or may be manually operated. At this time, whether or not to use the switching valves 23a, 23b, 23c, and 23d that are activated by an external operation signal, or whether to use the switching valves 23a, 23b, 23c, and 23d that are activated by an artificial operation is applied. It is selected as appropriate based on the specifications of the construction system 1. [0038] A load cell 25 is provided at the bottom of each solvent tank 22a, 22b, 22c, 22d. The load cell 25 individually measures the weights of the first to fourth solvents stored in the solvent tanks 22a, 22b, 22c, and 22d.
  • Solvent weight control means controlling the amount of solvent that flows within a certain period of time. Specifically, since the first to fourth solvents used for cleaning the coating apparatus 2 are generally expensive, the flow rate within a certain time is limited. For this reason, the load cell 25 is used to monitor the flow rates of the first to fourth solvents.
  • the solvent supply pipe 24 is connected to the upstream end of the cleaning pipe 20.
  • a flow control valve 27, a flow meter 28 and a solvent filter 29 are provided in the middle of the solvent supply pipe 24.
  • the flow rate control valve 27 controls the flow rates of the first to fourth solvents sent from the solvent tanks 22a, 22b, 22c, 22d to the solvent supply pipe 24. The presence of the flow control valve 27 adjusts the flow rates of the first to fourth solvents so as to eliminate the variation in cleaning.
  • the flow meter 28 is located downstream of the solvent supply pipe 24 with respect to the flow control valve 27.
  • the flow meter 28 measures the flow rates of the first to fourth solvents flowing through the solvent supply pipe 24 and feeds back to the flow control valve 27.
  • the solvent filter 29 is positioned downstream of the solvent supply pipe 24 with respect to the flow meter 28.
  • the solvent filter 29 is for removing foreign substances such as dust from the first to fourth solvents that have passed through the flow meter 28.
  • the first to fourth solvents filtered by the solvent filter 29 are supplied from the cleaning pipe 20 to the second pipe 13 of the coating apparatus 2 through the switching valve 21.
  • the first to fourth solvents supplied to the coating apparatus 2 are sequentially switched from the highly compatible first solvent to the highly washable fourth solvent.
  • the drying unit 5 includes, for example, a drying gas tank 31, a gas supply pipe 32, a flow rate control valve 33, and a gas flow meter 34.
  • the drying gas tank 31 stores drying gas for drying the inside of the first to third pipes 12 to 14 of the coating apparatus 2 and the inside of the die head 9. For example, nitrogen is used as the drying gas.
  • the gas supply pipe 32 is connected between the drying gas tank 31 and the upstream end of the solvent supply pipe 24.
  • a switching valve 35 is provided at a connection portion between the gas supply pipe 32, the solvent supply pipe 24, and the cleaning pipe 20. Is provided.
  • the switching valve 35 switches between the first position that connects between the solvent supply pipe 24 and the cleaning pipe 20, and the second position that connects between the cleaning pipe 20 and the gas supply pipe 32. It ’s like that. Therefore, when the switching valve 35 is switched to the second position, the drying gas stored in the drying gas tank 31 is transferred from the gas supply pipe 32 via the switching valve 35 and the cleaning pipe 20 to the second position of the coating apparatus 2. Supply to pipe 1 3.
  • This cleaning method is divided into a cleaning process using first and fourth solvents and a drying process using a dry gas.
  • the drying process is performed after the cleaning process.
  • the cleaning step is performed by supplying the first to fourth solvent stored in the first to fourth solvent tanks 22a, 22b, 22c, and 22d to the coating apparatus 2. Specifically, first, the switching valve 23 a corresponding to the first solvent tank 22 a is opened, and the first solvent in the first solvent tank 22 a is sent to the solvent supply pipe 24.
  • the flow rate of the first solvent flowing through the solvent supply pipe 24 is measured by the flow meter 28. Based on this measurement result, the operator operates the flow control valve 27 to adjust the flow rate of the first solvent flowing through the solvent supply pipe 24 to a predetermined value.
  • the work to adjust the flow rate of the first solvent can be automatically performed by feedback from the flow meter 28 by providing a control unit in the flow control valve 27.
  • the first solvent whose flow rate has been adjusted passes through the solvent filter 29 and reaches the switching banlev 35.
  • the switching valve 35 is switched to the first position. For this reason, the first solvent is supplied from the solvent supply pipe 24 to the second pipe 13 of the coating apparatus 2 through the switching valve 21.
  • the coating liquid used during coating remains in the first and second pipes 13 and 14 of the coating apparatus 2 and in the manifold 9a inside the die head 9.
  • the first solvent supplied to the second pipe 13 flows from the second pipe 13 toward the die head 9 and the first pipe 12 while extruding the coating liquid remaining in the coating apparatus 2.
  • the first solvent containing the coating liquid flows back toward the storage tank 6. Therefore, in this embodiment, as shown in FIG. 1, the storage tank 6 is replaced with the waste liquid can 15 prior to cleaning of the coating apparatus 2.
  • the one solvent that has reached the first pipe 12 sends out the coating liquid remaining in the first pipe 12 to the waste liquid can 15.
  • the first solvent that has reached the die head 9 flows into the tray 10 and the third pipe 14, and remains in the tray 10 and the third pipe 14 to send out the coating liquid to the waste liquid tank 11. This completes the first stage of the cleaning process.
  • the switching valve 23a corresponding to the first solvent tank 22a is closed, and the switching valve 23b corresponding to the second solvent tank 22b is opened.
  • the second solvent is supplied to the coating apparatus 2 via the solvent supply pipe 24 and the cleaning pipe 20.
  • the process of the second solvent flow is the same as the first solvent. Therefore, the second solvent supplied to the coating apparatus 2 sends the first solvent to the waste liquid can 15 and the waste liquid tank 11. This completes the second stage of the cleaning process.
  • the third stage of the cleaning process using the third solvent in the third storage tank 22c and the fourth stage of the cleaning process using the fourth solvent in the fourth storage tank 22d are continued. Done.
  • the third and fourth solvent flow processes are the same as those of the first solvent. Therefore, the third solvent sends the second solvent to the waste liquid can 15 and the waste liquid tank 11. Similarly, the fourth solvent sends the third solvent to the waste liquid can 15 and the waste liquid tank 11.
  • the first solvent used in the first stage of the cleaning process is highly compatible with the coating solution. Therefore, the coating liquid can be effectively pushed out from the coating apparatus 2. As a result, the occurrence of a solvent shock can be suppressed.
  • the 4th solvent is less compatible with the coating solution, but has a higher detergency than the 1st solvent. Therefore, the inside of the first to third pipes 12-14 and the inside of the die head 9 can be effectively cleaned. Therefore, it is possible to perform good cleaning with little variation in cleaning in a short time using a small amount of the first and fourth solvents.
  • the process proceeds to a drying process.
  • the switching valve 35 is switched from the first position to the second position. Therefore, the drying gas stored in the drying gas tank 31 is guided from the gas supply pipe 32 to the cleaning pipe 20 via the switching valve 35. Further, the drying gas is supplied from the cleaning pipe 20 to the second pipe 13 of the coating apparatus 2 through the switching valve 21. Dry through gas supply pipe 32 The flow rate of the drying gas is measured by the gas flow meter 34. Based on the measurement result, the operator operates the flow rate control valve 33 to adjust the flow rate of the drying gas flowing through the gas supply pipe 32 to a predetermined value. The operation of adjusting the flow rate of the drying gas can be automated by installing a control unit in the flow rate control valve 33.
  • the drying gas supplied to the coating apparatus 2 flows from the second pipe 13 toward the first pipe 12, the die head 9 and the third pipe 14. As a result, the inside of the first to third pipes 12 14 and the inside of the die head 9 are dried. Therefore, after the coating apparatus 2 is cleaned, the new coating liquid to be used next and the first to fourth solvents used at the time of cleaning are not mixed. Therefore, generation
  • the present invention can be implemented with various modifications within the scope not departing from the gist of the invention which is not specified in the above embodiment.
  • the drying gas and the first, first, and fourth solvents are mixed and sent to the coating apparatus 2 to clean the inside of the first to third pipes 12-14 and the inside of the die head 9.
  • the cleaning solvent used in the coating system 1 having the cleaning mechanism of the present invention is not particularly limited. Therefore, a material having good compatibility with the coating solution is appropriately selected.
  • the main solvent used in the coating solution is a cyclohexanone solvent
  • the solvent ie, the cleaning property
  • the resist coating solution
  • It can be washed with an extrusion pressure of 20 KPa-lOOKPa using a solvent such as PGMEA, PGM AC, or cyclohexanone as low solubility IJ), and has low compatibility with the resist (coating solution).
  • a solvent such as acetone or 2-butanone as the solvent (ie, high cleaning performance, solvent)
  • it can be cleaned at an extrusion pressure of 30 KPa-lOOKPa.
  • the storage tank 6 is replaced with the waste liquid can 15 prior to the cleaning of the coating apparatus 2, but the present invention is not limited to this.
  • washing may be carried out by providing coating f night norebu 40, 41, 42 in front of the storage tank 6 and opening and closing the vanolev 40-42.
  • the switching valve 21 is operated to open the cleaning pipe 20 and the second pipe 13. In this state, the cleaning solvent is sent to clean the die head 9 and the like.
  • the switching valve 21 is operated to open the cleaning pipe 20 and the first pipe 12. Also Open valves 41 and 42 and close valve 40. In this state, the cleaning solvent is sent to clean the filter 7 and the supply pump 8. The cleaning solvent at this time passes through valve 41 or 42.
  • valve 40 is opened, and the valves 41 and 42 are closed.
  • storage tank 6 can be a waste liquid can 1
  • This cleaning method can achieve the same effect even when the switching valve 21 is located at the position P1 or P2.
  • the present invention can be widely used as a processing machine, a processing machine, or a related device that requires color change or material change such as a printing machine, an adhesive processing machine, and a pigment processing machine.

Abstract

An application apparatus (1) which comprises a cleaning mechanism (3) having a piping (12 to 14) in which an application fluid flows, a die head (9) provided in the piping (12 to 14) and a plurality of solvent tanks (22a to 22d) for storing solvents of types different from one another. The cleaning mechanism (3) supplies solvents stored in the above solvent tanks (22a to 22d) to the above piping (12 to 14), in such a manner that a solvent compatible with the above application fluid is first supplied and then it is gradually changed to a solvent having a higher detergency, to thereby clean the inside of the piping (12 to 14) and the inside (9a, 9b) of the die head (9).

Description

明 細 書  Specification
洗浄機構を有する塗工装置、塗工装置の洗浄方法および塗工装置に用 いる洗浄機構  Coating device having cleaning mechanism, cleaning method for coating device, and cleaning mechanism used for coating device
技術分野  Technical field
[0001] 本発明は、塗工液が流れる配管やダイヘッド (die-head)を洗浄する洗浄機構を有す る塗工装置およびこの塗工装置を洗浄する洗浄方法に関する。さらに、本発明は、 塗工装置を洗浄する際に、この塗工装置に洗浄用の溶剤を供給する洗浄機構に関 する。  TECHNICAL FIELD [0001] The present invention relates to a coating apparatus having a cleaning mechanism for cleaning piping and a die-head through which a coating liquid flows, and a cleaning method for cleaning the coating apparatus. Furthermore, the present invention relates to a cleaning mechanism for supplying a cleaning solvent to the coating apparatus when cleaning the coating apparatus.
背景技術  Background art
[0002] 従来、塗工装置を用いて塗工する場合には、グラビアコート (gravure coat),ロール コート (roll coat),スライドコート (slide coat),カーテンコート (curtain coat),エキストノレ 一ジョンコート (extrusion coat)等の色々の方式が用途に応じて用いられている。ェキ ストルージョンコート、カーテンコートおよびスライドコートは、比較的安定した品質の 高い塗工を高速で行うことができる。  [0002] Conventionally, when coating is performed using a coating apparatus, a gravure coat, a roll coat, a slide coat, a curtain coat, and an extra-nozzle coating coat Various systems such as (extrusion coat) are used depending on the application. Extrusion coats, curtain coats and slide coats can be applied at a high speed with relatively stable and high quality.
[0003] これらの方式により塗工する場合は、スリットノズノレ (slit nozzle)を有するダイヘッドが 使用されている。ダイヘッドは、配管を介して塗工液が貯えられた貯蔵タンクに接続さ れている。この配管の途中に塗工液をダイヘッドに向けて送り出すポンプや塗工液を 濾過するフィルター (filter)が設けられている。塗工装置用の配管としては、例えば榭 脂製のパイプ (pipe)、ステンレス (stainless steel)製のパイプ、あるいは内面を樹脂コー ト (resin-coating)した金属製パイプが用レ、られてレ、る。  [0003] When coating by these methods, a die head having a slit nozzle is used. The die head is connected to a storage tank in which the coating liquid is stored via a pipe. A pump for feeding the coating liquid toward the die head and a filter for filtering the coating liquid are provided in the middle of the pipe. As piping for the coating device, for example, a pipe made of resin, a pipe made of stainless steel, or a metal pipe whose inner surface is resin-coated is used. RU
[0004] 塗工液の粘度 (viscosity)が変わったり、塗工液を切り換えたりする際には、ダイへッ ドゃ配管の内部を洗浄する必要がある。特に、塗工量の幅方向の均一化を図るため には、スリットノズルの開口端やマ二ホールド (manifold)のような複雑な構造部分を洗 浄して調整する必要がある。カロえて、貯蔵タンクに貯えられた塗工液をダイヘッドに 導く配管は、内径が小さいとともに、複雑な経路を通して引き回されていることが多い 。そのため、ダイヘッドや配管の洗浄作業は、長時間に亘つて入念に行われている。  [0004] When the viscosity (viscosity) of the coating solution is changed or the coating solution is switched, it is necessary to clean the inside of the piping at the die head. In particular, in order to make the coating amount uniform in the width direction, it is necessary to clean and adjust complicated structures such as the slit nozzle opening end and manifold. The piping that leads the coating liquid stored in the storage tank to the die head has a small inner diameter and is often routed through a complicated path. For this reason, the cleaning work of the die head and the pipe is carefully performed for a long time.
[0005] 塗工液の交換または定期的な清掃を実施する際には、塗工液を抜き出した後、配 管の内部を溶剤で洗浄する方法が採用されている。その他の例としては、次ぎに使 用する塗工液を用いて、使用済みの塗工液を加圧圧送 (pressure feed)により押し出 すことで、塗工液を入れ替える方法が知られている。この場合、洗浄用溶剤または次 の塗工液は、配管内部の容積により適宜の量が吐出され、液置換が行われるように なっている。さらに、ダイヘッドの内部のような構造が複雑な部分は、その都度人手に より分解し、手作業による清掃が行われている。 [0005] When exchanging the coating liquid or performing periodic cleaning, remove the coating liquid and then dispose it. A method of cleaning the inside of the tube with a solvent is employed. As another example, a method is known in which the coating liquid to be used next is replaced by extruding the used coating liquid by pressure feed. . In this case, the cleaning solvent or the next coating liquid is discharged in an appropriate amount depending on the volume inside the pipe, so that liquid replacement is performed. In addition, parts with complex structures such as the interior of the die head are manually disassembled each time and manually cleaned.
[0006] ところで、近年では、塗工液の多様化に伴レ、、塗工液の切り換え時間を短くすること が特に要望されてきている。し力 ながら、上記のように配管の内部やダイヘッドの内 部の清掃に手間が掛かるために、レ、まだに塗工液の切り換えに長時間を要している 。さらに、洗浄時には、異種の塗工液混合や、塗工液と洗浄用溶剤の相溶性  Meanwhile, in recent years, with the diversification of coating liquids, it has been particularly demanded to shorten the switching time of the coating liquid. However, since it takes time to clean the inside of the pipe and the inside of the die head as described above, it still takes a long time to switch the coating liquid. Furthermore, during cleaning, mixing of different coating liquids and compatibility between the coating liquid and the cleaning solvent
(compatibility)を主な原因とするソルベントショック (solvent-shock)が発生している。ソ ルベントショックとは、主に洗浄用溶剤による塗工液起因の凝縮物やゲル (gel)物のよ うな塗工液カス (trash)が生じる現象のことである。  Solvent shock (solvent-shock) occurs mainly due to (compatibility). Solvent shock is a phenomenon in which coating liquid trash such as condensate or gel caused by the cleaning solvent is generated.
[0007] 上記のようなことから、従来より洗浄時の問題を解消するための様々な工夫がなさ れている。例えば日本国特開平 7-132267号公報は、スリットノズノレを有する塗布へ ッド(いわゆるダイヘッド)の内部を容易に且つ効率よく洗浄できる洗浄方法を開示し ている。  [0007] Because of the above, various ideas have been made for solving the problem during cleaning. For example, Japanese Patent Application Laid-Open No. 7-132267 discloses a cleaning method capable of easily and efficiently cleaning the inside of a coating head (so-called die head) having a slit nozzle.
[0008] 日本国特開 2003-10767号公報は、ダイヘッドのスリットノズルの先端に残留した 固形化しつつある塗工液を、作業能率の低下を招くことなく完全に除去できるスリット ノズル洗浄方法、および洗浄機構を開示してレ、る。  Japanese Patent Laid-Open No. 2003-10767 discloses a slit nozzle cleaning method capable of completely removing a solidifying coating liquid remaining at the tip of a slit nozzle of a die head without causing a reduction in work efficiency, and A cleaning mechanism is disclosed.
[0009] 日本国特開平 9-85153号公報は、配管洗浄用に金属の塊であるビグ (Pig)を用い るダイコータ (die_coater)塗料洗浄装置を開示している。この装置では、ピグを圧縮気 体によって配管内壁を移動させ、塗料を押し出す。これにより配管洗浄時の塗料ロス を低減するとともに、少量の洗浄溶剤で短時間のうちに効率よく洗浄が行われる。 [0009] Japanese Patent Laid-Open 9-85153 Patent Publication, die coater Ru with biguanide (Pig) is a mass of metal for pipe cleaning (di e _ coa ter) discloses a paint cleaning device. In this device, the pig is moved along the inner wall of the pipe by the compressed gas, and the paint is pushed out. This reduces paint loss during pipe cleaning and enables efficient cleaning in a short time with a small amount of cleaning solvent.
[0010] さらに、 日本国特開昭 63- 256163は、フラッシング処理 (flushing- processing)を行う 塗料移送配管内壁の洗浄方法を開示している。この方法では、配管の内壁を洗浄 するに際して、まず配管の内壁を塗料除去剤を用いて処理し、次いで酸を用いて処 理した後、フラッシング処理をおこなう。さらにその後水置換処理を実行している。 発明の開示 [0010] Further, Japanese Patent Application Laid-Open No. 63-256163 discloses a method of cleaning the inner wall of a paint transfer pipe for performing flushing processing. In this method, when cleaning the inner wall of the pipe, the inner wall of the pipe is first treated with a paint remover, then treated with an acid, and then flushed. After that, water replacement processing is performed. Disclosure of the invention
[0011] 特開平 7-132267号公報に開示された方法では、スリットヘッドの内部を洗浄する に際して、塗布ヘッドにつながる塗布液供給管から該塗布ヘッド内へ洗浄液を供給 している。またこれと共に、この塗布液供給管を通過する洗浄液内に窒素ガス  In the method disclosed in Japanese Patent Laid-Open No. 7-132267, when cleaning the inside of the slit head, a cleaning liquid is supplied into the coating head from a coating liquid supply pipe connected to the coating head. At the same time, nitrogen gas is introduced into the cleaning liquid passing through the coating liquid supply pipe.
(nitrogen gas),アルゴンガス (argon gas)のような不活性ガスを吹き込むことで、洗浄液 流を「気泡流 (bubble flow)」化させる。この気泡により攪拌効果 (agitation effect)が増 加し、微少な隙間等に付着している残留塗布液を洗い流すことができる。しかしなが ら、塗布液との相溶性が良くない洗浄液が使用された際に、ソルベントショックが発生 するという問題がある。  By blowing an inert gas such as (nitrogen gas) or argon gas (argon gas), the cleaning liquid flow is changed to “bubble flow”. These bubbles increase the agitation effect, and the residual coating solution adhering to minute gaps can be washed away. However, there is a problem that a solvent shock occurs when a cleaning solution that is not compatible with the coating solution is used.
[0012] 特開 2003-10767号公報に開示された方法は、スリットノズルの先端に洗浄ノズノレ (nozzle)の射出ロカ エアー (air)を噴射し、残った洗浄液を乾燥除去するものである 。この方法では、配管の内部やダイヘッドのマ二ホールド内部あるいはスリットノズノレ の内部を洗浄することは困難である。  [0012] In the method disclosed in Japanese Patent Application Laid-Open No. 2003-10767, a cleaning nozzle air (air) is sprayed onto the tip of a slit nozzle, and the remaining cleaning liquid is dried and removed. With this method, it is difficult to clean the inside of the pipe, the inside of the die head manifold or the inside of the slit nozzle.
[0013] 特開平 9-85153号公報によると、ビグが圧縮気体によって配管内壁を移動するこ とにより塗料が洗浄されると記載されている。し力しながら、上記のように配管が樹脂 製パイプであったり、内面をフッ素樹脂やシリコーン (silicone)樹脂でコーティングした 金属製パイプである場合に、ピグによりコーティング表面が損傷したり、あるいは樹脂 表面に凹凸が生じてしまレ、、塗工液がより付着し易くなるという問題がある。さらに、ス リットノズルのスリット幅 (slit-gap)が狭い場合には、ビグがスリット部分で詰まる問題が ある。つまりこの装置は、ダイヘッドの内部洗浄には不向きとなる。  [0013] According to Japanese Patent Application Laid-Open No. 9-85153, it is described that the paint is washed by moving the inner wall of the pipe with the compressed gas. However, if the pipe is a resin pipe as described above, or if the inner surface is a metal pipe coated with fluororesin or silicone resin, the coating surface may be damaged by the pig, or the resin There is a problem that unevenness occurs on the surface and the coating liquid is more easily adhered. Furthermore, when the slit width of the slit nozzle (slit-gap) is narrow, there is a problem that the bigg is clogged at the slit portion. That is, this apparatus is not suitable for the internal cleaning of the die head.
[0014] 特開昭 63-256163号公報によると、塗料移送配管内壁を洗浄する際に、まず塗 料用除去剤を用レ、て配管内壁を処理してレ、る。次レ、で酸を用レ、て配管内壁を処理し た後、フラッシング処理をおこなレ、、さらに水置換処理により配管内壁を洗浄している  According to Japanese Patent Laid-Open No. 63-256163, when cleaning the inner wall of the paint transfer pipe, the inner wall of the pipe is first treated with a coating remover. After the inner wall of the pipe is treated with acid, the flushing process is performed and the inner wall of the pipe is washed by water replacement.
[0015] し力 ながら、塗料によっては、最初に処理剤として用いられる塗料用除去剤と洗 浄される塗料に使用した溶剤の相溶性が悪い場合もある。この場合には、ソルベント ショックが発生するのを避けられない。それとともに、最後に水置換処理を実行してい るので、乾燥等に時間が掛かるという問題もある。 [0016] 本発明の目的は、ソルベントショックの発生を抑制し、短時間で洗浄のばらつき[0015] However, depending on the paint, the compatibility of the solvent used in the paint remover used as the treating agent and the paint to be cleaned may be poor. In this case, it is inevitable that a solvent shock will occur. At the same time, since the water replacement process is performed lastly, there is a problem that drying takes time. [0016] An object of the present invention is to suppress the occurrence of a solvent shock and to perform cleaning variations in a short time.
(dispersion)の少ない良好な洗浄ができる塗工装置、塗工装置の洗浄方法および塗 ェ装置に用いる洗浄機構を得ることにある。 The object is to obtain a coating apparatus that can perform good cleaning with less (dispersion), a cleaning method for the coating apparatus, and a cleaning mechanism used in the coating apparatus.
[0017] 上記目的を達成するため、本発明の一つの形態に係る塗工装置は、 In order to achieve the above object, a coating apparatus according to one aspect of the present invention includes:
塗工液が流れる配管と、  Piping through which the coating liquid flows;
前記配管に設けられたダイヘッドと、  A die head provided in the pipe;
互いに異なる種類の溶剤を貯溜する複数の溶剤タンクを有し、前記溶剤タンクに貯 溜された溶剤を、前記塗工液と相溶性が高い溶剤からこの溶剤よりも洗浄性の高い 溶剤(すなわち前記塗工液との相溶性が低レ、溶剤)へ順に切り替えて前記配管に供 給することにより、前記配管の内部および前記ダイヘッドの内部を洗浄する洗浄機構 と、を備えていることを特徴としている。  It has a plurality of solvent tanks for storing different types of solvents, and the solvent stored in the solvent tank is changed from a solvent having higher compatibility with the coating liquid to a solvent having a higher cleaning property than the solvent (that is, the solvent And a washing mechanism for washing the inside of the pipe and the inside of the die head by switching to a low compatibility with the coating liquid in order and supplying the pipe to the pipe. Yes.
[0018] 本発明の一つの形態に係る洗浄方法は、塗工液が流れる配管と、この配管に設け られたダイヘッドと、を備えた塗工装置を洗浄する洗浄方法であって、 [0018] A cleaning method according to one aspect of the present invention is a cleaning method for cleaning a coating apparatus including a pipe through which a coating liquid flows and a die head provided in the pipe.
前記配管に接続される複数の溶剤タンクに互いに異なる種類の溶剤を貯溜し、 前記溶剤タンクに貯溜された溶剤を、前記塗工液と相溶性が高い溶剤からこの溶 剤よりも洗浄性の高レ、溶剤(すなわち前記塗工液との相溶性が低レ、溶剤)へ順に切 り替えて前記配管に供給することで、前記配管の内部および前記ダイヘッドの内部を 洗浄することを特徴としてレヽる。  Solvents of different types are stored in a plurality of solvent tanks connected to the pipe, and the solvent stored in the solvent tank is washed from a solvent having a high compatibility with the coating solution to a higher cleaning property than the solvent. The inside of the pipe and the inside of the die head are washed by sequentially switching to a solvent and a solvent (that is, a solvent having a low compatibility with the coating liquid and supplying the solvent to the pipe). The
[0019] さらに、本発明の一つの形態に係る洗浄機構は、塗工液が流れる配管と、前記配 管に設けられたダイヘッドと、を有する塗工装置に用いる洗浄機構であって、 互いに異なる種類の溶剤を貯溜する複数の溶剤タンクと、 Furthermore, a cleaning mechanism according to one aspect of the present invention is a cleaning mechanism used in a coating apparatus having a pipe through which a coating liquid flows and a die head provided in the pipe, and are different from each other. Multiple solvent tanks for storing different types of solvents;
前記溶剤タンクに貯溜された溶剤を、前記塗工液と相溶性が高い溶剤からこの溶 剤よりも洗浄性の高レ、溶剤(すなわち前記塗工液との相溶性が低レ、溶剤)へ順に切 り替えて前記配管に供給する溶剤供給管と、を具備したことを特徴としている。  The solvent stored in the solvent tank is changed from a solvent having a high compatibility with the coating solution to a solvent having a higher cleaning property than that of the solvent and a solvent (that is, a solvent having a low compatibility with the coating solution). And a solvent supply pipe that is sequentially switched to be supplied to the pipe.
[0020] これらの形態によれば、塗工液と相溶性が高い溶剤力 順次洗浄性の高い溶剤( すなわち前記塗工液との相溶性が低い溶剤)へ切り替えながら洗浄作業が実行され る。このため、ソルベントショックの発生を抑制し、少量の溶剤で洗浄ばらつきの少な い良好な洗浄が短時間にできる。 [0021] 本発明の好ましい形態によると、洗浄機構は、溶剤により洗浄された配管の内部お よびダイヘッドの内部を乾燥させる乾燥部を含んでいる。この構成によれば、洗浄さ れた箇所が乾燥するので、洗浄後に使用する新たな塗工液が洗浄用の溶剤と混じり 合うことがなレ、。よって、ソルベントショックの発生をより確実に抑制できる。 [0020] According to these embodiments, the cleaning operation is performed while switching to a solvent having a high compatibility with the coating solution and a solvent having a high cleaning property (that is, a solvent having a low compatibility with the coating solution). Therefore, the occurrence of solvent shock can be suppressed, and good cleaning with little variation in cleaning can be performed in a short time with a small amount of solvent. According to a preferred embodiment of the present invention, the cleaning mechanism includes a drying unit that dries the inside of the pipe cleaned with the solvent and the inside of the die head. According to this configuration, the cleaned portion is dried, so that a new coating solution used after cleaning cannot be mixed with the cleaning solvent. Therefore, it is possible to more reliably suppress the occurrence of solvent shock.
[0022] 本発明の一つの形態では、洗浄機構内を流れる溶剤の流量を測定する流量計と、 この測定結果に基づいて洗浄機構内を流れる溶剤の流量を制御する流量制御バル ブとをさらに備えていることが好ましい。この構成によれば、配管やダイヘッドを少量 の溶剤を用いて良好に洗浄することができる。  [0022] In one embodiment of the present invention, a flow meter for measuring the flow rate of the solvent flowing in the cleaning mechanism and a flow rate control valve for controlling the flow rate of the solvent flowing in the cleaning mechanism based on the measurement result are further provided. It is preferable to provide. According to this configuration, the pipe and the die head can be cleaned well with a small amount of solvent.
[0023] 本発明の一つの形態では、溶剤タンクは、この溶剤タンクに貯溜される溶剤の重量 を測定するロードセルの上に設けることが望ましい。この構成によれば、ロードセルを 用いて溶剤の流量を監視することができる。よって、配管やダイヘッドを少量の溶剤 を用いて効率良く洗浄することができる。ここで塗工液とは、有機溶媒と顔料からなる ものをいう。顔料粒子が有機溶媒の中で分散された状態になっている。そして「塗工 液と相溶性が高い」とは塗工液中の顔料の分散状態をこわさずに塗工液と混ざりや すレ、ことをレ、う。また「洗浄性が高レ、」とは塗工液中の顔料の分散状態をこわすことが できるほど溶解力が強ぐ壁面に付着した顔料をとる効果が高いことをいう。  [0023] In one embodiment of the present invention, the solvent tank is preferably provided on a load cell for measuring the weight of the solvent stored in the solvent tank. According to this configuration, the flow rate of the solvent can be monitored using the load cell. Therefore, the piping and the die head can be efficiently cleaned using a small amount of solvent. Here, the coating solution refers to a solution composed of an organic solvent and a pigment. The pigment particles are dispersed in an organic solvent. “High compatibility with the coating solution” means that the pigment is mixed with the coating solution without disturbing the dispersion state of the pigment in the coating solution. “High detergency” means that the effect of removing the pigment adhering to the wall surface, whose dissolving power is strong enough to break the dispersion state of the pigment in the coating solution, is high.
図面の簡単な説明  Brief Description of Drawings
[0024] [図 1]図 1は、本発明の一実施形態に係る洗浄機構を有する塗工装置の洗浄時を示 す図である。  FIG. 1 is a diagram illustrating a coating apparatus having a cleaning mechanism according to an embodiment of the present invention during cleaning.
[図 2]図 2は、図 1に示された洗浄機構を有する塗工装置の塗工時を示す概略図であ る。  [FIG. 2] FIG. 2 is a schematic view showing the time of application of the coating apparatus having the cleaning mechanism shown in FIG.
[図 3]図 3は、図 1に示された洗浄機構を有する塗工装置に組み込まれたダイヘッド の正面図である。  FIG. 3 is a front view of the die head incorporated in the coating apparatus having the cleaning mechanism shown in FIG.
[図 4]図 4は、図 3の F4—F4線に沿うダイヘッドの断面図である。  4 is a cross-sectional view of the die head taken along line F4-F4 in FIG.
[図 5]図 5は、図 1に示された洗浄機構を有する塗工装置の洗浄時を示す概略図であ る。  FIG. 5 is a schematic view showing a coating apparatus having the cleaning mechanism shown in FIG. 1 during cleaning.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0025] 以下本発明の実施の形態を、図面を参照して説明する。 [0026] 図 1ないし図 5は、本発明の一実施形態に係る塗工システム 1を開示している。この 塗工システム 1は、例えばカラーフィルター (color filter),液晶材料、感熱記録材料、 経皮吸収製剤のような高精度 ·高精密の塗工が要求される部材の塗工に適している Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 to 5 disclose a coating system 1 according to an embodiment of the present invention. This coating system 1 is suitable for coating materials that require high-precision and high-precision coating, such as color filters, liquid crystal materials, thermal recording materials, and transdermal absorption preparations.
[0027] 図 2に示すように、塗工システム 1は、塗工装置 2と洗浄機構 3とを備えている。洗浄 機構 3は、洗浄部 4と乾燥部 5とを備えている。塗工装置 2は、貯蔵タンク 6、フィルタ 一 Ίヽ供給ポンプ 8、ダイヘッド 9、受け皿 10、廃液槽 11および第 1ないし第 3の配管 12— 14を有している。なお、配管 14は無くてもよい。その場合、配管 13の終端にダ ィヘッドが接続される。 As shown in FIG. 2, the coating system 1 includes a coating device 2 and a cleaning mechanism 3. The cleaning mechanism 3 includes a cleaning unit 4 and a drying unit 5. The coating apparatus 2 has a storage tank 6, a filter-one supply pump 8, a die head 9, a tray 10, a waste liquid tank 11, and first to third pipes 12-14. The pipe 14 may be omitted. In that case, a die head is connected to the end of the pipe 13.
[0028] 貯蔵タンク 6は、塗工に用いる塗工液を貯蔵している。この貯蔵タンク 6は、第 1の配 管 12を介して供給ポンプ 8の吸い込み口に接続されている。フイノレター 7は、第 1の 配管 12の途中に設けられている。供給ポンプ 8の吐出口は、第 2の配管 13を介して ダイヘッド 9に接続されている。  [0028] The storage tank 6 stores a coating liquid used for coating. The storage tank 6 is connected to the suction port of the supply pump 8 via the first pipe 12. The fino letter 7 is provided in the middle of the first pipe 12. The discharge port of the supply pump 8 is connected to the die head 9 via the second pipe 13.
[0029] 図 3および図 4に示すように、ダイヘッド 9は、第 2の配管 13に連なるマ二ホールド 9 aと、マ二ホールド 9aの下方に向けて開口するスリットノズル 9bとを有している。スリット ノズノレ 9bのスリット幅 aは、マ二ホールド 9aの径よりも小さレヽ。受け皿 10は、ダイヘッド 9から落ちる塗工液を受け止めるように、ダイヘッド 9の下方に配置されている。ダイへ ッド 9および受け皿 10は、第 3の配管 14を介して廃液槽 11に接続されてレ、る。  As shown in FIGS. 3 and 4, the die head 9 has a manifold 9 a continuous with the second pipe 13 and a slit nozzle 9 b that opens downward from the manifold 9 a. Yes. The slit width a of slit Nozure 9b is smaller than the diameter of the manifold 9a. The tray 10 is disposed below the die head 9 so as to receive the coating liquid falling from the die head 9. The die head 9 and the tray 10 are connected to the waste liquid tank 11 via the third pipe 14.
[0030] 第 1ないし第 3の配管 12, 13, 14としては、例えば樹脂製パイプ、ステンレス製パイ プあるいは内面を樹脂でコーティングした金属製パイプを用いることができる。  [0030] As the first to third pipes 12, 13, and 14, for example, resin pipes, stainless steel pipes, or metal pipes whose inner surfaces are coated with resin can be used.
[0031] このような塗工装置 2によると、貯蔵タンク 6に貯えられた塗工液は、供給ポンプ 8の 駆動により貯蔵タンク 6から第 1の配管 12および第 2の配管 13を介してダイヘッド 9に 供給される。塗工液は、第 1の配管 12を流れる過程でフィルター 7を通過する。これ により、塗工液に混入したゴミなどの異物がフィルター 7によって除去される。ダイへッ ド 9に供給された塗工液は、スリットノズル 9bからカーテン状に流れる。ダイヘッド 9に 供給された余分な塗工液と、ダイヘッド 9から流れ出た塗工に供しない塗工液は、第 3の配管 14を通って廃液槽 11に戻される。  According to such a coating apparatus 2, the coating liquid stored in the storage tank 6 is driven from the storage tank 6 through the first pipe 12 and the second pipe 13 by driving the supply pump 8. Supplied to 9. The coating liquid passes through the filter 7 while flowing through the first pipe 12. As a result, foreign matters such as dust mixed in the coating liquid are removed by the filter 7. The coating liquid supplied to the die head 9 flows in a curtain shape from the slit nozzle 9b. The excess coating liquid supplied to the die head 9 and the coating liquid not supplied to the coating flowing out from the die head 9 are returned to the waste liquid tank 11 through the third pipe 14.
[0032] 図 2に示すように、塗工装置 2は、洗浄配管 20を介して洗浄機構 3に接続されてい る。本実施の形態では、洗浄配管 20の下流端は、切り替えバルブ 21を介して第 2の 配管 13に接続されている。言い換えると、切り替えバルブ 21は、ダイヘッド 9と供給ポ ンプ 8との間に位置してレ、る。 As shown in FIG. 2, the coating apparatus 2 is connected to the cleaning mechanism 3 via the cleaning pipe 20. The In the present embodiment, the downstream end of the cleaning pipe 20 is connected to the second pipe 13 via the switching valve 21. In other words, the switching valve 21 is positioned between the die head 9 and the supply pump 8.
[0033] この切り替えバルブ 21の位置は、ダイヘッド 9と供給ポンプ 8との間に限らなレ、。例 えば図 1に示すように、供給ポンプ 8とフィルター 7との間の位置 Pl、又はフィルター 7 と貯蔵タンク 6との間の位置 P2のいずれかに切り替えバルブ 21を設けてもよい。  The position of the switching valve 21 is limited between the die head 9 and the supply pump 8. For example, as shown in FIG. 1, a switching valve 21 may be provided either at a position Pl between the supply pump 8 and the filter 7 or at a position P2 between the filter 7 and the storage tank 6.
[0034] 洗浄機構 3の洗浄部 4は、複数例えば 4つの溶剤タンク 22a, 22b, 22c, 22dを有 している。ただし溶剤タンクの数は、もちろん 4つに限られるわけではなレ、。溶剤タン ク 22a, 22b, 22c, 22dfま、夫々三方コック型の切り替えノ ノレブ 23a, 23b, 23c, 23 dを介して溶剤供給管 24の上流部に並列に接続されている。  [0034] The cleaning unit 4 of the cleaning mechanism 3 has a plurality of, for example, four solvent tanks 22a, 22b, 22c, and 22d. Of course, the number of solvent tanks is not limited to four. The solvent tanks 22a, 22b, 22c and 22df are connected in parallel to the upstream portion of the solvent supply pipe 24 through three-way cock type switching valves 23a, 23b, 23c and 23d, respectively.
[0035] 溶剤タンク 22a, 22b, 22c, 22dは、互いに異なる種類の第 1ないし第 4の溶剤を 収容している。具体的には、第 1ないし第 4の溶剤は、溶剤供給管 24に対し最も上流 側に位置する溶剤タンク 22dから下流側に位置する溶剤タンク 22aに移るに従い、塗 ェ液との相溶性が高くなつている。言い換えると、第 1ないし第 4の溶剤は、溶剤供給 管 24に対し最も下流側に位置する溶剤タンク 22aから上流側に位置する溶剤タンク 22dに移るに従い洗浄性が高くなつている。よって、第 1の溶剤タンク 22aに収容され た第 1の溶剤は塗工液との相溶性が最も高ぐ第 4の溶剤タンク 22dに収容された第 4の溶剤は、洗浄性が最も高い。  [0035] The solvent tanks 22a, 22b, 22c, and 22d contain first to fourth solvents of different types. Specifically, the first to fourth solvents become more compatible with the coating solution as they move from the solvent tank 22d located on the most upstream side to the solvent supply pipe 24 to the solvent tank 22a located on the downstream side. It's getting higher. In other words, the first to fourth solvents have higher detergency as they move from the solvent tank 22a located on the most downstream side to the solvent supply pipe 24 to the solvent tank 22d located on the upstream side. Therefore, the first solvent stored in the first solvent tank 22a has the highest compatibility with the coating solution, and the fourth solvent stored in the fourth solvent tank 22d has the highest detergency.
[0036] 切り替え/くノレブ 23a, 23b, 23c, 23diま、夫々溶斉 ljタンク 22a, 22b, 22c, 22dの 上方に対応する位置に設けられている。切り替えバルブ 23a, 23b, 23c, 23dを開 閉することで、第 1ないし第 4の溶剤を選択して溶剤供給管 24に供給することができ る。すなわち、溶剤供給管 24に供給すべき第 1ないし第 4の溶剤を、塗工液との相溶 性が高いものから順次洗浄性の高いものへと切り替えることができる。  [0036] The switching / norebs 23a, 23b, 23c, 23di are provided at positions corresponding to the upper portions of the melting lj tanks 22a, 22b, 22c, 22d, respectively. By opening and closing the switching valves 23a, 23b, 23c, and 23d, the first to fourth solvents can be selected and supplied to the solvent supply pipe 24. That is, the first to fourth solvents to be supplied to the solvent supply pipe 24 can be sequentially switched from those having high compatibility with the coating solution to those having high cleaning properties.
[0037] 切り替えバルブ 23a, 23b, 23c, 23dは、外部からの操作信号によって自動的に 操作してもよいし、あるいは人為的に操作するようにしてもよい。この際、外部からの 操作信号で作動する切り替えバルブ 23a, 23b, 23c, 23dを用いる力、、あるいは人 為的な操作により作動する切り替えバルブ 23a, 23b, 23c, 23dを用いるかに関して は、塗工システム 1の仕様に基づいて適宜選択される。 [0038] 各溶剤タンク 22a, 22b, 22c, 22dの底部にロードセル 25が設けられている。ロー ドセル 25は、溶剤タンク 22a, 22b, 22c, 22dに貯蔵された第 1ないし第 4の溶剤の 重量を個々に計測する。この計測結果に基づき、洗浄のばらつきをなくすため第 1な レ、し第 4の溶剤の重量制御が行われる。溶剤の重量制御とは、一定時間内に流す溶 剤量を制御することを意味する。具体的に述べると、一般に塗工装置 2の洗浄に供 する第 1ないし第 4の溶剤は高価であるため、一定時間内に流す流量を制限している 。そのため、ロードセル 25は第 1ないし第 4の溶剤の流量を監視するために用いられ ている。 [0037] The switching valves 23a, 23b, 23c, and 23d may be automatically operated by an operation signal from the outside, or may be manually operated. At this time, whether or not to use the switching valves 23a, 23b, 23c, and 23d that are activated by an external operation signal, or whether to use the switching valves 23a, 23b, 23c, and 23d that are activated by an artificial operation is applied. It is selected as appropriate based on the specifications of the construction system 1. [0038] A load cell 25 is provided at the bottom of each solvent tank 22a, 22b, 22c, 22d. The load cell 25 individually measures the weights of the first to fourth solvents stored in the solvent tanks 22a, 22b, 22c, and 22d. Based on the measurement results, weight control of the first and fourth solvents is performed to eliminate variations in cleaning. Solvent weight control means controlling the amount of solvent that flows within a certain period of time. Specifically, since the first to fourth solvents used for cleaning the coating apparatus 2 are generally expensive, the flow rate within a certain time is limited. For this reason, the load cell 25 is used to monitor the flow rates of the first to fourth solvents.
[0039] 溶剤供給管 24は、洗浄配管 20の上流端に接続されている。溶剤供給管 24の途中 に流量制御バルブ 27、流量計 28および溶剤フィルター 29が設けられてレ、る。  The solvent supply pipe 24 is connected to the upstream end of the cleaning pipe 20. A flow control valve 27, a flow meter 28 and a solvent filter 29 are provided in the middle of the solvent supply pipe 24.
[0040] 流量制御バルブ 27は、溶剤タンク 22a, 22b, 22c, 22dから溶剤供給管 24に送ら れる第 1ないし第 4の溶剤の流量を制御する。この流量制御バルブ 27の存在により、 洗浄のばらつきを解消し得るように第 1ないし第 4の溶剤の流量が調整される。  [0040] The flow rate control valve 27 controls the flow rates of the first to fourth solvents sent from the solvent tanks 22a, 22b, 22c, 22d to the solvent supply pipe 24. The presence of the flow control valve 27 adjusts the flow rates of the first to fourth solvents so as to eliminate the variation in cleaning.
[0041] 流量計 28は、流量制御バルブ 27よりも溶剤供給管 24の下流に位置している。流 量計 28は、溶剤供給管 24の内部を流れる第 1ないし第 4の溶剤の流量を計測し、流 量制御バルブ 27にフィードバックする。  The flow meter 28 is located downstream of the solvent supply pipe 24 with respect to the flow control valve 27. The flow meter 28 measures the flow rates of the first to fourth solvents flowing through the solvent supply pipe 24 and feeds back to the flow control valve 27.
[0042] 溶剤フィルター 29は、流量計 28よりも溶剤供給管 24の下流に位置している。溶剤 フィルター 29は、流量計 28を通過した第 1ないし第 4の溶剤中からゴミなどの異物を 取り除くためのものである。溶剤フィルター 29により濾過された第 1ないし第 4の溶剤 は、洗浄配管 20から切り替えバルブ 21を介して塗工装置 2の第 2の配管 13に供給さ れる。塗工装置 2に供給される第 1ないし第 4の溶剤は、相溶性の高い第 1の溶剤か ら洗浄性の高い第 4の溶剤に順次切り替えられる。  The solvent filter 29 is positioned downstream of the solvent supply pipe 24 with respect to the flow meter 28. The solvent filter 29 is for removing foreign substances such as dust from the first to fourth solvents that have passed through the flow meter 28. The first to fourth solvents filtered by the solvent filter 29 are supplied from the cleaning pipe 20 to the second pipe 13 of the coating apparatus 2 through the switching valve 21. The first to fourth solvents supplied to the coating apparatus 2 are sequentially switched from the highly compatible first solvent to the highly washable fourth solvent.
[0043] 一方、前記乾燥部 5は、例えば乾燥用ガスタンク 31、ガス供給管 32、流量制御バ ルブ 33およびガス流量計 34を備えている。乾燥用ガスタンク 31は、塗工装置 2の第 1ないし第 3の配管 12— 14の内部およびダイヘッド 9の内部を乾燥させるための乾燥 用ガスを貯蔵している。乾燥用ガスとしては、例えば窒素を用いている。ガス供給管 3 2は、乾燥用ガスタンク 31と前記溶剤供給管 24の上流端との間を接続している。  On the other hand, the drying unit 5 includes, for example, a drying gas tank 31, a gas supply pipe 32, a flow rate control valve 33, and a gas flow meter 34. The drying gas tank 31 stores drying gas for drying the inside of the first to third pipes 12 to 14 of the coating apparatus 2 and the inside of the die head 9. For example, nitrogen is used as the drying gas. The gas supply pipe 32 is connected between the drying gas tank 31 and the upstream end of the solvent supply pipe 24.
[0044] ガス供給管 32と溶剤供給管 24と洗浄配管 20との接続部分に切り替えバルブ 35が 設けられている。切り替えバルブ 35は、溶剤供給管 24と洗浄配管 20との間を接続 する第 1のポジションと、洗浄配管 20とガス供給管 32との間を接続する第 2のポジシ ヨンとのいずれかに切り替わるようになつている。そのため、切り替えバルブ 35が第 2 のポジションに切り替わると、乾燥用ガスタンク 31に貯えられた乾燥用ガスがガス供 給管 32から切り替えバルブ 35および洗浄配管 20を介して塗工装置 2の第 2の配管 1 3に供給される。 [0044] A switching valve 35 is provided at a connection portion between the gas supply pipe 32, the solvent supply pipe 24, and the cleaning pipe 20. Is provided. The switching valve 35 switches between the first position that connects between the solvent supply pipe 24 and the cleaning pipe 20, and the second position that connects between the cleaning pipe 20 and the gas supply pipe 32. It ’s like that. Therefore, when the switching valve 35 is switched to the second position, the drying gas stored in the drying gas tank 31 is transferred from the gas supply pipe 32 via the switching valve 35 and the cleaning pipe 20 to the second position of the coating apparatus 2. Supply to pipe 1 3.
[0045] 次に、塗工装置 2を洗浄する方法について説明する。  [0045] Next, a method for cleaning the coating apparatus 2 will be described.
[0046] この洗浄方法は、第 1一第 4の溶剤を用いた洗浄工程と、乾燥ガスを用いた乾燥ェ 程とに分かれる。乾燥工程は、洗浄工程の後に行われる。  [0046] This cleaning method is divided into a cleaning process using first and fourth solvents and a drying process using a dry gas. The drying process is performed after the cleaning process.
[0047] 洗浄工程は、第 1ないし第 4の溶剤タンク 22a, 22b, 22c, 22dに貯蔵された第 1一 第 4の溶剤を塗工装置 2に供給することにより行われる。具体的には、まず最初に第 1の溶剤タンク 22aに対応する切り替えバルブ 23aを開き、第 1の溶剤タンク 22a内の 第 1の溶剤を溶剤供給管 24に送り出す。  [0047] The cleaning step is performed by supplying the first to fourth solvent stored in the first to fourth solvent tanks 22a, 22b, 22c, and 22d to the coating apparatus 2. Specifically, first, the switching valve 23 a corresponding to the first solvent tank 22 a is opened, and the first solvent in the first solvent tank 22 a is sent to the solvent supply pipe 24.
[0048] 溶剤供給管 24を流れる第 1の溶剤の流量は、流量計 28により計測される。この計 測結果に基づき、オペレータは流量制御バルブ 27を操作し、溶剤供給管 24を流れ る第 1の溶剤の流量を予め決められた値に調整する。第 1の溶剤の流量を調整する 作業は、流量制御バルブ 27に制御部を設けることで、流量計 28からのフィードバック により自動ィ匕してもよレ、。  [0048] The flow rate of the first solvent flowing through the solvent supply pipe 24 is measured by the flow meter 28. Based on this measurement result, the operator operates the flow control valve 27 to adjust the flow rate of the first solvent flowing through the solvent supply pipe 24 to a predetermined value. The work to adjust the flow rate of the first solvent can be automatically performed by feedback from the flow meter 28 by providing a control unit in the flow control valve 27.
[0049] 流量が調整された第 1の溶剤は、溶剤フィルター 29を通過するとともに切り替えバ ノレブ 35に到達する。洗浄工程では、切り替えバルブ 35は第 1のポジションに切り替 わっている。このため、第 1の溶剤は、溶剤供給管 24から切り替えバルブ 21を介して 塗工装置 2の第 2の配管 13に供給される。  [0049] The first solvent whose flow rate has been adjusted passes through the solvent filter 29 and reaches the switching banlev 35. In the cleaning process, the switching valve 35 is switched to the first position. For this reason, the first solvent is supplied from the solvent supply pipe 24 to the second pipe 13 of the coating apparatus 2 through the switching valve 21.
[0050] 塗工時に使用された塗工液は、塗工装置 2の第 1および第 2の配管 13, 14の内部 、ダイヘッド 9の内部のマ二ホールド 9aに残留している。第 2の配管 13に供給された 第 1の溶剤は、塗工装置 2に残留する塗工液を押し出しながら第 2の配管 13からダイ ヘッド 9および第 1の配管 12に向けて流れる。この際、第 1の配管 12では、塗工液を 含む第 1の溶剤が貯蔵タンク 6に向けて逆流する。従って、本実施形態では、図 1に 示すように、塗工装置 2の洗浄に先立って貯蔵タンク 6を廃液缶 15に置き換えてレ、る [0051] 第 1の配管 12に達した 1の溶剤は、第 1の配管 12内に残っている塗工液を廃液缶 15に送り出す。ダイヘッド 9に達した第 1の溶剤は、受け皿 10や第 3の配管 14に流 入し、受け皿 10および第 3の配管 14内に残ってレ、る塗工液を廃液槽 11に送り出す 。これにより洗浄工程の第 1段階が終了する。 [0050] The coating liquid used during coating remains in the first and second pipes 13 and 14 of the coating apparatus 2 and in the manifold 9a inside the die head 9. The first solvent supplied to the second pipe 13 flows from the second pipe 13 toward the die head 9 and the first pipe 12 while extruding the coating liquid remaining in the coating apparatus 2. At this time, in the first pipe 12, the first solvent containing the coating liquid flows back toward the storage tank 6. Therefore, in this embodiment, as shown in FIG. 1, the storage tank 6 is replaced with the waste liquid can 15 prior to cleaning of the coating apparatus 2. The one solvent that has reached the first pipe 12 sends out the coating liquid remaining in the first pipe 12 to the waste liquid can 15. The first solvent that has reached the die head 9 flows into the tray 10 and the third pipe 14, and remains in the tray 10 and the third pipe 14 to send out the coating liquid to the waste liquid tank 11. This completes the first stage of the cleaning process.
[0052] 引き続いて、第 1の溶剤タンク 22aに対応する切り替えバルブ 23aを閉じるとともに、 第 2の溶剤タンク 22bに対応する切り替えバルブ 23bを開く。これにより、第 2の溶剤 が溶剤供給管 24、洗浄配管 20を介して塗工装置 2に供給される。第 2の溶剤の流れ の過程は、第 1の溶剤と同様である。そのため、塗工装置 2に供給された第 2の溶剤 は、第 1の溶剤を廃液缶 15および廃液槽 11に送り出す。これにより洗浄工程の第 2 段階が終了する。  [0052] Subsequently, the switching valve 23a corresponding to the first solvent tank 22a is closed, and the switching valve 23b corresponding to the second solvent tank 22b is opened. As a result, the second solvent is supplied to the coating apparatus 2 via the solvent supply pipe 24 and the cleaning pipe 20. The process of the second solvent flow is the same as the first solvent. Therefore, the second solvent supplied to the coating apparatus 2 sends the first solvent to the waste liquid can 15 and the waste liquid tank 11. This completes the second stage of the cleaning process.
[0053] この後、第 3の貯蔵タンク 22c内の第 3の溶剤を用いる洗浄工程の第 3段階および 第 4の貯蔵タンク 22d内の第 4の溶剤を用いる洗浄工程の第 4段階が連続して行わ れる。第 3および第 4の溶剤の流れの過程は、前記第 1の溶剤と同様である。そのた め、第 3の溶剤は、第 2の溶剤を廃液缶 15および廃液槽 11に送り出す。同様に、第 4の溶剤は、第 3の溶剤を廃液缶 15および廃液槽 11に送り出す。  [0053] Thereafter, the third stage of the cleaning process using the third solvent in the third storage tank 22c and the fourth stage of the cleaning process using the fourth solvent in the fourth storage tank 22d are continued. Done. The third and fourth solvent flow processes are the same as those of the first solvent. Therefore, the third solvent sends the second solvent to the waste liquid can 15 and the waste liquid tank 11. Similarly, the fourth solvent sends the third solvent to the waste liquid can 15 and the waste liquid tank 11.
[0054] 洗浄工程の第 1段階で用いる第 1の溶剤は、塗工液との相溶性が高い。よって、塗 ェ液を塗工装置 2から効果的に押し出すことができる。これにより、ソルベントショック の発生を抑制することができる。一方、第 4溶剤は塗工液との相溶性は低いものの、 第 1の溶剤よりも洗浄性が高レ、。このため、第 1ないし第 3の配管 12— 14の内部およ びダイヘッド 9の内部の洗浄を効果的に行うことができる。したがって、少量の第 1な レ、し第 4の溶剤を用いて洗浄ばらつきの少ない良好な洗浄を短時間のうちに実行で きる。  [0054] The first solvent used in the first stage of the cleaning process is highly compatible with the coating solution. Therefore, the coating liquid can be effectively pushed out from the coating apparatus 2. As a result, the occurrence of a solvent shock can be suppressed. On the other hand, the 4th solvent is less compatible with the coating solution, but has a higher detergency than the 1st solvent. Therefore, the inside of the first to third pipes 12-14 and the inside of the die head 9 can be effectively cleaned. Therefore, it is possible to perform good cleaning with little variation in cleaning in a short time using a small amount of the first and fourth solvents.
[0055] 溶剤による洗浄工程が終了すると、乾燥工程に移行する。乾燥工程では、切り替え バルブ 35が第 1のポジションから第 2のポジションに切り替わつている。このため、乾 燥用ガスタンク 31に貯えられた乾燥用ガスがガス供給管 32から切り替えバルブ 35を 介して洗浄配管 20に導かれる。さらに、乾燥用ガスは、洗浄配管 20から切り替えバ ルブ 21を介して塗工装置 2の第 2の配管 13に供給される。ガス供給管 32を流れる乾 燥用ガスの流量は、ガス流量計 34によって計測される。この計測結果に基づき、ォ ペレータは流量制御バルブ 33を操作し、ガス供給管 32を流れる乾燥用ガスの流量 を予め決められた値に調整する。乾燥用ガスの流量を調整する作業は、流量制御バ ルブ 33に制御部を設けることで自動化してもょレ、。 [0055] When the cleaning process with the solvent is completed, the process proceeds to a drying process. In the drying process, the switching valve 35 is switched from the first position to the second position. Therefore, the drying gas stored in the drying gas tank 31 is guided from the gas supply pipe 32 to the cleaning pipe 20 via the switching valve 35. Further, the drying gas is supplied from the cleaning pipe 20 to the second pipe 13 of the coating apparatus 2 through the switching valve 21. Dry through gas supply pipe 32 The flow rate of the drying gas is measured by the gas flow meter 34. Based on the measurement result, the operator operates the flow rate control valve 33 to adjust the flow rate of the drying gas flowing through the gas supply pipe 32 to a predetermined value. The operation of adjusting the flow rate of the drying gas can be automated by installing a control unit in the flow rate control valve 33.
[0056] 塗工装置 2に供給された乾燥用ガスは、第 2の配管 13から第 1の配管 12、ダイへッ ド 9および第 3の配管 14に向けて流れる。これにより、第 1ないし第 3の配管 12 14 の内部およびダイヘッド 9の内部が乾燥する。そのため、塗工装置 2を洗浄した後、 次に使用する新たな塗工液と洗浄時に用いた第 1ないし第 4の溶剤が混合されること がない。よって、ソルベントショックの発生をさらに抑制できる。  The drying gas supplied to the coating apparatus 2 flows from the second pipe 13 toward the first pipe 12, the die head 9 and the third pipe 14. As a result, the inside of the first to third pipes 12 14 and the inside of the die head 9 are dried. Therefore, after the coating apparatus 2 is cleaned, the new coating liquid to be used next and the first to fourth solvents used at the time of cleaning are not mixed. Therefore, generation | occurrence | production of solvent shock can further be suppressed.
[0057] 本発明は上記実施の形態に特定されるものではなぐ発明の主旨を逸脱しない範 囲内で種々変形して実施可能である。例えば洗浄工程において、乾燥用ガスと第 1 一第 4の溶剤とを混合して塗工装置 2に送り込み、第 1ないし第 3の配管 12— 14の内 部およびダイヘッド 9の内部を洗浄するようにしてもょレ、。  [0057] The present invention can be implemented with various modifications within the scope not departing from the gist of the invention which is not specified in the above embodiment. For example, in the cleaning process, the drying gas and the first, first, and fourth solvents are mixed and sent to the coating apparatus 2 to clean the inside of the first to third pipes 12-14 and the inside of the die head 9. Anyway.
[0058] さらに、本発明の洗浄機構を有する塗工システム 1に使用される洗浄用溶剤は特に 限定されるものではなレ、。よって、塗工液と相溶性が良いものが適宜選択される。例 えば塗工液に用いられているメイン (main)溶剤がシクロへキサノン (cyclohexanone)溶 剤の場合には、レジスト (resist) (塗工液)との相溶性が高い溶剤(すなわち洗浄性が 低い溶斉 IJ)として PGMEA、 PGM AC,またはシクロへキサノンなどの溶剤を用いて、 20KPa— lOOKPaの押し出し圧力で洗浄可能であり、さらに、レジスト(塗工液)との 相溶性が低レ、溶剤(すなわち洗浄性が高レ、溶剤)としてアセトンまたは 2-ブタノンな どの溶剤を用いて、 30KPa— lOOKPaの押し出し圧力で洗浄可能である。  [0058] Further, the cleaning solvent used in the coating system 1 having the cleaning mechanism of the present invention is not particularly limited. Therefore, a material having good compatibility with the coating solution is appropriately selected. For example, when the main solvent used in the coating solution is a cyclohexanone solvent, the solvent (ie, the cleaning property) is highly compatible with the resist (coating solution). It can be washed with an extrusion pressure of 20 KPa-lOOKPa using a solvent such as PGMEA, PGM AC, or cyclohexanone as low solubility IJ), and has low compatibility with the resist (coating solution). Using a solvent such as acetone or 2-butanone as the solvent (ie, high cleaning performance, solvent), it can be cleaned at an extrusion pressure of 30 KPa-lOOKPa.
[0059] 上記実施の形態では、塗工装置 2の洗浄に先立って貯蔵タンク 6を廃液缶 15に置 き換えるようにしたが、本発明はこれに限定されない。例えば図 1に示すように、貯蔵 タンク 6の手前に塗工 f夜ノ ノレブ 40、 41 , 42を設け、バノレブ 40一 42を開閉することで 洗净を行ってもよい。  [0059] In the above embodiment, the storage tank 6 is replaced with the waste liquid can 15 prior to the cleaning of the coating apparatus 2, but the present invention is not limited to this. For example, as shown in FIG. 1, washing may be carried out by providing coating f night norebu 40, 41, 42 in front of the storage tank 6 and opening and closing the vanolev 40-42.
[0060] 具体的には、まず切り替えバルブ 21を操作し、洗浄配管 20と第 2の配管 13を開通 させる。この状態で洗浄溶剤を送り、ダイヘッド 9などを洗浄する。  Specifically, first, the switching valve 21 is operated to open the cleaning pipe 20 and the second pipe 13. In this state, the cleaning solvent is sent to clean the die head 9 and the like.
[0061] 次に切り替えバルブ 21を操作し、洗浄配管 20と第 1の配管 12を開通させる。また バルブ 41、 42を開放、バルブ 40を閉鎖する。この状態で洗浄溶剤を送り、フィルタ 一 7、供給ポンプ 8などを洗浄する。このときの洗浄溶剤は、バルブ 41又は 42を通りNext, the switching valve 21 is operated to open the cleaning pipe 20 and the first pipe 12. Also Open valves 41 and 42 and close valve 40. In this state, the cleaning solvent is sent to clean the filter 7 and the supply pump 8. The cleaning solvent at this time passes through valve 41 or 42.
、廃液槽 11に回収される。 It is collected in the waste liquid tank 11.
[0062] 最後にバルブ 40を開放し、バルブ 41、 42を閉鎖する。また貯蔵タンク 6を廃液缶 1[0062] Finally, the valve 40 is opened, and the valves 41 and 42 are closed. Also, storage tank 6 can be a waste liquid can 1
5に置き換える。この状態で洗浄溶剤を送り、第 1の配管を洗浄する。このときの洗浄 溶剤は、バルブ 40を通り、廃液缶 15に回収される。これにより塗工装置 2の全ての配 管 12— 14を洗浄することができる。 Replace with 5. In this state, send cleaning solvent to clean the first pipe. The cleaning solvent at this time passes through the valve 40 and is collected in the waste liquid can 15. As a result, all the pipes 12-14 of the coating apparatus 2 can be cleaned.
[0063] なおこの洗浄方法によっても、切り替えバルブ 21が、 P1又は P2の位置にあつたと しても同様の効果が達成できる。 [0063] This cleaning method can achieve the same effect even when the switching valve 21 is located at the position P1 or P2.
産業上の利用可能性  Industrial applicability
[0064] 本発明の活用例として印刷機械や粘着加工機、顔料加工機等の色替えや材料替 えが必要とする加工機または加工器機あるいは関連機器等幅広く利用できる。 [0064] As an application example of the present invention, it can be widely used as a processing machine, a processing machine, or a related device that requires color change or material change such as a printing machine, an adhesive processing machine, and a pigment processing machine.

Claims

請求の範囲 The scope of the claims
[1] 塗工液が流れる配管(12 14)と、 [1] Piping (12 14) through which the coating liquid flows,
前記配管(12— 14)に設けられたダイヘッド(9)と、  A die head (9) provided in the pipe (12-14);
互いに異なる種類の溶剤を貯溜する複数の溶剤タンク(22a 22d)を有し、前記 溶剤タンク(22a— 22d)に貯溜された溶剤を、前記塗工液と相溶性が高い溶剤から この溶剤よりも洗浄性の高い溶剤へ順に切り替えて前記配管(12 14)に供給する ことにより、前記配管(12— 14)の内部および前記ダイヘッド(9)の内部(9a, 9b)を 洗浄する洗浄機構 (3)と、を具備したことを特徴とする塗工装置(1)。  It has a plurality of solvent tanks (22a to 22d) for storing different types of solvents, and the solvent stored in the solvent tanks (22a to 22d) is made from a solvent that is highly compatible with the coating solution. A cleaning mechanism (3a, 9b) that cleans the inside of the pipe (12-14) and the inside of the die head (9) (9a, 9b) by switching to a highly detersive solvent in order and supplying it to the pipe (12 14) ), And a coating apparatus (1).
[2] 請求項 1の記載において、前記洗浄機構(3)は、前記溶剤により洗浄された前記 配管(12— 14)の内部および前記ダイヘッド(9)の内部(9a, 9b)を乾燥させる乾燥 部(5)を備えてレ、ることを特徴とする塗工装置(1)。  [2] The cleaning mechanism (3) according to claim 1, wherein the cleaning mechanism (3) is configured to dry the inside of the pipe (12-14) and the inside (9a, 9b) of the die head (9) cleaned with the solvent. A coating apparatus (1) characterized by comprising a part (5).
[3] 請求項 2の記載において、前記乾燥部(5)は、前記配管(12— 14)に乾燥用ガス を供給する乾燥用ガスタンク(31 )を有することを特徴とする塗工装置(1)。  [3] The coating apparatus (1) according to claim 2, wherein the drying section (5) includes a drying gas tank (31) for supplying a drying gas to the pipe (12-14). ).
[4] 請求項 1ないし請求項 3のいずれかの記載において、前記洗浄機構(3)内を流れ る前記溶剤の流量を測定する流量計(28)と、この測定結果に基づいて前記洗浄機 構(3)内を流れる前記溶剤の流量を制御する流量制御バルブ(27)と、をさらに備え ていることを特徴とする塗工装置(1)。  [4] The flowmeter (28) for measuring the flow rate of the solvent flowing in the cleaning mechanism (3) according to any one of claims 1 to 3, and the cleaning machine based on the measurement result The coating apparatus (1), further comprising a flow rate control valve (27) for controlling the flow rate of the solvent flowing in the structure (3).
[5] 請求項 1ないし請求項 3のいずれかの記載において、前記溶剤タンク(22a 22d) は、前記溶剤タンク(22a— 22d)に貯溜される前記溶剤の重量を計測するロードセ ル(25)の上に設けられることを特徴とする塗工装置(1)。  [5] In any one of claims 1 to 3, the solvent tank (22a 22d) is a load cell (25) for measuring the weight of the solvent stored in the solvent tank (22a-22d). A coating apparatus (1), characterized in that it is provided on top of the coating.
[6] 請求項 3の記載において、前記配管(12— 14)に供給される前記乾燥用ガスの流 量を測定するガス流量計(34)と、この測定結果に基づいて前記配管(12— 14)に供 給される前記乾燥用ガスの流量を制御する制御バルブ(33)とをさらに備えているこ とを特徴とする塗工装置(1)。  [6] In Claim 3, the gas flow meter (34) for measuring the flow rate of the drying gas supplied to the pipe (12-14), and the pipe (12— The coating apparatus (1), further comprising a control valve (33) for controlling the flow rate of the drying gas supplied to 14).
[7] 請求項 6の記載において、  [7] In claim 6,
前記洗浄機構(3)内を流れる前記溶剤の流量を測定する流量計(28)と、この測定 結果に基づレ、て前記洗浄機構(3)内を流れる前記溶剤の流量を制御する流量制御 バルブ(27)とをさらに備え、 前記溶剤タンク(22a— 22d)は、前記溶剤タンク(22a— 22d)に貯溜される前記溶 剤の重量を計測するロードセル(25)の上に設けられることを特徴とする塗工装置(1A flow meter (28) for measuring the flow rate of the solvent flowing in the cleaning mechanism (3), and a flow rate control for controlling the flow rate of the solvent flowing in the cleaning mechanism (3) based on the measurement result A valve (27), The solvent tank (22a-22d) is provided on a load cell (25) for measuring the weight of the solvent stored in the solvent tank (22a-22d).
) 0 ) 0
[8] 塗工液が流れる配管(12 14)と、この配管(12— 14)に設けられたダイヘッド(9) と、を備えた塗工装置を洗浄する洗浄方法であって、  [8] A cleaning method for cleaning a coating apparatus including a pipe (12 14) through which a coating liquid flows and a die head (9) provided in the pipe (12-14),
前記配管(12— 14)に接続される複数の溶剤タンク(22a— 22d)に互いに異なる 種類の溶剤を貯溜し、  Different types of solvents are stored in a plurality of solvent tanks (22a-22d) connected to the pipes (12-14),
前記溶剤タンク(22a 22d)に貯溜された溶剤を、前記塗工液と相溶性が高い溶 剤からこの溶剤よりも洗浄性の高い溶剤へ順に切り替えて前記配管(12— 14)に供 給することで、前記配管(12 14)の内部および前記ダイヘッド(9)の内部(9a, 9b) を洗浄することを特徴とする塗工装置の洗浄方法。  The solvent stored in the solvent tank (22a 22d) is sequentially switched from a solvent having high compatibility with the coating solution to a solvent having higher cleaning properties than the solvent and supplied to the pipe (12-14). Thus, the inside of the pipe (12 14) and the inside (9a, 9b) of the die head (9) are washed.
[9] 請求項 8の記載において、前記配管(12— 14)の内部および前記ダイヘッド(9)の 内部(9a, 9b)の洗浄が終了した後、前記配管(12— 14)の内部および前記ダイへッ ド(9)の内部(9a, 9b)を乾燥させることを特徴とする塗工装置の洗浄方法。 [9] In the description of claim 8, after cleaning of the inside of the pipe (12-14) and the inside (9a, 9b) of the die head (9) is completed, the inside of the pipe (12-14) and the A method of cleaning a coating apparatus, characterized in that the inside (9a, 9b) of the die head (9) is dried.
[10] 請求項 9の記載において、前記配管(12— 14)に乾燥用ガスタンク(31)から乾燥 用ガスを供給することにより、前記配管(12— 14)の内部および前記ダイヘッド(9)の 内部(9a, 9b)を乾燥させることを特徴とする塗工装置の洗浄方法。 [10] In the description of claim 9, by supplying a drying gas from the drying gas tank (31) to the pipe (12-14), the inside of the pipe (12-14) and the die head (9) A method for cleaning a coating apparatus, wherein the inside (9a, 9b) is dried.
[11] 塗工液が流れる配管(12— 14)と、前記配管(12— 14)に設けられたダイヘッド(9[11] The pipe (12-14) through which the coating liquid flows and the die head (9-9) provided in the pipe (12-14)
)と、を有する塗工装置に用いる洗浄機構(3)であって、 ), And a cleaning mechanism (3) used in a coating apparatus,
互いに異なる種類の溶剤を貯溜する複数の溶剤タンク(22a— 22d)と、 前記溶剤タンク(22a— 22d)に貯溜された溶剤を、前記塗工液と相溶性が高い溶 剤からこの溶剤よりも洗浄性の高い溶剤へ順に切り替えて前記配管(12— 14)に供 給する溶剤供給管(24)と、を具備したことを特徴とする洗浄機構 (3)。  A plurality of solvent tanks (22a-22d) for storing different types of solvents, and a solvent stored in the solvent tanks (22a-22d) from a solvent having a higher compatibility with the coating liquid than this solvent. A cleaning mechanism (3), comprising: a solvent supply pipe (24) that sequentially switches to a solvent having high detergency and supplies the pipe (12-14).
[12] 請求項 11の記載において、前記溶剤により洗浄された前記配管(12— 14)の内部 および前記ダイヘッド(9)の内部(9a, 9b)を乾燥させる乾燥部(5)をさらに備えてレ、 ることを特徴とする洗浄機構(3)。 [12] The device according to claim 11, further comprising a drying section (5) for drying the inside of the pipe (12-14) cleaned with the solvent and the inside (9a, 9b) of the die head (9). A cleaning mechanism (3) characterized by
[13] 請求項 12の記載において、前記乾燥部(5)は、前記配管(12 14)に乾燥用ガス を供給する乾燥用ガスタンク(31 )を有することを特徴とする洗浄機構(3)。 [13] The cleaning mechanism (3) according to claim 12, wherein the drying section (5) includes a drying gas tank (31) for supplying a drying gas to the pipe (1214).
[14] 請求項 12の記載において、前記乾燥部(5)は、前記配管(12— 14)に供給される 前記乾燥用ガスの流量を測定するガス流量計(34)と、この測定結果に基づいて前 記配管(12— 14)に供給される前記乾燥用ガスの流量を制御する流量制御バルブ( 33)と、を備えていることを特徴とする洗浄機構 (3)。 [14] In the description of claim 12, the drying section (5) includes a gas flow meter (34) for measuring a flow rate of the drying gas supplied to the pipe (12-14), and a result of the measurement. And a flow rate control valve (33) for controlling the flow rate of the drying gas supplied to the pipe (12-14) based on the cleaning mechanism (3).
[15] 請求項 11の記載において、前記溶剤供給管(24)内を流れる前記溶剤の流量を 測定する流量計 (28)と、この測定結果に基づいて前記溶剤供給管(24)内を流れる 前記溶剤の流量を制御する流量制御バルブ(27)とをさらに備えていることを特徴と する洗浄機構 (3)。  [15] The flowmeter (28) for measuring the flow rate of the solvent flowing through the solvent supply pipe (24) according to claim 11, and the flow through the solvent supply pipe (24) based on the measurement result A cleaning mechanism (3), further comprising a flow rate control valve (27) for controlling the flow rate of the solvent.
[16] 請求項 11の記載において、前記溶剤タンク(22a 22d)は、前記溶剤タンク(22a 一 22d)に貯溜される前記溶剤の重量を計測するロードセル(25)の上に設けられる ことを特徴とする洗浄機構 (3)。  [16] The method according to claim 11, wherein the solvent tank (22a 22d) is provided on a load cell (25) for measuring the weight of the solvent stored in the solvent tank (22a 22d). Cleaning mechanism (3).
PCT/JP2005/002819 2004-10-12 2005-02-22 Application apparatus having cleaning mechanism, method for cleaning application apparatus and cleaning mechanism for use in application apparatus WO2006040846A1 (en)

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TW200611754A (en) 2006-04-16
TWI381887B (en) 2013-01-11

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